Dust-free wafer storage device
Through the combination of electric telescopic rod and rack mechanism, the problem of displacement and fall off of wafers during transportation is solved, fast and reliable access operations are achieved, and the efficiency of the storage device is improved.
Patent Information
- Application Number
- CN202422232104.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-12
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-09-12
AI Technical Summary
Traditional wafer dust-free storage devices can easily cause wafer displacement or shedding during transportation and vibration, and are inconvenient to access.
The electric telescopic rod and rack mechanism are used to clamp the wafer through the electric telescopic rod, and the motor drives the opening and closing of the box cover to achieve rapid sealing and access.
Effectively prevent wafers from displaced or falling off during transportation, improve access efficiency, ensure sealing and rapid operation.
Smart Images
Figure CN223092833U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafers, and specifically relates to a wafer dust-free storage device. Background Technique
[0002] With the progress of technology and the continuous increase in the global demand for electronic products, the semiconductor industry has been developing rapidly. As the basic material of semiconductor products, the demand for dust-free storage during the manufacturing process of wafers has also increased.
[0003] When traditional wafer dust-free storage devices are in use, the following defects still exist: it is not convenient to ensure that wafers will not be displaced or fall off due to transportation, vibration and other factors during storage, and it is not convenient to access wafers. Therefore, it is of great application value to develop a wafer dust-free storage device. Content of the Utility Model
[0004] The purpose of the utility model is to solve the defects existing in the prior art, and a wafer dust-free storage device is proposed.
[0005] To achieve the above purpose, the utility model adopts the following technical scheme: a wafer dust-free storage device, including a first support plate, an electric telescopic rod is fixedly connected to the first support plate, one end of the electric telescopic rod is fixedly connected to a connection block, a first connecting plate is fixedly connected to the connection block, a first connecting rod is rotatably connected to the first connecting plate, a second connecting rod is rotatably connected to the first connecting plate, a fourth connecting rod is rotatably connected to the second connecting rod, a third connecting rod is rotatably connected to the first connecting rod, a first fixing plate is fixedly connected to the first support plate, a first sliding groove is provided on the first connecting plate, the first sliding groove slides on the first fixing plate, a clamping plate is fixedly connected to the first connecting plate, and a protection box is fixedly connected to the first support plate.
[0006] As a further description of the above technical solution:
[0007] A second fixing plate is fixedly connected to the first support plate, a motor is fixedly connected to the second fixing plate, a first connecting shaft is fixedly connected to the output end of the motor, a first bevel gear is fixedly connected to the first connecting shaft, a second bevel gear is meshed with the first bevel gear, a first circular gear is fixedly connected to the second bevel gear, a first rack is meshed with the first circular gear, a first box cover is fixedly connected to the first rack, a second connecting plate is provided on the first box cover, a third bevel gear is fixedly connected to the first connecting shaft, a fourth bevel gear is meshed with the third bevel gear, a second circular gear is fixedly connected to the fourth bevel gear, a second rack is meshed with the second circular gear, a second box cover is fixedly connected to the second rack, and a connecting groove is provided on the second box cover.
[0008] As a further description of the above technical solution:
[0009] The protective box is provided with a second sliding groove, the first rack and the second rack respectively slide on the second sliding groove, the third connecting rod is rotatably connected to the fourth connecting rod, and the third connecting rod and the fourth connecting rod are arranged in a cross shape.
[0010] As a further description of the above technical solution:
[0011] The second bevel gear and the first circular gear are rotatably connected to the protective box, and the fourth bevel gear and the second circular gear are rotatably connected to the protective box.
[0012] As a further description of the above technical solution:
[0013] The second connecting plate slides in the connecting groove, and there are two groups of the first sliding grooves.
[0014] As a further description of the above technical solution:
[0015] There are several groups of the first connecting plates, and there are several groups of the third connecting rod and the fourth connecting rod.
[0016] As a further description of the above technical solution:
[0017] One end of the electric telescopic rod slides through the protective box, and there are several groups of the clamping plates which are arranged inside the protective box.
[0018] The utility model has the following beneficial effects:
[0019] 1. In the utility model, at this time, the staff starts the electric telescopic rod to drive multiple groups of the first connecting plates to perform a contraction movement, so that two groups of the clamping plates clamp and fix the wafers, which can prevent the wafers from shifting or falling off due to factors such as transportation and vibration during storage.
