Single crystal rod guillotine shear

Abstract

The utility model belongs to the technical field of silicon crystal processing equipment, and particularly relates to a single crystal rod guillotine shear. A single crystal rod guillotine shear comprises a conveying mechanism arranged on a workbench and a cutting device for cutting a single crystal silicon rod, and further comprises the workbench, the workbench is provided with a cutting receding groove, spraying devices are arranged on the two sides of the cutting receding groove, nozzles of the spraying devices are aligned with the cutting receding groove, and the spraying devices are arranged on the cutting receding groove. The cooling liquid treatment device is arranged on the table top of the working table and in the working table; and when the cutting device is used for cutting the silicon single crystal rod, the cutting position can be fully cooled.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon crystal processing equipment, and particularly relates to a single crystal rod cutting machine. Background Art

[0002] The single crystal rod cutting machine is used for cutting a single crystal silicon rod, cutting the long strip cylindrical single crystal silicon rod into several segments for subsequent processing. The cutting machine usually includes a transmission device, a wire cutting device, a pressing device and a cooling device. The cooling device cools the cutting part of the single crystal silicon rod. The cooling device is usually a spraying mechanism, which sprays coolant to avoid overheating of the cutting part, resulting in the disconnection of the cutting wire or poor cutting surface. In reality, the general cooling mechanism cannot achieve good cooling effect and full utilization of the coolant. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a single crystal rod cutting machine aiming at the above existing technical problems, which can play a role in fully cooling the cutting position when the cutting device cuts the single crystal silicon rod.

[0004] In view of this, the utility model provides a single crystal rod cutting machine, which includes a conveying mechanism arranged on a workbench and a cutting device for cutting a single crystal silicon rod, and further includes: a workbench, the workbench is provided with a cutting relief groove; a spraying device, the spraying device is arranged on both sides of the cutting relief groove, and the nozzles of the spraying device are aligned with the cutting relief groove; a coolant treatment device, the coolant treatment device is arranged on the tabletop and inside of the workbench.

[0005] In this technical solution, after the conveying mechanism conveys the single crystal silicon rod to a designated position, the cutting wire of the cutting device cuts the single crystal silicon rod. The workbench has a cutting relief groove reserved for the cutting wire to cut the single crystal silicon rod to prevent interference. The spraying device is arranged on both sides of the cutting relief groove, and the nozzles spray coolant towards the cutting relief groove, which can fully cool the cutting of the single crystal silicon rod by the cutting device to avoid overheating and affecting the cutting efficiency. The cooled coolant is then treated by the coolant treatment device and reused.

[0006] In the above technical solution, further, the spraying device includes: a mounting frame, the mounting frame is a single-side open structure, and two mounting frames are symmetrically fixed on both sides of the cutting relief groove; a cooling pipe, the cooling pipe is fixedly connected to the mounting frame through a hoop, one end of the cooling pipe is blocked, and the other end is connected to a liquid inlet pipe; nozzles, the nozzles are circumferentially distributed on the cooling pipe and are aligned with the cutting relief groove, and an anti-blocking and pressure-increasing component is arranged in the nozzles.

[0007] In this technical solution, the nozzle is circumferentially arranged on the cooling pipe to spray coolant circumferentially on the cutting part, achieving a better cooling effect. At the same time, the cooling pipe is fixed by a circumferentially arranged hoop to prevent the cooling pipe from shaking during the spraying of coolant, which may cause a change in the spraying direction of the coolant. Additionally, an anti-blocking and pressure-boosting component is provided inside the nozzle to prevent the cutting debris from blocking the nozzle opening.

[0008] In the above technical solution, further, the anti-blocking and pressure-boosting component includes a valve ball that blocks the flow cavity. The valve ball is provided with a sliding groove, and a fixed rod is arranged in the sliding groove. One end of the fixed rod away from the valve ball is connected to a fixed block fixed to the inner wall of the nozzle. A push plate is fixedly connected to the fixed rod, and a first spring is sleeved on the fixed rod between the push plate and the fixed block. One end of the first spring is fixedly connected to the push plate, and the other end is fixedly connected to the fixed block.

