Silicon wafer inserting machine with blowing device
By setting up a blowing device and a blowing port in the silicon wafer inserting machine, the problem of adhesion damage during the insertion process is solved, effective separation and protection of the silicon wafer is achieved, and damage and contamination of the silicon wafer is avoided.
Patent Information
- Application Number
- CN202422128131.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-30
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-08-30
AI Technical Summary
When the existing silicon wafer insertion machine inserts the silicon wafer into the loading box, the silicon wafers are prone to stick together, causing multiple silicon wafers to move together when the suction cup is adsorbed, causing damage.
在插片机中设置吹气装置,通过吹气装置和吹气口对硅片之间进行吹气,利用过滤网过滤空气,避免硅片粘附并在取料时保护硅片不受损坏。
Effectively separate silicon wafers, prevent multiple silicon wafers from moving together, protect the silicon wafer from damage, and filter air through a filter to prevent silicon wafer contamination.
Smart Images
Figure CN223087092U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon wafer inserters, in particular to a silicon wafer inserter with a blowing device. Background Technique
[0002] The processing of single-crystal silicon wafers includes first squaring a single-crystal silicon rod and then slicing it. The processing of polycrystalline silicon wafers includes cutting a polycrystalline silicon ingot and then slicing it. The processing of quasi-monocrystalline silicon wafers includes cutting a quasi-monocrystalline silicon ingot and then slicing it. During the production process of silicon wafers, it is necessary to load the silicon wafers into a loading box one by one, and an inserter is required to perform this task. When the existing silicon wafer inserter inserts the silicon wafers into the loading box, it is necessary to convey the silicon wafers in the storage box to the transmission device. The silicon wafers are stacked in the storage box, and a picking device is used to adsorb and place the silicon wafers on the transmission device. Most of the existing silicon wafers are relatively thin, and it is easy for the silicon wafers to adhere to each other when stacked together. When the suction cup adsorbs the silicon wafers, the silicon wafers are likely to move upward together with the silicon wafers below, which is likely to cause damage to the silicon wafers. Therefore, we propose a silicon wafer inserter with a blowing device. Content of the Utility Model
[0003] The purpose of the utility model is to provide a silicon wafer inserter with a blowing device to solve the problems raised in the above background technique.
[0004] To achieve the above purpose, the utility model provides the following technical solution: A silicon wafer inserter with a blowing device, including a workbench, with four groups of support legs provided at the bottom of the workbench. A transmission device and an inserter are provided on the top of the workbench. A controller is provided on the front side wall of the inserter. A storage box is provided on the top of the workbench. A hydraulic rod is provided at the inner bottom of the storage box. A lifting plate is provided at one end of the hydraulic rod. A blowing port is opened on the right side wall of the storage box. A blowing device is provided on the top of the workbench. The blowing device includes a filter box provided on the top of the workbench. An exhaust fan penetrates through the right side wall of the filter box. A filter screen is provided on the inner side wall of the filter box. An air pump is provided on the top of the filter box. A delivery pipe is provided at one end of the air pump. An installation plate is provided on the right side wall of the storage box. A first electric telescopic rod is provided on the inner right side wall of the installation plate. A blowing disc matching the blowing port is provided at one end of the first electric telescopic rod. One end of the delivery pipe is communicated with the blowing disc. A plurality of blowing nozzles are provided on the left side wall of the blowing disc. A picking component is provided on the top of the workbench.
[0005] Further, the picking component includes a vertical column provided on the top of the workbench. A fixing block is provided at one end of the vertical column. A second electric telescopic rod is provided on the rear side wall of the fixing block. An installation block is provided at one end of the second electric telescopic rod. A third electric telescopic rod is provided at the bottom of the installation block. A suction cup is provided at one end of the third electric telescopic rod.
[0006] Further, a sliding rod is provided on the right inner wall of the mounting plate. One end of the sliding rod is connected to the right side wall of the storage box. A slider is sleeved on the outer wall of the sliding rod, and the top of the slider is connected to the bottom of the air blowing disc.
[0007] Further, a limiting block is sleeved on the outer wall of the sliding rod.
[0008] Further, the mounting plate is arranged in an L shape.
[0009] Further, multiple groups of the air blowing nozzles are linearly arrayed on the left side wall of the air blowing disc.
