Heater and single crystal furnace

Abstract

The embodiment of the utility model discloses a heater and a single crystal furnace, and the heater comprises a heating body; the heating body comprises a first heating body and a second heating body which are alternately arranged at least partially in the circumferential direction of the heating body. The first heating body and the two second heating bodies adjacent to the first heating body are enclosed to form an open slot; a slit is formed in the middle of the second heating body; along the axial direction of the heating body, the opening directions of the slit and the open slot are opposite; the length of the first heating body in the circumferential direction of the heating body is L1; along the axial direction of the heating body, the difference value between the length of the slit and the width of the first heating body is L2, and L1 is larger than L2 / 2. The content of oxygen entering the melt can be reduced, and the temperature gradient of the heater is adjusted, so that defects in the crystal are reduced, and the performance of the device is improved.

Description

Technical Field

[0001] The utility model relates to the field of crystal pulling, in particular to a heater and a single crystal furnace. Background Art

[0002] When growing single crystal silicon crystals, a main heater is generally required. The heating element of the main heater is mostly cylindrical. When used in a single crystal furnace, the heating element of the main heater is arranged around a quartz crucible. During crystal growth, the relative position between the melt interface and the heater generally remains unchanged. In the preparation of crystal growth with the existing heater, when adjusting the heater power, there is a delay in the change of the melt interface temperature, and there is a deviation between the melt interface temperature and the actual required temperature, resulting in poor crystal growth quality in the crystal growth stages such as crystal seeding, shoulder release, and equal diameter.

[0003] In addition, the existing heater mainly acts on the crucible in the area below the melt interface. After the heating element of the heater is heated for a long time, the quartz crucible releases more oxygen at high temperature, and the oxygen atoms generated by the reaction between the quartz crucible and the melt in the crucible are concentrated in the melt, resulting in oxygen enrichment in the melt. The oxygen in the melt enters the crystal, resulting in poor crystal quality. Summary of the Utility Model

[0004] In view of the above problems, embodiments of the present utility model are proposed to provide a heater and a single crystal furnace that overcome the above problems or at least partially solve the above problems.

[0005] To solve the above problems, in a first aspect, an embodiment of the present utility model discloses a heater, including: a heating body; at least part of the heating body includes a first heating element and a second heating element alternately arranged along its circumferential direction;

[0006] The first heating element and two adjacent second heating elements enclose an open slot; the length of the open slot along the circumferential direction of the heating body is equal to the length of the first heating element along the circumferential direction of the heating body; a slit is provided in the middle of the second heating element; the opening direction of the slit is opposite to that of the open slot;

[0007] The length of the first heating element along the circumferential direction of the heating body is L1;

[0008] The difference between the length of the slit along the axial direction of the heating body and the length of the first heating element along the axial direction of the heating body is L2; wherein, L1 > L2 / 2.

[0009] In a second aspect, an embodiment of the present utility model discloses a single crystal furnace, including the above heater.

[0010] Embodiments of the present utility model have the following advantages:

[0011] In the embodiment of the present utility model, the first heating element and the second heating element are alternately arranged along the circumferential direction of the heating body. A slit is provided in the middle of the second heating element. Since the length of the first heating element along the circumferential direction of the heating body is L1; along the axial direction of the heating body, the difference between the length of the slit and the width of the first heating element is L2; L1 > L2 / 2, so that the high-temperature region of the heating body is concentrated in the upper part near the first heating element, and the lower part of the second heating element maintains a lower calorific value, thereby realizing non-uniform temperature distribution. On the one hand, by adjusting the relationship between L1 and L2, and then adjusting the temperature gradient distribution of the heating body. Since the first heating element can correspond to the liquid surface part in the quartz crucible, the oxygen precipitated in the quartz crucible at high temperature can be quickly carried away by the gas in the furnace, which can reduce the oxygen content entering the melt, thereby reducing the defects in the crystal. On the other hand, the first heating element corresponds to the liquid surface part in the quartz crucible. When adjusting the power of the heater, the temperature of the melt liquid surface can be quickly adjusted, and the liquid surface temperature will directly reflect according to the change of the heater, thereby improving the accuracy of the melt liquid surface temperature. Brief Description of the Drawings

[0012] Figure 1 is a schematic structural diagram of a heater of the present utility model;

[0013] Figure 2 is a top view of a heater of the present utility model;

[0014] Figure 3 is a front view of a heater of the present utility model;

[0015] Figure 4 is a schematic structural diagram of a heating body of the present utility model;

[0016] Figure 5 is a schematic structural diagram of a heating flap of the present utility model;

[0017] Figure 6 is a schematic structural diagram of a connecting plate of the present utility model;

[0018] Figure 7 is a schematic structural diagram of a fastener of the present utility model;

[0019] Figure 8 is a schematic structural diagram of a foot plate of the present utility model;

[0020] Figure 9 is a cross-sectional view of a foot plate of the present utility model;

[0021] Figure 10 is a schematic structural diagram of a blank for preparing a heating flap of the present utility model.

