Wafer film pasting table device with deviation rectifying function

Abstract

The utility model relates to a wafer film pasting table device with a deviation rectifying function, which comprises a film pasting mechanism and a film pasting carrying table mechanism, and the front end of the bottom of the film pasting mechanism is provided with the film pasting carrying table mechanism; the film pasting carrying table mechanism sequentially comprises a deviation rectifying executing mechanism and a deviation rectifying transverse moving mechanism from top to bottom. According to the utility model, whether the film deviates or not in the moving process of the film on the roll shaft can be monitored in real time according to the detection sensor; according to the utility model, the film pasting table deviation rectifying mechanism is used for carrying out deviation rectifying motion, so that each film can be pasted at proper positions of a wafer and a steel ring.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a wafer film attaching table device with deviation correction. Background Art

[0002] After a large number of searches, it is found that the existing Chinese patent publication number is CN218594681U, which discloses a film attaching device for semiconductor wafer film covering, including a film device support, a first pressing and feeding roller unit, a second pressing and feeding roller unit, a first turning component, a second turning component, a third turning component, a fourth turning component, a floating roller one component, a film feeding roller component, a floating roller two component, a film attaching base support one, a film attaching base support two, a film receiving roller component, a film attaching detection component, a film taking roller component and a film taking auxiliary knife component. The purpose of the utility model is to provide a film attaching device for semiconductor wafer film covering to solve the problem of easy generation of bubbles in the process of film attaching to the wafer in the prior art, facilitate the subsequent processing procedures, and at the same time can realize automatic film attaching, saving time and effort and improving production efficiency.

[0003] In the process of film attaching to the wafer, the film passes through each roller of the film cutting mechanism, and a continuous circle is cut on the film by the upper roller knife of the film cutting mechanism. Then, it is conveyed to the film attaching mechanism by each roller. Due to a certain error in the levelness of each roller, as the film is continuously conveyed, it will slowly shift to one end on the roller shaft. Then, the film is attached to the wafer and the steel ring on the film attaching table by the roller knife on the film attaching mechanism. Due to the above deviation, the attached film will have a deviation and cannot meet the use of the subsequent process. Therefore, the above defects need to be improved.

[0004] In view of the above defects, the designer actively conducts research and innovation to create a wafer film attaching table device with deviation correction, making it more valuable in industry. Summary of the Utility Model

[0005] To solve any of the above technical problems, the purpose of the utility model is to provide a wafer film attaching table device with deviation correction.

[0006] To achieve the above purpose, the utility model adopts the following technical scheme:

[0007] The wafer film attaching table device with deviation correction includes a film attaching mechanism and a film attaching stage mechanism, and a film attaching stage mechanism is arranged at the front end of the bottom of the film attaching mechanism;

[0008] The film attaching stage mechanism sequentially includes a deviation correction execution mechanism and a deviation correction transverse movement mechanism from top to bottom;

[0009] The deviation rectification actuator sequentially includes a film laminating table bottom plate, an actuating sliding plate, and a film laminating table from bottom to top. An actuating motor mounting groove is provided on the right side of the actuating sliding plate. An actuating screw motor is mounted on the film laminating table bottom plate below the actuating motor mounting groove through an actuating motor fixing plate. The driving end on the left side of the actuating screw motor drives the left actuating movable plate to move in the left-right direction. The actuating movable plate is connected to the left side inside the actuating motor mounting groove. The actuating sliding plate is connected to the upper film laminating table through a plurality of actuating side plate assemblies;

[0010] The deviation rectification transverse movement mechanism includes a transverse movement screw motor, a screw rod, and a bottom support plate. The transverse movement screw motor is mounted at the rear end of the bottom support plate through a transverse movement motor support seat. The screw rod is mounted on the bottom support plate along the front-rear direction through a screw rod rear support seat and a screw rod front support seat. The driving end at the front end of the transverse movement screw motor is connected to the screw rod through a coupling. The screw rod is connected to the upper film laminating table bottom plate through a screw rod slider.

[0011] As a further improvement of the present utility model, a film laminating pressing mechanism is installed at the film outlet near the front end of the film laminating mechanism. The film laminating pressing mechanism includes a pressing baffle, a hand-tightening shaft connecting plate, a cylinder support plate, a pressing cylinder, and a pressing plate. The right side of the pressing baffle is mounted on the film laminating mechanism through the hand-tightening shaft connecting plate. A cylinder support plate is provided in front of the pressing baffle. The right side of the cylinder support plate is mounted on the hand-tightening shaft connecting plate. A pressing cylinder is mounted at the left bottom of the cylinder support plate. The driving end at the rear end of the pressing cylinder drives the pressing plate to move in the front-rear direction through a cylinder connecting plate, and the pressing plate is located in front of the pressing baffle.

