Uniform heating vacuum coating device based on revolution irradiation type

Abstract

The utility model belongs to the technical field of vacuum coating devices, and particularly relates to a revolution irradiation-based uniform heating vacuum coating device, which comprises a cabinet body and a sealing cabinet door arranged on the surface of the cabinet body, an observation window is arranged on the surface of the sealing cabinet door, a resistance heater is arranged at the bottom end in the cabinet body, and the resistance heater is arranged in the cabinet body. The equipment cabinet comprises an equipment cabinet body, the equipment cabinet body is internally provided with a reflection disc, the rear side of the inner wall of the equipment cabinet body is provided with a radiation heating pipe, the three sets of fixing plates are adopted to control clamping blocks at the bottoms of threaded blocks to move respectively, and then the three clamping blocks are conveniently controlled to conduct independent control displacement on the bottom face of a base plate; when an operator places a to-be-coated workpiece on the bottom surface of the base plate, the to-be-processed workpiece is rapidly clamped and stabilized by controlling the three groups of fixing plates, so that the clamping efficiency is improved, then the stably-clamped workpiece is subjected to revolution radiation irradiation heating through the rotation of the driving motor, and the uniform heating effect of the workpiece is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating devices, and particularly relates to a uniformly heated vacuum coating device based on revolution irradiation type. Background Art

[0002] A vacuum coating device is a device that deposits materials such as metals and non-metals on the surface of a substrate to form a thin film through physical or chemical methods in a vacuum environment. The working principle of the vacuum coating device is mainly based on the physical or chemical deposition process in a vacuum environment. In a vacuum chamber, the coating material is evaporated or sputtered by methods such as heating, electron beam bombardment, ion bombardment, or chemical reaction, and is deposited on the surface of the substrate to form a thin film. This thin film has specific physical, chemical, and mechanical properties and can meet different application requirements.

[0003] Among them, the public patent: "CN220767142U", the so-called "a vacuum coating device with uniform heating", includes a cabinet body. An upper end inside the cabinet body is provided with a vacuum chamber, and a reflecting disc is installed at the bottom of the vacuum chamber; a resistance heater is installed at the inner bottom of the cabinet body, and a heating crucible is installed at the top of the resistance heater. At the same time, the resistance heater is arranged at the bottom of the reflecting disc; a top disc is installed at the top of the vacuum chamber, and a turntable is installed at the bottom of the top disc; a driving motor is installed at the top of the cabinet body, and an output shaft of the driving motor is connected to a driving wheel; in the utility model, when in use, the workpiece fixed on the substrate inside the reflecting cover is heated by a radiation heating tube through radiation heating, and the heating surface is the coating surface of the workpiece, improving the heating efficiency. During the processing, by rotating the turntable, three reflecting covers can be driven to revolve synchronously to ensure that the workpieces in the three reflecting covers can be uniformly heated.

[0004] Specifically, the vacuum coating device market shows a trend of diversification and customization. Different industries have different requirements for coating equipment. Therefore, various types and specifications of vacuum coating devices have emerged in the market. However, in the above-mentioned public patent, the cooperation mode of the opening on the substrate surface and the bolt is used to clamp the workpiece to be coated. This clamping method not only significantly wastes a large amount of clamping preparation and operation time, reducing production efficiency, but also during the clamping process, due to the diversity and complexity of the workpiece shapes, such as curved surfaces, irregular edges, or small components, etc., the adaptability between the fixture and the workpiece is often poor, thus causing difficulties in clamping, and further affecting the coating efficiency of the workpiece and reducing production efficiency. Summary of the Utility Model

[0005] The object of the present utility model is to provide a uniformly heated vacuum coating device based on revolution irradiation, aiming to solve the problem that in the above-mentioned disclosed patent, the clamping of the workpiece to be coated is carried out by the cooperation of the opening on the substrate surface and the bolt. This clamping method not only significantly wastes a large amount of clamping preparation and operation time, reducing production efficiency, but also during the clamping process, due to the diversity and complexity of the workpiece shape, such as curved surfaces, irregular edges or small components, etc., the adaptability between the fixture and the workpiece is often poor, resulting in difficult clamping, and further affecting the coating efficiency of the workpiece and reducing production efficiency.

