ALD coating device and ALD coating equipment

Abstract

The utility model discloses an ALD (atomic layer deposition) coating device and ALD coating equipment, and relates to the technical field of coating. The ALD coating device comprises a deposition chamber, a spraying module and a heating module, the spraying module and the heating module are both contained in the deposition chamber, and a deposition channel is formed between the spraying module and the heating module; the spraying module comprises oxygen source spraying pieces, first metal source spraying pieces, an isolation gas spraying piece, a gas extraction piece and a second metal source spraying piece, and the multiple oxygen source spraying pieces and the multiple first metal source spraying pieces are sequentially arranged at intervals along the deposition channel; an isolation gas spraying piece and a gas extraction piece are arranged between any adjacent oxygen source spraying piece and first metal source spraying piece, and the first metal source spraying piece and the second metal source spraying piece are used for spraying different metal source gases to the deposition channel. The ALD coating device provided by the embodiment of the utility model has time type and space type deposition functions, and has the characteristics of higher production efficiency and better film forming quality.

Description

Technical Field

[0001] The utility model relates to the technical field of coating technology, and more specifically, to an ALD coating device and an ALD coating equipment. Background Art

[0002] At present, the ALD devices on the market are mainly of two types: time type and space type.

[0003] For multi-component film layers such as AZO and ITO, it is necessary to alternately deposit two oxide layers with different component ratios. When using a time-type ALD device to deposit a multi-component film layer, the production efficiency is very low, and there will be a situation of shared pipelines in the spraying system, resulting in cross-contamination problems. When using a space-type ALD device to deposit a multi-component film layer, the substrate needs to be transferred back and forth between two cavities, and the production efficiency is still low, and the film forming uniformity is poor. Summary of the Utility Model

[0004] The purpose of the utility model is to provide an ALD coating device which has both time-type and space-type deposition functions, can adopt different deposition methods for the film layers with different ratios in the multi-component film layer, and has the characteristics of higher production efficiency and better film forming quality.

[0005] Another purpose of the utility model is to provide an ALD coating equipment which has both time-type and space-type deposition functions, can adopt different deposition methods for the film layers with different ratios in the multi-component film layer, and has the characteristics of higher production efficiency and better film forming quality.

[0006] An embodiment of the utility model provides a technical solution:

[0007] An ALD coating device includes a deposition chamber, a spraying module and a heating module. The spraying module and the heating module are distributed vertically in the deposition chamber, and a deposition channel for the movement of the coating substrate is formed between them.

[0008] The spraying module includes an oxygen source spraying part, a first metal source spraying part, an isolation gas spraying part, an air extraction part and a second metal source spraying part. The oxygen source spraying part, the first metal source spraying part, the isolation gas spraying part and the air extraction part are arranged along the deposition channel to form a space-type deposition unit; the second metal source spraying part is arranged in the deposition chamber and forms a time-type deposition unit with the oxygen source spraying part, the isolation gas spraying part and the air extraction part.

[0009] The ALD coating device provided by the embodiment of the present utility model includes an oxygen source spraying part, a first metal source spraying part, an isolation gas spraying part, and an air extraction part to form a spatial deposition unit, which can perform spatial deposition on the film layer with a higher component ratio in the multi-component film layer to improve production efficiency; the second metal source spraying part, together with the oxygen source spraying part, the isolation gas spraying part, and the air extraction part, forms a time-type deposition unit, which can perform time-type deposition on the film layer with a lower component ratio in the multi-component film layer to improve deposition uniformity, avoid cross-contamination caused by shared pipelines, and ensure the quality of the deposited film layer. Therefore, the ALD coating device provided by the embodiment of the present utility model has both time-type and spatial deposition functions. When depositing a multi-component film layer, it has the characteristics of higher production efficiency, better film-forming quality, and can reduce production costs.

