Conveying device for wafer glass slide wet process mass thinning

Abstract

The utility model discloses a conveying device for wafer glass slide wet process mass thinning. The conveying device comprises a rack, a conveying belt rotationally arranged on the inner side of the rack through a rotating shaft, and a motor arranged on the right side of the rack, wherein the output end of the motor is connected with the rotating shaft on the inner side of the conveying belt; the adjustable guide limiting mechanisms are symmetrically arranged at the top of the rack, and each adjustable guide limiting mechanism comprises a vertical seat fixed on the surface of the top of the rack, a supporting rod movably penetrating through the vertical seat, a side plate fixed at the end part of the supporting rod, and a silica gel limiting plate mounted on the side surface of the side plate; according to the utility model, a belt conveyor in the prior art is improved and optimized, and a plurality of adjustable guide limiting mechanisms are symmetrically designed at the top of the belt conveyor, so that a wafer glass slide can be effectively guided and limited in the conveying process at the top of the conveyor belt, and deviation is prevented; meanwhile, the distance between the left adjustable guide limiting mechanism and the right adjustable guide limiting mechanism can be adaptively adjusted according to the size specifications of different wafer glass slides, and the use flexibility is high.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer glass carrier transportation, and particularly relates to a transportation device for wet bulk thinning of wafer glass carriers. Background Technique

[0002] During the processing of wafer glass carriers, multiple processes are required, including wet bulk thinning of the wafer glass carriers, so as to reduce the packaging and chip mounting height, reduce the chip packaging volume, improve the thermal diffusion efficiency, electrical performance, and mechanical performance of the chip, and reduce the processing amount of dicing. When wet bulk thinning the wafer glass carriers, a belt conveyor is needed for the transportation of the wafer glass carriers.

[0003] This belt conveyor can continuously transport the wafer glass carriers during the wet bulk thinning process of the wafer glass carriers, increasing the automation degree of the entire wet bulk thinning process. This belt conveyor is also a common transportation device, mainly composed of components such as a frame, a conveyor belt, and a motor.

[0004] In the process of transporting the wafer glass carriers by the belt conveyor in the prior art, due to the lack of an effective and safe limit guiding structure, the wafer glass carriers are not guided and limited during transportation, and may shift in position, affecting the accuracy in the subsequent wet bulk thinning process. Therefore, the utility model provides a transportation device for wet bulk thinning of wafer glass carriers. Content of the Utility Model

[0005] The purpose of the utility model is to provide a transportation device for wet bulk thinning of wafer glass carriers to solve the problems raised in the above background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solution: A transportation device for wet bulk thinning of wafer glass carriers, including

[0007] a frame, a conveyor belt rotatably installed inside the frame through a rotating shaft, and a motor installed on the right side of the frame with its output end connected to the rotating shaft inside the conveyor belt;

[0008] A plurality of adjustable guiding and limiting mechanisms symmetrically arranged on the top of the frame, including a vertical seat fixed on the top surface of the frame, a support rod movably passing through the vertical seat, a side plate fixed at the end of the support rod, and a silica gel limiting plate installed on the side of the side plate. The adjustable guiding and limiting mechanism further includes a movable plate movably installed on the top surface of the vertical seat, a movable clamping rod fixed at the center of the bottom of the movable plate, and a plurality of limiting clamping holes opened on the surface of the support rod. The bottom end of the movable clamping rod penetrates into one of the limiting clamping holes. The adjustable guiding and limiting mechanism further includes two sliding plates fixed on both sides of the bottom of the movable plate. The two sliding plates are respectively located on both sides of the vertical seat. Side grooves are opened on the surfaces of both sides of the vertical seat, and springs and side sliders are arranged in the side grooves. One end of the side slider extends to the side of the vertical seat and is fixed to the sliding plate.

[0009] Preferably, a circular groove is opened on the top surface of the side slider, the bottom end of the spring is embedded and installed in the circular groove, and the top end of the spring abuts against the upper wall of the side groove.

[0010] Preferably, the adjustable guiding and limiting mechanism further includes a disassembly and assembly structure arranged between the silica gel limiting plate and the side plate. The disassembly and assembly structure includes two rubber sockets arranged on the side of the silica gel limiting plate, triangular clamping blocks arranged on the end surface of the rubber sockets, and jacks opened on the surface of the side plate and adapted to the rubber sockets. The end of the rubber socket penetrates through the jack to one side of the side plate, and the triangular clamping block is clamped on the side of the side plate. The rubber socket and the triangular clamping block are of an integral structure, and a rectangular air chamber is opened in the rubber socket.

