Liquid storage container and substrate cleaning device

Abstract

The utility model discloses a liquid storage container and a substrate cleaning device, and relates to the technical field of display module cleaning. The liquid storage container comprises a container body, a drainage assembly and a filtering piece, and a liquid inlet is formed in the container body. The drainage assembly is arranged in the container body; the drainage assembly comprises a drainage plate, the drainage plate is arranged right opposite to the liquid inlet, and the drainage plate can guide liquid entering through the liquid inlet to the inner wall of the container body and then flow into the container body. And the filtering piece is arranged on the drainage plate and can filter impurities in liquid entering from the liquid inlet. According to the liquid storage container, liquid entering the container body can be filtered and cleaned, the filtered and cleaned liquid can be guided to the inner wall of the container body, and the liquid flows into the container body after the inner wall of the container body is washed, so that floating foam and impurities cannot be accumulated on the inner wall of the container body, automatic cleaning of the container body is achieved, and the working efficiency is improved. The liquid storage container does not need to be manually cleaned in order to guarantee the product yield, the labor cost is reduced, and the cleaning efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of display module cleaning, in particular to a liquid storage container and a substrate cleaning device. Background Art

[0002] In the manufacturing process of a display module, it is necessary to perform chemical cleaning or wet etching on a substrate. This processing includes liquid medicine treatment, deionized water rinsing, and organic solvent protective film treatment.

[0003] In the process of rinsing the substrate with deionized water, the water in the liquid storage container is recycled. Figure 1 It is a schematic structural diagram of a liquid storage container in the prior art. As Figure 1 shown, the container body 1 of the liquid storage container in the prior art includes a liquid inlet 11 and a liquid outlet 14. The liquid in the container body 1 flows through the liquid outlet 14 to the cleaning unit to rinse the substrate, and the rinsed liquid then enters the container body 1 through the liquid inlet 11. Since the liquid in the container body 1 is recycled, there are more impurities in the liquid after multiple uses, resulting in various impurities and floating foams accumulating in the container body 1. After the circulating water is used for a period of time, the substrate cannot be cleaned thoroughly, thus affecting the product yield. In the prior art, it is necessary to manually check the cleanliness of each liquid storage container regularly. However, due to the large number of machines, frequent inspection and cleaning consume a lot of manpower, increasing the labor cost. Moreover, manually cleaning the liquid storage container requires the machine to stop for half an hour to one hour, affecting the cleaning efficiency of the substrate. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a liquid storage container and a substrate cleaning device. The liquid storage container can achieve automatic cleaning, avoid wasting manpower, reduce the labor cost, and improve the cleaning efficiency.

[0005] To achieve the above object, the utility model adopts the following technical solutions:

[0006] A liquid storage container, comprising:

[0007] A container body, on which a liquid inlet is provided;

[0008] A drainage assembly, arranged inside the container body; the drainage assembly includes a drainage plate, the drainage plate is arranged opposite to the liquid inlet, and the drainage plate can guide the liquid entering through the liquid inlet to the inner wall of the container body and then flow into the container body;

[0009] A filter element, arranged on the drainage plate, and the filter element can filter impurities in the liquid entering through the liquid inlet.

[0010] As an alternative to the liquid storage container, the drainage plate is inclined at a set angle from the position facing the liquid inlet as the center towards the opposite side walls of the container body, and a first gap is left between the drainage plate and the opposite side walls of the container body.

[0011] As an alternative to the liquid storage container, the set angle is an acute angle.

[0012] As an alternative to the liquid storage container, the drainage assembly further includes a baffle plate, which is arranged on the side of the drainage plate facing away from the liquid inlet, and the baffle plate is close to the first gap, and the baffle plate extends from the drainage plate in the direction away from the liquid inlet.

[0013] As an alternative to the liquid storage container, the filter element includes a porous filter cotton, and the porous filter cotton is detachably connected to the drainage plate.

[0014] As an alternative to the liquid storage container, a sewage outlet is further provided on the container body, the sewage outlet is arranged on the side wall of the container body, and the position of the sewage outlet is at the liquid level inside the container body.

[0015] As an alternative to the liquid storage container, a sewage discharge channel is further provided on the side wall of the container body, one end of the sewage discharge channel is communicated with the sewage outlet, and the other end is communicated with the outside.

[0016] As an alternative to the liquid storage container, a liquid outlet is further provided on the container body, and the liquid outlet can be communicated with the liquid inlet.