[0010] The embodiment of the present utility model also provides a technical solution:

[0011] An ALD coating equipment includes a loading and unloading device, multiple functional devices, and the aforementioned ALD coating device. The ALD coating device includes a deposition chamber, a spraying module, and a heating module. The spraying module and the heating module are vertically distributed in the deposition chamber, and a deposition channel for the movement of the coating substrate is formed therebetween; the spraying module includes an oxygen source spraying part, a first metal source spraying part, an isolation gas spraying part, an air extraction part, and a second metal source spraying part. The oxygen source spraying part, the first metal source spraying part, the isolation gas spraying part, and the air extraction part are arranged along the deposition channel to form a spatial deposition unit; the second metal source spraying part is arranged in the deposition chamber and forms a time-type deposition unit together with the oxygen source spraying part, the isolation gas spraying part, and the air extraction part;

[0012] The loading end of the loading and unloading device is connected to one end of the ALD coating device through a part of the multiple functional devices, and the unloading end of the loading and unloading device is connected to the other end of the ALD coating device through the remaining part of the multiple functional devices.

[0013] The ALD coating equipment provided by the embodiment of the present utility model, the oxygen source spraying part, the first metal source spraying part, the isolation gas spraying part and the pumping part of its ALD coating device form a spatial deposition unit, which can perform spatial deposition on the film layer with a higher component ratio in the multi-component film layer to improve production efficiency, and multiple oxygen source spraying parts and multiple first metal source spraying parts are arranged at equal intervals to ensure the uniformity of spatial deposition; the second metal source spraying part of its ALD coating device and the oxygen source spraying part, the isolation gas spraying part and the pumping part form a time-type deposition unit, which can perform time-type deposition on the film layer with a lower component ratio in the multi-component film layer to further improve the deposition uniformity, and the configuration of the second metal source spraying part enables different metal sources to be sprayed through different pipelines, avoiding cross-contamination and improving the film formation quality. Therefore, the ALD coating equipment provided by the embodiment of the present utility model has both time-type and spatial deposition functions, and has the characteristics of higher production efficiency and better film formation quality. Description of the Drawings

[0014] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present utility model, and should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0015] Figure 1 Schematic structural diagram of the ALD coating device provided by the embodiment of the present utility model;

[0016] Figure 2 Schematic structural diagram of the spraying module of the ALD coating device;

[0017] Figure 3 Schematic structural diagram of the ALD coating equipment provided by the embodiment of the present utility model.

[0018] Reference numerals: 100 - ALD coating device; 110 - deposition chamber; 120 - spraying module; 121 - oxygen source spraying part; 122 - first metal source spraying part; 123 - isolation gas spraying part; 124 - pumping part; 125 - second metal source spraying part; 130 - heating module; 140 - deposition channel; 150 - reciprocating conveying module; 200 - ALD coating equipment; 210 - loading and unloading device; 220 - preheating device; 230 - feeding device; 240 - discharging device; 250 - lifting device; 260 - return device. Detailed Embodiments

[0019] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. The components of the embodiments of the present utility model usually described and illustrated in the accompanying drawings herein can be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the present utility model claimed, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the scope of protection of the present utility model.

[0021] It should be noted that similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0022] In the description of the present utility model, it should be understood that the orientation or positional relationships indicated by the terms "upper", "lower", "inner", "outer", "left", "right", etc. are based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationships in which the utility model product is usually placed during use, or the orientation or positional relationships commonly understood by those skilled in the art. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present utility model.

[0023] In addition, the terms "first", "second", etc. are only used for descriptive distinction and should not be construed as indicating or implying relative importance.

[0024] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, terms such as "set", "connected" should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0025] The following will describe the specific implementation manners of the present utility model in detail with reference to the accompanying drawings.

[0026] Embodiment

[0027] Please refer to Figure 1, Figure 1 The structural schematic diagram of the ALD coating apparatus 100 provided by this embodiment is shown below.

