Turnover equipment
The transfer device automates the transfer of semiconductor materials, reducing labor requirements, improving efficiency, and lowering defect rates by integrating a load carrier, inspection, and pallet transfer system.
Patent Information
- Application Number
- CN202422160544.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-04
- Publication Date
- 2025-07-15
- Estimated Expiration
- 2034-09-04
AI Technical Summary
In the semiconductor industry, the turnover link of the upper and lower process of the product relies on manual operations, resulting in large personnel demand, low turnover efficiency and high scrapping rate.
It provides a turnover equipment, including a vehicle turnover unit, a material detection unit, a pallet turnover unit and a material handling unit, to realize automated turnover and removal of defective products, and to work together through components such as conveying devices, handling devices and detection cameras.
It realizes automatic turnover of products, reduces personnel demand, improves turnover efficiency, reduces scrap rate, and can automatically eliminate bad products.
Smart Images
Figure CN223097415U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of semiconductor production equipment, and more particularly, to a turnover device. Background Art
[0002] In the semiconductor industry, during the turnover process from the upstream process to the downstream process of products, the turnover of products is usually carried out manually. In this way, not only is the demand for personnel large, the turnover efficiency low, but also the product quality is difficult to control during the turnover process, the scrap rate is high, and the long-term resource investment is high. Utility Model Content
[0003] At least one turnover device is provided in an embodiment of this application to improve the technical problems of large demand for personnel, low turnover efficiency, and high scrap rate when manually turning over products in the prior art.
[0004] An embodiment of this application provides a turnover device, which includes: a carrier turnover unit, a material detection unit, a pallet turnover unit, and a material handling unit;
[0005] The carrier turnover unit is used to turnover carriers, and materials are loaded on the carriers;
[0006] The material detection unit is used to detect the materials to distinguish good-quality materials from defective materials;
[0007] The pallet turnover unit is used to turnover pallets;
[0008] The material handling unit is used to transport the good-quality materials to the pallets.
[0009] In an optional embodiment, the carrier turnover unit includes a first conveyor, a second conveyor, and a carrier handling device;
[0010] The first conveyor is used to convey the carrier from the carrier loading end to the carrier recycling end;
[0011] The second conveyor is used to convey the carrier to the picking range of the material handling unit;
[0012] The carrier handling device is used to transport the carrier from one of the first conveyor and the second conveyor to the other.
[0013] In an optional embodiment, the carrier handling device is configured to be able to move the carrier horizontally to move the carrier to the first conveyor or the second conveyor.
[0014] In an optional embodiment, the first conveyor is configured to be able to move the carrier in the height direction so that the carrier is flush with the second conveyor in height.
[0015] In an alternative embodiment, the first conveying device is provided with a sensing device for detecting the flatness of the material on the vehicle.
[0016] In an alternative embodiment, the pallet turnover unit includes a third conveying device, a fourth conveying device, and a pallet handling device;
[0017] The third conveying device is used to convey the pallet to the loading range of the material handling unit;
[0018] The fourth conveying device is used to convey the empty pallets and the full pallets;
[0019] The pallet handling device is used to handle the empty pallets to the third conveying device and the full pallets to the fourth conveying device.
[0020] In an alternative embodiment, the pallet turnover unit further includes a pallet placing device and a pallet recycling device;
[0021] The pallet placing device is used to place the empty pallets on the fourth conveying device;
[0022] The pallet recycling device is used to recycle the full pallets from the fourth conveying device.
[0023] In an alternative embodiment, the material detection unit includes a first camera and a second camera;
[0024] The first camera is located above the vehicle turnover unit and is used to capture an image of the upper surface of the material;
[0025] The second camera is located in the handling path of the material handling unit and is used to capture an image of the lower surface of the material.
[0026] In an alternative embodiment, the turnover equipment further includes: a defective product placement area;
[0027] The defective product placement area is used to place the defective materials.
