Three-station exhaust table
Manually adjusting the coil position through the XYZ three-axis adjustment assembly, the problems of difficult fine-tuning of the existing exhaust Taichung coil position and high motor control costs are solved, and flexible adjustment and cost reduction are achieved.
Patent Information
- Application Number
- CN202422105572.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-29
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-08-29
AI Technical Summary
现有排气台在特定工作场景中线圈位置微调困难,且电机控制方式成本高。
The XYZ three-axis adjustment components are adopted, including the X-axis slide rail, the Y-axis guide rail and the Z-axis mounting seat. The coil position is adjusted through manual operation to reduce the use of motor control.
The fine adjustment and special adjustment of the coil position are achieved, reducing equipment costs.
Smart Images
Figure CN223092808U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of vacuum exhaust equipment, and particularly to a three-station exhaust table. Background Art
[0002] An exhaust table pumps out gas molecules inside an electro-vacuum device (such as a magnetron, a traveling-wave tube, a gyrotron, a klystron, etc.) through a vacuum pump to reduce the internal pressure, thereby achieving the required vacuum degree. In the fields of scientific research, industry, medical treatment, etc., the exhaust table is an important device for maintaining the normal operation of the experimental environment, production process or medical equipment.
[0003] Currently, the exhaust table mainly includes a vacuum pump system, an exhaust pipeline, a heating system, and a control system. During the exhaust process, first, the exhaust port of the electro-vacuum device is connected to the pumping port of the high-vacuum system, and then the vacuum pump group is started to pump out the gas inside the electro-vacuum device; meanwhile, the heating system heats the electro-vacuum device to promote the desorption and discharge of gas molecules inside the electro-vacuum device; after a period of exhaust and heating, the vacuum degree inside the electro-vacuum device will reach the process requirements.
[0004] In the existing exhaust tables, most of the heating systems use coils to heat up. The position of the coil is usually adjusted by controlling the movement of a motor in the control system. Although this adjustment method is convenient, in some specific working scenarios, such as when fine-tuning or special adjustment of the coil position is required, the motor control method is no longer applicable and manual operation needs to be relied on.
[0005] In addition, when the frequency of adjusting the coil position is not high, using motor control usually also brings a relatively high cost investment, such as the procurement and installation costs of components such as motors, controllers, and sensors. Summary of the Utility Model
[0006] In order to be able to finely adjust the coil position and reduce the installation cost, the present application provides a three-station exhaust table.
[0007] The present application provides a three-station exhaust table, adopting the following technical solution:
[0008] A three-station exhaust table includes a vacuum pump system, an exhaust pipeline, and a heating system. The heating system includes a coil, and further includes a bracket with multiple layers. The bracket is provided with an adjusting component for adjusting the coil position. The adjusting component includes two X-axis slide rails spaced vertically on the bracket, a Y-axis guide rail slidably arranged between the two X-axis slide rails, a connecting block slidably connected to the Y-axis guide rail, and a Z-axis mounting seat arranged on the connecting block. The coil is arranged on the Z-axis mounting seat; a first locking member is arranged between the Y-axis guide rail and the X-axis slide rail, and a second locking member is arranged between the connecting block and the Y-axis guide rail.
[0009] Preferably, the bracket is provided with an extension profile for installing the X-axis slide rail. The X-axis slide rail is slidably connected to a transfer plate. The Y-axis guide rail is provided with a longitudinal profile connected to the transfer plate. The first locking member is a first knob threadedly connected to the transfer plate, and one end of the first knob can abut against the side wall of the extension profile.
[0010] Preferably, the connecting block is provided with a fixing block. The second locking member is a second knob threadedly connected to the fixing block, and one end of the second knob can abut against the side wall of the longitudinal profile.
[0011] Preferably, the Z-axis mounting seat is provided with an adjusting seat. The adjusting seat includes a rotating block arranged on the Z-axis mounting seat, a fixing plate arranged on the rotating block, a connecting plate arranged on the fixing plate, a first clamping block arranged on the connecting plate, and a second clamping block detachably connected to the first clamping block. The coil includes two connecting rods, and the connecting rods pass through between the first clamping block and the second clamping block.
[0012] Preferably, the rotating block is rotatably arranged on the Z-axis mounting seat. The Z-axis mounting seat is provided with a plunger base, and the plunger base is provided with a fixed indexing pin. The rotating block is provided with a fixing hole for inserting the end of the fixed indexing pin.
