Carrying tool for gas reduction equipment and gas reduction equipment

Abstract

The utility model provides a carrying tool for gas reduction equipment and the gas reduction equipment, and belongs to the technical field of semiconductor equipment. The carrying tool comprises a plurality of carrying assemblies, wherein each carrying assembly comprises a fixed support and a movable part; when the gas reduction equipment needs to be carried, the fixed support is fixed to a metal plate cabinet body bottom plate of the gas reduction equipment, the moving part is fixed to the lower portion of the fixed support so that the metal plate cabinet body can be suspended on the ground, in this way, the moving part slides along with pushing of the metal plate cabinet body, carrying of the equipment is achieved, manual carrying is not needed, and the carrying efficiency is improved. Meanwhile, the toppling risk of the cabinet body can be reduced.

Description

Technical Field

[0001] The present disclosure belongs to the technical field of semiconductor equipment, and particularly relates to a handling tool for a gas reduction device and a gas reduction device. Background Art

[0002] The gas reduction device is mainly used for reducing the gas flowing into the vacuum pump, removing one or several gases among them. Since the vacuum pump compresses air to do work during the vacuum pumping process, the temperature in the vacuum pump rises. The gas flowing through the vacuum pump will undergo a chemical reaction at high temperature, generating harmful gases, liquids or solids. The gas reduction device is to treat one or more of the gases before they flow into the vacuum pump.

[0003] At the client site, the installation space is relatively limited. The sheet metal cabinet included in the gas reduction device is relatively large in size and will not move from the time of equipment installation until scrapping. The equipment will be fixed to the appropriate ground with fixing bolts, and the bottom of all equipment is flat, and detachable or elevated wheels cannot be designed. However, before the equipment enters the workshop, when it is in the warehouse, it is generally placed on a wooden bracket and moved from the warehouse to the workshop. There is a section of the journey that requires moving the equipment. Moreover, due to the small internal space of the FAB factory during this moving journey, tools such as forklifts cannot be used. At the same time, since there are pipelines above the FAB workshop, lifting equipment cannot be installed either.

[0004] Therefore, there is currently no auxiliary tool for moving the gas reduction device. In order to avoid friction between the equipment and the ground, manual handling of the equipment is generally required, and there is also a risk of the equipment tipping over during handling, which is extremely inconvenient. Summary of the Utility Model

[0005] The present disclosure aims to at least solve one of the technical problems existing in the prior art, and provides a handling tool for a gas reduction device and a gas reduction device.

[0006] On one hand of the present disclosure, a handling tool for a gas reduction device is provided. The handling tool includes: a plurality of handling components, and each handling component includes a fixed bracket and a moving member; wherein,

[0007] When it is necessary to handle the gas reduction device, the fixed bracket is fixed to the bottom plate of the sheet metal cabinet of the gas reduction device, and the moving member is fixed below the fixed bracket to suspend the sheet metal cabinet above the ground.

[0008] Optionally, the plurality of handling components are distributed on at least opposite sides of the bottom plate of the sheet metal cabinet.

[0009] Optionally, the fixed bracket includes a first fixing portion and a second fixing portion; wherein,

[0010] The first fixing portion is fixed to the side surface of the bottom plate of the sheet metal cabinet, the second fixing portion is bent from the upper end of the first fixing portion to a side away from the sheet metal cabinet, and the moving member is fixed below the second fixing portion.

[0011] Optionally, the transport assembly further includes a first fixing member and a second fixing member, the first fixing member is provided with a first fixing through hole, and the moving member and the second fixing member are both provided with a second fixing through hole; wherein,

[0012] The first fixing member is inserted into the first fixing through hole to fix the first fixing portion to the sheet metal cabinet bottom plate, and the second fixing member is inserted into the second fixing through hole to fix the moving member to the second fixing portion.

[0013] Optionally, both the first fixing member and the second fixing member are bolts.

[0014] Optionally, the moving member is a universal wheel.