[0028] In an alternative embodiment, the turnover equipment further includes: a buffer area;
[0029] The buffer area is used to place the good materials during the turnover of the pallets.
[0030] The above technical solution of the present application has the following beneficial technical effects:
[0031] The turnover equipment provided by the embodiments of the present application can achieve the automatic turnover of products. Compared with the method of manually turning over products in the prior art, it can reduce the large demand for personnel, improve the low turnover efficiency, and reduce the scrap rate. In addition, the turnover equipment can also automatically remove defective products from the products.
[0032] To make the above objects, features, and advantages of the present application more obvious and understandable, the following specifically enumerates preferred embodiments and, in conjunction with the accompanying drawings, makes the following detailed description. Description of the Drawings
[0033] To more clearly illustrate the technical solutions of the embodiments of the present application, the following briefly introduces the drawings required to be used in the embodiments. The drawings here are incorporated into the specification and constitute a part of this specification. These drawings show embodiments that conform to the present application and, together with the specification, are used to illustrate the technical solutions of the present application. It should be understood that the following drawings only show some embodiments of the present application and should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.
[0034] Figure 1 Shows a schematic structural diagram of a turnover equipment provided by an embodiment of the present application;
[0035] Figure 2 Shows Figure 1 A schematic diagram from another perspective.
[0036] Reference Signs:
[0037] 10, carrier turnover unit; 11, first conveyor device; 11a, first conveyor section; 11b, second conveyor section; 11c, third conveyor section; 12, second conveyor device; 13, carrier handling device; 14, sensing device; 20, material detection unit; 21, first camera; 22, second camera; 30, tray turnover unit; 31, third conveyor device; 32, fourth conveyor device; 33, tray handling device; 34, tray placement device; 35, tray recycling device; 40, material handling unit; 50, defective product placement area; 60, buffer area; 100, carrier; 200, bracket; 300, tray. Detailed Embodiments
[0038] Now, various exemplary embodiments of the present application will be described in detail with reference to the drawings. It should be noted that: Unless otherwise specifically stated, the relative arrangements, numerical expressions, and numerical values of the components and steps described in these embodiments do not limit the scope of the present application.
[0039] Embodiments of the present application will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present application, and should not be construed as a limitation of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts fall within the scope of protection of the present application.
[0040] The terms "first" and "second" in the description and claims of the present application may explicitly or implicitly include one or more of such features. In the description of the present application, unless otherwise specified, the meaning of "a plurality" is two or more. In addition, "and / or" in the description and claims indicates at least one of the connected objects, and the character " / " generally indicates an "or" relationship between the associated objects before and after.
[0041] In the description of the present application, it should be understood that the orientation or positional relationships indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. are based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present application.
[0042] In the description of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "mounted", "connected" and "connected" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.
[0043] As Figure 1 and Figure 2 shown, the turnover equipment provided by the embodiment of the present application includes: a carrier turnover unit 10, a material detection unit 20, a pallet turnover unit 30, and a material handling unit 40. The carrier turnover unit 10 is used to turnover the carrier 100, and the material is loaded on the carrier 100. The material detection unit 20 is used to detect the material to distinguish between good-quality materials and defective materials. The pallet turnover unit 30 is used to turnover the pallet 300. The material handling unit 40 is used to handle the good-quality materials to the pallet 300.
[0044] Specifically, when using the above-mentioned turnover equipment to turnover materials, the carrier turnover unit 10 can be used to turnover the carrier 100 loaded with materials. During the turnover process, the material detection unit 20 can be used to detect whether the materials are qualified products, and the material handling unit 40 can be used to handle the qualified products into the tray 300 on the tray turnover unit 30. Finally, the tray turnover unit 30 is used to turnover the qualified products to the next process.
[0045] The turnover equipment provided by the embodiment of the present application can realize the automatic turnover of products. Compared with the method of manually turning over products in the prior art, it can reduce the large demand for personnel, improve the low turnover efficiency, and reduce the scrap rate. In addition, the turnover equipment can also automatically remove defective products from the products.
