Furnace cover reflection structure capable of increasing pulling speed of crystal bar

Abstract

The utility model relates to the technical field of single crystal furnace covers, in particular to a furnace cover reflecting structure capable of increasing the pulling speed of a crystal bar, which comprises a furnace cover component, the furnace cover component comprises a furnace cover body, and a molybdenum reflecting plate is arranged in the furnace cover body. When the single crystal furnace cover works, the molybdenum reflecting plate is placed inside the furnace cover body, the threaded rod is rotated clockwise to push the movable block and the rolling wheel to move, the rolling wheel pushes the supporting plate upwards, the supporting plate supports the molybdenum reflecting plate, when the single crystal furnace works, the through groove and the pipe body can allow a crystal bar to pass through, and by means of the reflecting effect of the additionally-arranged molybdenum reflecting plate, the molybdenum reflecting plate is prevented from falling off. The heat which is originally radiated to the top wall of the furnace cover by the solution and the crystal bar can be reflected to other positions in the furnace by the molybdenum reflecting plate, so that the phenomenon that the temperature of the surfaces of the crystal bar and the solution rises due to the fact that the heat is reflected back to the surfaces of the solution and the crystal bar is avoided; correspondingly, the pulling speed of the crystal bar can be improved, and the purpose of improving per unit area yield can be achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace lids, and particularly to a lid reflection structure capable of increasing the pulling speed of a crystal rod. Background Art

[0002] A single crystal furnace is a device that melts polycrystalline materials such as polysilicon with a graphite heater in an inert gas environment and grows dislocation-free single crystals by the Czochralski method; the Czochralski method is a common method for growing single crystals at present. Its working principle is to place the raw materials constituting the crystal in a crucible and heat them to melt, then pick up a seed crystal on the surface of the melt and lift the melt. Under controlled conditions, the seed crystal and the melt continuously rearrange atoms or molecules at the interface, and gradually solidify with the decrease in temperature to grow a single crystal. The water-cooled screen is a device used to take away the heat during the forming process of the single crystal rod;

[0003] The lids of single crystal furnaces are mostly in the shape of smooth stainless steel round lids. When the heat of the solution and the crystal rod is radiated to the lid in the form of thermal radiation, a part of the heat will be reflected back to the surface of the solution and the crystal rod through the reflection of the smooth stainless steel on the lid surface, resulting in a relatively high temperature on the surface of the crystal rod and the solution. When the temperature of the crystal rod is relatively high, the crystal growth rate is slow, which will affect the growth rate of the crystal rod; for this reason, a lid reflection structure capable of increasing the pulling speed of the crystal rod is proposed. Content of the Utility Model

[0004] The purpose of the utility model is to provide a lid reflection structure capable of increasing the pulling speed of a crystal rod, so as to solve the problems put forward in the above background art.

[0005] To achieve the above purpose, the utility model provides the following technical solution: a lid reflection structure capable of increasing the pulling speed of a crystal rod, including a lid assembly. The lid assembly includes a lid body. A molybdenum reflection plate is arranged inside the lid body. Two support plates are symmetrically hinged to the inner side wall of the lid body. Two threaded rods are symmetrically threadedly connected to the outer side wall of the lid body. One end of each threaded rod extends into the lid body and is rotatably connected to a movable block through a bearing. Two support plates are symmetrically welded to the upper surface of the movable block. A rotating shaft is rotatably connected between the opposite sides of the two support plates. A roller is installed on the outer side wall of the rotating shaft. A pipe body communicates with the upper surface of the lid body. A through groove is formed on the upper surface of the molybdenum reflection plate.

[0006] As a further preferred of this technical solution: a connecting flange is welded to the top of the outer side wall of the pipe body.

[0007] As a further preferred of this technical solution: two connecting blocks are symmetrically welded to the outer side wall of the movable block. A guide rod is welded to the outer side wall of the connecting block. The guide rod is slidably connected to the lid body.

[0008] As a further preference of this technical solution: A knob is welded to one end of the threaded rod away from the movable block.

[0009] As a further preference of this technical solution: An installation groove is formed on the front surface of the furnace cover body, and a transparent plate is installed on the inner side wall of the installation groove.

[0010] As a further preference of this technical solution: Two positioning holes are symmetrically formed on the upper surface of the molybdenum reflector, and two positioning rods are symmetrically welded to the top of the inner side wall of the furnace cover body.

[0011] As a further preference of this technical solution: A water inlet is formed on one side of the outer side wall of the furnace cover body, and a water outlet is formed on the other side of the outer side wall of the furnace cover body.