[0012] As a further improvement of the present utility model, a reflector is mounted on the left side of the pressing baffle through a reflection support plate. A pressing sensor support plate one is provided below the cylinder support plate. The right side of the pressing sensor support plate one is connected to the upper cylinder support plate through an intermediate support plate. A pressing sensor is mounted on the left side of the pressing sensor support plate one through a pressing sensor support plate two.

[0013] As a further improvement of the present utility model, a hand-tightening shaft is mounted on the top of the hand-tightening shaft connecting plate. The right side of the hand-tightening shaft is mounted on the film laminating mechanism through a fixing block.

[0014] As a further improvement of the present utility model, a detection sensor is sequentially mounted on the film laminating mechanism on the front left side of the film laminating pressing mechanism through a detection sensor support plate one and a detection sensor support plate two.

[0015] As a further improvement of the present utility model, an actuating guide rail distributed in the left-right direction is mounted on the film laminating table bottom plate below the actuating sliding plate. The bottom of the actuating sliding plate is connected to the lower actuating guide rail through a plurality of actuating sliders.

[0016] As a further improvement of the present utility model, the driving end on the left side of the actuating lead screw motor is connected to the left actuating movable plate through an actuating adjusting plate.

[0017] As a further improvement of the present utility model, the actuating side plate assembly sequentially includes an actuating fixed side plate and an actuating movable side plate from outside to inside. A lifting motor installed at the bottom of the film pasting table bottom plate drives the upper film pasting table to move in the vertical direction. An actuating vertical guide rail assembly distributed along the vertical direction is installed inside the actuating fixed side plate. The actuating movable side plate at the bottom of the film pasting table is connected to the outer actuating fixed side plate through the actuating vertical guide rail assembly.

[0018] As a further improvement of the present utility model, transverse guide rails distributed along the front-rear direction are provided below both the left and right sides of the film table bottom plate. The transverse guide rails are installed on the guide rail support plates. The bottom parts on both the left and right sides of the film table bottom plate are respectively connected to the lower transverse guide rails through a plurality of transverse sliders.

[0019] By means of the above solutions, the present utility model has at least the following advantages:

[0020] The present utility model can monitor in real time whether the film deviates during the movement on the roller shaft according to the detection sensor;

[0021] The present utility model performs a rectifying movement through the rectifying mechanism of the film pasting table to ensure that each film is pasted at a suitable position on the wafer and the steel ring;

[0022] The present utility model provides a transverse movement mechanism for the film pasting table, enabling the film to move from one end of the steel ring to the other end, ensuring that the film is pasted on the film pasting table, and guaranteeing the next process.

[0023] The above description is only an overview of the technical solution of the present utility model. In order to be able to understand the technical means of the present utility model more clearly and implement it in accordance with the content of the description, the following takes the preferred embodiments of the present utility model and combines with the drawings to elaborate in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required to be used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present utility model, and therefore should not be regarded as a limitation of the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0025] Figure 1 is a schematic structural diagram of a wafer film pasting table device with rectification of the present utility model;

[0026] Figure 2 is Figure 1 a schematic structural diagram of the film pasting and pressing mechanism in

[0027] Figure 3 is Figure 1 a schematic structural diagram of the deviation rectification actuator in

[0028] Figure 4 is Figure 1 a schematic structural diagram of the deviation rectification and transverse movement mechanism in

[0029] Among them, the meanings of the reference numerals in the figures are as follows.

[0030] Film pasting mechanism 1, film pasting pressing mechanism 2, film 3, deviation rectification actuator 4, deviation rectification and transverse movement mechanism 5, detection sensor support plate 1 6, detection sensor support plate 2 7, detection sensor 8, reflection support plate 201, reflection plate 202, pressing baffle 203, cylinder connection plate 204, fixed block 205, hand-tightening shaft connection plate 206, intermediate support plate 207, hand-tightening shaft 208, pressing sensor support plate 1 209, cylinder support plate 210, pressing sensor support plate 2 211, pressing sensor 212, pressing cylinder 213, pressing plate 214, film pasting table bottom plate 401, execution guide rail 402, execution slider 403, execution sliding plate 404, execution movable plate 405, execution adjustment plate 406, execution motor fixing plate 407, execution lead screw motor 408, transverse movement lead screw motor 501, transverse movement motor support seat 502, transverse movement guide rail 503, coupling 504, lead screw rear support seat 505, lead screw 506, transverse movement slider 507, bottom support plate 508, lead screw front support seat 509, guide rail support plate 510. Specific embodiments

[0031] The following will further describe in detail the specific embodiments of the present invention in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present invention, but are not used to limit the scope of the present invention.