[0015] Optionally, the transport assembly further comprises a height adjustment member disposed below the second fixing portion;

[0016] When the sheet metal cabinet needs to be supported, the height of the height adjustment member is adjusted until the height adjustment member contacts the ground, and the moving member is suspended above the ground;

[0017] When the sheet metal cabinet needs to be moved, the height of the height adjustment member is adjusted until the height adjustment member is suspended above the ground and the moving member is in contact with the ground;

[0018] When the sheet metal cabinet needs to be placed on the ground, the height of the height adjusting member is adjusted to make the sheet metal cabinet contact with the ground.

[0019] Optionally, the height adjustment member includes a supporting portion and an adjusting portion; wherein,

[0020] The first end of the adjusting portion is rotatably connected to the second fixing portion, and the second end of the adjusting portion is fixedly connected to the supporting portion.

[0021] Optionally, the height adjustment member is an adjustment foot.

[0022] In another aspect of the present disclosure, a gas abatement device is provided, comprising a sheet metal cabinet, wherein a plurality of fixing grooves are arranged on a bottom plate of the sheet metal cabinet, each of the fixing grooves being used to accommodate a transport component of the transport tool described above.

[0023] The present disclosure provides a handling tool for a gas reduction device and a gas reduction device. Among them, the handling tool includes: a plurality of handling components, each of the handling components including a fixed bracket and a moving member; wherein, when it is necessary to handle the gas reduction device, the fixed bracket is fixed to the bottom plate of the sheet metal cabinet body of the gas reduction device, and the moving member is fixed below the fixed bracket to suspend the sheet metal cabinet body above the ground. In this way, the moving member slides as the sheet metal cabinet body is pushed, realizing the handling of the device without manual handling and reducing the risk of the cabinet body tipping over at the same time. Description of the Drawings

[0024] Figure 1 Schematic structural diagram of the handling tool installed on the sheet metal cabinet body according to an embodiment of the present disclosure;

[0025] Figure 2 In the present disclosure Figure 1 Partial enlarged view of part A in

[0026] Figure 3 Schematic structural diagram of the handling tool installed on the sheet metal cabinet body according to another embodiment of the present disclosure;

[0027] Figure 4 Schematic structural diagram of the handling tool installed on the sheet metal cabinet body according to another embodiment of the present disclosure;

[0028] Figure 5 Schematic structural diagram of the sheet metal cabinet body according to another embodiment of the present disclosure. Detailed Description of the Embodiment

[0029] To enable those skilled in the art to better understand the technical solutions of the present disclosure, the present disclosure will be further described in detail below with reference to the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present disclosure, which are part of the embodiments of the present disclosure, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present disclosure without creative efforts shall fall within the protection scope of the present disclosure.

[0030] In some descriptions of the present disclosure, terms such as "including" or "comprising" etc. neither limit the mentioned shapes, numbers, steps, actions, operations, components, elements and / or their groups, nor exclude the appearance or addition of one or more other different shapes, numbers, steps, actions, operations, components, elements and / or their groups.

[0031] In some descriptions of the present disclosure, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity and order of the indicated technical features.

[0032] In some descriptions of the present disclosure, terms such as "install", "connect", "link" or "fix" and the like do not limit to physical or mechanical connections, but may include electrical connections, whether direct or indirectly through an intermediate medium, and can be the communication inside two components or the interaction relationship between two components.

[0033] In some descriptions of the present disclosure, the orientation or positional relationship indicated by terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only used to represent the relative positional relationship. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0034] As Figures 1 to 4 shown, on one aspect of the present disclosure, a handling tool for a gas reduction device is proposed. The handling tool includes: a plurality of handling components 100, and each handling component 100 includes a fixed bracket 110 and a moving member 120; wherein, when it is necessary to handle the gas reduction device, the fixed bracket 110 is fixed to the bottom plate 210 of the sheet metal cabinet 200 of the gas reduction device, and the moving member 120 is fixed below the fixed bracket 110 to suspend the sheet metal cabinet 200 above the ground.

[0035] In this embodiment, by arranging a plurality of handling components on the bottom plate of the sheet metal cabinet to suspend the sheet metal cabinet above the ground, in this way, when pushing the sheet metal cabinet, it moves based on the moving member arranged below it, without the need to manually lift it, saving manpower, and at the same time, it can also avoid the friction between the cabinet and the ground.

