Water cooling screen of Czochralski crystal growing furnace

Abstract

The utility model relates to the technical field of water cooling screens, in particular to a water cooling screen of a Czochralski single crystal furnace, which comprises a furnace body, a screen body is mounted in the furnace body, and a heat exchange groove is arranged in the screen body. Cooling water is injected into the circular ring pipes from the water inlet pipes, then the circular ring pipes enable the cooling water to enter the circular ring pipes on the next layer through the vertical pipes and enter the square ring pipes through the guide pipes at the same time, and the circular ring pipes inside the screen body and the square ring pipes outside the screen body exchange heat with gas inside the furnace body at the same time. The heat exchange pieces and the heat exchange balls are distributed on the inner side wall of the screen body in a staggered mode, the inner surface area of the screen body is increased, the lower surface area of the screen body is increased through the arc face arranged on the lower surface of the screen body, the heat exchange efficiency is improved, the heat absorption area of the water cooling screen is increased, the heat exchange efficiency is high, the production efficiency of monocrystalline silicon is improved, and practicability is higher.

Description

Technical Field

[0001] The utility model relates to the technical field of water-cooled screens, and specifically relates to a water-cooled screen for a Czochralski single crystal furnace. Background Technique

[0002] A Czochralski single crystal furnace is a device that melts polycrystalline materials such as polysilicon with a graphite heater in an inert gas environment and grows dislocation-free single crystals by the Czochralski method. During the process of processing and pulling single crystals, a water-cooled screen is required to strengthen the heat transfer at the crystallization interface, so that the silicon melt releases its own heat during crystallization, thereby completing the crystallization process faster.

[0003] At present, the water-cooled screens used in the industry are ordinary water-cooled screens, with a relatively single shape, a small heat absorption area, and low heat exchange efficiency, resulting in a low crystal pulling speed and low production efficiency. Therefore, a water-cooled screen for a Czochralski single crystal furnace is proposed. Content of the Utility Model

[0004] The purpose of the utility model is to provide a water-cooled screen for a Czochralski single crystal furnace to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A water-cooled screen for a Czochralski single crystal furnace, including a furnace body, a screen body is installed inside the furnace body, heat exchange grooves are opened inside the screen body, circular ring pipes are evenly installed inside the heat exchange grooves, vertical pipes are evenly communicated between the circular ring pipes, guide pipes are evenly communicated on the inner side walls of two of the circular ring pipes, the outer side wall of the guide pipe is fixedly connected to the screen body, one end of the guide pipe away from the circular ring pipe is commonly communicated with the same square ring pipe, heat exchange fins are evenly fixedly connected to the inner side wall of the screen body, heat exchange balls are evenly fixedly connected to the inner side wall of the screen body, the heat exchange fins and the heat exchange balls are distributed alternately, the lower surface of the screen body is provided with an arc surface, a water inlet pipe and a water outlet pipe are respectively communicated with the upper surface of one of the circular ring pipes, and the outer surfaces of the water inlet pipe and the water outlet pipe are both fixedly connected to the upper surface of the screen body.

[0006] As a further preference of this technical solution: A crucible is installed on the lower surface of the inner side wall of the furnace body, and the crucible contains molten single crystal silicon inside.

[0007] As a further preference of this technical solution: A heat insulation ring is fixedly connected to the outer side wall of the screen body.

[0008] As a further preference of this technical solution: An installation ring is fixedly connected to the outer side wall of the heat insulation ring, and four installation blocks are welded to the outer side wall of the installation ring.

[0009] As a further preference of this technical solution: a circular groove is provided at the upper end of the inner side wall of the furnace body, four installation grooves are provided on the lower surface of the circular groove, and the outer diameter of the installation groove is larger than the inner diameter of the installation block.

[0010] As a further preference of this technical solution: an installation hole is provided on the upper surface of the installation block, a fastening bolt is provided on the upper surface of the installation hole, and the lower surface of the installation block is fixedly connected to the lower surface of the installation groove through the fastening bolt.

[0011] As a further preference of this technical solution: a furnace opening is communicated with the upper surface of the furnace body.

[0012] As a further preference of this technical solution: an observation window is provided on the upper surface of the furnace body, and a CCD camera is installed on the upper surface of the observation window.