[0017] As an alternative to the liquid storage container, the liquid inlet is arranged at the top of the container body, and the liquid outlet is arranged at the bottom of the container body.

[0018] A substrate cleaning device includes the liquid storage container according to any of the above solutions.

[0019] Advantages of the present utility model:

[0020] The liquid storage container provided by the present utility model is provided with a drainage assembly facing the liquid inlet in the container body, and a filter element is arranged on the drainage plate, so that the liquid entering the container body is first filtered by the filter element to remove impurities, clean the liquid, and reduce the generation of foam; moreover, the drainage plate can guide the liquid entering through the liquid inlet to the inner wall of the container body, wash the inner wall of the container body, so that the foam and impurities cannot accumulate on the inner wall of the container body, and reduce the formation of accumulated foam at the liquid level in the container body. This liquid storage container can not only filter and clean the liquid entering the container body, but also guide the filtered and cleaned liquid to the inner wall of the container body, wash the inner wall of the container body and then flow back into the container body, so that impurities and foam cannot accumulate on the inner wall of the container body, realizing the automatic cleaning of the container body, without stopping the machine for manual cleaning of the liquid storage container to ensure the product yield, reducing the labor cost and improving the cleaning efficiency of the substrate.

[0021] The substrate cleaning device provided by the present utility model includes the above-mentioned liquid storage container, which can not only ensure the cleaning quality of the substrate, but also reduce the labor cost and improve the cleaning efficiency of the substrate. Description of the Drawings

[0022] Figure 1 is a schematic structural view of a liquid storage container in the prior art;

[0023] Figure 2 is a schematic structural view of the liquid storage container provided by the specific embodiment of the present utility model;

[0024] Figure 3 is Figure 2 the sectional view taken along the line A-A in

[0025] In the figure:

[0026] 1, container body; 2, drainage assembly; 3, filter element; 4, first gap; 5, second gap; 6, liquid level;

[0027] 11, liquid inlet; 12, sewage outlet; 13, sewage channel; 14, liquid outlet; 21, drainage plate; 22, baffle. Specific Embodiment

[0028] In order to make the technical problems solved by the present utility model, the technical solutions adopted and the achieved technical effects clearer, the technical solutions of the present utility model will be further described below with reference to the drawings and through specific embodiments.

[0029] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0030] Figure 2 is a schematic structural view of the liquid storage container provided by the specific embodiment of the present utility model, as Figure 2 shown, this embodiment provides a liquid storage container, including a container body 1, a drainage assembly 2, and a filter element 3. An inlet 11 and an outlet 14 are provided on the container body 1, and the outlet 14 can communicate with the inlet 11. The inlet 11 is provided at the top of the container body 1, and the outlet 14 is provided at the bottom of the container body 1. The height of the liquid level 6 in the container body 1 is set. The outlet 14 is connected to the cleaning unit through an outlet pipeline, and the liquid in the container body 1 enters the cleaning unit through the outlet 14 and the outlet pipeline. The cleaning unit is used to clean the substrate. The cleaning unit is connected to the inlet 11 through an inlet pipeline, and the cleaned liquid enters the container body 1 again through the inlet pipeline and the inlet 11, so as to realize the recycling of the liquid.

[0031] In the liquid storage container provided by this embodiment, by arranging a drainage assembly 2 in the container body 1, the drainage assembly 2 includes a drainage plate 21. The drainage plate 21 is arranged opposite to the inlet 11, and the drainage plate 21 can guide the liquid entering through the inlet 11 to the inner wall of the container body 1 and then flow into the container body 1; the filter element 3 is arranged on the drainage plate 21 and can filter the impurities in the liquid entering through the inlet 11, so that the liquid entering the container body 1 is first filtered by the filter element 3 to remove impurities, clean the liquid, and reduce the generation of foam; moreover, the drainage plate 21 can guide the liquid entering through the inlet 11 to the inner wall of the container body 1, wash the inner wall of the container body 1, so that the foam cannot accumulate on the inner wall of the container body 1. This liquid storage container can not only filter and clean the liquid entering the container body 1, but also guide the filtered and cleaned liquid to the inner wall of the container body 1, wash the inner wall of the container body 1 and then flow into the container body 1, realizing the automatic cleaning of the container body 1, without stopping the machine to manually clean the liquid storage container to ensure the product yield, reducing the labor cost, and improving the cleaning efficiency of the substrate.