[0020] 2. In the utility model, the staff starts the motor to drive the first box cover and the second box cover to move towards each other, so that the second connecting plate slides into the connecting groove to seal and close the protective box. In this way, the opening and closing actions of the box can be completed quickly and accurately, shortening the time for wafer access and storage, improving work efficiency, and ensuring the sealing performance between the protective box and the second box cover and the first box cover by the second connecting plate sliding into the connecting groove. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 is a schematic perspective view of a wafer dust-free storage device proposed by the utility model Figure 1 ;
[0022] Figure 2 is an exploded view of a partial structure of a wafer dust-free storage device proposed by the utility model Figure 1 ;
[0023] Figure 3Explosion of a partial structure of a wafer dust-free storage device proposed by the present utility model Figure 2 ;
[0024] Figure 4 Schematic diagram of a partial structure of a wafer dust-free storage device proposed by the present utility model;
[0025] Figure 5 Schematic diagram of the structure of a wafer dust-free storage device proposed by the present utility model.
[0026] Legend description:
[0027] 1. First support plate; 2. Electric telescopic rod; 3. Connecting block; 4. First connecting plate; 5. First connecting rod; 6. Second connecting rod; 7. Third connecting rod; 8. Fourth connecting rod; 9. First fixing plate; 10. First sliding groove; 11. Clamping plate; 12. Protection box; 13. Second fixing plate; 14. Motor; 15. First connecting shaft; 16. First bevel gear; 17. Second bevel gear; 18. First circular gear; 19. First rack; 20. First box cover; 22. Second connecting plate; 23. Third bevel gear; 24. Fourth bevel gear; 25. Second circular gear; 26. Second rack; 27. Second box cover; 28. Connecting groove; 29. Second sliding groove. Specific implementation manner
[0028] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.
[0029] Referring to Figures 1 - 5 , an embodiment provided by the present utility model: a wafer dust-free storage device includes a first support plate 1, an electric telescopic rod 2 is fixedly connected to the first support plate 1, a connecting block 3 is fixedly connected to one end of the electric telescopic rod 2, a first connecting plate 4 is fixedly connected to the connecting block 3, a first connecting rod 5 is rotatably connected to the first connecting plate 4, a second connecting rod 6 is rotatably connected to the first connecting plate 4, a fourth connecting rod 8 is rotatably connected to the second connecting rod 6, a third connecting rod 7 is rotatably connected to the first connecting rod 5, a first fixing plate 9 is fixedly connected to the first support plate 1, a first sliding groove 10 is provided on the first connecting plate 4, the first sliding groove 10 slides on the first fixing plate 9, a clamping plate 11 is fixedly connected to the first connecting plate 4, a protection box 12 is fixedly connected to the first support plate 1. At this time, the staff starts the electric telescopic rod 2 to pull multiple first connecting plates 4 to perform a contraction movement, so that two clamping plates 11 clamp and fix the wafer, which can prevent the wafer from being displaced or falling off due to factors such as transportation and vibration during storage.
[0030] A fixed plate two 13 is fixedly connected to the support plate one 1. A motor 14 is fixedly connected to the fixed plate two 13. An output end of the motor 14 is fixedly connected to a connecting shaft one 15. A bevel gear one 16 is fixedly connected to the connecting shaft one 15. A bevel gear two 17 is meshed with the bevel gear one 16. A circular gear one 18 is fixedly connected to the bevel gear two 17. A rack one 19 is meshed with the circular gear one 18. A box cover one 20 is fixedly connected to the rack one 19. A connecting plate two 22 is provided on the box cover one 20. A bevel gear three 23 is fixedly connected to the connecting shaft one 15. A bevel gear four 24 is meshed with the bevel gear three 23. A circular gear two 25 is fixedly connected to the bevel gear four 24. A rack two 26 is meshed with the circular gear two 25. A box cover two 27 is fixedly connected to the rack two 26. A connecting groove 28 is provided on the box cover two 27. A sliding groove two 29 is provided on the protective box 12. The rack one 19 and the rack two 26 respectively slide on the sliding groove two 29. A connecting rod three 7 is rotatably connected to a connecting rod four 8. The connecting rod three 7 and the connecting rod four 8 are cross - arranged. The bevel gear two 17 and the circular gear one 18 are rotatably connected to the protective box 12. The bevel gear four 24 and the circular gear two 25 are rotatably connected to the protective box 12. The connecting plate two 22 slides in the connecting groove 28. There are two groups of sliding grooves one 10. There are several groups of connecting plates one 4. There are several groups of connecting rods three 7 and connecting rods four 8. One end of the electric telescopic rod 2 slides through the protective box 12. There are several groups of clamping plates 11 and they are arranged inside the protective box 12. When the staff starts the motor 14, it drives the box cover one 20 and the box cover two 27 to move towards each other, making the connecting plate two 22 slide into the connecting groove 28, and sealing and closing the protective box 12. In this way, the opening and closing actions of the box can be completed quickly and accurately, shortening the time for wafer access and improving work efficiency. By the connecting plate two 22 sliding into the connecting groove 28, the sealing performance between the protective box 12 and the box cover two 27 and the box cover one 20 can be ensured.
