Substrate overturning coating device

Abstract

The utility model provides a substrate overturning and coating device which comprises a slewing mechanism, an anti-attachment plate and a jig bearing plate, the anti-attachment plate is arranged below the jig bearing plate, the slewing mechanism is connected with a top plate of a main cavity, a connecting support is arranged below the slewing mechanism, and the anti-attachment plate and the jig bearing plate are fixed through the connecting support; a plurality of mounting holes are formed in the jig bearing plate, an overturning piece is arranged in each mounting hole, limiting grooves are formed in the left side edge and the right side edge of each mounting hole, shaft sleeves are arranged on the front side and the rear side of each mounting hole, a limiting protruding block extends outwards from one of the left side edge and the right side edge of each overturning piece, connecting shafts are arranged on the front side and the rear side of each overturning piece, and an overturning rod extending obliquely upwards is arranged on one connecting shaft; a turnover device is further arranged below the swing mechanism and can stir a turnover rod to enable a turnover piece to rotate, a limiting groove is used for supporting a limiting protruding block, the end of a connecting shaft is in sliding fit with a shaft sleeve in the turnover process, disassembly and assembly are convenient, rotation is smoother and not prone to falling, and an anti-sticking plate is additionally arranged, so that the jig cannot be coated with a film in the film coating process.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, and more specifically to a substrate flipping film coating device. Background Art

[0002] Vacuum evaporation machines and other coating equipment are used to perform physical vapor deposition coating on the surface of objects / substrates. The substrate is fixed by a coating pot, and one or more coating pots are set inside the main cavity. The coating pots will revolve or rotate in a planetary manner to increase the uniformity of the coating.

[0003] The prior art with announcement number CN 218710802 U designs a plating pot structure with a flippable substrate, and springs are arranged at both ends of the flipping body to slow down the inertial impact force of the flipping part falling rapidly. However, the elastic potential energy of the springs varies, which may cause elastic failure. In addition, small parts are easy to fall off during installation, which is inconvenient for disassembly and assembly, is not conducive to cost saving, and the jig is easy to be plated on the film during coating.

[0004] Therefore, the present application proposes a substrate flip coating device that is easy to disassemble and assemble, and has stable and smooth rotation. Utility Model Content

[0005] In view of this, in order to solve the above problems, the utility model proposes a substrate flipping coating device, by replacing the springs at both ends of the original connecting shaft 316 with a sleeve 313 for sliding fit, which makes disassembly and assembly convenient and makes the rotation smoother and less likely to fall, thus saving costs, and adding an anti-attachment plate 2 so that the jig will not be plated on the film during coating.

[0006] A substrate flip coating device, the coating device is located in the upper part of the main cavity, characterized in that: the coating device comprises a rotating mechanism 1, an anti-attachment plate 2, and a fixture support plate 3, the anti-attachment plate 2 is arranged below the fixture support plate 3, the rotating mechanism 1 is connected to the top plate of the main cavity, a connecting bracket 11 is arranged below the rotating mechanism 1, and the anti-attachment plate 2 and the fixture support plate 3 are fixed by the connecting bracket 11; a plurality of mounting holes 31 are arranged on the fixture support plate 3, each mounting hole 31 is provided with a flip member 314, the flip member 314 is used to fix the substrate 33, and the left and right sides of the mounting hole 31 are provided with limiting grooves 312, a front Axle sleeves 313 are provided on the rear two sides, and a limiting protrusion 315 extends outward from one of the left and right sides of the flip piece 314, and connecting shafts 316 are provided on the front and rear sides, and a flip rod 317 extending obliquely upward is provided on one of the connecting shafts 316; a flip device 4 is also provided under the rotating mechanism 1, and the flip device 4 can move the flip rod 317 to rotate the flip piece 314, and the limiting groove 312 is used to support the limiting protrusion 315, so that the flip piece 314 is stable and rotates 180° each time, and when flipping, the end of the connecting shaft 316 is slidably matched with the shaft sleeve 313, which is convenient for disassembly and assembly, and the flipping is smooth and not easy to fall off.