[0022] Description of the Reference Numerals:

[0023] 1. Heating body; 11. Heating flap; 111. First heating element; 112. Second heating element; 1121. First connecting section; 1122. Second connecting section; 1123. Transition section; 1124. Slit; 113. Opening groove; 114. Third heating element; 1141. First mounting hole; 2. Foot plate; 21. Groove; 3. Connecting plate; 4. Fastener; 5. Second mounting hole. Detailed implementation manners

[0024] In order to make the above objects, features and advantages of the present utility model more obvious and understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and specific implementation manners.

[0025] The terms "first" and "second" in the description and claims of this application may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, the meaning of "a plurality" is two or more. In addition, "and / or" in the description and claims means at least one of the connected objects, and the character " / " generally means an "or" relationship between the associated objects before and after.

[0026] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0027] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and defined, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0028] In the prior art, grooves with upper and lower openings are alternately arranged along the axial direction of the heater body; along the circumferential direction of the heater body, the widths of the regions between the grooves are the same, and the heat generated by the heater body along the axial direction is uniformly distributed up and down. During crystal pulling, the heating area of the heater body does not correspond to the liquid surface area. Its long-term heating of the interior of the melt causes the quartz crucible to release more oxygen at high temperatures, and the oxygen atoms generated by the reaction between the crucible and the melt are concentrated in the melt, resulting in oxygen enrichment in the melt. The present invention provides a heater that concentrates the heat of the heater body in the upper region of the heater body by adjusting the width and length of the heater body in the grooved area. Among them,

[0029] In a first aspect, an embodiment of the present invention provides a heater, as Figures 1 to 4 shown, the heater may include a heating body 1; at least a part of the heating body 1 may include a first heating element 111 and a second heating element 112 alternately arranged along its circumferential direction; the first heating element 111 and two adjacent second heating elements 112 enclose to form an open slot 113; a slit 1124 is provided in the middle of the second heating element 112, and along the axial direction of the heating body 1, the opening directions of the slit 1124 and the open slot 113 are opposite. The length of the first heating element 111 along the circumferential direction of the heating body 1 is L1; the difference between the length of the slit in the axial direction of the heating body and the length of the first heating element in the axial direction of the heating body is L2; where L1 > L2 / 2. In this embodiment, the length of the first heating element 111 along the circumferential direction of the heating body 1 is the length of the first heating element 111, the length of the first heating element 111 along the radial direction of the heating body 1 is the thickness of the first heating element 111, and the length of the first heating element 111 along the axial direction of the heating body 1 is the width of the first heating element 111.

[0030] In the embodiment of the present invention, the first heating element 111 and the second heating element 112 are alternately arranged along the circumferential direction of the heating body 1, and a slit 1124 is provided in the middle of the second heating element 112. Since the length of the first heating element 111 along the circumferential direction of the heating body 1 is L1, and the difference between the length of the slit in the axial direction of the heating body and the length of the first heating element in the axial direction of the heating body is L2; where L1 > L2 / 2, the high-temperature region of the heating body 1 is concentrated near the first heating element 111, and the lower part of the second heating element 112 maintains a lower heat generation amount, that is, the heat generation amount of the upper part of the heating body 1 is greater than that of the lower part, thereby realizing non-uniform temperature distribution. Since the upper part of the heating body 1 can correspond to the liquid surface part in the quartz crucible, the oxygen precipitated from the quartz crucible at high temperatures can be quickly carried away by the gas in the furnace, which can reduce the oxygen content entering the melt, thereby reducing defects in the crystal and improving the performance of the device.