[0009] In this technical solution, the coolant enters the cooling pipe from the liquid inlet pipe. After filling the cooling pipe, the pressure inside the pipe continuously increases, pushing the valve ball to move along the fixed rod. The valve ball pushes the push plate, and the push plate compresses the second spring. The coolant enters the nozzle from the flow cavity through the liquid outlet and sprays outwards. When the spraying stops, the coolant supply from the liquid inlet pipe stops, and the pressure in the flow cavity decreases. Under the restoring force of the second spring, the push plate pushes the valve ball to reset, preventing the cutting debris from entering the flow cavity.

[0010] In the above technical solution, further, the coolant treatment device includes a liquid flow inclined plane arranged on the tabletop. The inclined end of the liquid flow inclined plane is provided with a liquid discharge port, and the liquid discharge port is connected to a liquid discharge channel. The liquid discharge channel communicates with a collection bin. The inner cavity of the collection bin is divided into a chip collection cavity above the filter screen and a liquid storage cavity below the filter screen by a filter screen.

[0011] In this technical solution, the coolant for cooling the cutting part falls on the liquid flow inclined plane below, enters the liquid discharge channel through the liquid discharge port provided at the end of the liquid flow inclined plane, and enters the collection bin arranged inside the workbench through the liquid discharge channel. The cutting debris is filtered by the filter screen of the collection bin and remains in the chip collection cavity, and the filtered coolant remains in the liquid storage cavity, completing the separation of the coolant and the cutting debris. The filtered coolant can be reused.

[0012] In the above technical solution, further, a fixing mechanism is further included. The fixing mechanism includes a mounting frame arranged on the tabletop. A first cylinder is arranged at the top of the mounting frame. The output end of the first cylinder passes through the mounting frame and is connected to a mounting plate. The mounting plate is connected to a pressing block through a second spring.

[0013] In this technical solution, after the conveying device transports the single-crystalline silicon rod to be cut to the required position, the first cylinder in the fixing mechanism pushes the mounting plate downward until the pressing block abuts against the single-crystalline silicon rod and compresses the second spring. The elastic force of the second spring presses the single-crystalline silicon rod, achieving the pressing purpose while avoiding mechanical extrusion damage to the surface of the single-crystalline silicon rod.

[0014] In the above technical solution, further, the shape of the mounting plate is an arc-shaped plate.

[0015] In the above technical solution, further, the second spring and the pressing block are circumferentially distributed on the mounting plate.

[0016] In the above technical solution, further, a rubber layer is provided on the pressing surface of the pressing block and the single-crystalline silicon rod.

[0017] In the above technical solution, further, a water pump is connected to the end of the liquid inlet pipe away from the cooling pipe.

[0018] The beneficial effects of the present utility model are as follows:

[0019] 1. The semi-circular cooling pipe and the nozzles circumferentially arranged on the cooling pipe have a better cooling effect on the cutting wire cutting the single-crystalline silicon rod;

[0020] 2. At the same time, the anti-blocking and pressure-increasing assembly provided in the nozzle improves the spraying speed of the cooling liquid while preventing cutting debris from blocking the nozzle or entering the cooling pipe;

[0021] 3. The setting of the coolant treatment device facilitates the separation of the coolant and the cutting debris;

[0022] 4. The elastic force of the second spring presses the single-crystalline silicon rod, achieving the pressing purpose while avoiding mechanical extrusion damage to the surface of the single-crystalline silicon rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a schematic structural diagram of the present utility model;

[0024] Figure 2 is a schematic structural diagram of the spraying device on one side of the cutting relief groove;

[0025] Figure 3 is a schematic structural diagram of the inside of the nozzle;

[0026] Figure 4 is a schematic structural diagram of the coolant cleaning device;

[0027] Figure 5 is a schematic structural diagram of the fixing device.