[0006] To achieve the above object, the present utility model provides the following technical solutions: A uniformly heated vacuum coating device based on revolution irradiation, including a cabinet body and a sealed cabinet door installed on the surface of the cabinet body. An observation window is installed on the surface of the sealed cabinet door. A resistance heater is installed at the bottom end inside the cabinet body. A reflection plate is installed inside the cabinet body. A radiation heating tube is installed on the rear side of the inner wall of the cabinet body. A control air valve is installed on the back side of the cabinet body. A driving motor is installed on the top of the cabinet body;

[0007] A top plate is installed at the top end of the inner wall of the cabinet body. A turntable is connected to the bottom surface of the top plate. A reflection cover is arranged on the outer side wall of the turntable. A substrate is installed on the inner wall of the reflection cover. A power supply box is connected to the surface of the substrate. A fixing plate is connected to the bottom surface of the substrate. One end of the fixing plate is connected to a fixing motor. The output end of the fixing motor is connected to a threaded rod. A threaded block is connected to the surface of the threaded rod. A clamping block is connected to the bottom surface of the threaded block.

[0008] In order to ensure the stability of the workpiece device to be coated, as the uniformly heated vacuum coating device based on revolution irradiation of the present utility model, preferably, an activity frame is connected to the outer side wall of the turntable, and the bottom end of the activity frame is connected to the reflection cover.

[0009] In order to facilitate the clamping of workpieces of different specifications, as the uniformly heated vacuum coating device based on revolution irradiation of the present utility model, preferably, the power supply box is electrically connected to the driving motor. Three fixing motors are connected to the bottom surface of the substrate, and the three fixing motors are equidistantly distributed about the center of the substrate.

[0010] In order to facilitate the stable movement of the clamping block, as the uniformly heated vacuum coating device based on revolution irradiation of the present utility model, preferably, the threaded rod is in threaded connection with the threaded block. The threaded block is T-shaped in side view, and the threaded block and the opening on the inner wall of the fixing plate form a sliding structure.

[0011] In order to facilitate the stable fixation of the substrate, as the uniform heating vacuum coating device based on the revolution irradiation type of the present utility model, preferably, a screw rod is connected through the outer side wall of the reflector cover, one end of the screw rod is connected with a positioning block, and a limiting plate is connected to the side of the positioning block away from the screw rod.

[0012] In order to prevent the workpiece from falling off, as the uniform heating vacuum coating device based on the revolution irradiation type of the present utility model, preferably, the surface of the limiting plate is connected to the bottom surface of the substrate, and the screw rod is threadedly connected to the reflector cover.

[0013] In order to make the movement of the limiting plate stable, as the uniform heating vacuum coating device based on the revolution irradiation type of the present utility model, preferably, a rotating block is connected to one end of the screw rod close to the positioning block, and the rotating block and the opening on one side of the positioning block form a rotating structure.

[0014] Compared with the prior art, the beneficial effects of the present utility model are:

[0015] The present utility model controls the clamping blocks at the bottom of the threaded blocks to move by using three fixing plates respectively, thereby facilitating the separate control of the displacement of the three clamping blocks on the bottom surface of the substrate. When the operator places the workpiece to be coated on the bottom surface of the substrate, the quick clamping and stabilization of the workpiece to be processed are achieved by controlling the three fixing plates, thereby improving the clamping efficiency. Then, through the rotation of the driving motor and the simultaneous activation of the radiation heating tube, the workpiece is preheated. At this time, the clamped and stable workpiece is subjected to revolution radiation irradiation heating, improving the effect of uniform heating of the workpiece. Description of the Drawings

[0016] The drawings are used to provide a further understanding of the present utility model and constitute a part of the specification. Together with the embodiments of the present utility model, they are used to explain the present utility model and do not constitute a limitation to the present utility model. In the drawings:

[0017] Figure 1 It is a schematic structural diagram of the cabinet body of the uniform heating vacuum coating device based on the revolution irradiation type.

[0018] Figure 2 It is a schematic internal structural diagram of the cabinet body of the uniform heating vacuum coating device based on the revolution irradiation type.

[0019] Figure 3 It is a schematic installation structural diagram of the resistance heater of the uniform heating vacuum coating device based on the revolution irradiation type.

[0020] Figure 4 It is a schematic bottom view installation structural diagram of the reflector cover of the uniform heating vacuum coating device based on the revolution irradiation type.