[0046] In some embodiments, the carrier turnover unit 10 may include a first conveyor 11, a second conveyor 12, and a carrier handling device 13. The first conveyor 11 is used to convey the carrier 100 from the carrier loading end to the carrier recycling end. The second conveyor 12 is used to convey the carrier 100 to the picking range of the material handling unit 40. The carrier handling device 13 is used to move the carrier 100 from one of the first conveyor 11 and the second conveyor 12 to the other. That is to say, during use, the carrier handling device 13 can be used to move the carrier 100 loaded with materials on the first conveyor 11 to the second conveyor 12, and then the second conveyor 12 is used to convey the carrier 100 loaded with materials to the picking range of the material handling unit 40 for material handling. Correspondingly, after the materials on the carrier 100 are handled, the carrier handling device 13 can also be used to move the empty carrier 100 back to the first conveyor 11, so that the first conveyor 11 can convey the empty carrier 100 to the carrier recycling end.
[0047] In some embodiments, the carriers 100 can be stacked on the first conveyor 11 through the brackets 200. However, this embodiment does not make any limitation thereto.
[0048] In some embodiments, the vehicle handling device 13 is configured to be able to move the vehicle 100 in the horizontal direction to move the vehicle 100 to the first transfer device 11 or the second transfer device 12. Exemplarily, the vehicle handling device 13 includes a lateral translation mechanism. The lateral translation mechanism can move relative to the second transfer device 12 in the horizontal direction. The vehicle handling device 13 can apply a pulling force in the horizontal direction to the vehicle 100 to pull the vehicle 100 from the first transfer device 11 to the second transfer device 12. The vehicle handling device 13 can also apply a pushing force in the horizontal direction to the vehicle 100 to push the vehicle 100 from the second transfer device 12 to the first transfer device 11. Further, in order for the lateral translation mechanism to apply a pulling force to the vehicle 100, the lateral translation mechanism can be provided with a connection structure. The connection structure is used to connect the lateral translation mechanism to the vehicle 100 so that when the lateral translation mechanism moves, it can apply a pulling force to the vehicle 100. It should be understood that the connection structure can be a suction cup or a clamping jaw, etc. However, this embodiment does not make any limitation thereto.
[0049] In some embodiments, when the vehicles 100 are stacked on the first transfer device 11 through the brackets 200, the first transfer device 11 is configured to be able to move the vehicles 100 in the height direction. Exemplarily, the first transfer device 11 includes a first transfer section 11a, a second transfer section 11b, and a third transfer section 11c. The first transfer section 11a and the third transfer section 11c are arranged parallel to each other vertically. The second transfer section 11b is located between the first transfer section 11a and the third transfer section 11c. The second transfer section 11b is provided with a clamping mechanism that can move up and down. The clamping mechanism can move downward after clamping the bracket 200 on the first transfer section 11a. During the up and down movement of the clamping mechanism, the height of the vehicle 100 relative to the second transfer device 12 can be adjusted. And when the clamping mechanism moves downward to the lowest point, the clamping effect can be cancelled to place the bracket 200 on the third transfer section 11c. With such a setting, each layer of the vehicle 100 on the bracket 200 can be flush with the second transfer device 12, so as to ensure that the vehicle 100 can smoothly reach the first transfer device 11 or the second transfer device 12 during horizontal movement.
[0050] In some embodiments, the first conveying device 11 may be provided with a sensing device 14 for detecting the flatness of the materials on the carrier 100. Exemplarily, the sensing device 14 includes a transmitter and a receiver. The transmitter and the receiver are arranged on the first conveying section 11a and are located on both sides of the first conveying section 11a respectively. During use, the transmitter can emit an optical signal to the receiver. When the carrier 100 passes by, if the receiving end can receive the optical signal, it can prove that the materials are flat. If the receiving end does not receive the optical signal, it can prove that the materials are uneven, and the system can issue an alarm to remind the operator to handle it. It should be understood that in order to ensure the flatness of the materials on each carrier 100, the number of sensing devices 14 can be consistent with the number of carriers 100.