[0028] The marks in the figure are indicated as:

[0029] 1. Cutting device; 2. Conveying device; 3. Workbench; 4. Spraying device; 5. Fixing device; 6. Cutting relief groove; 7. Liquid flow slope; 8. Drainage port; 9. Installation frame; 10. Liquid inlet pipeline; 11. Cooling pipeline; 12. Nozzle; 13. Hoop; 14. Flow cavity; 15. Liquid outlet; 16. Valve ball; 17. Sliding groove; 18. Convex block; 19. Push plate; 20. Fixed rod; 21. First spring; 22. Fixed block; 23. Drainage channel; 24. Collection bin; 25. Chip collection cavity; 26. Filter screen; 27. Liquid storage cavity; 28. Installation bracket; 29. First cylinder; 30. Installation plate; 31. Second spring; 32. Pressing block. Detailed implementation manners

[0030] The technical solutions in the embodiments of the present application will be clearly described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art belong to the scope of protection of the present application.

[0031] In the description of the present application, it should be noted that the terms used herein are only for describing specific implementation manners, and are not intended to limit the exemplary embodiments of the present application. For the convenience of description, the dimensions of the various parts shown in the drawings are not drawn according to the actual proportional relationship. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific value should be interpreted as merely exemplary, rather than as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar reference numerals and letters indicate similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0032] It should be noted that the terms "first", "second", etc. in the description and claims of the present application are used to distinguish similar objects, rather than to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described herein, and the objects distinguished by "first", "second", etc. are usually of the same type, and do not limit the number of objects. For example, the first object can be one or multiple. In addition, "and / or" in the description and claims means at least one of the connected objects, and the character " / " generally means an "or" relationship between the associated objects before and after.

[0033] It should be noted that in the description of the present application, the orientation or positional relationship indicated by the directional terms such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom", etc. is usually based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description. Without contrary instructions, these directional terms do not indicate and imply that the device or component referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on the protection scope of the present application; the directional terms "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0034] It should be noted that in the present application, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, the element defined by the statement "comprising one..." does not exclude the presence of additional identical elements in the process, method, article or device comprising that element. In addition, it should be pointed out that the scope of the methods and devices in the embodiments of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in a reverse order according to the functions involved. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. Additionally, the features described with reference to certain examples may be combined in other examples.

[0035] Embodiment 1:

[0036] Refer to Figures 1-5 , this embodiment provides a single crystal rod cutting machine, including a conveying mechanism arranged on a workbench 3 and a cutting device 1 for cutting a single crystal rod, and further including: a workbench 3, the workbench 3 is provided with a cutting relief groove 6; a spraying device 4, the spraying device 4 is arranged on both sides of the cutting relief groove 6, and the nozzles 12 of the spraying device 4 are aligned with the cutting relief groove 6; a coolant treatment device, the coolant treatment device is arranged on the tabletop of the workbench 3 and inside the workbench 3. After the conveying mechanism conveys the single crystal rod to a designated position, the cutting wire of the cutting device 1 cuts the single crystal rod. The workbench 3 reserves a cutting relief groove 6 for the cutting of the single crystal rod by the cutting wire to prevent interference. The spraying device 4 is arranged on both sides of the cutting relief groove 6, and the nozzles 12 spray coolant towards the cutting relief groove 6, which can fully cool the cutting of the single crystal rod by the cutting device 1 to avoid overheating and affecting the cutting efficiency. The cooled coolant is then treated by the coolant treatment device and reused.

[0037] Embodiment 2:

[0038] This embodiment provides a single crystal rod cutting machine. In addition to including the technical solutions of the above embodiment, it also has the following technical features.

[0039] Refer to Figure 1 and Figure 2 , the spraying device 4 includes: a mounting frame 9, the mounting frame 9 is a single-sided open structure, and two of the mounting frames 9 are symmetrically fixed on both sides of the cutting relief groove 6; a cooling pipe 11, the cooling pipe 11 is fixedly connected to the mounting frame 9 through a hoop 13, one end of the cooling pipe 11 is blocked, and one end is connected to a liquid inlet pipe 10; a nozzle 12, the nozzles 12 are circumferentially distributed on the cooling pipe 11 and are aligned with the cutting relief groove 6, and an anti-blocking and pressure-increasing component is provided in the nozzle 12. One end of the liquid inlet pipe 10 away from the cooling pipe 11 is connected to a water pump to control the coolant to enter the cooling pipe 11 and adjust the pressure. The nozzles 12 are circumferentially arranged on the cooling pipe 11 to spray the coolant circumferentially on the cutting part, and the cooling effect is better. At the same time, the cooling pipe 11 is fixed by the circumferentially arranged hoop 13 to prevent the cooling pipe 11 from shaking during the spraying of the coolant, which causes a change in the spraying direction of the coolant. At the same time, an anti-blocking and pressure-increasing component is provided in the nozzle 12 to prevent the cutting debris from blocking the nozzle 12 port.