[0028] The ALD coating apparatus 100 provided by this embodiment includes a deposition chamber 110, a spray module 120, and a heating module 130. The spray module 120 and the heating module 130 are vertically distributed in the deposition chamber 110, and a deposition channel 140 for the movement of the coating substrate is formed between the spray module 120 and the heating module 130.

[0029] The ALD coating apparatus 100 provided by this embodiment has both a spatial deposition function and a temporal deposition function. In practical applications, during the movement of the coating substrate along the deposition channel 140, the spatial deposition and temporal deposition of the coating substrate can be completed step by step.

[0030] Please refer to Figure 2 , Figure 2 The structural schematic diagram of the spray module 120 is shown below.

[0031] The spray module 120 of the ALD coating apparatus 100 includes an oxygen source spray member 121, a first metal source spray member 122, an isolation gas spray member 123, an air extraction member 124, and a second metal source spray member 125. The oxygen source spray member 121 is used to spray oxygen source gas into the deposition channel 140, the first metal source spray member 122 is used to spray the first metal source gas into the deposition channel 140, the isolation gas spray member 123 is used to spray isolation gas into the deposition channel 140, the air extraction member 124 is used for air extraction and discharging to the outside, and the second metal source spray member 125 is used to spray the second metal source gas into the deposition channel 140.

[0032] The oxygen source spray member 121, the first metal source spray member 122, the isolation gas spray member 123, and the air extraction member 124 form a spatial deposition unit. Specifically, a plurality of oxygen source spray members 121 and a plurality of first metal source spray members 122 are arranged at intervals in sequence along the deposition channel 140, and an isolation gas spray member 123 and an air extraction member 124 are arranged between any adjacent oxygen source spray member 121 and first metal source spray member 122.

[0033] In practical applications, the oxygen source spray member 121, the first metal source spray member 122, and the isolation gas spray member can each form different gas atmosphere fields at different positions in the deposition channel 140. The oxygen source spray member 121 can continuously spray oxygen source gas to form an oxygen source gas atmosphere field, the isolation gas spray member can continuously spray isolation gas to form an isolation gas atmosphere field, and the first metal source spray member 122 can continuously spray the first metal source gas to form a first metal source gas atmosphere field.

[0034] Since the isolation gas spray member is located between the oxygen source spray member 121 and the first metal source spray member 122, that is, the isolation gas atmosphere field is between the oxygen source gas atmosphere field and the first metal source gas atmosphere field, the isolation of the oxygen source gas atmosphere field and the first metal source gas atmosphere field is achieved. The air extraction member 124 is used to extract the excess gas between the oxygen source gas atmosphere field and the first metal source gas atmosphere field from the deposition channel 140, realizing the reflux of the oxygen source gas, the isolation gas and the first metal source gas, so as to maintain the stable state of each gas atmosphere field.

[0035] In practical applications, during the movement of the coating substrate along the deposition channel 140, it sequentially passes through the oxygen source gas atmosphere, the isolation gas atmosphere and the first metal source gas atmosphere. During the process of passing through the oxygen source gas atmosphere, the oxygen source gas is chemically adsorbed on the surface of the coating substrate; during the process of passing through the isolation gas atmosphere, under the action of the air extraction member 124, the isolation gas blows away the unadsorbed oxygen source gas remaining on the surface of the coating substrate; during the process of passing through the first metal source gas atmosphere, the first metal source gas is chemically adsorbed on the surface of the coating substrate, thus completing an ALD deposition reaction and forming the first film layer.

[0036] In this embodiment, in the arrangement queue composed of multiple oxygen source spray members 121 and multiple first metal source spray members 122, both the head and the end of the arrangement queue are oxygen source spray members 121. This ensures that during the reciprocating movement of the coating substrate along the deposition channel 140, the coating substrate can pass through the oxygen source gas atmosphere and the first metal source gas atmosphere respectively, ensuring sustainable deposition of the first film layer during the reciprocating movement and improving the deposition efficiency. Moreover, both the head and the end of the arrangement queue are oxygen source spray members 121, which can control the influence range of the first metal source gas, avoid the large diffusion of the first metal source to other positions in the cavity, avoid the generation and accumulation of dust, and ensure the safety of opening the cavity at the same time.