[0036] It should be noted that the number of handling components in this embodiment is not specifically limited, and it can be two, three or four or other numbers, as long as it can support the movement of the sheet metal cabinet.

[0037] Furthermore, it should be noted that the position where the handling components are arranged on the bottom plate in this embodiment is not specifically limited. For example, they can be arranged below the bottom plate, and a plurality of handling components are evenly distributed below the bottom plate; of course, more preferably, a plurality of handling components can be arranged on the side of the bottom plate to facilitate the installation of the handling components.

[0038] It should be understood that when a plurality of handling components are arranged on the side of the bottom plate of the sheet metal cabinet, the plurality of handling components should be distributed on at least two opposite sides of the bottom plate. That is to say, the plurality of handling components can be distributed on the front and rear sides of the bottom plate, or on the left and right sides of the bottom plate. Of course, the plurality of handling components can also be distributed on the front and rear sides and the left and right sides of the bottom plate at the same time, and no specific limitation is made thereto.

[0039] It should also be understood that the number of handling components provided on the front and rear sides, and the left and right sides of the bottom plate may be the same or different, as long as the stability of the sheet metal cabinet can be ensured.

[0040] It should also be understood that the front side of the sheet metal cabinet bottom plate should be the side facing the cabinet door, and the rear side of the bottom plate should be the side facing away from the cabinet door.

[0041] For example, Figures 1 to 4 As shown, multiple transport assemblies 100 are symmetrically distributed on the front and rear sides of the base plate 210 , for example, one, two or three transport assemblies 100 are distributed on the front side of the base plate 210 , and one, two or three transport assemblies 100 are distributed on the rear side of the base plate 210 .

[0042] It should be noted that the present embodiment does not specifically limit the structure of the fixed bracket. For example, when the transport assembly is fixed under the bottom plate, the fixed bracket can be a fixed plate, one part of which is used to connect with the bottom plate of the sheet metal cabinet, and the other part of which is used to connect with the moving part. For another example, when the transport assembly is fixed to the side of the bottom plate, the fixed bracket can include two connected parts, one part of which is used to connect with the bottom plate of the sheet metal cabinet, and the other part of which is used to connect with the moving part.

[0043] For example, Figures 1 to 4 As shown, the fixing bracket 110 includes a first fixing portion 111 and a second fixing portion 112; wherein the first fixing portion 111 is fixed to the side of the bottom plate 210 of the sheet metal cabinet 200, the second fixing portion 112 is bent from the first fixing portion 111 to a side away from the sheet metal cabinet 200, and the moving member 120 is fixed below the second fixing portion 112.

[0044] It should be understood that the second fixing portion should be bent outward from the upper end of the first fixing portion to meet the installation requirements of the moving part located below the second fixing portion, and the bending angle of the second fixing portion here should be 90°, that is, the first fixing portion and the second fixing portion are in a vertical connection relationship.

[0045] For example, Figures 1 to 4 As shown, the transport assembly 100 also includes a first fixing member 130 and a second fixing member 140. The first fixing portion 111 is provided with a first fixing through hole, and the movable member 120 and the second fixing portion 112 are provided with a second fixing through hole. In this way, the first fixing member 130 is inserted into the first fixing through hole to fix the fixing bracket 110 to the bottom plate 210 of the sheet metal cabinet 200, and the second fixing member 140 is inserted into the second fixing through holes of the movable member 120 and the second fixing portion 112 in sequence to fix the movable member 120 to the second fixing portion 112.

[0046] It should be noted that the types of the first fixing member and the second fixing member are not specifically limited in this embodiment. For example, both the first fixing member and the second fixing member are bolts. It should be noted that when the second fixing member is a bolt, it is also necessary to cooperate with a nut. That is, the second fixing member is inserted into the second fixing through hole, and a nut is arranged above the second fixing portion. The movement member is fixed by the cooperation of the nut and the bolt.