[0013] Preferably, a reinforcing rib is arranged between the connecting plate and the fixing plate and the first clamping block. Both sides of the reinforcing rib are connected to the fixing plate and the first clamping block respectively.
[0014] Preferably, the Z-axis mounting seat is provided with a handle.
[0015] In summary, the beneficial effects of the present application are as follows:
[0016] By providing an adjusting assembly, a first knob, a second knob, and an adjusting seat and other components, the positions of the coil in the X, Y, and Z axis directions are adjusted, which can meet the requirements of fine-tuning or special adjustment of the coil position by manual operation in some specific working scenarios.
[0017] In addition, when the frequency of adjusting the coil position is not high, the present application avoids using a motor control method, which can greatly reduce costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 is a schematic structural diagram of the present embodiment of the present application;
[0019] Figure 2 is Figure 1 an enlarged schematic view of part A in
[0020] Figure 3 is Figure 1Enlarged schematic view at position B in the [Chinese context].
[0021] Explanation of reference numerals: 1. Bracket; 11. Extension profile; 2. Coil; 21. Connecting rod; 3. Adjusting assembly; 31. X-axis slide rail; 311. Slide block; 312. Adapter plate; 32. Y-axis guide rail; 321. Longitudinal profile; 33. Fixed block; 34. Z-axis mounting seat; 341. Plunger base; 342. Handle; 4. First knob; 5. Second knob; 6. Adjusting seat; 61. Rotating block; 62. Fixed plate; 63. Connecting plate; 631. Reinforcing rib; 64. First clamping block; 65. Second clamping block; 7. Fixed indexing pin; 8. Vacuum pump system. Detailed implementation mode
[0022] The following further elaborates on this application in conjunction with the attached drawings of the specification.
[0023] Refer to Figure 1 , a three-station exhaust table disclosed in an embodiment of this application includes a vacuum pump system 8, an exhaust pipeline, a heating system, and a bracket 1 with a three-layer structure. Among them, the heating system includes a coil 2. When in use, first connect the exhaust port of the electro-vacuum device to the pumping port of the high-vacuum system, and then start the vacuum pump group to extract the gas inside the electro-vacuum device; at the same time, the coil 2 will heat the electro-vacuum device to promote the desorption and discharge of gas molecules inside the electro-vacuum device until the vacuum degree inside the electro-vacuum device reaches the process requirements.
[0024] Refer to Figure 2 and Figure 3 , specifically, the bracket 1 is provided with an adjusting assembly 3 for adjusting the position of the coil 2. The adjusting assembly 3 includes two X-axis slide rails 31 installed at intervals along the vertical direction on the bracket 1, a Y-axis guide rail 32 slidably disposed between the two X-axis slide rails 31, a connecting block (not shown in the figure) slidably connected to the Y-axis guide rail 32, and a Z-axis mounting seat 34 fixed to the connecting block. Among them, the length direction of the X-axis slide rail 31 is set along the horizontal direction; the bracket 1 is installed with an extension profile 11 for fixedly installing the X-axis slide rail 31. The X-axis slide rail 31 is slidably connected with a slide block 311, and the slide block 311 is fixed with an adapter plate 312, and the adapter plate 312 is generally in an L-shaped structure.
[0025] Refer to Figure 2 and Figure 3 , the Y-axis guide rail 32 is fixed with a longitudinal profile 321 connected to the adapter plate 312, that is, both ends of the longitudinal profile 321 are fixedly connected to the side walls of the two adapter plates 312. In addition, a first locking member is provided between the Y-axis guide rail 32 and the X-axis slide rail 31, and the first locking member is located below the Y-axis guide rail 32. The first locking member is a first knob 4 threadedly connected to the adapter plate 312. When fixing, one end of the first knob 4 abuts against the side wall of the extension profile 11.
[0026] Referring to Figure 2 and Figure 3 , further, a second locking member is provided between the connecting block and the Y-axis guide rail 32. A fixing block 33 is installed on the connecting block, and the second locking member is a second knob 5 threadedly connected to the fixing block 33. When fixing, one end of the second knob 5 abuts against the side wall of the longitudinal profile 321.
