Wafer glass slide blank surface quality detection device
Through the base, upper cross frame and carrier table structure, combined with multi-axis linear guide rails and clamping devices, the problem of unstable wafer surface detection is solved, and the stability and accuracy of wafer surface quality detection is achieved.
Patent Information
- Application Number
- CN202422239072.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-12
- Publication Date
- 2025-07-08
- Estimated Expiration
- 2034-09-12
AI Technical Summary
The wafer surface detection in the prior art is unstable, and the wafer may move during the load movement, resulting in inaccurate detection lenses, affecting the accuracy and stability of the detection.
The base, upper cross frame and carrier table structure are adopted, combined with multi-axis linear guide rails and clamping structures to achieve stable clamping and flexible movement of the wafer, ensuring the accurate positioning of optical detection instruments and the expansion of the detection range.
The stability and accuracy of wafer surface quality detection are achieved, the wafer movement during the loading process is avoided, and the detection flexibility and speed are improved.
Smart Images
Figure CN223078210U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of quality inspection of wafer glass carrier blanks, and particularly relates to a surface quality detection device for wafer glass carrier blanks. Background Art
[0002] The wafer surface quality detection device detects physical defects and pattern defects on the wafer and obtains the position coordinates of the defects. The defects can be divided into random defects and equipment defects. Random defects are mainly caused by particles attached to the wafer surface, so their positions cannot be predicted. The main function of the wafer defect detection device is to detect defects on the wafer and find their positions.
[0003] In the specification of a prior art (publication number CN214542145U) of a wafer surface quality detection device, it is mentioned that "a transverse moving device is arranged at the left position of the platform main body, a moving device handle is arranged at the left position of the transverse moving device, a platform handle is arranged at the left position of the platform main body, a knob is arranged at the right position of the platform main body, a placing platform is arranged at the upper position of the transverse moving device, a vacuum adsorption table is arranged at the upper position of the placing platform, a wafer is arranged at the upper position of the vacuum adsorption table, and an optical detection lens is arranged at the upper position of the wafer". However, the wafer surface detection in the prior art is not stable. The wafer part may move during the transportation and movement process, resulting in misalignment under the detection lens, affecting the accuracy of detection, and it is not stable, accurate and practical. Summary of the Utility Model
[0004] In order to overcome the defects existing in the prior art, a surface quality detection device for wafer glass carrier blanks is provided to solve the problems that the wafer surface detection in the prior art is not stable, the wafer part may move during the transportation and movement process, resulting in misalignment under the detection lens, affecting the accuracy of detection, and it is not stable, accurate and practical.
[0005] To achieve the above object, a surface quality detection device for wafer glass carrier blanks is provided, which includes a base, an upper cross frame and a loading table. A lower groove is formed in the middle of the upper end surface of the base, and a first Y-axis linear guide rail is arranged in the lower groove. A lower sliding block is arranged on the lower end surface of the loading table, and the lower sliding block is slidably connected to the first Y-axis linear guide rail. An upper cross frame is movably arranged above the base, and an upper hanging frame is arranged on the lower end surface of the upper cross frame. An upper fixing sleeve is fixed under the upper hanging frame, and the upper fixing sleeve is sleeved outside the upper part of the optical detector.
[0006] Furthermore, support frames are arranged on both the left and right sides of the base, side fixing plates are fixed on the upper end surfaces of the support frames, and a first Z-axis linear guide rail is arranged on the upper part of the side fixing plates.
[0007] Furthermore, a first X-axis linear guide rail is provided in the middle of the upper cross frame, and an upper slider is slidably connected to the first X-axis linear guide rail. Side sliders are provided at both the left and right ends of the upper cross frame, and the side sliders are slidably connected to the first Z-axis linear guide rails on the same side.
[0008] Furthermore, a mounting base is provided at the lower part of the optical detector, and a detection head is mounted under the mounting base.
[0009] Furthermore, a cushion layer is provided in the middle of the upper end surface of the loading table. The cushion layer is made of silicone rubber. A left clamping structure is provided at the left part of the upper end surface of the loading table, and a right clamping structure is provided at the right part of the upper end surface of the loading table. At the same time, the left clamping structure and the right clamping structure are symmetric about the center line of the loading table.
[0010] Furthermore, side fixing blocks are provided on the right clamping structure. Multiple groups of side telescopic cylinders are sleeved in the side fixing blocks. The front ends of the side telescopic cylinders are fixed on the outer side surface of the U-shaped clamping plate. Multiple groups of springs are provided on the inner side surface of the U-shaped clamping plate, and the front ends of the springs are fixed on the outer side surface of the inner pressing piece.
[0011] The beneficial effects of the present utility model are as follows:
[0012] 1. In the present utility model, through the sliding movement of the upper cross frame on the first X-axis linear guide rail and the side sliders on the first Z-axis linear guide rails, it is convenient to drive the upper cross frame to move horizontally and vertically, which is convenient for flexibly detecting the surface quality of the wafer glass carrier blank, and is more flexible and practical.