[0031] Working principle: First, the staff places the wafer between two sets of clamping plates 11. At this time, the staff activates the electric telescopic rod 2, which pushes the connecting block 3, and then pushes the first connecting plate 4, driving the first sliding groove 10 to slide on the first fixing plate 9. Through the first connecting rod 5 and the second connecting rod 6, the third connecting rod 7 and the fourth connecting rod 8 are pushed to rotate, and multiple first connecting plates 4 are pulled to perform a contraction movement, causing the two clamping plates 11 to clamp and fix the wafer. This can prevent the wafer from shifting or falling off due to factors such as transportation and vibration during storage. At this time, the staff activates the motor 14, which drives the first connecting shaft 15 to rotate, driving the first bevel gear 16 and the third bevel gear 23 to rotate, driving the second bevel gear 17 and the fourth bevel gear 24 to rotate in opposite directions, driving the first circular gear 18 and the second circular gear 25 to rotate in opposite directions, driving the first rack 19 and the second rack 26 to slide in opposite directions on the second sliding groove 29, and driving the first box cover 20 and the second box cover 27 to move in opposite directions, causing the second connecting plate 22 to slide into the connecting groove 28, sealing and closing the protective box 12. This can quickly and accurately complete the opening and closing actions of the box, shortening the time for wafer access and improving work efficiency. The sealing performance between the protective box 12, the second box cover 27, and the first box cover 20 can be ensured by the second connecting plate 22 sliding into the connecting groove 28.
[0032] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.
Claims
1. A wafer dust-free storage device, comprising a first support plate (1), characterized in that: One end of the electric telescopic rod (2) is fixedly connected to the support plate one (1), and one end of the electric telescopic rod (2) is fixedly connected to a connecting block (3). A first connecting plate (4) is fixedly connected to the connecting block (3). A first connecting rod (5) is rotatably connected to the first connecting plate (4). A second connecting rod (6) is rotatably connected to the first connecting plate (4). A fourth connecting rod (8) is rotatably connected to the second connecting rod (6). A third connecting rod (7) is rotatably connected to the first connecting rod (5). A first fixing plate (9) is fixedly connected to the support plate one (1). A first sliding groove (10) is provided on the first connecting plate (4), and the first sliding groove (10) slides on the first fixing plate (9). A clamping plate (11) is fixedly connected to the first connecting plate (4). A protection box (12) is fixedly connected to the support plate one (1).
2. The wafer dust-free storage device according to claim 1, characterized in that: A second fixing plate (13) is fixedly connected to the support plate one (1). A motor (14) is fixedly connected to the second fixing plate (13). One end of a connecting shaft one (15) is fixedly connected to the output end of the motor (14). A first bevel gear (16) is fixedly connected to the connecting shaft one (15). A second bevel gear (17) is meshed with the first bevel gear (16). A first circular gear (18) is fixedly connected to the second bevel gear (17). A first rack (19) is meshed with the first circular gear (18). A first box cover (20) is fixedly connected to the first rack (19). A second connecting plate (22) is provided on the first box cover (20). A third bevel gear (23) is fixedly connected to the connecting shaft one (15). A fourth bevel gear (24) is meshed with the third bevel gear (23). A second circular gear (25) is fixedly connected to the fourth bevel gear (24). A second rack (26) is meshed with the second circular gear (25). A second box cover (27) is fixedly connected to the second rack (26). A connecting groove (28) is provided on the second box cover (27).
3. The wafer dust-free storage device according to claim 2, wherein: A second sliding groove (29) is provided on the protection box (12), and the first rack (19) and the second rack (26) slide on the second sliding groove (29) respectively. The third connecting rod (7) is rotatably connected to the fourth connecting rod (8), and the third connecting rod (7) and the fourth connecting rod (8) are arranged in a cross shape.
4. The wafer dust-free storage device according to claim 3, characterized in that: The second bevel gear (17) and the first circular gear (18) are rotatably connected to the protection box (12). The fourth bevel gear (24) and the second circular gear (25) are rotatably connected to the protection box (12).
5. A wafer dust-free storage device according to claim 4, characterized in that: The second connecting plate (22) slides in the connecting groove (28), and there are two groups of the first sliding grooves (10).
6. The wafer dust-free storage device according to claim 5, wherein: There are several groups of the first connecting plates (4), and there are several groups of the third connecting rods (7) and the fourth connecting rods (8).
7. A wafer dust-free storage device according to claim 6, characterized in that: One end of the electric telescopic rod (2) slides through the protection box (12), and there are several groups of the clamping plates (11) which are arranged inside the protection box (12).