[0010] Further, the filter screen is arranged above the exhaust fan.
[0011] Compared with the prior art, the beneficial effects of the present utility model are as follows: With the cooperation of the air blowing device and the air blowing port, the present utility model can blow air between the silicon wafers, so as to separate the silicon wafers. When taking the materials, it can avoid the upper silicon wafer moving upward together with the lower silicon wafer, ensuring that the silicon wafers are not damaged during material taking; Under the action of the filter screen, the air drawn in can be filtered to avoid the silicon wafers being polluted by the air carrying dust. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 is a schematic structural diagram of the present utility model;
[0013] Figure 2 is a left view of the structure of the present utility model;
[0014] Figure 3 is a schematic structural diagram of Structure A of the present utility model;
[0015] Figure 4 is a schematic structural diagram of the internal structure of the filter box of the present utility model.
[0016] In the figure: 1, workbench; 2, controller; 3, wafer inserter; 4, air blowing device; 40, filter box; 41, exhaust fan; 42, air pump; 43, delivery pipe; 44, first electric telescopic rod; 45, air blowing disc; 46, air blowing nozzle; 47, limiting block; 48, slider; 49, mounting plate; 400, sliding rod; 401, filter screen; 5, material taking assembly; 51, vertical column; 52, fixed block; 53, second electric telescopic rod; 54, mounting block; 55, third electric telescopic rod; 56, suction cup; 6, hydraulic rod; 7, storage box; 8, lifting plate; 9, transmission device; 10, air blowing port. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0017] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0018] Embodiment 1:
[0019] Please refer to Figures 1-4 , the present invention provides a technical solution: a silicon wafer inserter provided with a blowing device, including a workbench 1, four groups of support legs are provided at the bottom of the workbench 1, a transmission device 9 and an inserter 3 are provided at the top of the workbench 1, a controller 2 is provided on the front side wall of the inserter 3, a storage box 7 is provided at the top of the workbench 1, a hydraulic rod 6 is provided at the inner bottom of the storage box 7, a lifting plate 8 is provided at one end of the hydraulic rod 6, a blowing port 10 is opened on the right side wall of the storage box 7, a blowing device 4 is provided at the top of the workbench 1, the blowing device 4 includes a filter box 40 provided at the top of the workbench 1, an exhaust fan 41 penetrates through the right side wall of the filter box 40, a filter screen 401 is provided on the inner side wall of the filter box 40, the filter screen 401 is arranged above the exhaust fan 41, an air pump 42 is provided at the top of the filter box 40, a delivery pipe 43 is provided at one end of the air pump 42, an installation plate 49 is provided on the right side wall of the storage box 7, the installation plate 49 is arranged in an L shape, a first electric telescopic rod 44 is provided on the inner right side wall of the installation plate 49, a blowing disc 45 matching the blowing port 10 is provided at one end of the first electric telescopic rod 44, one end of the delivery pipe 43 is communicated with the blowing disc 45, a plurality of blowing nozzles 46 are provided on the left side wall of the blowing disc 45, and the plurality of blowing nozzles 46 are linearly arrayed on the left side wall of the blowing disc 45, which can better blow the single crystal silicon wafer so that the single crystal silicon wafer can be separated, and a material taking assembly 5 is provided at the top of the workbench 1.
[0020] Please refer to Figure 1 , the material taking assembly 5 includes a vertical column 51 provided at the top of the workbench 1, a fixing block 52 is provided at one end of the vertical column 51, a second electric telescopic rod 53 is provided on the rear side wall of the fixing block 52, an installation block 54 is provided at one end of the second electric telescopic rod 53, a third electric telescopic rod 55 is provided at the bottom of the installation block 54, a suction cup 56 is provided at one end of the third electric telescopic rod 55, a sliding rod 400 is provided on the inner right side wall of the installation plate 49, one end of the sliding rod 400 is connected to the right side wall of the storage box 7, a slider 48 is sleeved on the outer wall of the sliding rod 400, the top of the slider 48 is connected to the bottom of the blowing disc 45, a limiting block 47 is sleeved on the outer wall of the sliding rod 400, and the slider 48 can be limited under the action of the limiting block 47. When the slider 48 moves to contact the limiting block 47, at this time, the blowing nozzles 46 are located in the blowing port 10.