[0013] Compared with the prior art, the beneficial effects of the present utility model are:

[0014] In the present utility model, the screen body of the water-cooled screen is installed inside the furnace body of the single crystal furnace. Cooling water is injected into the circular ring pipe from the water inlet pipe, and the circular ring pipe then enters the circular ring pipe of the next layer through the vertical pipe. At the same time, it enters the square ring pipe through the conduit. The circular ring pipe inside the screen body and the square ring pipe outside the screen body simultaneously exchange heat with the gas inside the furnace body. The heat exchange fins and heat exchange balls are staggered on the inner side wall of the screen body, increasing the inner surface area of the screen body. The arc surface provided on the lower surface of the screen body increases the lower surface area of the screen body, which helps to accelerate the heat exchange efficiency, increases the heat absorption area of the water-cooled screen, has a higher heat exchange efficiency, improves the production efficiency of single crystal silicon, and has stronger practicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is the front view structural schematic diagram of the present utility model;

[0016] Figure 2 is the sectional view structural schematic diagram of the present utility model;

[0017] Figure 3 is the structural schematic diagram of the screen body in the present utility model;

[0018] Figure 4 is the sectional view structural schematic diagram of the screen body in the present utility model;

[0019] Figure 5 is the structural schematic diagram of the circular ring pipe and the square ring pipe in the present utility model;

[0020] Figure 6 is the sectional view structural schematic diagram of the furnace body in the present utility model.

[0021] In the figure: 1. Furnace body; 2. Screen body; 3. Heat exchange tank; 4. Circular ring pipe; 5. Vertical pipe; 6. Conduit; 7. Square ring pipe; 8. Heat exchange fin; 9. Heat exchange ball; 10. Arc surface; 11. Water inlet pipe; 12. Water outlet pipe; 13. Crucible; 14. Monocrystalline silicon; 15. Heat insulation ring; 16. Installation ring; 17. Installation block; 18. Circular groove; 19. Installation groove; 20. Installation hole; 21. Tightening bolt; 22. Furnace opening; 23. Observation window; 24. CCD camera. Detailed implementation mode

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals indicate the same or similar elements or elements with the same or similar functions from beginning to end. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present application and should not be construed as a limitation to the present application. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0023] In the description of the present application, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection", "connection", and "setting" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0024] Please refer to Figure 1-6, the present utility model provides a technical solution: a water-cooled screen of a Czochralski single crystal furnace, including a furnace body 1, a screen body 2 is installed inside the furnace body 1, a heat exchange groove 3 is opened inside the screen body 2, circular ring pipes 4 are uniformly installed inside the heat exchange groove 3, vertical pipes 5 are uniformly communicated between the circular ring pipes 4, guide pipes 6 are uniformly communicated with the inner side walls of two of the circular ring pipes 4, the outer side wall of the guide pipe 6 is fixedly connected to the screen body 2, one end of the guide pipe 6 away from the circular ring pipe 4 is commonly communicated with the same square ring pipe 7, heat exchange fins 8 are uniformly fixedly connected to the inner side wall of the screen body 2, heat exchange balls 9 are uniformly fixedly connected to the inner side wall of the screen body 2, the heat exchange fins 8 and the heat exchange balls 9 are arranged in an alternating manner, an arc surface 10 is provided on the lower surface of the screen body 2, a water inlet pipe 11 and a water outlet pipe 12 are respectively communicated with the upper surface of one of the circular ring pipes 4, and the outer surfaces of the water inlet pipe 11 and the water outlet pipe 12 are fixedly connected to the upper surface of the screen body 2; when in use, the screen body 2 of the water-cooled screen is installed inside the furnace body 1 of the single crystal furnace, cooling water is injected into the circular ring pipe 4 from the water inlet pipe 11, and the circular ring pipe 4 then enters the circular ring pipe 4 of the next layer through the vertical pipe 5, and at the same time enters the square ring pipe 7 through the guide pipe 6. The circular ring pipe 4 inside the screen body 2 and the square ring pipe 7 outside the screen body 2 simultaneously exchange heat with the gas inside the furnace body 1. The heat exchange fins 8 and the heat exchange balls 9 are arranged in an alternating manner on the inner side wall of the screen body 2, increasing the inner surface area of the screen body 2. The arc surface 10 provided on the lower surface of the screen body 2 increases the lower surface area of the screen body 2, both of which help to accelerate the efficiency of heat exchange.

[0025] In this embodiment, specifically: a crucible 13 is installed on the lower surface of the inner side wall of the furnace body 1, and molten single crystal silicon 14 is accommodated inside the crucible 13; the crucible 13 is used to melt polycrystalline materials.

[0026] In this embodiment, specifically: a heat insulation ring 15 is fixedly connected to the outer side wall of the screen body 2.

[0027] In this embodiment, specifically: an installation ring 16 is fixedly connected to the outer side wall of the heat insulation ring 15, and four installation blocks 17 are welded to the outer side wall of the installation ring 16; used for installing and fixing the screen body 2.

[0028] In this embodiment, specifically: a circular groove 18 is opened at the upper end of the inner side wall of the furnace body 1, four installation grooves 19 are opened on the lower surface of the circular groove 18, and the outer diameter of the installation groove 19 is larger than the inner diameter of the installation block 17; the installation block 17 and the installation groove 19 are used in cooperation.