[0007] Further, the flipping device 4 includes a lifting cylinder 41 and a lever 42. The bottom of the lifting cylinder 41 is connected to the lever 42. When the fixture carrier plate 3 rotates, the end of the lever 42 away from the lifting cylinder 41 can contact the flipping rod 317 to flip the flipping member 314. After the flipping is completed, the lifting cylinder 41 rises to make the lever 42 away from the rotating fixture carrier plate 3. At this time, the lever 42 will not contact the flipping rod 317.

[0008] In some embodiments, a limiting block 43 is provided in the middle of the lever 42. The limiting block 43 is provided on both sides of the middle of the lever 42 to reduce the vibration of the lever 42 when flipping the flipping rod 317.

[0009] In some embodiments, a reinforcing rib 44 is provided below the lever 42 to strengthen the strength of the lever 42 when the lever 42 is long, so that the lever 42 is not easily driven by the flipping member 314 to vibrate when flipping the flipping rod 317.

[0010] Further, connecting blocks 311 are provided on the front and rear sides of the mounting hole 31. The connecting blocks 311 are connected to the fixture carrier plate 3 by screws. A bushing 313 is provided on the side of the connecting block 311 close to the mounting hole 31. The bushing 313 is used for sleeving and connecting with the connecting shaft 316, so that the connecting shaft 316 rotates in the bushing 313 during flipping.

[0011] Further, the length and width of the limiting groove 312 are greater than those of the limiting protrusion 315. When the lower surface of the limiting protrusion 315 contacts the limiting groove 312, the flipping member 314 is horizontal.

[0012] Further, there is a gap between the flipping member 314 and one of the connecting blocks 311 for arranging the flipping rod 317. The flipping rod 317 is fixed to the connecting shaft 316 at the corresponding position. The flipping rod 317 is V-shaped, X-shaped or cross-shaped.

[0013] Further, one or more stepped through holes are provided in the middle of the flipping member 314. The substrate 33 is placed on the stepped through holes. The stepped through holes are in contact with the edge of the lower surface of the substrate 33. A pressing ring 34 is provided on the upper surface of the substrate 33. The pressing ring 34 presses the edge of the upper surface of the substrate 33. The solid thickness of the pressing ring 34 is the same as the width of the step protruding from the stepped through hole.

[0014] Further, a plurality of pressing strips 36 are provided on the lower surface of the flipping member 314. One end of the pressing strip 36 is fixed with a screw, and the other end presses the pressing ring 34, so that the substrate 33 is fixed in the flipping member 314. Loosening the screw allows the pressing strip 36 to rotate, so that the substrate 33 can be removed.

[0015] In some embodiments, a bending portion 361 is provided in the middle of the pressure strip 36, so that the pressure strip 36 has space for deformation. One end of the pressure strip 36 that presses against the pressure ring 34 is a free end, and the substrate 33 can be pulled out by pulling the pressure strip 36 without loosening the screw.

[0016] Further, the area of the anti-deposition plate 2 is larger than that of the fixture carrier plate 3, which is used to prevent the fixture from being coated with film during film coating.

[0017] Further, the anti-deposition plate 2 is an octagonal or circular stainless steel anti-deposition plate 2, and the surface of the anti-deposition plate 2 is sandblasted to increase the adhesion.

[0018] The beneficial effects of the present utility model: The present utility model provides a substrate flipping and coating device. The coating device is located in the upper part of the main cavity. The coating device includes a rotary mechanism 1, an anti-deposition plate 2, and a fixture carrier plate 3. The anti-deposition plate 2 is arranged below the fixture carrier plate 3. The rotary mechanism 1 is connected to the top plate of the main cavity. A connecting bracket 11 is provided below the rotary mechanism 1. The anti-deposition plate 2 and the fixture carrier plate 3 are fixed through the connecting bracket 11. A plurality of mounting holes 31 are provided on the fixture carrier plate 3. A flipping member 314 is arranged in each mounting hole 31. The flipping member 314 is used to fix the substrate 33. Limiting grooves 312 are arranged on the left and right sides of the mounting hole 31, and bushings 313 are arranged on the front and rear sides. One of the left and right sides of the flipping member 314 extends outward with a limiting protrusion 315, and connecting shafts 316 are arranged on the front and rear sides. A flipping rod 317 extending obliquely upward is arranged on one of the connecting shafts 316. A flipping device 4 is also provided below the rotary mechanism 1. The flipping device 4 can push the flipping rod 317 to rotate the flipping member 314. The limiting groove 312 is used to support the limiting protrusion 315, so that the flipping member 314 is stable and rotates 180° each time. When flipping, the end of the connecting shaft 316 slides with the bushing 313, which is convenient for disassembly and assembly, and the flipping is smooth and not easy to fall off; at the same time, an anti-deposition plate 2 is added, so that the fixture will not be coated with film during film coating. Description of the Drawings

[0019] Figure 1 It is the overall structure diagram of the substrate flipping and coating device of the present utility model.