[0051] In some embodiments, the pallet turnover unit 30 includes a third conveying device 31, a fourth conveying device 32, and a pallet handling device 33. The third conveying device 31 is used to convey the pallet 300 to the loading range of the material handling unit 40. The fourth conveying device 32 is used to convey the empty pallet 300 and the full pallet 300. The pallet handling device 33 is used to handle the empty pallet 300 to the third conveying device 31 and the full pallet 300 to the fourth conveying device 32. That is to say, during use, the empty pallet 300 can be conveyed to the handling range of the pallet handling device 33 by the fourth conveying device 32, and then the empty pallet 300 can be handled to the third conveying device 31 by the pallet handling device 33. Then, the third conveying device 31 conveys the empty pallet 300 to the loading range of the material handling unit 40. When the material handling unit 40 fills the empty pallet 300, the third conveying device 31 can convey the full pallet 300 to the handling range of the pallet handling device 33, and then the pallet handling device 33 handles the full pallet 300 to the fourth conveying device 32, and finally the fourth conveying device 32 transports the full pallet 300 out.
[0052] In some embodiments, the pallet turnover unit 30 further includes a pallet 300 placing device 34 for placing the empty pallet 300 onto the fourth conveying device 32. Exemplarily, the pallet 300 placing device 34 includes a first lifting motor for supporting and lifting the empty pallet 300. During use, the first lifting motor can control the driving rod to descend. When the driving rod descends below the fourth conveying device 32, the empty pallet 300 can fall onto the fourth conveying device 32 and be sent away by the fourth conveying device 32.
[0053] In some embodiments, the pallet turnover unit 30 further includes a pallet 300 recycling device 35 for recycling the fully loaded pallets 300 from the fourth transfer device 32. Exemplarily, the pallet 300 recycling device 35 includes a second lifting motor for supporting and lifting the fully loaded pallets 300. During use, the second lifting motor can control its drive rod to rise. When the drive rod rises above the fourth transfer device 32, the fully loaded pallet 300 can be lifted by the drive rod, and the lifted fully loaded pallet 300 can be taken away by an operator or a robot. Further, the pallet 300 recycling device 35 may further include a frame and a fixing structure disposed on the frame. The frame is located above the second lifting motor. Whenever the fully loaded pallet 300 rises to a set position, the fixing structure can fix the fully loaded pallet 300 so that the second lifting motor can reset. By repeating the above operations, stacking of the fully loaded pallets 300 can be achieved. When the stacking quantity of the fully loaded pallets 300 reaches the set value, the system can issue an alarm to remind the operator to transport the fully loaded pallets 300 out.
[0054] In some embodiments, the pallet handling device 33 can be a two-axis robotic arm, a three-axis robotic arm, a four-axis robotic arm, a five-axis robotic arm, a six-axis robotic arm, etc. However, this embodiment does not make any limitation thereto.
[0055] In some embodiments, the material detection unit 20 includes a first camera 21, a second camera 22, and a data processor. The first camera 21 is located above the carrier turnover unit 10 and is used to capture an image of the upper surface of the material. The second camera 22 is located in the handling path of the material handling unit 40 and is used to capture an image of the lower surface of the material. The data processor is electrically connected to the first camera 21 and the second camera 22. Specifically, the first camera 21 can be disposed above the second transfer device 12, and the field of view of the first camera 21 faces downward. The second camera 22 can be disposed in the handling path of the material handling unit 40, and the field of view of the second camera 22 faces upward. During use, the first camera 21 can capture an image of the upper surface of the material, the second camera 22 can capture an image of the lower surface of the material when the material handling unit 40 handles the material, and the data processor can receive the images captured by the first camera 21 and the second camera 22 and compare the received images with the standard images to determine whether the upper and lower surfaces of the material are qualified. It should be understood that in order to improve the detection effect, when the image of the upper surface of the material is unqualified, the image of the lower surface of the material may no longer be captured.