[0031] In addition, in the present utility model, the heater is mainly used for single crystal growth. The single crystal growth process includes stages such as melting the material, adjusting the temperature, seeding, shoulder opening, shoulder turning, and equal diameter. During one or more stages of crystal growth, the heater power needs to be adjusted. Specifically, during the temperature adjustment stage, the heater power needs to be adjusted to keep the melt interface temperature stable within the required range. During the shoulder opening stage, in order to meet the demand for the lateral growth of the crystal, the crystal precipitation rate needs to be increased. In terms of the crystal pulling process, the heater power needs to be reduced to lower the melt surface temperature. Due to traditional heaters, their heat generation area is concentrated below the melt surface and the longitudinal temperature gradient does not meet the requirement of heat concentration. As a result, after the heater power is adjusted, there is a lag in the temperature adjustment at the melt surface, which leads to a relatively large or small adjustment amplitude or a relatively long or short adjustment time of the heater power. If the adjustment amplitude is large or the time is long, it will cause too much temperature drop at the melt interface, too fast lateral growth speed, an increase in the shoulder opening wire break rate, or the diameter exceeding the target value. If the adjustment amplitude is small or the time is short, it will cause too little temperature drop at the melt interface, too slow lateral growth speed, and too thin a diameter. Therefore, the melt interface requires accurate and rapid temperature response to help quickly adjust the temperature of the melt surface, reduce the wire break rate, or increase the qualified rate of shoulder opening. During the equal diameter stage, due to the temperature drop during the shoulder opening or shoulder turning stage, the overall temperature of the melt decreases, and the equal diameter pulling speed gradually increases. In order to reach the target pulling speed, the heater power needs to be adjusted, specifically by raising or lowering the heater power to timely adjust the temperature of the melt surface. Therefore, during the equal diameter stage, the temperature of the melt surface also needs to be adjusted quickly so that the pulling speed is at the target value.

[0032] In the present utility model, the first heating element 111 corresponds to the first heating area of the heater, and the L2 length range of the second heating element 112 corresponds to the second heating area of the heater. Among them, during single crystal growth, the position of the heater relative to the melt interface in the crucible remains unchanged; the first heating area corresponds to the melt interface area, and the second heating area is in the area below the melt interface. As an implementation requirement, by limiting the lengths of L1 and L2, the heat generation of the first heating area ≥ 1 / 4 of the heat generation of the second heating area, meeting the required temperature gradient and heat concentration. When the heater power is adjusted, specifically when adjusting by 0.3 kw, 0.4 kw, or 0.5 KW, etc., the change in the heater power can be quickly reflected in the temperature change at the melt interface, and a more stable temperature of the melt surface can be provided. If the first heating area and the second heating area do not meet the above relationship, the heat generation of the heater will mainly act on the area below the melt interface. When the heater power is adjusted, there is a time difference between the temperature change below the melt and the temperature change at the melt surface, that is, after the heater power is adjusted, there is a time difference in the temperature adjustment at the melt interface, resulting in the inability to quickly adjust the temperature of the melt interface and affecting crystal growth.

[0033] In the embodiment of the present utility model, by adjusting the temperature zone distribution, the temperature gradient in the melt is made more stable, which is helpful for crystal growth. The high-temperature zone is concentrated on the upper part of the heating body 1 of the heater, reducing the temperature at the bottom of the crucible, which can reduce the reaction between the quartz crucible and the melt at high temperature, thereby reducing the oxygen entering the melt; on the other hand, the reduction of the temperature gradient in the melt weakens the convection in the melt.

[0034] The heater described in the embodiment of the present utility model can be energized to achieve the heating function. The heater may include a heating body 1, and the heating body 1 may be in a ring structure. The heating body 1 may be sleeved outside the workpiece to be heated to perform thermal radiation on the workpiece to be heated and achieve the heating of the workpiece to be heated.

[0035] Specifically, at least part of the heating body 1 is composed of a first heating element 111 and a second heating element 112 alternately arranged along its circumferential direction. The first heating element 111 and the two second heating elements 112 adjacent to it can enclose to form an open slot 113. Further, the open slot 113 may be a U-shaped slot with an opening facing one end of the heating body 1 along its axial direction.

[0036] Specifically, along the axial direction of the heating body 1, as Figure 1 shown, the top end of the first heating element 111 may be flush with the top end of the second heating element 112, and the bottom end of the second heating element 112 may protrude from the bottom end of the first heating element 111; or, along the axial direction of the heating body 1, the top end of the second heating element 112 may protrude from the top end of the first heating element 111, and the bottom end of the second heating element 112 may protrude from the bottom end of the first heating element 111. In this embodiment, the length of the open slot 113 along the circumferential direction of the heating body 1 is equal to the length of the first heating element 111 along the circumferential direction of the heating body 1. The area where the first heating element 111 is connected to the second heating element 112 belongs to the second heating element 112.

[0037] Specifically, the first heating element 111 and the second heating element 112 are alternately arranged along the circumferential direction of the heating body 1. The adjacent first heating element 111 and the second heating element 112 may be integrally formed or may be spliced and fixed, which may be specifically set according to actual needs. In the embodiment of the present utility model, no specific limitation is made thereto.