[0021] Figure 5Schematic diagram of the fixing plate installation structure of a uniformly heated vacuum coating device based on revolution irradiation

[0022] Figure 6 Schematic sectional view of the reflector of a uniformly heated vacuum coating device based on revolution irradiation

[0023] Figure 7 Schematic partial sectional view of the fixing plate of a uniformly heated vacuum coating device based on revolution irradiation

[0024] Figure 8 Schematic diagram of the clamping block of a uniformly heated vacuum coating device based on revolution irradiation

[0025] Figure 9 Schematic diagram of the screw connection structure of a uniformly heated vacuum coating device based on revolution irradiation

[0026] In the figure: 1, cabinet body; 2, sealed cabinet door; 3, observation window; 4, resistance heater; 5, reflector disc; 6, radiation heating tube; 7, control air valve; 8, drive motor; 9, top disc; 10, turntable; 11, movable frame; 12, reflector; 13, substrate; 14, power supply box; 15, fixing plate; 16, fixing motor; 17, threaded rod; 18, threaded block; 19, clamping block; 20, screw; 21, positioning block; 22, limiting plate; 23, rotating block. Specific embodiments

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0028] Please refer to Figures 1-9 , the present invention provides the following technical solutions: A uniformly heated vacuum coating device based on revolution irradiation, including a cabinet body 1 and a sealed cabinet door 2 installed on the surface of the cabinet body 1. An observation window 3 is installed on the surface of the sealed cabinet door 2. A resistance heater 4 is installed at the bottom end inside the cabinet body 1. A reflector disc 5 is installed inside the cabinet body 1. A radiation heating tube 6 is installed on the rear side of the inner wall of the cabinet body 1. A control air valve 7 is installed on the back side of the cabinet body 1. A drive motor 8 is installed on the top of the cabinet body 1;

[0029] At the top of the inner wall of the cabinet body 1, a top plate 9 is installed. The bottom surface of the top plate 9 is connected to a turntable 10. On the outer side wall of the turntable 10, a reflector 12 is provided. On the inner wall of the reflector 12, a substrate 13 is installed. On the surface of the substrate 13, a power supply box 14 is connected. On the bottom surface of the substrate 13, a fixing plate 15 is connected. One end of the fixing plate 15 is connected to a fixing motor 16. The output end of the fixing motor 16 is connected to a threaded rod 17. On the surface of the threaded rod 17, a threaded block 18 is connected. On the bottom surface of the threaded block 18, a clamping block 19 is connected.

[0030] Preferably: On the outer side wall of the turntable 10, a movable frame 11 is connected. The bottom end of the movable frame 11 is connected to the reflector 12.

[0031] During specific use, the resistance heater 4, the reflection disc 5, the radiation heating tube 6, the control air valve 7, the drive motor 8, the top plate 9, the turntable 10, the movable frame 11 and the reflector 12 in this application document are all prior arts. For the specific structures, please refer to the published patent: CN220767142U;

[0032] Preferably: The power supply box 14 is electrically connected to the drive motor 8. On the bottom surface of the substrate 13, three fixing motors 16 are connected, and the three fixing motors 16 are equidistantly distributed about the center of the substrate 13.

[0033] During specific use, by using three fixing motors 16, the stability after the workpiece is clamped can be ensured, and the coating effect of the workpiece can be improved.

[0034] Preferably: The threaded rod 17 is threadedly connected to the threaded block 18. The threaded block 18 is T-shaped in side view, and the threaded block 18 and the opening on the inner wall of the fixing plate 15 form a sliding structure.

[0035] During specific use, by sliding the threaded block 18 along the fixing motor 16, it is convenient to move the clamping block 19 and clamp the workpiece to be coated.

[0036] Preferably: A screw rod 20 penetrates and is connected to the outer side wall of the reflector 12. One end of the screw rod 20 is connected to a positioning block 21. On the side of the positioning block 21 away from the screw rod 20, a limiting plate 22 is connected.

[0037] During specific use, by the surface of the limiting plate 22 contacting the bottom surface of the substrate 13, it is convenient to stably install the substrate 13.

[0038] Preferably: The surface of the limiting plate 22 is connected to the bottom surface of the substrate 13, and the screw rod 20 is threadedly connected to the reflector 12.

[0039] During specific use, by rotating the screw rod 20, it is convenient to limit the installation of the substrate 13 through the limiting plate 22, and ensure that the substrate 13 remains stable during the process that the rotating turntable 10 drives the reflector 12 to revolve when the drive motor 8 starts.

[0040] Preferably, a rotating block 23 is connected to one end of the screw rod 20 close to the positioning block 21, and the rotating block 23 and an opening on one side of the positioning block 21 form a rotating structure.

[0041] During specific use, by rotating the rotating block 23 along the opening on one side of the positioning block 21, it is convenient to move and stabilize the limiting plate 22.