[0056] In some embodiments, the material handling unit 40 can be a two-axis robotic arm, a three-axis robotic arm, a four-axis robotic arm, a five-axis robotic arm, a six-axis robotic arm, etc. However, this embodiment does not make any limitation thereto.
[0057] In some embodiments, the turnover device further includes a defective product placement area 50 for placing defective product materials. That is to say, when the material handling unit 40 transports materials, it can transport the defective product materials to the defective product placement area 50.
[0058] In some embodiments, the turnover device further includes a buffer area 60 for placing qualified product materials during the turnover of the pallet 300. That is to say, when the material handling unit 40 transports materials, it can transport the qualified product materials to the buffer area 60 when the pallet 300 is turning over.
[0059] One or more embodiments of this specification are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of one or more embodiments of this specification shall be included within the protection scope of this application.
[0060] The above is only the specific implementation manner of this application, but the protection scope of this application is not limited thereto. Any person skilled in the art within the technical scope disclosed in this application can easily think of changes or substitutions, which should all be covered within the protection scope of this application. Therefore, the protection scope of this application shall be subject to the protection scope of the claims.
Claims
1. A turnover device, characterized in that, The turnover equipment includes: a carrier turnover unit, a material detection unit, a pallet turnover unit, and a material handling unit; The carrier turnover unit is used to turnover carriers, and the carriers are loaded with materials; The material detection unit is used to detect the materials to distinguish good products from defective products; The pallet turnover unit is used to turnover pallets; The material handling unit is used to transport the good products to the pallet.
2. The turnover equipment according to claim 1, characterized in that, The carrier turnover unit includes a first conveyor, a second conveyor, and a carrier handling device; The first conveyor is used to convey the carrier from the carrier loading end to the carrier recycling end; The second conveyor is used to convey the carrier to the picking range of the material handling unit; The carrier handling device is used to transport the carrier from one of the first conveyor and the second conveyor to the other.
3. The turnover equipment according to claim 2, wherein The carrier handling device is arranged to be able to move the carrier horizontally to move the carrier to the first conveyor or the second conveyor.
4. The turnover equipment according to claim 3, characterized in that The first conveyor is arranged to be able to move the carrier in the height direction so that the carrier is flush with the second conveyor in height.
5. The turnover equipment according to claim 2, wherein The first conveyor is provided with a sensing device, and the sensing device is used to detect the flatness of the material on the carrier.
6. The turnover equipment according to claim 1, wherein The pallet turnover unit includes a third conveyor, a fourth conveyor, and a pallet handling device; The third conveyor is used to convey the pallet to the loading range of the material handling unit; The fourth conveyor is used to convey the empty pallets and the full pallets; The pallet handling device is used to transport the empty pallets to the third conveyor and transport the full pallets to the fourth conveyor.
7. The turnover equipment according to claim 6, characterized in that The pallet turnover unit further includes a pallet placing device and a pallet recycling device; The pallet placing device is used to place the empty pallets on the fourth conveyor; The pallet recycling device is used to recycle the full pallets from the fourth conveyor.
8. The turnover equipment according to claim 1, characterized in that, The material detection unit includes a first camera and a second camera; The first camera is located above the carrier turnover unit and is used to capture an image of the upper surface of the material; The second camera is located in the handling path of the material handling unit and is used to capture an image of the lower surface of the material.
9. The turnover equipment according to claim 1, characterized in that, The turnover equipment further includes: a defective product placement area; The defective product placement area is used to place the defective products.
10. The turnover device according to claim 1, characterized in that, The turnover equipment further includes: a buffer area; The buffer area is used to place the good products during the turnover of the pallets.