[0038] Specifically, a slit 1124 may be provided in the middle of the second heating element 112. The slit 1124 and the opening direction of the open slot 113 are opposite, which is beneficial to ensuring the structural stability of the heating body 1; in addition, the design that the slit 1124 and the opening direction of the open slot 113 are opposite can improve the current flow path.

[0039] Specifically, along the circumferential direction of the heating body 1, the length of the first heating element 111 can be L1, and L1 can be an arc length. Along the axial direction of the heating body 1, the difference between the length of the slit 1124 and the width of the first heating element 111 is L2; wherein, L1 > L2 / 2, as Figures 1 to 5 shown, the heating area of the heating body 1 can be concentrated near the upper part, that is, the heat generation amount of the upper part of the heating body 1 is greater than that of the lower part. Compared with other existing heaters, in this embodiment, by extending the length of the first heating element 111 and increasing the distance between the second heating elements 112, the high-temperature area of the heater is concentrated near the upper part of the first heating element. The high-temperature area corresponds to the part of the crucible liquid surface, so that the oxygen precipitated from the crucible at high temperature is quickly carried away by the argon gas in the furnace, reducing the oxygen content entering the melt; at the same time, the high-temperature area is concentrated on the upper part of the heating lobe, reducing the radiation area of the high-temperature area on the crucible.

[0040] Optionally, the second heating element 112 includes a first connection section 1121 and a second connection section 1122, and a transition section 1123 connected between the first connection section 1121 and the second connection section 1122; the transition section 1123 between the first connection section 1121 and the second connection section 1122 encloses to form a slit 1124.

[0041] In the embodiment of the present invention, the second heating body 1 may include a first connection section 1121, a transition section 1123, and a second connection section 1122 connected in sequence. There is a slit 1124 between the first connection section 1121 and the second connection section 1122, so that the current can pass through the first connection section 1121, the transition section 1123, and the second connection section 1122 in sequence, which can improve the uniformity of the thermal radiation of the second heating element 112.

[0042] Optionally, in the present invention, the length L1 of the first heating element 111 is 70 - 140 mm; along the axial direction of the heating body 1, the difference between the length of the slit 1124 and the width of the first heating element 111 is L2, which is 140 - 280 mm, and L1 > L2 / 2, so that the heat generation amount of the upper part of the heating body 1 is greater than that of the lower part, realizing uneven distribution of heat, and can avoid too high temperature gradient.

[0043] Specifically, in some optional embodiments of the present invention, controlling L1 to be 70 - 140 mm and L2 to be 140 - 280 mm is convenient for realizing that the heat generation amount of the upper part of the heating body 1 is greater than that of the lower part, realizing uneven distribution of heat, and can avoid too high temperature gradient; at the same time, it can reduce the oxygen content. The specific principle analysis is as follows:

[0044] In this embodiment, the dimensions of the first connection section 1121 and the second connection section 1122 along the axial direction of the heating body 1, and the dimensions of the first heating element 111 and the transition section 1123 along the circumferential direction of the heating body 1 all affect the heat receiving area of the quartz crucible, thereby affecting the thermal convection in the melt. The larger the dimensions of the first connection section 1121 and the second connection section 1122 along the axial direction of the heating body 1, the stronger the thermal radiation to the middle and bottom of the quartz crucible, which easily leads to enhanced thermal convection in the melt and an increase in the oxygen content precipitated in the quartz crucible. The smaller the dimensions of the first connection section 1121 and the second connection section 1122 along the axial direction of the heating body 1, the more concentrated the heat in the heating area of the heating body 1, resulting in too high a temperature gradient and an increase in the generation of crystal defects, which has a greater impact on production. In this embodiment, by adjusting the values of the length L1 and the length L2, and the relationship between the length L1 and the length L2, the high-temperature area is concentrated in the upper part of the heater body, reducing the temperature at the bottom of the crucible, which can reduce the reaction between the quartz crucible and the melt at high temperatures, thereby reducing the oxygen entering the melt; on the other hand, the reduction of the temperature gradient in the melt weakens the convection in the melt (especially the convection below the crystal). Therefore, the diffusion boundary layer of oxygen impurities is relatively thick below the solid-liquid interface, inhibiting the diffusion of oxygen into the crystal.