[0047] Furthermore, it should be noted that the type of the movement member is not specifically limited in this embodiment. For example, the movement member adopts a universal wheel, which can move in various different directions, reduce the wear between the sheet metal cabinet body and the ground, and improve the moving efficiency.

[0048] Furthermore, as Figures 1 to 4 shown, the handling assembly 100 further includes a height adjusting member 150 disposed below the second fixing portion 112. When it is necessary to support the sheet metal cabinet body 200, the height of the height adjusting member 150 is adjusted until the height adjusting member 150 contacts the ground, and the movement member 120 is suspended above the ground; when it is necessary to move the sheet metal cabinet body 200, the height of the height adjusting member 150 is adjusted until the height adjusting member 150 is suspended above the ground, and the movement member 120 contacts the ground. When it is necessary to place the sheet metal cabinet body 200 on the ground, the height of the height adjusting member 150 is adjusted to make the sheet metal cabinet body 200 contact the ground.

[0049] It should be noted that the situation where the sheet metal cabinet needs to be supported by a height adjustment member should include two states: before the sheet metal cabinet is moved and after the sheet metal cabinet is moved. In one case, before the sheet metal cabinet is moved, the height adjustment member can be installed under the second fixed part to support the sheet metal cabinet so that the sheet metal cabinet is separated from the ground. At this time, a moving member can be installed under the second fixed part or the position of the moving member can be adjusted to meet the movement requirements. Then the sheet metal cabinet needs to be moved. In this case, the height of the height adjustment member is adjusted to make it suspended above the ground, and the moving member contacts the ground. At this time, the sheet metal cabinet is supported based on the moving member, and the sheet metal cabinet is transported by moving the moving member. In another case, after the sheet metal cabinet is moved to the target position, the height adjustment member can be adjusted again to a position in contact with the ground, and the moving member is suspended above the ground. At this time, the sheet metal cabinet is supported by the height adjustment member, and the moving member is removed. Then, the sheet metal cabinet needs to be placed at the target position, and the height of the height adjustment member is further adjusted to make the sheet metal cabinet contact the ground. At this time, the bottom position of the height adjustment member is flush with the bottom of the sheet metal cabinet, or the bottom position of the height adjustment member is lower than the bottom position of the sheet metal cabinet, and then the handling assembly is removed. That is, when the sheet metal cabinet needs to be supported by the height adjustment member, the height of the height adjustment member is higher than the height of the moving member, so that the height adjustment member is in contact with the ground, and the moving member is suspended in the air. When the sheet metal cabinet needs to be moved by the moving member, the height of the height adjustment member is lower than the height of the moving member, so that the height adjustment member is suspended in the air, and the moving member is in contact with the ground.

[0050] In some preferred embodiments, Figure 2 As shown, the height adjustment member 150 includes a support portion 151 and an adjustment portion 152, wherein the first end of the adjustment portion 152 is rotatably connected to the second fixed portion 112, and the second end of the adjustment portion 152 is fixedly connected to the support portion 151. The height of the height adjustment member is adjusted by rotating the adjustment portion 152 in the second fixed portion 112, and the support portion is used to support the sheet metal cabinet 200. For example, when it is necessary to support the sheet metal cabinet, the second end of the adjustment portion 152 is rotated until the support portion 151 is in contact with the ground, and the moving member 120 is suspended from the ground, meeting the need to support the sheet metal cabinet 200 with the height adjustment member; when it is necessary to push the equipment, the second end of the adjustment portion 152 is rotated again until the support portion 151 is suspended from the ground, and the moving member 120 is in contact with the ground. At this time, the moving member slides with the pushing of the equipment, and the equipment is transported. When the device needs to be placed at the target position, the second end of the adjusting portion 152 is rotated until the bottom of the supporting portion 151 is flush with or lower than the bottom of the sheet metal cabinet 200 , so that the sheet metal cabinet 200 is in contact with the ground.