[0032] In order to enable the liquid entering the container body 1 through the liquid inlet 11 to be drained to the inner wall of the container body 1, the drainage plate 21 is inclined at a set angle from the position directly opposite the liquid inlet 11 as the center towards the direction close to the opposite side walls of the container body 1, and a first gap 4 is left between the drainage plate 21 and the opposite side walls of the container body 1. Figure 2 The direction indicated by the arrow in the figure is the flow direction of the liquid, that is, the drainage plate 21 is set as a symmetric structure with the position directly opposite the liquid inlet 11 as the center, guiding the liquid flowing from the liquid inlet 11 to the drainage plate 21 to be divided into two paths, respectively flowing towards the direction close to the opposite side walls of the container body 1, flowing to the inner wall of the container body 1, and flowing down along the inner wall of the container body 1 through the first gap 4 between the drainage plate 21 and the inner wall of the container body 1, so as to wash the floating foam accumulated on the inner wall of the container body 1.

[0033] Figure 3 is Figure 2 the sectional view taken along the line A-A in the figure, as Figure 2 and Figure 3 shown, since the container body 1 has two pairs of opposite side walls, a first gap 4 is left between one pair of opposite side walls and the drainage plate 21, and no gap or a second gap 5 is left between the other pair of opposite side walls and the drainage plate 21. When no gap is left between the other pair of opposite side walls and the drainage plate 21, the liquid entering from the liquid inlet 11 only flows to one pair of opposite side walls through the two first gaps 4; when a second gap 5 is left between the other pair of opposite side walls and the drainage plate 21, the liquid entering from the liquid inlet 11 flows to one pair of opposite side walls through the two first gaps 4 respectively and flows to the other pair of opposite side walls through the two second gaps 5.

[0034] Specifically, the set angle is an acute angle. That is, the drainage plate 21 is inclined from the position directly opposite the liquid inlet 11 as the center towards the direction close to the top plate of the container body 1. Such a setting can enable the liquid to flow from one end of the side plate close to the top plate to the bottom plate, increasing the flushing area of the container body 1 and having a better flushing effect on the side walls of the container body 1.

[0035] Of course, in other embodiments, the set angle can also be an obtuse angle, that is, the drainage plate 21 is inclined from the position directly opposite the liquid inlet 11 as the center towards the direction close to the bottom plate of the container body 1, which can also enable the liquid entering from the liquid inlet 11 to flow along the drainage plate 21 to the opposite side walls of the container body 1 to wash the two side walls of the container body 1. Or, the drainage plate 21 is set as a quadrangular pyramid, the apex angle of the quadrangular pyramid is set facing the liquid inlet 11, and the four side faces are respectively set corresponding to the four side walls of the container body 1.

[0036] Furthermore, the drainage assembly 2 further includes a baffle 22, which is disposed on a side of the drainage plate 21 away from the liquid inlet 11, and the baffle 22 is disposed close to the first gap 4, and the baffle 22 extends from the drainage plate 21 in a direction away from the liquid inlet 11. In this embodiment, since the drainage plate 21 is inclined from the center position toward the direction close to the top plate, most of the liquid flows obliquely upwards to the side wall of the container body 1 under the guidance of the drainage plate 21, but a small part of the liquid still flows downward along the end surface of the drainage plate 21 to the lower surface of the drainage plate 21 under the action of gravity, and the baffle 22 can guide the liquid on the lower surface of the drainage plate 21 to flow downward along the side of the baffle 22 into the container body 1.

[0037] Specifically, the filter element 3 includes a porous filter cotton, which is detachably connected to the drain plate 21. The porous filter cotton can adsorb fine debris and other impurities with a density greater than water in the liquid entering the container body 1 from the liquid inlet 11 in the pores, preventing impurities from flowing into the container body 1 to clean the substrate. The porous filter cotton can be placed directly on the drain plate 21, or it can be fixed on the drain plate 21 by a limiter or a fixing member to prevent the porous filter cotton from being displaced by the impact of the liquid, blocking the first gap 4 and / or the second gap 5, and affecting the circulation of the liquid. By regularly replacing the porous filter cotton, it is prevented that the pores of the porous filter cotton are filled with impurities and effective filtration cannot be achieved.

[0038] Of course, in other embodiments, the filter element 3 may also be other filter elements 3 such as a filter net, and the impurities filtered by the filter net remain on the guide plate 21, and the impurities on the guide plate 21 are cleaned regularly.