[0040] Embodiment 3:

[0041] This embodiment provides a single crystal rod cutting machine. In addition to including the technical solutions of the above embodiment, it also has the following technical features.

[0042] Refer to Figure 3 , the anti-blocking and pressure-increasing component includes a valve ball 16 that blocks the flow cavity 14. The valve ball 16 is provided with a sliding groove 17. A fixing rod 20 is provided in the sliding groove 17. One end of the fixing rod 20 away from the valve ball 16 is connected to a fixing block 22 fixed to the inner wall of the nozzle 12. A push plate 19 is fixedly connected to the fixing rod 20. A first spring 21 is sleeved on the fixing rod 20 between the push plate 19 and the fixing block 22. One end of the first spring 21 is fixedly connected to the push plate 19, and the other end is fixedly connected to the fixing block 22. The coolant enters the cooling pipe 11 from the liquid inlet pipe 10. After filling the cooling pipe 11, the pressure in the pipe continues to increase, pushing the valve ball 16 to move along the fixing rod 20. The valve ball 16 pushes the push plate 19, and the push plate 19 compresses the second spring 31. The coolant enters the nozzle 12 from the flow cavity 14 through the liquid outlet 15 and sprays outwards. When the spraying stops, the coolant supply through the liquid inlet pipe 10 stops, and the pressure in the flow cavity 14 decreases. Under the restoring force of the second spring 31, the push plate 19 pushes the valve ball 16 to reset, preventing the cutting debris from entering the flow cavity 14.

[0043] Embodiment 4:

[0044] This embodiment provides a single crystal bar cutting machine, which, in addition to including the technical solutions of the above embodiments, also has the following technical features.

[0045] Referring to Figure 1 and Figure 4 , the coolant treatment device includes: a liquid flow inclined plane 7 provided on the tabletop, a liquid discharge port 8 provided at the inclined end of the liquid flow inclined plane 7, the liquid discharge port 8 is connected to a liquid discharge channel 23, the liquid discharge channel 23 communicates with a collection bin 24, and the inner cavity of the collection bin 24 is divided into a chip collection cavity 25 above the filter screen 26 and a liquid storage cavity 27 below the filter screen 26 by a filter screen 26. The coolant for cooling the cutting part falls on the lower liquid flow inclined plane 7, enters the liquid discharge channel 23 through the liquid discharge port 8 provided at the end of the liquid flow inclined plane 7, and enters the collection bin 24 provided in the workbench 3 through the liquid discharge channel 23. The cutting debris is filtered by the filter screen 26 of the collection bin 24 and remains in the chip collection cavity 25, and the filtered coolant remains in the liquid storage cavity 27, completing the separation of the coolant and the cutting debris. The filtered coolant can be reused.

[0046] Embodiment 5:

[0047] This embodiment provides a single crystal bar cutting machine, which, in addition to including the technical solutions of the above embodiments, also has the following technical features.

[0048] Referring to Figure 5 , it further includes a fixing mechanism. The fixing mechanism includes a mounting frame 28 provided on the tabletop, a first cylinder 29 provided at the top of the mounting frame 28, the output end of the first cylinder 29 passes through the mounting frame 28 and is connected to a mounting plate 30, and the mounting plate 30 is connected to a pressing block 32 through a second spring 31. The mounting plate 30 is in the shape of an arc plate, the second spring 31 and the pressing block 32 are circumferentially distributed on the mounting plate 30, and a rubber layer is provided on the pressing surface between the pressing block 32 and the single crystal bar to avoid scratching the surface of the single crystal bar during fixing. After the conveying device 2 conveys the single crystal bar to be cut to the required position, the first cylinder 29 in the fixing mechanism pushes the mounting plate 30 to move downward until the pressing block 32 abuts against the single crystal bar and the second spring 31 is compressed. The single crystal bar is pressed by the elastic force of the second spring 31, achieving the pressing purpose while avoiding mechanical extrusion damage to the surface of the single crystal bar.