[0013] 2. In the present utility model, the optical detector will move synchronously with the upper cross frame, which is convenient for driving the lower mounting base and the detection head to accurately detect the position of the wafer glass carrier blank, and is more convenient and fast.
[0014] 3. The loading table of the present utility model can move back and forth on the first Y-axis linear guide rail, which is convenient for feeding in and out for detection. Moreover, the setting of the cushion layer will play an anti-slip effect. At the same time, the left clamping structure and the right clamping structure provided on the left and right parts of the upper end surface of the loading table can stably clamp the wafer glass carrier blank placed in the middle, so that its surface remains stable during the detection process to ensure the stability and accuracy of the detection results. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 is the front view schematic diagram of the embodiment of the present utility model;
[0016] Figure 2 is the top view schematic diagram of the base of the embodiment of the present utility model;
[0017] Figure 3 is the structural schematic diagram of the upper moving cross frame of the embodiment of the present utility model;
[0018] Figure 4 This is the effect diagram of the material loading table of the embodiment of the present utility model.
[0019] In the figure: 1, base; 10, support frame; 11, side fixed plate; 12, first Z-axis linear guide rail; 13, lower groove; 14, first Y-axis linear guide rail; 2, upper cross frame; 20, upper slider; 21, side slider; 22, upper hanging frame; 23, upper fixed sleeve; 24, optical detector; 25, mounting seat; 26, detection head; 27, first X-axis linear guide rail; 3, material loading table; 30, lower slider; 31, cushion layer; 32, left clamping structure; 33, right clamping structure; 34, side telescopic cylinder; 35, side fixed block; 36, U-shaped clamping plate; 37, spring; 38, inner extrusion sheet. Specific embodiments
[0020] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. The specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model. Specific details such as specific system structures and technologies are proposed to more thoroughly understand the embodiments of the present utility model. The described embodiments are part of the embodiments of the present disclosure, but not all of the embodiments. However, those skilled in the art should understand that the present utility model can also be implemented in other embodiments without these specific details. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative efforts fall within the scope of protection of the present disclosure.
[0021] The following will describe the specific embodiments of the present utility model in detail with reference to the accompanying drawings.
[0022] Figure 1 This is the front view schematic diagram of the embodiment of the present utility model, Figure 2 This is the top view schematic diagram of the base of the embodiment of the present utility model, Figure 3 This is the structural schematic diagram of the upper moving cross frame of the embodiment of the present utility model and Figure 4 This is the effect diagram of the material loading table of the embodiment of the present utility model.
[0023] Refer to Figures 1 to 4As shown in the figure, the present utility model provides a surface quality detection device for a wafer glass carrier blank, including a base 1, an upper cross frame 2 and a loading table 3. A lower groove 13 is formed in the middle of the upper end surface of the base 1, and a first Y-axis linear guide rail 14 is arranged in the lower groove 13. A lower slider 30 is arranged on the lower end surface of the loading table 3, and the lower slider 30 is slidably connected to the first Y-axis linear guide rail 14. An upper cross frame 2 is movably arranged above the base 1, and an upper hanging frame 22 is arranged on the lower end surface of the upper cross frame 2. An upper fixing sleeve 23 is fixed under the upper hanging frame 22, and the upper fixing sleeve 23 is sleeved outside the upper part of the optical detector 24.
[0024] In this embodiment, support frames 10 are arranged on both the left and right sides of the base 1, a side fixing plate 11 is fixed on the upper end surface of the support frame 10, and a first Z-axis linear guide rail 12 is arranged on the upper part of the side fixing plate 11; a first X-axis linear guide rail 27 is arranged in the middle of the upper cross frame 2, an upper slider 20 is slidably connected to the first X-axis linear guide rail 27, side sliders 21 are arranged at both the left and right ends of the upper cross frame 2, and the side sliders 21 are slidably connected to the first Z-axis linear guide rail 12 on the same side.
[0025] As a preferred embodiment, the present utility model slides the upper cross frame 2 on the first X-axis linear guide rail 27 and the side sliders 21 on the first Z-axis linear guide rail 12, which is convenient to drive the upper cross frame 2 to move horizontally and vertically, so as to conveniently and flexibly detect the surface quality of the wafer glass carrier blank, and is more flexible and practical.
[0026] In this embodiment, an installation seat 25 is arranged under the optical detector 24, and a detection head 26 is installed under the installation seat 25.
[0027] As a preferred embodiment, the optical detector 24 in the present utility model moves synchronously with the upper cross frame 2, which is convenient to drive the following installation seat 25 and detection head 26 to accurately detect the position of the wafer glass carrier blank, and is more convenient and fast.