[0032] In order to enable those skilled in the art of this technology to better understand the solution of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Usually, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the detailed description of the embodiments of the present invention provided in the drawings below is not intended to limit the scope of the claimed present invention, but only represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present invention.

[0033] Such as Figures 1 to 4As shown in the figure, a wafer film pasting table device with deviation correction includes a film pasting mechanism 1 and a film pasting stage mechanism. The film pasting stage mechanism is arranged at the front end of the bottom of the film pasting mechanism 1. Among them, the film pasting mechanism 1 in this application is similar in structure and function to the technical solution disclosed in the "Film Pasting Device for Semiconductor Wafer Film Coating" with the patent publication number CN218594681U. Therefore, the film pasting mechanism 1 will not be described in detail in this article.

[0034] I. The film pasting stage mechanism successively includes a deviation correction execution mechanism 4 and a deviation correction transverse movement mechanism 5 from top to bottom.

[0035] 1. The deviation correction execution mechanism 4 successively includes a film pasting table bottom plate 401, an execution sliding plate 404, and a film pasting table from bottom to top. An execution motor installation groove is opened on the right side of the execution sliding plate 404. An execution screw motor 408 is installed on the film pasting table bottom plate 401 below the execution motor installation groove through an execution motor fixing plate 407. The driving end on the left side of the execution screw motor 408 drives the left execution movable plate 405 to move in the left-right direction. The execution movable plate 405 is connected to the left side inside the execution motor installation groove. The execution sliding plate 404 is connected to the upper film pasting table through a plurality of execution side plate assemblies.

[0036] An execution guide rail 402 distributed in the left-right direction is installed on the film pasting table bottom plate 401 below the execution sliding plate 404. The bottom of the execution sliding plate 404 is connected to the lower execution guide rail 402 through a plurality of execution sliders 403.

[0037] The driving end on the left side of the execution screw motor 408 is connected to the left execution movable plate 405 through an execution adjustment plate 406.

[0038] The execution side plate assembly successively includes an execution fixed side plate and an execution movable side plate from outside to inside. The lifting motor installed at the bottom of the film pasting table bottom plate 401 drives the upper film pasting table to move in the vertical direction. An execution vertical guide rail assembly distributed in the vertical direction is installed inside the execution fixed side plate. The execution movable side plate at the bottom of the film pasting table is connected to the outer execution fixed side plate through the execution vertical guide rail assembly.

[0039] Transverse guide rails 503 distributed in the front-rear direction are arranged below both the left and right sides of the film table bottom plate 401. The transverse guide rails 503 are installed on the guide rail support plate 510. The bottom parts of both the left and right sides of the film table bottom plate 401 are respectively connected to the lower transverse guide rails 503 through a plurality of transverse sliders 507.

[0040] 2. The deviation rectifying and transverse shifting mechanism 5 includes a transverse shifting lead screw motor 501, a lead screw 506, and a bottom support plate 508. The transverse shifting lead screw motor 501 is installed at the rear end of the bottom support plate 508 through a transverse shifting motor support base 502. The lead screw 506 is installed on the bottom support plate 508 along the front-rear direction through a lead screw rear support base 505 and a lead screw front support base 509. The driving end at the front end of the transverse shifting lead screw motor 501 is connected to the lead screw 506 through a coupling 504. The lead screw 506 is connected to the upper film pasting table bottom plate 401 through a lead screw slider.

[0041] 2. A film pasting pressing mechanism 2 is installed at the film outlet near the front end on the film pasting mechanism 1.

[0042] 1. The film pasting pressing mechanism 2 includes a pressing baffle 203, a hand-tightening shaft connecting plate 206, a cylinder support plate 210, a pressing cylinder 213, and a pressing plate 214. The right side of the pressing baffle 203 is installed on the film pasting mechanism 1 through the hand-tightening shaft connecting plate 206. A cylinder support plate 210 is arranged in front of the pressing baffle 203. The right side of the cylinder support plate 210 is installed on the hand-tightening shaft connecting plate 206. A pressing cylinder 213 is installed at the left bottom of the cylinder support plate 210. The driving end at the rear of the pressing cylinder 213 drives the pressing plate 214 to move in the front-rear direction through a cylinder connecting plate 202, and the pressing plate 214 is located in front of the pressing baffle 203.