[0020] Figure 2 It is the structure diagram of the substrate flipping and coating device of the present utility model without the rotary mechanism.

[0021] Figure 3 It is the partial reverse structure diagram of the substrate flipping and coating device of the present utility model.

[0022] Figure 4 It is the partial enlarged view of the substrate flipping and coating device of the present utility model.

[0023] Figure 5 It is the structure diagram of the flipping member of the substrate flipping and coating device of the present utility model.

[0024] Figure 6 for the substrate turning coating device of the present utility model Figure 3 Enlarged view of part A

[0025] Description of main component symbols

[0026] Rotating mechanism 1, connecting bracket 11, anti - sticking plate 2, fixture bearing plate 3, mounting hole 31, connecting block 311, limiting groove 312, bushing 313, turning part 314, limiting convex block 315, connecting shaft 316, turning rod 317, substrate 33, pressing ring 34, pressing strip 36, bending part 361, turning device 4, lifting cylinder 41, lever 42, limiting stop 43, reinforcing rib 44

[0027] The following specific embodiments will further illustrate the present utility model in conjunction with the above - mentioned drawings Specific embodiments

[0028] As Figure 1 shown, it is the overall structure diagram of the substrate turning coating device of the present utility model; as Figure 2 shown, it is the structure diagram of the substrate turning coating device of the present utility model without the rotating mechanism; as Figure 3 shown, it is the partial structure diagram of the reverse side of the substrate turning coating device of the present utility model; as Figure 4 shown, it is the partial enlarged view of the substrate turning coating device of the present utility model. As Figure 5 shown, it is the structure diagram of the turning part of the substrate turning coating device of the present utility model; as Figure 6 shown, it is the Figure 3 Enlarged view of part A Example 1:

[0029] A substrate flipping coating device, the coating device is located in the upper part of the main cavity, and is characterized in that: the coating device includes a rotary mechanism 1, a anti-deposition plate 2, and a fixture carrier plate 3. The anti-deposition plate 2 is arranged below the fixture carrier plate 3. The rotary mechanism 1 is connected to the top plate of the main cavity. A connecting bracket 11 is arranged below the rotary mechanism 1. The anti-deposition plate 2 and the fixture carrier plate 3 are fixed through the connecting bracket 11. A plurality of mounting holes 31 are arranged on the fixture carrier plate 3. A flipping member 314 is arranged in each mounting hole 31 for fixing the substrate 33. Limiting grooves 312 are arranged on the left and right sides of the mounting hole 31, and bushings 313 are arranged on the front and back sides. One of the left and right sides of the flipping member 314 extends outward with a limiting convex block 315, and connecting shafts 316 are arranged on the front and back sides. A flipping rod 317 extending obliquely upward is arranged on one of the connecting shafts 316. A flipping device 4 is further arranged below the rotary mechanism 1. The flipping device 4 can toggle the flipping rod 317 to make the flipping member 314 rotate. The limiting groove 312 is used to support the limiting convex block 315, so that the flipping member 314 is stable and rotates 180° each time. When flipping, the end of the connecting shaft 316 is slidably mated with the bushing 313, which is convenient for disassembly and assembly, and the flipping is smooth and not easy to fall off.

[0030] The flipping device 4 includes a lifting cylinder 41 and a lever 42. The bottom of the lifting cylinder 41 is connected to the lever 42. When the fixture carrier plate 3 rotates, the end of the lever 42 away from the lifting cylinder 41 can contact the flipping rod 317 to toggle the flipping member 314 to turn over. After the turning over is completed, the lifting cylinder 41 rises to make the lever 42 away from the rotating fixture carrier plate 3. At this time, the lever 42 will not contact the flipping rod 317.