[0042] The working principle of the present utility model during specific use: First, three fixed plates 15 are adopted to respectively control the movement of the clamping blocks 19 at the bottom of the threaded block 18. The specific movement process is as follows: Control the fixed plate 15 to start, drive the threaded rod 17 to rotate, the rotation of the threaded rod 17 drives the threaded block 18 to slide along the opening on the inner wall of the fixed motor 16, and the sliding of the threaded block 18 drives the clamping block 19 to slide. Thus, it is convenient to control the displacement of the three clamping blocks 19 separately on the bottom surface of the substrate 13. When an operator places the workpiece to be coated on the bottom surface of the substrate 13, by controlling the three fixed plates 15, it is possible to quickly clamp and stabilize the workpiece to be processed, thereby improving the clamping efficiency. Then, through the rotation of the drive motor 8, the clamped and stable workpiece is irradiated and heated by the revolution of the radiant heating tube 6. At the same time, the resistance heater 4 heats the coating consumables inside the top crucible. Then, by controlling the air valve 7, the inside of the cabinet body 1 is evacuated to a vacuum state. Then, the coating consumables inside the crucible are evaporated and condensed on the surface of the workpiece to form a coating, improving the effect of uniform heating of the workpiece. In addition, by rotating the screw rod 20, the rotating block 23 at one end of the screw rod 20 is rotated along the opening on one side of the positioning block 21, so that the limiting plate 22 is withdrawn from the bottom surface of the substrate 13. This application ingeniously adopts a spiral clamping structure. This innovative design ensures that the workpiece can be stably fixed on the substrate 13 during the revolution movement, effectively avoiding the phenomenon of the workpiece falling off the substrate 13. Specifically, the spiral clamping structure realizes the tight bite between the workpiece and the substrate 13 through its unique thread design. This bite not only enhances the connection strength between the two, but also provides the necessary damping effect during the revolution process to prevent the workpiece from loosening or falling off due to the action of centrifugal force. Compared with the above-mentioned publicly disclosed patents, it has obvious advantages and improves the safety of the workpiece.

[0043] Finally, it should be noted that the above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A uniform heat-receiving vacuum coating device based on revolution irradiation, comprising a cabinet body (1) and a sealed cabinet door (2) installed on the surface of the cabinet body (1), characterized in that: An observation window (3) is installed on the surface of the sealed cabinet door (2). A resistance heater (4) is installed at the inner bottom end of the cabinet body (1). A reflecting disc (5) is installed inside the cabinet body (1). A radiant heating tube (6) is installed on the rear side of the inner wall of the cabinet body (1). A control air valve (7) is installed on the back side of the cabinet body (1). A driving motor (8) is installed on the top of the cabinet body (1). A top disc (9) is installed at the inner top end of the cabinet body (1). The bottom surface of the top disc (9) is connected to a turntable (10). A reflecting cover (12) is arranged on the outer side wall of the turntable (10). A substrate (13) is installed on the inner wall of the reflecting cover (12). A power supply box (14) is connected to the surface of the substrate (13). The bottom surface of the substrate (13) is connected to a fixing plate (15). One end of the fixing plate (15) is connected to a fixing motor (16). The output end of the fixing motor (16) is connected to a threaded rod (17). A threaded block (18) is connected to the surface of the threaded rod (17). A clamping block (19) is connected to the bottom surface of the threaded block (18).

2. The uniform heat-receiving vacuum coating device based on revolution irradiation according to claim 1, wherein: An activity frame (11) is connected to the outer side wall of the turntable (10). The bottom end of the activity frame (11) is connected to the reflecting cover (12).

3. The uniformly heated vacuum coating device based on revolution irradiation according to claim 1, characterized in that: The power supply box (14) is electrically connected to the driving motor (8). Three fixing motors (16) are connected to the bottom surface of the substrate (13), and the three fixing motors (16) are evenly distributed around the center of the substrate (13).

4. The uniformly heated vacuum coating device based on revolution irradiation according to claim 1, characterized in that: The threaded rod (17) is in threaded connection with the threaded block (18). The threaded block (18) is T-shaped in side view. The threaded block (18) and the inner wall opening of the fixing plate (15) form a sliding structure.

5. The uniform heat-receiving vacuum coating device based on revolution irradiation according to claim 1, characterized in that: A screw rod (20) penetrates and is connected to the outer side wall of the reflecting cover (12). One end of the screw rod (20) is connected to a positioning block (21). A limiting plate (22) is connected to the side of the positioning block (21) away from the screw rod (20).

6. The uniform heat-receiving vacuum coating device based on revolution irradiation according to claim 5, wherein: The surface of the limiting plate (22) is connected to the bottom surface of the substrate (13). The screw rod (20) is in threaded connection with the reflecting cover (12).

7. The evenly heated vacuum coating device based on revolution irradiation according to claim 5, wherein: A rotating block (23) is connected to one end of the screw rod (20) close to the positioning block (21). The rotating block (23) and the side opening of the positioning block (21) form a rotating structure.

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