[0043] 2. A reflector 202 is installed on the left side of the pressing baffle 203 through a reflection support plate 201. A first pressing sensor support plate 209 is arranged below the cylinder support plate 210. The right side of the first pressing sensor support plate 209 is connected to the upper cylinder support plate 210 through an intermediate support plate 207. A pressing sensor 212 is installed on the left side of the first pressing sensor support plate 209 through a second pressing sensor support plate 211.

[0044] 3. A hand-tightening shaft 208 is installed on the top of the hand-tightening shaft connecting plate 206. The right side of the hand-tightening shaft 208 is installed on the film pasting mechanism 1 through a fixing block 205.

[0045] 3. A detection sensor 8 is successively installed on the film pasting mechanism 1 on the left front of the film pasting pressing mechanism 2 through a first detection sensor support plate 6 and a second detection sensor support plate 7.

[0046] A deviation rectifying actuator 4 is installed on the deviation rectifying and transverse shifting mechanism 5. The film pasting mechanism 1 is also provided on the deviation rectifying and transverse shifting mechanism 5. A film 3 is also installed between the respective transmission rollers of the film pasting mechanism 1 for film transmission. A first detection sensor support plate 6 is installed on one side of the film pasting mechanism 1. A second detection sensor support plate 7 is installed on the first detection sensor support plate 6. A detection sensor 8 is installed on the second detection sensor support plate 7. A film pasting pressing mechanism 2 is installed on the other side of the film pasting mechanism 1.

[0047] Brief description of the working process of the present utility model:

[0048] During the process of the film 3 being transferred between the rollers of the film sticking mechanism 1, the detection sensor 8 on the detection sensor support plate two 7 on one side of the film sticking mechanism 1 can monitor in real time whether the boundary of the film 3 is offset. When the film 3 is not offset, the deviation rectifying transverse movement mechanism 5 drives the deviation rectifying execution mechanism 4 to move, completing the film sticking on the wafer and the steel ring; when the detection sensor 8 monitors that the boundary of the film 3 is offset, the execution lead screw motor 408 drives the execution movable plate 405 to move, and the execution movable plate 405 drives the execution sliding plate 404 to move, causing the entire upper film sticking table to move, compensating for the deviation of the film 3, and ensuring the uniformity of the film sticking on the circle and the steel ring.

[0049] The present utility model provides a wafer film sticking table device with deviation rectification. After the film on the film sticking mechanism is stuck on the wafer carrier table, it is judged whether the film is deviated according to the information monitored by the sensor, and the wafer film sticking table is finely adjusted according to the feedback structure to ensure that the film is accurately stuck on the steel ring and the wafer without deviation, ensuring the normal use of subsequent processes.

[0050] It can monitor in real time whether the film is offset during the movement on the roller shaft according to the detection sensor; perform deviation rectification movement through the deviation rectification mechanism of the film sticking table to ensure that each film is stuck in the appropriate position on the wafer and the steel ring; the transverse movement mechanism of the film sticking table moves the film from one end of the steel ring to the other end to ensure that the film is completely stuck on the film sticking table.

[0051] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, the meaning of "a plurality" is two or more.

[0052] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection, it can be a mechanical connection, an electrical connection, it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood through specific circumstances.

[0053] The above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. It should be pointed out that for those of ordinary skill in the art, without departing from the technical principle of the present utility model, several improvements and modifications can be made, and these improvements and modifications should also be regarded as the protection scope of the present utility model.