[0029] In this embodiment, specifically: an installation hole 20 is formed in the upper surface of the installation block 17, a fastening bolt 21 is provided on the upper surface of the installation hole 20, and the lower surface of the installation block 17 is fixedly connected to the lower surface of the installation groove 19 through the fastening bolt 21; the installation block 17 is placed in the installation groove 19, the fastening bolt 21 is inserted into the installation hole 20 and tightened, and the installation block 17 is fixed in the installation groove 19, so that the screen body 2 can be fixed.

[0030] In this embodiment, specifically: a furnace mouth 22 is communicated with the upper surface of the furnace body 1.

[0031] In this embodiment, specifically: an observation window 23 is formed in the upper surface of the furnace body 1, and a CCD camera 24 is installed on the upper surface of the observation window 23; it is convenient to observe the growth condition of the single crystal silicon 14.

[0032] The working principle of the present utility model is as follows: the screen body 2 of the water-cooled screen is installed inside the furnace body 1 of the single crystal furnace, cooling water is injected into the circular ring pipe 4 from the water inlet pipe 11, and the circular ring pipe 4 then sends the cooling water into the circular ring pipe 4 of the next layer through the vertical pipe 5, and at the same time enters the square ring pipe 7 through the conduit 6. The circular ring pipe 4 inside the screen body 2 and the square ring pipe 7 outside the screen body 2 simultaneously exchange heat with the gas inside the furnace body 1. The heat exchange fins 8 and the heat exchange balls 9 are staggered on the inner side wall of the screen body 2, increasing the inner surface area of the screen body 2. The arc surface 10 provided on the lower surface of the screen body 2 increases the lower surface area of the screen body 2, both of which contribute to accelerating the heat exchange efficiency. Thus, a water-cooled screen of a Czochralski single crystal furnace is formed, increasing the heat absorption area of the water-cooled screen, having a higher heat exchange efficiency, improving the production efficiency of the single crystal silicon 14, and being more practical.

[0033] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A water-cooled screen of a Czochralski single crystal furnace, comprising a furnace body (1), characterized in that: Inside the furnace body (1), a screen body (2) is installed. Inside the screen body (2), a heat exchange groove (3) is provided. Inside the heat exchange groove (3), circular ring pipes (4) are evenly installed. Between the circular ring pipes (4), vertical pipes (5) are evenly connected. On the inner side walls of two of the circular ring pipes (4), conduits (6) are evenly connected. The outer side wall of the conduit (6) is fixedly connected to the screen body (2). The ends of the conduits (6) far from the circular ring pipes (4) are commonly connected to the same square ring pipe (7). On the inner side wall of the screen body (2), heat exchange fins (8) are evenly fixedly connected. On the inner side wall of the screen body (2), heat exchange balls (9) are evenly fixedly connected. The heat exchange fins (8) and the heat exchange balls (9) are arranged in an alternating manner. On the lower surface of the screen body (2), an arc surface (10) is provided. On the upper surface of one of the circular ring pipes (4), a water inlet pipe (11) and a water outlet pipe (12) are respectively connected. The outer surfaces of the water inlet pipe (11) and the water outlet pipe (12) are fixedly connected to the upper surface of the screen body (2).

2. The water-cooled screen of the Czochralski single crystal furnace according to claim 1, wherein: On the lower surface of the inner side wall of the furnace body (1), a crucible (13) is installed. Inside the crucible (13), single crystal silicon (14) in a molten state is contained.

3. The water-cooled screen of the Cz single crystal furnace according to claim 2, characterized in that: On the outer side wall of the screen body (2), a heat insulation ring (15) is fixedly connected.

4. The water-cooled screen of the Czochralski single crystal furnace according to claim 3, wherein: On the outer side wall of the heat insulation ring (15), a mounting ring (16) is fixedly connected. On the outer side wall of the mounting ring (16), four mounting blocks (17) are welded.

5. The water-cooled screen of the Czochralski single crystal furnace according to claim 4, characterized in that: On the upper end of the inner side wall of the furnace body (1), a circular groove (18) is provided. On the lower surface of the circular groove (18), four mounting grooves (19) are provided. The outer diameter of the mounting groove (19) is larger than the inner diameter of the mounting block (17).

6. The water-cooled screen of the Czochralski single crystal furnace according to claim 5, characterized in that: On the upper surface of the mounting block (17), a mounting hole (20) is provided. On the upper surface of the mounting hole (20), a fastening bolt (21) is provided. The lower surface of the mounting block (17) is fixedly connected to the lower surface of the mounting groove (19) through the fastening bolt (21).

7. The water-cooled screen of the Czochralski single crystal furnace according to claim 6, characterized in that: On the upper surface of the furnace body (1), a furnace opening (22) is connected.

8. The water-cooled screen of the Czochralski single crystal furnace according to claim 6, characterized in that: On the upper surface of the furnace body (1), an observation window (23) is provided. On the upper surface of the observation window (23), a CCD camera (24) is installed.

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