[0037] Moreover, at both ends of the arrangement queue composed of multiple oxygen source spray members 121 and multiple first metal source spray members 122, an isolation gas spray member 123 and an air extraction member 124 are arranged. The purpose is to isolate the two end regions of the deposition chamber 110 from the deposition channel 140, preventing other gases in the deposition chamber 110 from entering along the deposition channel 140, thereby affecting the deposition quality of the film layer.

[0038] In this embodiment, an isolation gas spray member 123 and an air extraction member 124 are arranged at both ends of the arrangement queue. The air extraction member 124 is located between the isolation gas spray member 123 and the oxygen source spray member 121. It can be understood that for an isolation gas spray member 123 and an air extraction member 124 at both ends of the arrangement queue, the air extraction member 124 extracts the excess isolation gas and the excess oxygen source gas and completes the reflux.

[0039] Between the adjacent oxygen source spraying member 121 and the first metal source spraying member 122, an isolation gas spraying member 123 and two air extraction members 124 are arranged, and the isolation gas spraying member 123 is located between the two air extraction members 124.

[0040] In practical applications, in the area between the adjacent oxygen source spraying member 121 and the first metal source spraying member 122, one of the two air extraction members 124 can extract some of the excess oxygen source gas sprayed by the adjacent oxygen source spraying member 121 and some of the excess isolation gas sprayed by the isolation gas spraying member 123; the remaining one of the two air extraction members 124 can extract some of the excess first metal source gas sprayed by the adjacent first metal source spraying member 122 and some of the excess isolation gas sprayed by the isolation gas spraying member 123. This avoids the isolation gas from entering the oxygen source gas atmosphere field or the first metal source gas atmosphere field, and also avoids the cross-mixing of the oxygen source gas atmosphere field and the first metal source gas atmosphere field.

[0041] It can be understood that during the process of the coating substrate passing through the deposition channel 140, the coating substrate will alternately pass through multiple oxygen source gas atmosphere fields and the first metal source gas atmosphere fields in sequence, and can repeatedly complete multiple deposition reactions, and different thicknesses of the first film layer can be formed. Limited by the sizes of the deposition chamber 110 and the spraying module 120, if the required thickness of the first film layer is large, the coating substrate can be controlled to move back and forth in the deposition channel 140 multiple times, so as to achieve multiple spatial depositions and obtain the first film layer that meets the thickness requirements.

[0042] In this embodiment, the ALD coating device 100 further includes a reciprocating conveying module 150, and the reciprocating conveying module 150 is arranged in the deposition channel 140 for conveying the coating substrate to move back and forth in the deposition channel 140. It can be understood that in practical applications, the coating substrate is usually loaded on a carrier, that is, the reciprocating conveying module 150 actually conveys the carrier to move in the deposition channel 140.

[0043] The oxygen source spraying member 121, the second metal source spraying member 125, the isolation gas spraying member 123 and the air extraction member 124 form a time-type deposition unit. It can be understood that during the process of spatial deposition, in order to avoid cross-contamination of different metal source gases, the second metal source spraying member 125 needs to be kept closed. Similarly, during the process of spatial deposition, the first metal source spraying member 122 also needs to be kept closed.

[0044] For time-based deposition, with the first metal source spray member 122 kept closed, the oxygen source spray member 121, the isolation gas spray member 123, and the second metal source spray member 125 are all under pulsed control. Specifically, when the coating substrate is in the deposition channel 140, first, a plurality of oxygen source spray members 121 are controlled to be opened and then closed to pulse-spray the oxygen source gas into the deposition channel 140, so that the oxygen source gas molecules are adsorbed on the surface of the coating substrate, and the oxygen source gas molecules react at the surface active sites of the coating substrate to form a saturated monolayer.