[0012] Compared with the prior art, the beneficial effects of the present utility model are:

[0013] When the present utility model works, the molybdenum reflector is placed inside the furnace cover body. By rotating the threaded rod clockwise, the threaded rod pushes the movable block and the roller to move. The roller pushes the support plate upward, and the support plate holds the molybdenum reflector. When the single crystal furnace is working, the through groove and the pipe body can accommodate the passing of the crystal rod. With the reflection effect of the additionally provided molybdenum reflector, the heat radiated from the solution and the crystal rod to the top wall of the furnace cover will be reflected by the molybdenum reflector to other positions inside the furnace, avoiding the heat being reflected back to the surface of the solution and the crystal rod, resulting in an increase in the temperature of the crystal rod and the solution surface. Compared with before installing the molybdenum reflector, the temperature of the crystal rod and the solution is relatively reduced, and the pulling speed of the crystal rod will be increased accordingly, achieving the purpose of improving the single production. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is the front view structural schematic diagram of the present utility model;

[0015] Figure 2 in the present utility model Figure 1 is the enlarged view of the structure of Area A;

[0016] Figure 3 is the bottom view structural schematic diagram of the present utility model;

[0017] Figure 4 in the present utility model Figure 3 is the enlarged view of the structure of Area B;

[0018] Figure 5 is the partial cross-sectional view structural schematic diagram of the present utility model;

[0019] Figure 6 is the structural schematic diagram of the molybdenum reflector and the positioning hole in the present utility model;

[0020] Figure 7This is a structural schematic diagram of the furnace cover body and the positioning rod in the utility model;

[0021] Figure 8 It is a schematic diagram of the heat radiation direction in the utility model.

[0022] In the figure: 1. furnace cover body; 2. molybdenum reflector; 3. support plate; 4. threaded rod; 5. movable block; 6. support plate; 7. rotating shaft; 8. roller; 9. tube body; 10. through groove; 11. connecting flange; 12. connecting block; 13. guide rod; 14. knob; 15. mounting groove; 16. transparent plate; 17. positioning hole; 18. positioning rod; 19. water inlet; 20. water outlet. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present application, and cannot be understood as limitations on the present application. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0024] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "set" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0025] See also Figure 1-8, the present utility model provides a technical solution: a furnace cover reflection structure capable of increasing the pulling speed of a crystal rod, including a furnace cover assembly. The furnace cover assembly includes a furnace cover body 1, inside which there is a molybdenum reflector 2. Two support plates 3 are symmetrically hinged to the inner side wall of the furnace cover body 1. Two threaded rods 4 are symmetrically threadedly connected to the outer side wall of the furnace cover body 1. One end of the threaded rod 4 extends into the furnace cover body 1 and is rotatably connected to a movable block 5 through a bearing. Two support plates 6 are symmetrically welded to the upper surface of the movable block 5. A rotating shaft 7 is rotatably connected between the opposite sides of the two support plates 6. A roller 8 is installed on the outer side wall of the rotating shaft 7. A pipe body 9 communicates with the upper surface of the furnace cover body 1. A through groove 10 is opened on the upper surface of the molybdenum reflector 2; the taper on the surface of the molybdenum reflector 2 can be customized. Place the molybdenum reflector 2 inside the furnace cover body 1. By rotating the threaded rod 4 clockwise, the threaded rod 4 pushes the movable block 5 and the roller 8 to move. The roller 8 pushes the support plate 3 upward, and the support plate 3 holds the molybdenum reflector 2. When the single crystal furnace is working, the through groove 10 and the pipe body 9 can accommodate the passage of the crystal rod. With the reflection effect of the added molybdenum reflector 2, the heat radiated from the original solution and the crystal rod to the top wall of the furnace cover will be reflected by the molybdenum reflector 2 to other positions inside the furnace, avoiding the heat being reflected back to the surface of the solution and the crystal rod, resulting in an increase in the temperature of the crystal rod and the solution surface. Compared with before installing the molybdenum reflector 2, the temperature of the crystal rod and the solution is relatively reduced, and accordingly, the pulling speed of the crystal rod will be increased.

[0026] In this embodiment, specifically: a connecting flange 11 is welded to the top of the outer side wall of the pipe body 9; the pipe body 9 can be connected to the auxiliary chamber by means of the connecting flange 11.

[0027] In this embodiment, specifically: two connecting blocks 12 are symmetrically welded to the outer side wall of the movable block 5. A guide rod 13 is welded to the outer side wall of the connecting block 12. The guide rod 13 is slidably connected to the furnace cover body 1; the connecting block 12 and the guide rod 13 slide together, which can prevent the situation that the movable block 5 rotates with the threaded rod 4.