[0011] Preferably, a plurality of support legs are arranged at the bottom of the frame.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows: By improving and optimizing the belt conveyor in the prior art, the present utility model symmetrically designs a plurality of adjustable guiding and limiting mechanisms on its top, so that the wafer glass carrier can be effectively guided and limited during the conveying process on the top of the conveyor belt, preventing deviation. At the same time, the distance between the left and right adjustable guiding and limiting mechanisms can be adaptively adjusted according to the size specifications of different wafer glass carriers, and the use flexibility is high. Description of the Drawings

[0013] Figure 1 is a schematic structural diagram of the present utility model;

[0014] Figure 2 is the present utility model Figure 1 a partial enlarged view of area A in;

[0015] Figure 3 is a cross-sectional view of the adjustable guiding and limiting mechanism of the present utility model;

[0016] Figure 4 For the present utility model Figure 3 Partial enlarged view of area B in the present utility model;

[0017] Figure 5 For the present utility model Figure 3 Partial enlarged view of area C in the present utility model;

[0018] In the figure: 1, frame; 2, conveyor belt; 3, adjustable guiding and limiting mechanism; 31, vertical seat; 32, support rod; 33, side plate; 331, jack; 34, silicone limiting plate; 341, rubber socket; 342, triangular clamping block; 35, movable plate; 36, movable clamping rod; 37, sliding plate; 38, limiting clamping hole; 39, side groove; 310, spring; 311, side slider; 4, motor. Specific embodiments

[0019] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the protection scope of the present utility model.

[0020] Embodiment

[0021] Please refer to Figures 1 to 5 , which is an embodiment of the present utility model. This embodiment provides a technical solution: a conveying device for wet massive thinning of wafer glass carriers, including

[0022] frame 1, conveyor belt 2 rotatably installed inside the frame 1 through a rotating shaft, and motor 4 installed on the right side of the frame 1 and with its output end connected to the inner rotating shaft of the conveyor belt 2. When the motor 4 operates subsequently, it can drive the conveyor belt 2 to rotate, realizing the conveying of wafer glass carriers during the wet massive thinning process;

[0023] A plurality of adjustable guiding and limiting mechanisms 3 symmetrically arranged on the top of the frame 1, including a vertical seat 31 welded and fixed on the top surface of the frame 1, a support rod 32 movably passing through the vertical seat 31, a side plate 33 welded and fixed at the end of the support rod 32, and a silicone limiting plate 34 installed on the side of the side plate 33. The two symmetric adjustable guiding and limiting mechanisms 3 enable the wafer glass carrier to be effectively guided and limited during the conveying process on the top of the conveyor belt 2, preventing deviation. At the same time, since the silicone limiting plate 34 is made of flexible silicone material, it will not cause damage to the surface of the wafer glass carrier.

[0024] Among them, the adjustable guiding and limiting mechanism 3 further includes a movable plate 35 movably installed on the top surface of the vertical seat 31, a movable clamping rod 36 welded and fixed at the center of the bottom of the movable plate 35, and a plurality of limiting clamping holes 38 formed on the surface of the support rod 32. The bottom end of the movable clamping rod 36 penetrates into one of the limiting clamping holes 38 to stably limit the support rod 32. The adjustable guiding and limiting mechanism 3 further includes two sliding plates 37 welded and fixed on both sides of the bottom of the movable plate 35. The two sliding plates 37 are respectively located on both sides of the vertical seat 31. Side grooves 39 are formed on both side surfaces of the vertical seat 31, and a spring 310 and a side sliding block 311 are arranged in the side grooves 39. One end of the side sliding block 311 extends out of the side surface of the vertical seat 31 and is fixed to the sliding plate 37. Subsequently, when the position of the silicone limiting plate 34 needs to be adjusted, only need to lift the movable plate 35, so that the sliding plate 37 drives the side sliding block 311 to move upward and compresses the spring 310, causing the bottom end of the movable clamping rod 36 to move out of the limiting clamping hole 38, then the limitation on the support rod 32 can be released. Then the support rod 32 can be horizontally moved to adjust the position of the silicone limiting plate 34. When the silicone limiting plate 34 is adjusted to a suitable position, release the movable plate 35, so that the spring 310 pushes the side sliding block 311 back, and the sliding plate 37 drives the movable plate 35 and the movable clamping rod 36 to reset. Finally, the bottom end of the movable clamping rod 36 is inserted into the limiting clamping hole 38 at other positions, and the support rod 32, the side plate 33 and the silicone limiting plate 34 can be limited again, completing the adaptive adjustment of the position of the silicone limiting plate 34.

[0025] Among them, a circular groove is formed on the top surface of the side sliding block 311, the bottom end of the spring 310 is embedded and installed in the circular groove, and the top end of the spring 310 abuts against the upper wall of the side groove 39, so that the spring 310 is stably limited and will not deviate.