[0045] After that, a plurality of isolation gas spray members 123 and a plurality of pumping members 124 are controlled to be opened and then closed to purge the deposition chamber 110 with the isolation gas to remove the residual oxygen source gas and reaction by-products. Then, the second metal source spray member 125 is controlled to be opened and then closed to spray the second metal source gas into the deposition channel 140, so that the coating substrate that has completed the adsorption of the oxygen source gas molecules chemically adsorbs the second metal source gas molecules again, and the second metal source gas molecules react with the saturated monolayer to generate the second film layer.

[0046] Finally, a plurality of isolation gas spray members 123 and a plurality of pumping members 124 are controlled to be opened and then closed to purge the deposition chamber 110 again with the isolation gas to remove the residual second metal source gas and reaction by-products.

[0047] To ensure deposition uniformity and deposition efficiency, in this embodiment, the number of the second metal source spray members 125 is multiple, and the multiple second metal source spray members 125 are arranged at equal intervals in sequence along the deposition channel 140. Moreover, to further improve deposition uniformity and deposition efficiency, during the time-based deposition process, the reciprocating conveying module 150 can also convey the coating substrate to move back and forth in the deposition channel 140.

[0048] Preferably, in this embodiment, in the extending direction of the deposition channel 140, the multiple second metal source spray members 125 are respectively arranged adjacent to the multiple oxygen source spray members 121. It is equivalent to that the spraying positions of the multiple second metal source spray members 125 correspond one by one to those of the multiple oxygen source spray members 121, that is, there are no isolation gas spray members 123 and pumping members 124 between any second metal source spray member 125 and its adjacent oxygen source spray member 121, which can further improve the film formation uniformity of the time-based deposition film layer and can shorten the movement stroke of the coating substrate during deposition, thus improving deposition efficiency.

[0049] And since dust is mainly generated near the metal source spray ports during the process of depositing the spatial deposition film layer, the multiple second metal source spray members 125 and the multiple oxygen source spray members 121 are respectively arranged in correspondence, which can reduce the generation of dust during deposition.

[0050] Specifically, in the spray module 120 of this embodiment, in the order of the isolation gas spray member 123, the air extraction member 124, the second metal source spray member 125, the oxygen source spray member 121, the air extraction member 124, the isolation gas spray member 123, the air extraction member 124, the first metal source spray member 122, and the air extraction member 124, they are arranged in sequence from left to right in the Figure 2 state shown to form an arrangement unit.

[0051] Multiple arrangement units are arranged in sequence from left to right in the Figure 2 to form a unit queue. At the rightmost end of the unit queue, there are also arranged the isolation gas spray member 123, the air extraction member 124, the second metal source spray member 125, the oxygen source spray member 121, the air extraction member 124, and the isolation gas spray member 123 from left to right. It can be understood that in this embodiment, multiple oxygen source spray members 121 are connected to the same oxygen source pipeline, and this oxygen source pipeline can input the external oxygen source gas to multiple oxygen source spray members 121 for separate spraying. The oxygen source gas can be gaseous water, hydrogen peroxide, and oxygen in plasma state, etc. Multiple isolation gas spray members 123 are connected to the same isolation gas pipeline, and this isolation gas pipeline can input the external isolation gas to multiple isolation gas spray members 123 for separate spraying. The isolation gas can be an inert gas such as nitrogen.

[0052] Similarly, multiple first metal source spray members 122 are connected to the same first metal source pipeline, and this first metal source pipeline inputs the external first metal source gas to multiple first metal source spray members 122 for separate spraying. Multiple second metal source spray members 125 are connected to the same second metal source pipeline, and this second metal source pipeline inputs the external second metal source gas to multiple second metal source spray members 125 for separate spraying.