[0028] In this embodiment, specifically: a knob 14 is welded to the end of the threaded rod 4 away from the movable block 5; it is convenient to rotate the threaded rod 4.

[0029] In this embodiment, specifically: an installation groove 15 is opened on the front surface of the furnace cover body 1. A transparent plate 16 is installed on the inner side wall of the installation groove 15; it is convenient to observe the internal situation of the furnace cover body 1.

[0030] In this embodiment, specifically: two positioning holes 17 are symmetrically opened on the upper surface of the molybdenum reflector 2. Two positioning rods 18 are symmetrically welded to the top of the inner side wall of the furnace cover body 1; when placing the molybdenum reflector 2, by inserting the positioning rods 18 into the positioning holes 17, the precise placement of the molybdenum reflector 2 can be ensured.

[0031] In this embodiment, specifically: a water inlet 19 is provided on one side of the outer wall of the furnace lid body 1, and a water outlet 20 is provided on the other side of the outer wall of the furnace lid body 1; the water inlet 19 and the water outlet 20 are arranged to accommodate the inlet pipe and the outlet pipe of the water-cooled screen of the single crystal furnace.

[0032] The working principle of the present utility model is as follows: Place the molybdenum reflector 2 inside the furnace lid body 1. By rotating the threaded rod 4 clockwise, the threaded rod 4 pushes the movable block 5 and the roller 8 to move. The roller 8 pushes the support plate 3 upward, and the support plate 3 holds the molybdenum reflector 2. When the single crystal furnace is working, the through groove 10 and the pipe body 9 can accommodate the passing of the crystal rod. With the help of the reflection effect of the added molybdenum reflector 2, the heat radiated from the original solution and the crystal rod to the top wall direction of the furnace lid will be reflected by the molybdenum reflector 2 to other positions inside the furnace, avoiding the heat being reflected back to the surface of the solution and the crystal rod, resulting in an increase in the surface temperature of the crystal rod and the solution. Compared with before the molybdenum reflector 2 is installed, the temperature of the crystal rod and the solution is relatively reduced, and correspondingly, the pulling speed of the crystal rod will be increased, achieving the purpose of improving the single output.

[0033] Although the embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A furnace lid reflection structure capable of increasing the pulling speed of a crystal bar, comprising a furnace lid assembly, characterized in that: The furnace cover assembly includes a furnace cover body (1). Inside the furnace cover body (1), there is a molybdenum reflector (2). On the inner side wall of the furnace cover body (1), two support plates (3) are symmetrically hinged. On the outer side wall of the furnace cover body (1), two threaded rods (4) are symmetrically threadedly connected. One end of the threaded rod (4) extends into the furnace cover body (1) and is rotatably connected to a movable block (5) through a bearing. On the upper surface of the movable block (5), two support plates (6) are symmetrically welded. Between the opposite sides of the two support plates (6), a rotating shaft (7) is rotatably connected through a bearing. On the outer side wall of the rotating shaft (7), a roller (8) is installed. On the upper surface of the furnace cover body (1), a pipe body (9) is communicated. On the upper surface of the molybdenum reflector (2), a through groove (10) is opened.

2. The cover reflection structure capable of increasing the pulling speed of the crystal bar according to claim 1, wherein: On the top of the outer side wall of the pipe body (9), a connecting flange (11) is welded.

3. The cover reflection structure capable of increasing the pulling speed of the crystal bar according to claim 1, characterized in that: On the outer side wall of the movable block (5), two connecting blocks (12) are symmetrically welded. On the outer side wall of the connecting block (12), a guide rod (13) is welded. The guide rod (13) is slidably connected to the furnace cover body (1).

4. The cover reflection structure capable of increasing the pulling speed of the crystal bar according to claim 1, wherein: One end of the threaded rod (4) away from the movable block (5) is welded with a knob (14).

5. The lid reflection structure capable of increasing the pulling speed of the crystal bar according to claim 1, wherein: On the front surface of the furnace cover body (1), an installation groove (15) is opened. On the inner side wall of the installation groove (15), a transparent plate (16) is installed.

6. The cover reflection structure capable of increasing the pulling speed of the crystal rod according to claim 1, wherein: On the upper surface of the molybdenum reflector (2), two positioning holes (17) are symmetrically opened. On the top of the inner side wall of the furnace cover body (1), two positioning rods (18) are symmetrically welded.

7. The lid reflection structure capable of increasing the pulling speed of the crystal bar according to claim 1, wherein: On one side of the outer side wall of the furnace cover body (1), a water inlet (19) is opened. On the other side of the outer side wall of the furnace cover body (1), a water outlet (20) is opened.

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