[0045] Optionally, the cross-sectional area of the first heating element 111 along the axial direction of the heating body 1 is D1, and the cross-sectional area of the first connection section 1121 or the second connection section 1122 along the circumferential direction of the heating body 1 is D2; wherein, 0.75D1 ≤ D2 ≤ 3D1. In this way, while ensuring a relatively large calorific value of the first heating element 111, the lateral support strength of the first heating element 111 can also be ensured, preventing the heating body 1 from deforming and improving the service life of the heater. In this embodiment, the cross-section of the first heating element 111 along the axial direction of the heating body 1 can be understood as a cross-section parallel to the axial direction of the heating body; the cross-section of the first connection section 1121 or the second connection section 1122 along the circumferential direction of the heating body 1 can be understood as a cross-section parallel to the circumferential direction of the heating body or parallel to the cross-section of the heating body.

[0046] Specifically, the larger D1 is relative to D2, the shorter L1 is, the stronger the lateral support strength of the first heating element 111, the less likely the heating body 1 is to deform, and the longer the service life of the heater. However, it is not conducive to the concentrated heating of the heating body 1; the larger L2 is, the more uniform the overall strength of the heating body 1, and the relatively longer the service life of the heater. Therefore, controlling 0.75D1 ≤ D2 ≤ 3D1 enables the first heating element 111 to have both a relatively large calorific value and a strong lateral support strength.

[0047] Based on the above embodiments or some other alternative embodiments, the thickness of the first heating element 111 in the radial direction of the heating body 1 is 15 - 50 mm; the thickness of the second heating element 112 in the radial direction of the heating body 1 is 15 - 50 mm, which is convenient for ensuring the heat radiation ability of the heating body 1.

[0048] Specifically, as an implementation manner, the thicknesses of the first heating element 111 and the second heating element 112 in the radial direction of the heating body 1 are the same. The thickness of the first heating element 111 in the radial direction of the heating body 1 is 15 - 50 mm.

[0049] Based on the above embodiments or some other alternative embodiments, the length L1 of the first heating element 111 in the circumferential direction of the heating body 1 is greater than or equal to the length L3 of the second heating element 112 in the circumferential direction of the heating body 1. In this embodiment, the length L1 of the first heating element 111 in the circumferential direction of the heating body 1 is the length of the opening groove 113 in the circumferential direction of the heating body 1. By defining L1 and the length L3 of the second heating element 112 in the circumferential direction of the heating body 1, when processing with the same cylindrical blank, two heating bodies 1 can be processed into upper and lower parts, reducing the processing cost. Specifically, in this embodiment, when processing the heating petals from the blank, by adjusting the distance between the graphite plates, under the condition of meeting the required resistance range of the heater, two heating petals can be processed from a quarter blank, and the raw material cost is reduced by 50%.

[0050] Optionally, as an alternative embodiment, the heating body 1 can be integrally formed, so that the structural strength of the heating body 1 is relatively high and the processing steps are simplified. The heating body 1 is a ring structure.

[0051] Specifically, the heating body 1 can be alternately arranged by the first heating element 111 and the second heating element 112; or at least part of the heating body 1 is alternately arranged by the first heating element 111 and the second heating element 112.

[0052] Furthermore, the heater can include at least two symmetrically arranged foot plates 2; at least two foot plates 2 are both connected to the heating body 1, and at least two foot plates 2 can be connected to the same side of the heating body 1 for supporting the heating body; the foot plates 2 can be electrically connected to the power supply to transmit current to the heating body 1, so that the heating body 1 can perform heat radiation on the workpiece to be heated.

[0053] Specifically, the foot plate 2 and the opening direction of the opening groove 113 are on the same side of the heating body 1.

[0054] Specifically, the first mounting holes 1141 can be provided on the heating body 1, and the corresponding second mounting holes 5 can be provided on the foot plate 2. The second mounting holes 5 and the first mounting holes 1141 can be opposite and conduct, so as to realize the installation and fixation between the foot plate 2 and the heating body 1 through the fasteners 4.

[0055] Specifically, as Figure 8 and Figure 9 shown, the foot plate 2 can be provided with a groove 21 for accommodating at least part of the third heating element 114. The groove 21 can be an L-shaped groove, a U-shaped groove, or the like.

[0056] Alternatively, the foot plate 2 and the heating body 1 can also be adhesively bonded with conductive glue or fixed and installed by other hard connection methods. The embodiments of the present invention do not make specific limitations on this.

[0057] Exemplarily, the number of the foot plates 2 can include two, three, four, etc., and at least two of the foot plates 2 are symmetrically arranged with respect to the axis of the heating body 1.