[0027] Referring to Figure 2 and Figure 3 , the Z-axis mounting seat 34 is fixed with an adjusting seat 6. The adjusting seat 6 includes a rotating block 61 rotatably connected to the Z-axis mounting seat 34, a fixing plate 62 fixed to one side of the rotating block 61, a connecting plate 63 fixed to the side of the fixing plate 62 away from the rotating block 61, a first clamping block 64 fixed to the side of the connecting plate 63 away from the fixing plate 62, and a second clamping block 65 detachably connected to the first clamping block 64. Among them, the rotating block 61 and the Z-axis mounting seat 34 are connected by means of shaft hinge. The Z-axis mounting seat 34 is fixed with a plunger base 341, and two fixed indexing pins 7 are installed on the plunger base 341. A fixing hole (not shown in the figure) is provided at the top of the rotating block 61 for the end of the fixed indexing pin 7 to be inserted, so as to fix the position of the rotating block 61.
[0028] Referring to Figure 3 , further, a reinforcing rib 631 is installed on the top of the connecting plate 63, and both sides of the reinforcing rib 631 are fixedly connected to the fixing plate 62 and the first clamping block 64 respectively.
[0029] Referring to Figure 3 , further, the Z-axis mounting seat 34 is fixed with a handle 342, which is convenient for manual operation and movement to adjust the position of the coil 2.
[0030] Referring to Figure 3 , the second clamping block 65 is located on the top of the first clamping block 64 and is fixed by bolts. The coil 2 includes two connecting rods 21, and the connecting rods 21 are generally in an L-shaped structure. During installation, the two connecting rods 21 are respectively passed through between the first clamping block 64 and the second clamping block 65, and the connecting rods 21 are clamped and fixed by bolts and the second clamping block 65.
[0031] The above are all the preferred embodiments of the present application, and the protection scope of the present application is not limited accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of the present application should be covered within the protection scope of the present application.
Claims
1. A three-station exhaust table, comprising a vacuum pump system (8), an exhaust pipeline, and a heating system, the heating system including a coil (2), characterized in that: It further includes a bracket (1) having multiple layers. The bracket (1) is provided with an adjusting assembly (3) for adjusting the position of the coil (2). The adjusting assembly (3) includes two X-axis slide rails (31) spaced vertically on the bracket (1), a Y-axis guide rail (32) slidably disposed between the two X-axis slide rails (31), a connecting block slidably connected to the Y-axis guide rail (32), and a Z-axis mounting base (34) disposed on the connecting block. The coil (2) is disposed on the Z-axis mounting base (34). A first locking member is disposed between the Y-axis guide rail (32) and the X-axis slide rail (31), and a second locking member is disposed between the connecting block and the Y-axis guide rail (32).
2. The three-station exhaust table according to claim 1, characterized in that: The bracket (1) is provided with an extended profile (11) for mounting the X-axis slide rail (31). The X-axis slide rail (31) is slidably connected with an adapter plate (312). The Y-axis guide rail (32) is provided with a longitudinal profile (321) connected to the adapter plate (312). The first locking member is a first knob (4) threadedly connected to the adapter plate (312), and one end of the first knob (4) can abut against the side wall of the extended profile (11).
3. The three-station exhaust table according to claim 1, characterized in that: The connecting block is provided with a fixed block (33). The second locking member is a second knob (5) threadedly connected to the fixed block (33), and one end of the second knob (5) can abut against the side wall of the longitudinal profile (321).
4. A three-station exhaust table according to claim 1, characterized in that: The Z-axis mounting base (34) is provided with an adjusting seat (6). The adjusting seat (6) includes a rotating block (61) disposed on the Z-axis mounting base (34), a fixing plate (62) disposed on the rotating block (61), a connecting plate (63) disposed on the fixing plate (62), a first clamping block (64) disposed on the connecting plate (63), and a second clamping block (65) detachably connected to the first clamping block (64). The coil (2) includes two connecting rods (21), and the connecting rods (21) pass through between the first clamping block (64) and the second clamping block (65).
5. The three-station exhaust table according to claim 4, wherein: The rotating block (61) is rotatably disposed on the Z-axis mounting base (34). The Z-axis mounting base (34) is provided with a plunger base (341). The plunger base (341) is provided with a fixed indexing pin (7). The rotating block (61) is provided with a fixing hole for inserting the end portion of the fixed indexing pin (7).
6. The three-station exhaust table according to claim 4, wherein: A reinforcing rib (631) is disposed between the connecting plate (63) and the fixing plate (62) and the first clamping block (64). The two sides of the reinforcing rib (631) are respectively connected to the fixing plate (62) and the first clamping block (64).
7. The three-station exhaust table according to claim 1, characterized in that: The Z-axis mounting base (34) is provided with a handle (342).