[0028] In this embodiment, a cushion layer 31 is arranged in the middle of the upper end surface of the loading table 3. The cushion layer 31 is made of silicone rubber. A left clamping structure 32 is arranged on the left part of the upper end surface of the loading table 3, and a right clamping structure 33 is arranged on the right part of the upper end surface of the loading table 3. At the same time, the left clamping structure 32 and the right clamping structure 33 are symmetric about the center line of the loading table 3; a side fixing block 35 is arranged on the right clamping structure 33, multiple groups of side telescopic cylinders 34 are sleeved in the side fixing block 35, the front end of the side telescopic cylinder 34 is fixed on the outer side surface of the U-shaped clamping plate 36, multiple groups of springs 37 are arranged on the inner side surface of the U-shaped clamping plate 36, and the front end of the spring 37 is fixed on the outer side surface of the inner pressing piece 38.
[0029] As a preferred embodiment, the loading platform 3 of the present utility model can move back and forth on the first Y-axis linear guide rail 14, which is convenient for feeding in and out for detection. Moreover, the setting of the cushion layer 31 will have an anti-slip effect. At the same time, the left clamping structure 32 and the right clamping structure 33 provided on the left and right parts of the upper end surface of the loading platform 3 can stably clamp the wafer glass carrier blank placed in the middle, so that its surface remains stable during the detection process to ensure the stability and accuracy of the detection results.
[0030] The present utility model can effectively solve the problem that the surface detection of wafers in the prior art is not stable, and the wafer parts may move during the loading and moving process, resulting in misalignment under the detection lens, affecting the accuracy of detection, and not being stable, accurate and practical. The present utility model is convenient and flexible for loading and transporting the wafer glass carrier blank in and out, and keeps the wafer glass carrier blank safe and stable during the transportation process to avoid movement. At the same time, the optical detection instrument can move flexibly, increasing the detection range, and the detection is more stable, accurate and fast.
[0031] The above embodiments are used to explain the present utility model, rather than limiting the utility model. Any modifications and changes made to the present utility model within the spirit of the present utility model and the scope of the claimed rights should be included in the protection scope of the present utility model.
Claims
1. A surface quality detection device for a wafer glass carrier blank, characterized in that: It includes a base (1), an upper cross-frame (2) and a loading table (3). A lower groove (13) is formed in the middle of the upper end surface of the base (1), and a first Y-axis linear guide rail (14) is arranged in the lower groove (13). A lower slider (30) is arranged on the lower end surface of the loading table (3), and the lower slider (30) is slidably connected to the first Y-axis linear guide rail (14). An upper cross-frame (2) is movably arranged above the base (1), and an upper hanging frame (22) is arranged on the lower end surface of the upper cross-frame (2). An upper fixing sleeve (23) is fixed under the upper hanging frame (22), and the upper fixing sleeve (23) is sleeved outside the upper part of the optical detector (24).
2. The surface quality detection device for a wafer glass carrier blank according to claim 1, characterized in that, Support frames (10) are arranged on both the left and right sides of the base (1), a side fixing plate (11) is fixed on the upper end surface of the support frame (10), and a first Z-axis linear guide rail (12) is arranged on the upper part of the side fixing plate (11).
3. The surface quality detection device for a wafer glass carrier blank according to claim 1, characterized in that, A first X-axis linear guide rail (27) is arranged in the middle of the upper cross-frame (2), an upper slider (20) is slidably connected to the first X-axis linear guide rail (27), side sliders (21) are arranged at both the left and right ends of the upper cross-frame (2), and the side sliders (21) are slidably connected to the first Z-axis linear guide rail (12) on the same side.
4. A surface quality detection device for a wafer glass carrier blank according to claim 1, characterized in that, An installation seat (25) is arranged at the lower part of the optical detector (24), and a detection head (26) is installed under the installation seat (25).
5. The surface quality detection device for a wafer glass carrier blank according to claim 1, wherein, A cushion layer (31) is arranged in the middle of the upper end surface of the loading table (3), the cushion layer (31) is made of silicone rubber. A left clamping structure (32) is arranged on the left part of the upper end surface of the loading table (3), a right clamping structure (33) is arranged on the right part of the upper end surface of the loading table (3), and the left clamping structure (32) and the right clamping structure (33) are symmetric about the center line of the loading table (3).
6. The surface quality detection device for a wafer glass carrier blank according to claim 5, wherein, A side fixing block (35) is arranged on the right clamping structure (33), multiple groups of side expansion cylinders (34) are sleeved in the side fixing block (35), the front ends of the side expansion cylinders (34) are fixed on the outer side surface of the U-shaped clamping plate (36), multiple groups of springs (37) are arranged on the inner side surface of the U-shaped clamping plate (36), and the front ends of the springs (37) are fixed on the outer side surface of the inner extrusion sheet (38).