[0058] Optionally, in some other alternative embodiments of the present invention, the heating body 1 can include a plurality of heating segments 11 spliced end to end. Each heating segment 11 can include a first heating element 111 and a second heating element 112 alternately arranged along the circumferential direction of the heating body 1. A third heating element 114 is further provided at the end of the heating segment 11 along the circumferential direction of the heating body 1; along the axial direction of the heating body 1, in a single heating segment 11, the third heating element 114 and the second heating element 112 are connected to the same side of the first heating element 111, and the length of the third heating element 114 is less than the length of the second heating element 112.

[0059] In the embodiments of the present invention, along the axial direction of the heating body 1, in a single heating segment 11, the third heating element 114 and the second heating element 112 protrude from the same side of the first heating element 111, which is convenient for improving the structural strength of the heating body 1. Moreover, the length of the third heating element 114 is less than the length of the second heating element 112. Since the third heating element 114 is provided at the end of the heating segment 11 along the circumferential direction of the heating body 1, it is convenient for splicing and fixing between two adjacent heating segments 11 through the third heating element 114.

[0060] Specifically, the third heating element 114 is provided at the end of the heating segment 11 along the circumferential direction of the heating body 1, as Figure 1 shown, the third heating element 114 is connected to the adjacent second heating element 112.

[0061] Specifically, when the splicing position of the heating petals 11 is far from the foot plate 2 along the circumferential direction of the heating body 1, it is greatly affected by gravity and the pressure of the heating petals 11 on both sides of the splicing position. The closer the splicing position is to the lower part of the heating body 1, the worse the splicing stability is, and more splicing points are needed. In this embodiment, the length of the third heating body 114 is less than that of the second heating body 112. The adjacent heating petals 11 are spliced through the third heating body 114, so that the splicing position between the heating petals 11 can be close to the upper part of the heating body 1, with good support strength, and fewer splicing points are required, which can reduce the splicing difficulty. In addition, the third heating body 114 is close to the first heating body, that is, the heating petals are connected through the transverse heating area, so that the current path is reduced, and the heating area of the longitudinal heating area is further reduced.

[0062] Specifically, the third heating body 114 can be a strip-shaped structure extending along the axial direction of the heating body 1, or the third heating body 114 can also be an L-shaped structure extending along the axial and circumferential directions of the heating body 1.

[0063] Specifically, a single heating petal 11 can simultaneously include the first heating body 111, the second heating body 112 and the third heating body 114, and a single heating petal 11 can be an integrally formed structure.

[0064] Specifically, the number of the heating petals 11 can be two, three, four or six, etc. Figure 1 and Figure 6 As shown, the adjacent two heating petals 11 can be connected through the connecting plate 3, and as shown in Figure 1 and Figure 8 shown, they can also be connected through the foot plate 2.

[0065] Optionally, along the axial direction of the heating body 1, the difference between the length of the third heating body 114 in the axial direction of the heating body 1 and the length of the first heating body 111 in the axial direction of the heating body 1 is L4; wherein, L4 ≤ L2 / 2, which is convenient for preparing two heating petals from one embryo, can reduce material waste and save costs.

[0066] Specifically, L4 = L2 / 2, so that the splicing position of the heating petals 11 can be at 1 / 2 of the embryo height. Due to the structural design, it is convenient to adjust the gap between the second heating bodies 112, and cutting and grooving can be carried out on an arc-shaped embryo to prepare two heating petals 11. As shown in Figure 10 shown, it shows the situation where an arc-shaped embryo can prepare two heating petals 11, so that the raw material cost can be reduced by 50%.

[0067] Optionally, the heater further includes a connecting plate 3. The third heating elements 114 of two adjacent heating flaps 11 are connected by the connecting plate 3, which can improve the reliability and firmness of the splicing and installation of two adjacent heating flaps 11.

[0068] Specifically, the number of connecting plates 3 can be one, two, or three. As shown in Figures 1 to 7 Figure, a first mounting hole 1141 can be provided on the third heating element 114, a second mounting hole 5 can be provided on the connecting plate 3, and the second mounting hole 5 and the first mounting hole 1141 can be opposite and conducting to facilitate the threading of the fastener 4.

[0069] Specifically, the connecting plate 3 and the third heating element 114 can also be adhesively fixed by conductive adhesive, or other hard connection methods can also be used for fixation. This embodiment does not make specific limitations in this regard.

[0070] Optionally, at least part of the third heating elements 114 of two adjacent heating flaps 11 can be fixedly connected by a foot plate 2, so that two adjacent heating flaps 11 can be directly spliced through the foot plate 2, the connecting plate 3 can be cancelled, which is convenient for reducing the processing cost, and can further reduce the weight and the weight of the heating body, and make full use of the heating of different regions of the heating body.