[0039] After the liquid in the container body 1 is cleaned by the cleaning unit, the oil on the substrate will form foam in the liquid. After being filtered by the filter element 3, a small amount of foam will be drained to the inner wall of the container body 1 through the drainage plate 21. The foam on the inner wall of the container body 1 is flushed by the liquid and flows to the liquid surface 6. Therefore, a small amount of foam will remain at the liquid surface 6.

[0040] Furthermore, in order to prevent the accumulation of floating foam at the liquid surface 6 in the container body 1, a drain port 12 is further provided on the container body 1. The drain port 12 is provided on the side wall of the container body 1, and the position of the drain port 12 is located at the liquid surface 6 in the container body 1. The floating foam accumulated at the liquid surface 6 will be discharged through the drain port 12. The drain port 12 is provided on one of the side walls or both side walls of the other pair of oppositely arranged side walls. In this embodiment, the drain port 12 is provided on one of the side walls, and there are two drain ports 12, and the two drain ports 12 are symmetrically arranged, and the symmetry lines of the two drain ports 12 coincide with the projection of the center line of the liquid inlet 11 on the side wall.

[0041] In one embodiment, a sewage discharge channel 13 is further provided on the side wall of the container body 1. One end of the sewage discharge channel 13 is communicated with the sewage outlet 12, and the other end is communicated with the outside, so that the floating foam enters the sewage discharge channel 13 through the sewage outlet 12 and then is discharged through the sewage discharge channel 13.

[0042] In one embodiment, the baffle 22 is located outside the sewage outlet 12, which can prevent the liquid from flowing from the lower surface of the drainage plate 21 to the sewage outlet 12 and affecting the volume of the liquid in the container body 1.

[0043] This embodiment also provides a substrate cleaning device, including the above-mentioned liquid storage container, which can not only ensure the cleaning quality of the substrate, but also reduce the labor cost and improve the cleaning efficiency of the substrate.

[0044] The above content is only the preferred embodiment of the present invention. For those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manner and application scope. The content of this specification should not be construed as a limitation to the present invention.

Claims

1. A liquid storage container, characterized in that, include: A container body (1), wherein the container body (1) is provided with a liquid inlet (11); a drainage component (2) disposed in the container body (1); the drainage component (2) comprises a drainage plate (21), the drainage plate (21) being disposed opposite to the liquid inlet (11), the drainage plate (21) being capable of guiding the liquid entering through the liquid inlet (11) to the inner wall of the container body (1) and then flowing into the container body (1); A filter element (3) is arranged on the guide plate (21), and the filter element (3) can filter impurities in the liquid entering through the liquid inlet (11).

2. The liquid storage container according to claim 1, characterized in that, The guide plate (21) is centered at a position directly opposite to the liquid inlet (11) and is inclined at a set angle toward the opposite side walls of the container body (1), and a first gap (4) is left between the guide plate (21) and the opposite side walls of the container body (1).

3. The liquid storage container according to claim 2, characterized in that, The set angle is an acute angle.

4. The liquid storage container according to claim 3, characterized in that, The drainage assembly (2) further comprises a baffle (22), wherein the baffle (22) is arranged on a side of the drainage plate (21) away from the liquid inlet (11), and the baffle (22) is arranged close to the first gap (4), and the baffle (22) extends from the drainage plate (21) in a direction away from the liquid inlet (11).

5. The liquid storage container according to claim 1, wherein The filter element (3) comprises a porous filter cotton, and the porous filter cotton is detachably connected to the drainage plate (21).

6. The liquid storage container according to claim 1, characterized in that The container body (1) is also provided with a sewage outlet (12), which is arranged on the side wall of the container body (1), and the sewage outlet (12) is located at the liquid level (6) in the container body (1).

7. The liquid storage container according to claim 6, characterized in that, A sewage discharge channel (13) is also provided on the side wall of the container body (1), one end of the sewage discharge channel (13) is connected to the sewage discharge port (12), and the other end is connected to the outside.

8. The liquid storage container according to any one of claims 1-7, characterized in that, The container body (1) is also provided with a liquid outlet (14), and the liquid outlet (14) can be communicated with the liquid inlet (11).

9. The liquid storage container according to claim 8, characterized in that, The liquid inlet (11) is arranged at the top of the container body (1), and the liquid outlet (14) is arranged at the bottom of the container body (1).

10. A substrate cleaning device, characterized in that, Comprising a liquid storage container as described in any one of claims 1-9.

Images