[0026] Among them, the adjustable guiding and limiting mechanism 3 further includes a disassembly and assembly structure, and the disassembly and assembly structure is arranged between the silicone limiting plate 34 and the side plate 33. The disassembly and assembly structure includes two rubber sockets 341 arranged on the side surface of the silicone limiting plate 34, triangular clamping blocks 342 arranged on the end surface of the rubber socket 341, and jacks 331 formed on the surface of the side plate 33 and adapted to the rubber sockets 341. The end of the rubber socket 341 penetrates through the jack 331 to the side of the side plate 33, and the triangular clamping block 342 is clamped on the side surface of the side plate 33 to limit the rubber socket 341 and ensure the installation stability of the silicone limiting plate 34. Subsequently, when the silicone limiting plate 34 needs to be removed and replaced, only need to pull the silicone limiting plate 34 sideways with force, so that the rubber socket 341 and the triangular clamping block 342 undergo elastic deformation and are finally pulled out of the jack 331, then the silicone limiting plate 34 can be disassembled from the side plate 33.

[0027] Among them, the rubber socket 341 and the triangular clamping block 342 are of an integral structure, both of which are made of rubber material and will undergo elastic deformation when being squeezed. A rectangular air chamber is provided inside the rubber socket 341, so that the triangular clamping block 342 and the rubber socket 341 have sufficient deformation space when being squeezed.

[0028] Among them, a plurality of supporting legs are provided at the bottom of the frame 1.

[0029] Although the embodiments of the present invention have been shown and described (see the above detailed description), those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A conveying device for wet bulk thinning of a wafer glass carrier, characterized in that: including a frame (1), a conveyor belt (2) rotatably installed inside the frame (1) through a rotating shaft, and a motor (4) installed on the right side of the frame (1) with its output end connected to the rotating shaft inside the conveyor belt (2); a plurality of adjustable guiding and limiting mechanisms (3) symmetrically arranged on the top of the frame (1), including a vertical seat (31) fixed on the top surface of the frame (1), a support rod (32) movably passing through the vertical seat (31), a side plate (33) fixed at the end of the support rod (32), and a silica gel limiting plate (34) installed on the side surface of the side plate (33).

2. The conveying device for wet bulk thinning of a wafer glass carrier according to claim 1, characterized in that: The adjustable guiding and limiting mechanism (3) further includes a movable plate (35) movably installed on the top surface of the vertical seat (31), a movable clamping rod (36) fixed at the center of the bottom of the movable plate (35), and a plurality of limiting clamping holes (38) opened on the surface of the support rod (32), and the bottom end of the movable clamping rod (36) penetrates into one of the limiting clamping holes (38).

3. The conveying device for wet bulk thinning of a wafer glass carrier according to claim 2, wherein: The adjustable guiding and limiting mechanism (3) further includes two sliding plates (37) fixed on both sides of the bottom of the movable plate (35), the two sliding plates (37) are respectively located on both sides of the vertical seat (31), side grooves (39) are opened on the surface of both sides of the vertical seat (31), and a spring (310) and a side sliding block (311) are arranged in the side grooves (39), and one end of the side sliding block (311) extends to the side of the vertical seat (31) and is fixed to the sliding plate (37).

4. The conveying device for wet bulk thinning of a wafer glass carrier according to claim 3, characterized in that: A circular groove is opened on the top surface of the side sliding block (311), the bottom end of the spring (310) is embedded and installed in the circular groove, and the top end of the spring (310) abuts against the upper wall of the side groove (39).

5. The conveying device for wet bulk thinning of a wafer glass carrier according to claim 1, wherein: The adjustable guiding and limiting mechanism (3) further includes a disassembly and assembly structure, and the disassembly and assembly structure is arranged between the silica gel limiting plate (34) and the side plate (33).

6. The conveying device for wet bulk thinning of a wafer glass carrier according to claim 5, characterized in that: The disassembly and assembly structure includes two rubber sockets (341) arranged on the side surface of the silica gel limiting plate (34), triangular clamping blocks (342) arranged on the end surface of the rubber sockets (341), and jacks (331) opened on the surface of the side plate (33) and adapted to the rubber sockets (341), the end of the rubber socket (341) penetrates through the jack (331) to one side of the side plate (33), and the triangular clamping block (342) is clamped on the side surface of the side plate (33).

7. The conveying device for wet bulk thinning of a wafer glass carrier according to claim 6, characterized in that: The rubber socket (341) and the triangular clamping block (342) are of an integral structure, and a rectangular air is opened in the rubber socket (341).

8. The conveying device for wet bulk thinning of a wafer glass carrier according to claim 1, wherein: A plurality of support legs are arranged at the bottom of the frame (1).

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