[0021] Working principle: The cut monocrystalline silicon wafers are stacked in the storage box 7. The controller 2 controls the hydraulic rod 6 to work. The hydraulic rod 6 drives the lifting plate 8 to move upward, driving the monocrystalline silicon wafers to move upward. The controller 2 can control the upward stroke of the hydraulic rod 6 to ensure that the uppermost monocrystalline silicon wafer is located at the air blowing port 10. The first electric telescopic rod 44 drives the air blowing disc 45 to move. The air blowing disc 45 drives the slider 48 to move on the outer wall of the sliding rod 400. The slider 48 can be limited by the limiting block 47. At this time, the air blowing nozzle 46 is located in the air blowing port 10. Under the action of the exhaust fan 41, air is drawn into the filter box 40. Under the action of the filter net 45, the dust in the air can be filtered. Under the action of the air pump 42, the air is conveyed into the air blowing disc 45 through the conveying pipe 43. Under the action of the air blowing nozzle 46, the monocrystalline silicon wafers are blown to separate them. The third electric telescopic rod 55 drives the suction cup 56 to move downward to adsorb the uppermost silicon wafer. Then, under the action of the second electric telescopic rod 53, the silicon wafer is driven to move above the transmission device 9. The third electric telescopic rod 55 drives the silicon wafer to move downward and place it on the transmission device 9. Then, under the action of the wafer inserter 3, the wafer can be inserted.
[0022] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A silicon wafer inserter provided with a blowing device, comprising a workbench (1), four groups of support legs are arranged at the bottom of the workbench (1), a transmission device (9) and an inserter (3) are arranged at the top of the workbench (1), and a controller (2) is arranged on the front side wall of the inserter (3), characterized in that: On the top of the workbench (1), there is a storage box (7). At the bottom inside the storage box (7), there is a hydraulic rod (6). One end of the hydraulic rod (6) is provided with a lifting plate (8). On the right side wall of the storage box (7), there is a blowing port (10). On the top of the workbench (1), there is a blowing device (4). The blowing device (4) includes a filter box (40) provided on the top of the workbench (1). A suction fan (41) penetrates through the right side wall of the filter box (40). The inner side wall of the filter box (40) is provided with a filter net (401). On the top of the filter box (40), there is an air pump (42). One end of the air pump (42) is provided with a delivery pipe (43). On the right side wall of the storage box (7), there is a mounting plate (49). On the right inner side wall of the mounting plate (49), there is a first electric telescopic rod (44). One end of the first electric telescopic rod (44) is provided with a blowing disc (45) matching the blowing port (10). One end of the delivery pipe (43) is communicated with the blowing disc (45). On the left side wall of the blowing disc (45), there are multiple groups of blowing nozzles (46). On the top of the workbench (1), there is a material taking assembly (5).
2. The wafer inserter provided with a blowing device according to claim 1, wherein: The material taking assembly (5) includes a vertical column (51) provided on the top of the workbench (1). One end of the vertical column (51) is provided with a fixing block (52). On the rear side wall of the fixing block (52), there is a second electric telescopic rod (53). One end of the second electric telescopic rod (53) is provided with a mounting block (54). At the bottom of the mounting block (54), there is a third electric telescopic rod (55). One end of the third electric telescopic rod (55) is provided with a suction cup (56).
3. The wafer inserter provided with a blowing device according to claim 1, characterized in that: On the right inner side wall of the mounting plate (49), there is a sliding rod (400). One end of the sliding rod (400) is connected to the right side wall of the storage box (7). The outer wall of the sliding rod (400) is sleeved with a sliding block (48). The top of the sliding block (48) is connected to the bottom of the blowing disc (45).
4. The wafer inserter provided with a blowing device according to claim 3, characterized in that: A limiting block (47) is sleeved on the outer wall of the sliding rod (400).
5. The wafer inserter provided with a blowing device according to claim 1, wherein: The mounting plate (49) is arranged in an L shape.
6. The wafer inserter provided with a blowing device according to claim 1, characterized in that: The multiple groups of blowing nozzles (46) are linearly arrayed on the left side wall of the blowing disc (45).
7. The wafer inserter provided with a blowing device according to claim 1, wherein: The filter net (401) is arranged above the suction fan (41).