[0049] The embodiments of the present application have been described above with reference to the accompanying drawings. Without conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application is not limited to the above specific embodiments. The above specific embodiments are merely illustrative and not restrictive. Under the inspiration of the present application, those of ordinary skill in the art can also make many forms without departing from the purpose of the present application and the scope protected by the claims, and all of them belong to the protection scope of the present application.

Claims

1. A single crystal bar cutting machine, comprising a conveying mechanism arranged on a workbench (3) and a cutting device (1) for cutting a single crystal silicon bar, characterized in that, It further includes: A workbench (3), and the workbench (3) is provided with a cutting relief groove (6); A spraying device (4), the spraying device (4) is arranged on both sides of the cutting relief groove (6), and the nozzles (12) of the spraying device (4) are aligned with the cutting relief groove (6); A coolant treatment device, and the coolant treatment device is arranged on the tabletop of the workbench (3) and inside the workbench (3).

2. The single crystal bar cutting machine according to claim 1, characterized in that, The spraying device (4) includes: An installation frame (9), the installation frame (9) has a single-sided open structure, and two installation frames (9) are symmetrically fixed on both sides of the cutting relief groove (6); A cooling pipe (11), the cooling pipe (11) is fixedly connected to the installation frame (9) through a hoop (13), one end of the cooling pipe (11) is blocked, and the other end is connected to a liquid inlet pipe (10); Nozzles (12), the nozzles (12) are circumferentially distributed on the cooling pipe (11) and are aligned with the cutting relief groove (6), and an anti-blocking and pressure-increasing assembly is arranged in the nozzles (12).

3. The single crystal bar cutting machine according to claim 2, wherein The anti-blocking and pressure-increasing assembly includes a valve ball (16) blocking a flow cavity (14), the valve ball (16) is provided with a sliding groove (17), a fixing rod (20) is arranged in the sliding groove (17), one end of the fixing rod (20) away from the valve ball (16) is connected to a fixing block (22) fixed to the inner wall of the nozzle (12), a push plate (19) is fixedly connected to the fixing rod (20), and a first spring (21) is sleeved on the fixing rod (20) between the push plate (19) and the fixing block (22), one end of the first spring (21) is fixedly connected to the push plate (19), and the other end is fixedly connected to the fixing block (22).

4. A single crystal bar cutting machine according to claim 1, wherein The coolant treatment device includes: a liquid flow inclined plane (7) arranged on the tabletop, a liquid discharge port (8) is arranged at the inclined end of the liquid flow inclined plane (7), the liquid discharge port (8) is connected to a liquid discharge channel (23), the liquid discharge channel (23) communicates with a collection bin (24), and the inner cavity of the collection bin (24) is divided into a chip collection cavity (25) above the filter screen (26) and a liquid storage cavity (27) below the filter screen (26) by a filter screen (26).

5. A single crystal rod cutting machine according to claim 1, characterized in that, It further includes a fixing mechanism, the fixing mechanism includes an installation frame (28) arranged on the tabletop, a first cylinder (29) is arranged at the top of the installation frame (28), the output end of the first cylinder (29) passes through the installation frame (28) and is connected to an installation plate (30), and the installation plate (30) is connected to a pressing block (32) through a second spring (31).

6. The single crystal bar cutting machine according to claim 5, wherein, The installation plate (30) is in the shape of an arc plate.

7. The single crystal bar cutting machine according to claim 6, wherein, The second springs (31) and the pressing blocks (32) are circumferentially distributed on the installation plate (30).

8. A single crystal bar cutting machine according to claim 7, characterized in that, A rubber layer is arranged on the pressing surface of the pressing block (32) and the single-crystal silicon rod.

9. The single crystal bar cutting machine according to claim 2, wherein One end of the liquid inlet pipe (10) away from the cooling pipe (11) is connected to a water pump.

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