[0051] It should be noted that the type of the height adjusting member is not specifically limited in this embodiment. For example, adjustable feet can be used. The adjustable feet include a fixed base, an externally threaded screw rod, an adjusting block, and an internally threaded cap provided on the adjusting block. Among them, the fixed base is equivalent to the supporting part, and the externally threaded screw rod, the adjusting block, and the internally threaded cap are equivalent to the adjusting part. The fixed seat is connected to the externally threaded screw rod, and the adjusting block moves up and down on the externally threaded screw rod by the cooperation of the internally threaded cap and the externally threaded screw rod. Rotate the externally threaded screw rod to adjust its height.

[0052] On the other hand of the present disclosure, as Figures 1 to 5 shown, a gas reduction device is proposed, which includes a sheet metal cabinet body 200, and a plurality of fixing grooves 211 are provided on the bottom plate 210 of the sheet metal cabinet body 200. Each fixing groove 211 is used to accommodate one handling component 100 in the handling tool given above. That is to say, one handling component 100 is accommodated in one fixing groove 211.

[0053] It should be noted that the position where the fixing groove is set is not specifically limited in this embodiment. For example, the fixing groove can be set at the bottom of the bottom plate, and the corresponding handling component can be installed at the bottom of the bottom plate. More preferably, the fixing groove can be set on the side of the bottom plate, and the corresponding handling component can be installed on the side of the bottom plate, which is convenient for installation, and the installation method is more convenient and flexible.

[0054] It should be further noted that the number of the fixing grooves is not specifically limited in this embodiment. One fixing groove, two fixing grooves or three fixing grooves, etc. can be respectively provided on the front and rear sides of the bottom plate, or one fixing groove, two fixing grooves, etc. can be respectively provided on the left and right sides of it. Of course, the same or different numbers of fixing grooves can also be provided on both the front and rear sides and the left and right sides of it.

[0055] It should also be understood that the size of the fixing groove should at least match the size of the first fixing part in the fixing bracket, so that the first fixing part is embedded in the fixing groove. Of course, part of the second fixing part can also be embedded in the fixing groove to increase the stress area of the handling component, thereby increasing the stability.

[0056] Next, the structure of the handling tool will be further described with specific embodiments:

[0057] Embodiment 1

[0058] As Figures 1 to 5 shown, four fixing grooves 211 are provided on the side of the bottom plate 210 of the sheet metal cabinet body 200. Among them, two fixing grooves 211 are located on the front side of the bottom plate 210, and the other two fixing grooves 211 are located on the rear side of the bottom plate 210.

[0059] As Figures 1 to 4As shown in the figure, the handling tool includes: four handling components 100, two of which are located in two fixing grooves 211 on the front side of the bottom plate 210, and the other two handling components are located in two fixing grooves 211 on the rear side of the bottom plate 210. Each handling component 100 includes a fixing bracket 110, a moving member 120, a first fixing member 130, a second fixing member 140, and a height adjusting member 150.

[0060] In this embodiment, the moving member uses universal wheels, the first fixing member and the second fixing member use bolts, and the height adjusting member uses adjusting feet.

[0061] Furthermore, please continue to refer to Figures 1 to 4 , the fixing bracket 110 includes a first fixing portion 111 and a second fixing portion 112. The first fixing portion 111 is fixed in the fixing groove 211 through the first fixing member 130. The moving member 120 is fixed below the second fixing portion 112 through the second fixing member 140, and a nut is provided on the upper side of the second fixing portion 112. By cooperating the nut with the bolt, the fixing of the moving member 120 is realized.

[0062] Even further, please continue to refer to Figures 1 to 4 , the external threaded screw of the adjusting foot penetrates through the second fixing portion 112. A fixing base is provided at the other end of the external threaded screw, and an internal threaded nut is also sleeved on the external threaded screw. By rotating the internal threaded nut, the external threaded screw is screwed in and out in the second fixing portion, so as to realize the adjustment of the height of the adjusting foot.

[0063] It should be noted that when it is necessary to handle the sheet metal cabinet, the handling components are installed in the corresponding fixing grooves, and the adjusting feet are adjusted to be away from the ground. The universal wheels are in contact with the ground. By pushing the sheet metal cabinet, the universal wheels slide. After reaching the destination, the handling components need to be disassembled from the sheet metal cabinet.