[0031] A limiting block 43 is arranged in the middle of the lever 42. The limiting block 43 is arranged on both sides of the middle of the lever 42 to reduce the shaking of the lever 42 when toggling the flipping rod 317.

[0032] A reinforcing rib 44 is arranged below the lever 42 to strengthen the strength of the lever 42 when the lever 42 is long, so that it is not easy to be driven by the flipping member 314 to shake when toggling the flipping rod 317.

[0033] Connecting blocks 311 are arranged on the front and back sides of the mounting hole 31. The connecting blocks 311 are connected to the fixture carrier plate 3 by screws. A bushing 313 is arranged on one side of the connecting block 311 close to the mounting hole 31. The bushing 313 is used for sleeving connection with the connecting shaft 316, so that the connecting shaft 316 rotates in the bushing 313 when flipping.

[0034] The length and width of the limiting groove 312 are larger than those of the limiting convex block 315. When the lower surface of the limiting convex block 315 contacts the limiting groove 312, the flipping member 314 is horizontal.

[0035] There is a gap between the flipping member 314 and one of the connecting blocks 311 for arranging a flipping rod 317. The flipping rod 317 is fixed to the connecting shaft 316 at the corresponding position. The flipping rod 317 is V-shaped, X-shaped or cross-shaped.

[0036] One or more stepped through-holes are provided in the middle of the flipping member 314. A substrate 33 is placed on the stepped through-holes. The stepped through-holes are in contact with the edge of the lower surface of the substrate 33. A pressing ring 34 is provided on the upper surface of the substrate 33. The pressing ring 34 presses the edge of the upper surface of the substrate 33. The solid thickness of the pressing ring 34 is the same as the width of the step protruding from the stepped through-hole.

[0037] A plurality of pressing strips 36 are provided on the lower surface of the flipping member 314. One end of the pressing strip 36 is fixed with a screw, and the other end presses the pressing ring 34, so that the substrate 33 is fixed in the flipping member 314. Loosening the screw allows the pressing strip 36 to rotate, so that the substrate 33 can be removed.

[0038] A bending portion 361 is provided in the middle of the pressing strip 36, so that the pressing strip 36 has space for deformation. The end pressing the pressing ring 34 is a free end, and the substrate 33 can be pulled out by pulling the pressing strip 36 without loosening the screw.

[0039] The area of the anti-deposition plate 2 is larger than that of the fixture carrier plate 3, which is used to prevent the fixture from being coated during film coating.

[0040] The anti-deposition plate 2 is an octagonal or circular stainless steel anti-deposition plate 2. The surface of the anti-deposition plate 2 is sandblasted to increase adhesion.

[0041] Beneficial effects of the utility model: The utility model proposes a substrate flip coating device, the coating device is located in the upper part of the main cavity, the coating device includes a rotating mechanism 1, an anti-adhesion plate 2, and a fixture support plate 3, the anti-adhesion plate 2 is arranged below the fixture support plate 3, the rotating mechanism 1 is connected to the top plate of the main cavity, a connecting bracket 11 is arranged below the rotating mechanism 1, the anti-adhesion plate 2 and the fixture support plate 3 are fixed by the connecting bracket 11, a plurality of mounting holes 31 are arranged on the fixture support plate 3, each mounting hole 31 is provided with a flip member 314, the flip member 314 is used to fix the substrate 33, the left and right sides of the mounting hole 31 are provided with limiting grooves 312, and the front and rear sides are provided with There is a shaft sleeve 313, one of the left and right sides of the flip member 314 extends outward with a limiting protrusion 315, and connecting shafts 316 are arranged on the front and rear sides, and a flip rod 317 extending obliquely upward is arranged on one of the connecting shafts 316. A flip device 4 is also provided under the rotating mechanism 1, and the flip device 4 can move the flip rod 317 to rotate the flip member 314. The limiting groove 312 is used to support the limiting protrusion 315, so that the flip member 314 is stable and rotates 180° each time. When flipping, the end of the connecting shaft 316 is slidably matched with the shaft sleeve 313, which is convenient for disassembly and assembly, and the flipping is smooth and not easy to fall off; at the same time, an anti-attachment plate 2 is added to prevent the fixture from being plated on the film during coating.