Claims

1. Wafer film sticking table device with deviation correction, comprising a film sticking mechanism (1) and a film sticking carrier table mechanism, and a film sticking carrier table mechanism is arranged at the front end of the bottom of the film sticking mechanism (1); it is characterized in that: The film pasting stage mechanism successively includes a deviation rectification execution mechanism (4) and a deviation rectification lateral movement mechanism (5) from top to bottom; The deviation rectification execution mechanism (4) successively includes a film pasting stage bottom plate (401), an execution sliding plate (404) and a film pasting stage from bottom to top. An execution motor installation groove is formed in the right side of the execution sliding plate (404). An execution lead screw motor (408) is installed on the film pasting stage bottom plate (401) below the execution motor installation groove through an execution motor fixing plate (407). The driving end on the left side of the execution lead screw motor (408) drives the left execution movable plate (405) to move in the left-right direction. The execution movable plate (405) is connected to the left side in the execution motor installation groove. The execution sliding plate (404) is connected to the upper film pasting stage through a plurality of execution side plate assemblies; The deviation rectification lateral movement mechanism (5) includes a lateral movement lead screw motor (501), a lead screw (506) and a bottom support plate (508). The lateral movement lead screw motor (501) is installed at the rear end of the bottom support plate (508) through a lateral movement motor support seat (502). The lead screw (506) is installed on the bottom support plate (508) along the front-rear direction through a lead screw rear support seat (505) and a lead screw front support seat (509). The driving end at the front end of the lateral movement lead screw motor (501) is connected to the lead screw (506) through a coupling (504). The lead screw (506) is connected to the upper film pasting stage bottom plate (401) through a lead screw slider.

2. The wafer film attaching table device with deviation correction as described in claim 1, wherein A film pasting pressing mechanism (2) is installed at the film outlet near the front end on the film pasting mechanism (1). The film pasting pressing mechanism (2) includes a pressing baffle (203), a hand-tightening shaft connecting plate (206), a cylinder support plate (210), a pressing cylinder (213) and a pressing plate (214). The right side of the pressing baffle (203) is installed on the film pasting mechanism (1) through the hand-tightening shaft connecting plate (206). A cylinder support plate (210) is arranged in front of the pressing baffle (203). The right side of the cylinder support plate (210) is installed on the hand-tightening shaft connecting plate (206). A pressing cylinder (213) is installed at the left bottom of the cylinder support plate (210). The driving end at the rear end of the pressing cylinder (213) drives the pressing plate (214) to move in the front-rear direction through a cylinder connecting plate (204), and the pressing plate (214) is located in front of the pressing baffle (203).

3. The wafer film laminating table device with deviation rectification according to claim 2, wherein, A reflector (202) is installed on the left side of the pressing baffle (203) through a reflection support plate (201). A pressing sensor support plate one (209) is arranged below the cylinder support plate (210). The right side of the pressing sensor support plate one (209) is connected to the upper cylinder support plate (210) through an intermediate support plate (207). A pressing sensor (212) is installed on the left side of the pressing sensor support plate one (209) through a pressing sensor support plate two (211).

4. The wafer film laminating table device with deviation correction as described in claim 2, wherein, A hand-twisting shaft (208) is installed on the top of the hand-twisting shaft connecting plate (206), and the right side of the hand-twisting shaft (208) is installed on the film pasting mechanism (1) through a fixing block (205).

5. The wafer film laminating table device with deviation rectification according to claim 2, characterized in that, A detection sensor (8) is sequentially installed on the film pasting mechanism (1) on the front left side of the film pasting pressing mechanism (2) through a detection sensor support plate one (6) and a detection sensor support plate two (7).

6. The wafer film attaching table device with deviation rectification as described in claim 1, characterized in that, An execution guide rail (402) distributed in the left-right direction is installed on the film pasting table bottom plate (401) below the execution sliding plate (404), and the bottom of the execution sliding plate (404) is connected to the lower execution guide rail (402) through a plurality of execution sliders (403).

7. The wafer film sticking table device with deviation correction according to claim 1, characterized in that, The driving end on the left side of the execution screw motor (408) is connected to the execution movable plate (405) on the left side through an execution adjustment plate (406).

8. The wafer film laminating table device with deviation correction according to claim 1, wherein, The execution side plate assembly sequentially includes an execution fixed side plate and an execution movable side plate from the outside to the inside. A lifting motor installed at the bottom of the film pasting table bottom plate (401) drives the upper film pasting table to move in the vertical direction. An execution vertical guide rail assembly distributed in the vertical direction is installed inside the execution fixed side plate, and the execution movable side plate at the bottom of the film pasting table is connected to the outer execution fixed side plate through the execution vertical guide rail assembly.

9. The wafer film attaching table device with deviation rectification according to claim 1, wherein, Transverse guide rails (503) distributed in the front-rear direction are arranged below both the left and right sides of the film table bottom plate (401). The transverse guide rails (503) are installed on guide rail support plates (510), and the bottom parts of both the left and right sides of the film table bottom plate (401) are respectively connected to the lower transverse guide rails (503) through a plurality of transverse sliders (507).

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