[0064] It further needs to be explained that the handling tool in Embodiment 1 includes four handling components only for exemplary illustration. In other preferred embodiments, three handling components, five handling components, or six handling components, etc. can also be provided. For example, two handling components are provided on the front side of the bottom plate, and one handling component is provided at the middle position on the rear side of the bottom plate; for another example, three handling components are provided on the front side of the bottom plate, and three handling components are provided on the rear side of the bottom plate; for another example, two handling components are respectively provided on the front side and the rear side of the bottom plate, and one handling component is respectively provided on the left side and the right side of the bottom plate, etc., which will not be listed one by one here.

[0065] The present disclosure provides a handling tool for a gas reduction device and a gas reduction device, which have the following beneficial effects compared with the prior art: The handling tool of the present disclosure has a simple structure and a small volume, saving space, meeting the handling requirements of a sheet metal cabinet without changing the height of the sheet metal cabinet body. It does not require manual handling. By only pushing the device, the movement of the device can be achieved, and at the same time, the device can be prevented from tipping over, which has great convenience.

[0066] It can be understood that the above embodiments are merely exemplary embodiments adopted to illustrate the principle of the present disclosure. However, the present disclosure is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present disclosure, and these modifications and improvements are also regarded as the protection scope of the present disclosure.

Claims

1. A handling tool for a gas abatement device, characterized in that, The transport tool comprises: a plurality of transport components, each of which comprises a fixed bracket and a moving part; wherein, When the gas reduction equipment needs to be transported, the fixed bracket is fixed to the bottom plate of the sheet metal cabinet of the gas reduction equipment, and the moving member is fixed below the fixed bracket to suspend the sheet metal cabinet above the ground.

2. The handling tool for a gas abatement device according to claim 1, characterized in that, The plurality of transport components are distributed on at least two opposite sides of the sheet metal cabinet bottom plate.

3. The handling tool for a gas abatement device according to claim 2, wherein The fixing bracket includes a first fixing portion and a second fixing portion; wherein, The first fixing portion is fixed to the side surface of the bottom plate of the sheet metal cabinet, the second fixing portion is bent from the upper end of the first fixing portion to a side away from the sheet metal cabinet, and the moving member is fixed below the second fixing portion.

4. The handling tool for a gas reduction device according to claim 3, characterized in that, The transport assembly further includes a first fixing member and a second fixing member, the first fixing member is provided with a first fixing through hole, and the moving member and the second fixing member are both provided with a second fixing through hole; wherein, The first fixing member is inserted into the first fixing through hole to fix the first fixing portion to the sheet metal cabinet bottom plate, and the second fixing member is inserted into the second fixing through hole to fix the moving member to the second fixing portion.

5. The handling tool for a gas reduction device according to claim 4, characterized in that, The first fixing member and the second fixing member are both bolts.

6. The handling tool for a gas reduction device according to claim 4, wherein The moving part adopts a universal wheel.

7. The handling tool for a gas reduction device according to claim 3, characterized in that, The transport assembly further includes a height adjustment member disposed below the second fixing portion; When the sheet metal cabinet needs to be supported, the height of the height adjustment member is adjusted until the height adjustment member contacts the ground, and the moving member is suspended above the ground; When the sheet metal cabinet needs to be moved, the height of the height adjustment member is adjusted until the height adjustment member is suspended above the ground and the moving member is in contact with the ground; When the sheet metal cabinet needs to be placed on the ground, the height of the height adjusting member is adjusted to make the sheet metal cabinet contact with the ground.

8. The handling tool for a gas abatement device according to claim 7, characterized in that, The height adjustment member includes a supporting portion and an adjusting portion; wherein, The first end of the adjusting portion is rotatably connected to the second fixing portion, and the second end of the adjusting portion is fixedly connected to the supporting portion.

9. The handling tool for a gas abatement device according to claim 8, characterized in that, The height adjustment member adopts an adjustment foot.

10. A gas reduction device, characterized in that, It comprises a sheet metal cabinet, a bottom plate of which is provided with a plurality of fixing grooves, each of which is used for accommodating a transport component of the transport tool according to any one of claims 1 to 9.

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