[0042] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A substrate flipping coating device, the coating device is located in the upper part of the main cavity, and is characterized in that: The coating device includes a rotary mechanism (1), a sputtering shield (2), and a fixture carrier plate (3). The sputtering shield (2) is arranged below the fixture carrier plate (3). The rotary mechanism (1) is connected to the top plate of the main cavity. A connecting bracket (11) is provided below the rotary mechanism (1). The sputtering shield (2) and the fixture carrier plate (3) are fixed through the connecting bracket (11). A plurality of mounting holes (31) are provided on the fixture carrier plate (3). A flipping member (314) is arranged in each mounting hole (31). The flipping member (314) is used to fix the substrate (33). Limiting grooves (312) are arranged on the left and right sides of the mounting hole (31), and bushings (313) are arranged on the front and rear sides. One of the left and right sides of the flipping member (314) extends outwards with a limiting protrusion (315), and connecting shafts (316) are arranged on the front and rear sides. A flipping rod (317) extending obliquely upwards is arranged on one of the connecting shafts (316). A flipping device (4) is further provided below the rotary mechanism (1). The flipping device (4) can toggle the flipping rod (317) to rotate the flipping member (314). The limiting groove (312) is used to support the limiting protrusion (315) to make the flipping member (314) stable and rotate 180° each time. When flipping, the end of the connecting shaft (316) is in sliding fit with the bushing (313).

2. The substrate turning coating device according to claim 1, wherein: The flipping device (4) includes a lifting cylinder (41) and a lever (42). The bottom of the lifting cylinder (41) is connected to the lever (42). When the fixture carrier plate (3) rotates, the end of the lever (42) away from the lifting cylinder (41) can contact the flipping rod (317) to toggle the flipping member (314) to turn over. After turning over is completed, the lifting cylinder (41) rises to make the lever (42) away from the rotating fixture carrier plate (3). At this time, the lever (42) will not contact the flipping rod (317).

3. The substrate turning coating device according to claim 1, wherein: Connecting blocks (311) are arranged on the front and rear sides of the mounting hole (31). The connecting blocks (311) are connected to the fixture carrier plate (3) by screws. Bushings (313) are arranged on one side of the connecting blocks (311) close to the mounting hole (31). The bushings (313) are used to sleeve the connecting shafts (316) so that the connecting shafts (316) rotate in the bushings (313) when flipping.

4. The substrate flipping coating device according to claim 1, characterized in that: The length and width of the limiting groove (312) are larger than those of the limiting protrusion (315). When the lower surface of the limiting protrusion (315) contacts the limiting groove (312), the flipping member (314) is horizontal.

5. The substrate turnover coating device according to claim 1, characterized in that: A gap is provided between the flipping member (314) and one of the connecting blocks (311) for arranging the flipping rod (317). The flipping rod (317) is fixed to the corresponding connecting shaft (316).

6. The substrate turnover coating device according to claim 1, wherein: One or more stepped through holes are provided in the middle of the flipping member (314). The substrate (33) is placed on the stepped through holes. The stepped through holes are in contact with the edges of the lower surface of the substrate (33). A pressing ring (34) is arranged on the upper surface of the substrate (33). The pressing ring (34) presses the edges of the upper surface of the substrate (33). The solid thickness of the pressing ring (34) is the same as the width of the protruding step of the stepped through hole.

7. The substrate turnover coating device according to claim 1, wherein: The lower surface of the flipping member (314) is provided with a plurality of pressing strips (36). One end of the pressing strip (36) is fixed with a screw, and the other end presses against the pressing ring (34), so that the substrate (33) is fixed within the flipping member (314). By loosening the screw, the pressing strip (36) can rotate, enabling the substrate (33) to be removed.

8. The substrate flipping coating device according to claim 7, characterized in that: The middle part of the pressing strip (36) is provided with a bending part (361), so that the pressing strip (36) has space for deformation. The end pressing against the pressing ring (34) is a free end, and the substrate (33) can be removed by pulling the pressing strip (36) without loosening the screw.

9. The substrate turning coating device according to claim 1, characterized in that: The area of the anti-sticking plate (2) is larger than that of the jig carrier plate (3).

10. The substrate flipping coating device according to claim 1, characterized in that: The anti-sticking plate (2) is an octagonal or circular stainless steel anti-sticking plate, and the surface of the anti-sticking plate (2) is sandblasted.

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