[0053] Taking the deposition of AZO thin film as an example, a spatial deposition unit is used to complete the deposition of the zinc oxide film layer with a larger component ratio, that is, the first film layer is the zinc oxide film layer, and the first metal source gas is the zinc source gas; a time-type deposition unit is used to complete the deposition of the aluminum oxide film layer with a smaller component ratio, that is, the second film layer is the aluminum oxide film layer, and the second metal source gas is the aluminum source gas.

[0054] Taking the deposition of ITO thin film as an example, a spatial deposition unit is used to complete the deposition of the indium oxide film layer with a larger component ratio, that is, the first film layer is the indium oxide film layer, and the first metal source gas is the indium source gas; a time-type deposition unit is used to complete the deposition of the tin oxide film layer with a smaller component ratio, that is, the second film layer is the tin oxide film layer, and the second metal source gas is the tin source gas.

[0055] It can be seen that in the ALD coating apparatus 100 provided in this embodiment, the oxygen source spraying member 121, the first metal source spraying member 122, the isolation gas spraying member 123, and the air extraction member 124 in the spraying module 120 form a spatial deposition unit, which can perform spatial deposition on the film layer with a higher component ratio in the multi-component film layer to improve production efficiency. The second metal source spraying member 125, the oxygen source spraying member 121, the isolation gas spraying member 123, and the air extraction member 124 in the spraying module 120 form a time-based deposition unit, which can perform time-based deposition on the film layer with a lower component ratio in the multi-component film layer to improve deposition uniformity. Moreover, different reaction gases are sprayed synchronously by different spraying members respectively, which can avoid cross-contamination and further improve the film formation quality.

[0056] Therefore, the ALD coating apparatus 100 provided in the embodiment of the present invention has both time-based and spatial deposition functions, and has the advantages of higher production efficiency and better film formation uniformity.

[0057] This embodiment also provides an ALD coating equipment 200. Please refer to Figure 3 , Figure 3 which is a schematic structural diagram of the ALD coating equipment 200.

[0058] The ALD coating equipment 200 provided in this embodiment includes a loading and unloading device 210, a plurality of functional devices, and the aforementioned ALD coating apparatus 100. The loading and unloading device 210 has a loading end for loading the coating substrate and an unloading end for unloading the coating substrate. The loading end of the loading and unloading device 210 is connected to one end of the ALD coating apparatus 100 through a part of the plurality of functional devices, and the unloading end of the loading and unloading device 210 is connected to the other end of the ALD coating apparatus 100 through the remaining part of the plurality of functional devices.

[0059] It can be understood that in practical applications, the coating substrate is loaded on the carrier at the loading end. After the loading is completed, the carrier drives the coating substrate to pass through a plurality of functional devices in sequence and then enters the ALD coating apparatus 100. During the process of passing through the plurality of functional devices, the plurality of functional devices perform pre-treatment on the coating substrate before coating.

[0060] In this embodiment, among the plurality of functional devices, there is a preheating device 220 between the loading end of the loading and unloading device 210 and the ALD coating apparatus 100. The preheating device 220 is used to preheat the coating substrate during the process of passing through it, so that the temperature of the coating substrate reaches the temperature requirement for ALD deposition.

[0061] During the process of the coated substrate passing through the deposition chamber 110 of the ALD coating device 100, at least one of spatial deposition and time-based deposition can be completed. After the coated substrate after film deposition leaves the ALD coating device 100, it reaches the unloading end of the loading and unloading device after being processed by multiple functional devices, and unloading is completed.

[0062] Specifically, in this embodiment, in addition to the preheating device 220, the multiple functional devices further include a feeding device 230, a discharging device 240, a lifting device 250, and a return device 260. The loading end of the loading and unloading device 210, the feeding device 230, the preheating device 220, the ALD coating device 100, the discharging device 240, the lifting device 250, the return device 260, and the unloading end of the loading and unloading device 210 are sequentially connected to form a conveying path, and a conveying mechanism is arranged on the conveying path for conveying the coated substrate. The reciprocating conveying module 150 of the ALD coating device 100 is a part of the conveying mechanism.