[0071] Specifically, the specific number of heating flaps 11, the specific number of foot plates 2, and the specific number of connecting plates 3 can all be selected according to actual needs. This embodiment of the present invention does not make specific limitations in this regard. As shown in Figure 1 Figure, only the case of four heating flaps 11, two connecting plates 3, and two foot plates 2 is shown, and other cases can be set with reference.

[0072] Specifically, in some alternative embodiments, improving the service life of the heater can be considered from two aspects. On the one hand, since the weight of the heating body 1 relies on the foot plate 2 for support, in this embodiment, by providing an opening groove 113 and a slit 1124, and the size of the opening groove 113 is relatively large, compared with the existing heater, the weight of the heating body 1 can be reduced, the foot plate 2 can be lightened, and the stress at the splicing part between the foot plate 2 and the heating body 1 can be reduced, thereby improving the service life of the heater.

[0073] On the other hand, affected by the material, in this embodiment, by using the foot plate 2 to connect the heating flaps 11, the number of splicing parts can be reduced. In this way, at high temperatures in the furnace, the probability of silicon powder entering the gaps at the splicing parts of the heating flaps 11 and reacting with the heating body 1 to generate silicon carbide can be reduced, and the material uniformity of the heater can be maintained, thereby improving the service life of the heater.

[0074] In some other alternative embodiments, the volume of the heating body 1 may be V1; the inner diameter of the heating body 1 is Φ1, the outer diameter is Φ2, and the axial length is H1; the width of the first heating element 111 along the axial direction of the heating body 1 is H2. Figure 10 The height of the shown embryo body is the sum of the heights H1 and H2, and the volume of the embryo body is defined as V0; V0 = π((Φ2 / 2)² - (Φ1 / 2)²) * (H1 + H2); wherein, the ratio range of V1:V0 is (31 - 65):100.

[0075] In the embodiment of the present utility model, controlling the ratio range of V1:V0 to (31 - 65):100 is convenient for ensuring the structural strength of the heating body 1 and improving the service life of the heater. Specifically, both the inner diameter and the outer diameter of the heating body 1 refer to the diameter dimensions.

[0076] Specifically, according to the formula: mass m = density ρ * volume v, the relationship between the mass of the heating body 1 and the mass of the embryo body can be converted into the relationship between the volume of the heating body 1 and the volume of the embryo body, that is, by adjusting the ratio of V1:V0, the relationship between the mass of the heating body 1 and the mass of the embryo body can be reflected.

[0077] Specifically, when the heating body 1 is an integrally formed ring structure, the heating body 1 can be processed from a ring embryo body. The heating body 1 is spliced by a plurality of heating segments 11, and the heating segments 11 can be processed from arc embryo bodies.

[0078] Specifically, taking the heating body 1 being spliced by four heating segments 11 end to end as an example, the heating segments 11 can be processed from 1 / 4 ring embryo bodies. For example, when the outer diameter of the heating segment 11 is 35 inches, the ratio range of the volume ratio of the heating segment 11 to the 1 / 4 ring embryo body is (35 - 65):100; when the outer diameter of the heating segment 11 is 37 inches, the ratio range of the volume ratio of the heating segment 11 to the 1 / 4 ring embryo body is (33 - 55):100; when the outer diameter of the heating segment 11 is 40 inches, the ratio range of the volume ratio V1:V0 to the 1 / 4 ring embryo body is (31 - 50):100.

[0079] The heater described in the embodiment of the present utility model has at least the following advantages:

[0080] In the embodiment of the present utility model, the first heating element and the second heating element are alternately arranged along the circumferential direction of the heating body. A slit is provided in the middle of the second heating element. Since the length of the first heating element in the circumferential direction of the heating body is L1, and along the axial direction of the heating body, the difference between the length of the slit and the width of the first heating element is L2; L1 > L2 / 2, so that the high-temperature region of the heating body is concentrated in the upper part near the first heating element, while the lower part of the second heating element maintains a lower calorific value, thereby realizing non-uniform temperature distribution. Since the first heating element can correspond to the liquid surface part in the quartz crucible, oxygen precipitated from the quartz crucible at high temperature can be quickly carried away by the gas in the furnace, which can reduce the oxygen content entering the melt, thereby reducing defects in the crystal and improving the performance of the device.

[0081] In a second aspect, the embodiment of the present utility model also discloses a single crystal furnace, which specifically may include the above-mentioned heater.

[0082] The single crystal furnace described in the embodiment of the present utility model can achieve the same beneficial effects as the above-mentioned heater, and the present utility model will not elaborate herein.