[0063] Benefiting from the beneficial effects of the ALD coating device 100, the ALD coating equipment 200 provided in this embodiment has both time-based and spatial deposition functions, and has the advantages of higher production efficiency and better film formation uniformity.

[0064] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, various changes and modifications can be made to the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. An ALD coating device, characterized in that, It includes a deposition chamber (110), a spraying module (120) and a heating module (130). The spraying module (120) and the heating module (130) are both accommodated in the deposition chamber (110), and there is a deposition channel (140) between the spraying module (120) and the heating module (130). The spraying module (120) includes an oxygen source spraying member (121), a first metal source spraying member (122), an isolation gas spraying member (123), an air extraction member (124) and a second metal source spraying member (125). A plurality of the oxygen source spraying members (121) and a plurality of the first metal source spraying members (122) are arranged at intervals in sequence along the deposition channel (140). An isolation gas spraying member (123) and an air extraction member (124) are arranged between any adjacent oxygen source spraying member (121) and the first metal source spraying member (122). The first metal source spraying member (122) and the second metal source spraying member (125) are used to spray different metal source gases into the deposition channel (140).

2. The ALD coating device according to claim 1, characterized in that, The number of the second metal source spraying members (125) is multiple, and a plurality of the second metal source spraying members (125) are arranged at equal intervals in sequence along the deposition channel (140).

3. The ALD coating device according to claim 2, wherein, In the extending direction of the deposition channel (140), a plurality of the second metal source spraying members (125) are respectively arranged adjacent to a plurality of the oxygen source spraying members (121).

4. The ALD coating apparatus according to claim 1, wherein In the arrangement queue composed of a plurality of the oxygen source spraying members (121) and a plurality of the first metal source spraying members (122), the oxygen source spraying members (121) are at both the head and the end of the arrangement queue.

5. The ALD coating device according to claim 1, characterized in that, An isolation gas spraying member (123) and an air extraction member (124) are arranged at both ends of the arrangement queue composed of a plurality of the oxygen source spraying members (121) and a plurality of the first metal source spraying members (122), and the air extraction member (124) is between the isolation gas spraying member (123) and the oxygen source spraying member (121).

6. The ALD coating device according to claim 1, wherein An isolation gas spraying member (123) and two air extraction members (124) are arranged between adjacent oxygen source spraying member (121) and the first metal source spraying member (122), and the isolation gas spraying member (123) is between the two air extraction members (124).

7. The ALD coating device according to claim 1, characterized in that, The ALD coating device (100) further includes a reciprocating conveying module (150). The reciprocating conveying module (150) is accommodated in the deposition chamber (110) and is between the spraying module (120) and the heating module (130). The reciprocating conveying module (150) is used to convey a coating substrate to reciprocate in the deposition channel (140).

8. An ALD coating device, characterized in that, It includes a loading and unloading device (210), multiple functional devices, and an ALD coating device (100) as described in any one of claims 1-7. The loading end of the loading and unloading device (210) is connected to one end of the ALD coating device (100) through a part of the multiple functional devices, and the unloading end of the loading and unloading device (210) is connected to the other end of the ALD coating device (100) through the remaining part of the multiple functional devices.

9. The ALD coating equipment according to claim 8, wherein, Among the multiple functional devices, there is a preheating device (220) between the loading end of the loading and unloading device (210) and the ALD coating device (100).

10. The ALD coating device according to claim 9, wherein The multiple functional devices further include a feeding device (230), a discharging device (240), a lifting device (250), and a return device (260). The loading end of the loading and unloading device (210), the feeding device (230), the preheating device (220), the ALD coating device (100), the discharging device (240), the lifting device (250), the return device (260), and the unloading end of the loading and unloading device (210) are connected in sequence.

Images