[0083] Although the preferred embodiments of the embodiments of the present utility model have been described, those skilled in the art can make additional changes and modifications once they know the basic creative concepts. Therefore, the appended claims are intended to be construed to include the preferred embodiments and all changes and modifications falling within the scope of the embodiments of the present utility model.

[0084] Finally, it should also be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or terminal device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or terminal device. Without further limitation, an element defined by the statement "comprising one..." does not exclude the existence of another identical element in the process, method, article or terminal device comprising the element.

[0085] The above has introduced in detail a heater and a single crystal furnace provided by the present utility model. Specific examples are used in this article to elaborate on the principle and implementation manner of the present utility model. The description of the above embodiments is only used to help understand the method and its core idea of the present utility model; at the same time, for those of ordinary skill in the art, according to the idea of the present utility model, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation to the present utility model.

Claims

1. A heater, characterized in that, It includes a heating body (1); at least part of the heating body (1) includes a first heating element (111) and a second heating element (112) alternately arranged along its circumferential direction; The first heating element (111) and two adjacent second heating elements (112) enclose to form an opening groove (113); the length of the opening groove (113) along the circumferential direction of the heating body (1) is equal to the length of the first heating element (111) along the circumferential direction of the heating body (1); A slit (1124) is provided in the middle of the second heating element (112); the opening direction of the slit (1124) is opposite to that of the opening groove (113); The length of the first heating element (111) along the circumferential direction of the heating body (1) is L1; The difference between the length of the slit (1124) in the axial direction of the heating body (1) and the length of the first heating element (111) in the axial direction of the heating body (1) is L2; wherein, L1 > L2 / 2.

2. The heater according to claim 1, characterized in that, L1 is 70 - 140 mm, and L2 is 140 - 280 mm.

3. The heater according to claim 1 or 2, characterized in that, The second heating element (112) includes a first connecting section (1121) and a second connecting section (1122), and a transition section (1123) connected between the first connecting section (1121) and the second connecting section (1122); The cross-sectional area of the first heating element (111) along the axial direction of the heating body (1) is D1, and the cross-sectional area of the first connecting section (1121) or the second connecting section (1122) along the circumferential direction of the heating body (1) is D2; wherein, 0.75D1 ≤ D2 ≤ 3D1.

4. The heater according to claim 3, characterized in that, The first heating element (111) and the second heating element (112) have the same thickness along the radial direction of the heating body (1); The thickness of the first heating element (111) along the radial direction of the heating body (1) is 15 - 50 mm.

5. The heater according to claim 1, characterized in that The length of the second heating element (112) along the circumferential direction of the heating body (1) is L3; wherein, L1 ≥ L3.

6. The heater according to claim 5, characterized in that, The heating body (1) is integrally formed; or The heating body (1) includes a plurality of heating segments (11) spliced end to end. Among them, each heating segment (11) includes a first heating element (111) and a second heating element (112) alternately arranged along the circumferential direction of the heating body (1). A third heating element (114) is also provided at the circumferential end of the heating segment (11) along the heating body (1); in each heating segment (11), the third heating element (114) and the second heating element (112) are connected to the same side of the first heating element (111), and along the axial direction of the heating body (1), the length of the third heating element (114) is less than the length of the second heating element (112).

7. The heater according to claim 6, characterized in that, The difference between the length of the third heating element (114) in the axial direction of the heating body (1) and the length of the first heating element (111) in the axial direction of the heating body (1) is L4; wherein, L4 ≤ L2 / 2.

8. The heater according to claim 6, characterized in that, The heater further includes a connecting plate (3), and the third heating elements (114) of two adjacent heating segments (11) are connected through the connecting plate (3).

9. The heater according to claim 6, characterized in that, The heater includes at least two foot plates (2), and the foot plates are symmetric with respect to the heating body (1); When the heating body (1) is integrally formed, at least two of the foot plates (2) are connected to the same side of the heating body (1); When the heating body (1) includes a plurality of heating segments (11) spliced end to end, at least two adjacent heating segments (11) are fixedly connected to each other through the foot plate (2) between the third heating bodies (114).

10. The heater according to claim 1, characterized in that, The volume of the heating body (1) is V1; the inner diameter of the heating body (1) is Φ1, the outer diameter is Φ2, and the axial length is H1; The width of the first heating body (111) along the axis of the heating body (1) is H2, and the volume of the heater blank is defined as V0, and V0 = π((Φ2 / 2)² - (Φ1 / 2)²) * (H1 + H2); Wherein, the ratio range of V1:V0 is (31 - 65):

100.

11. A single crystal furnace, characterized in that, A heater according to any one of claims 1-10 is included.

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