Multi-chip variable-pitch transferring device for semiconductor chips

Abstract

The utility model discloses a multi-chip variable-pitch transfer device for semiconductor chips. The multi-sheet material variable-pitch transfer device comprises a claw seat, a variable-pitch mechanism, two transverse pull arms, two clamping plates, a synchronous belt transmission system and a plurality of positioning carriers, a synchronizing mechanism of the pitch changing mechanism is located in a pitch changing cavity of the claw seat, and a plurality of reference blocks fixed to the synchronizing mechanism are transversely arranged at equal intervals and slidably connected to the claw seat. The middles of two transverse pull arms are located in the two transmission through holes, the upper ends of the two transverse pull arms are connected with reference blocks on the outer sides, and clamping blocks and two clamping plates at the lower ends of the two transverse pull arms fix the two ends of two transverse horizontal sections of the synchronous belt. The positioning carriers are connected with the upper ends of the reference blocks respectively, the servo motor is started, and under the action of the synchronizing mechanism, the distances between the different stations of the multiple positioning carriers and the different stations of the chips are different. The utility model has the effects of reducing the clamping times, reducing the operation frequency of the manipulator, saving time and obviously improving the overall test efficiency.

Description

Technical Field

[0001] The utility model relates to the field of material movement, in particular to a multi-chip variable pitch transfer device for semiconductor chips. Background Art

[0002] During the storage and transportation of components in 3C electronic devices, especially semiconductor chips, the components are usually neatly arranged in a tray (tray) to ensure that there is no contact between components and prevent damage caused by collision. To increase the storage capacity, the spacing between components is often designed to be very small. However, before component assembly, testing is required, and a larger spacing is needed during testing, so the distance between components must be increased to avoid mutual interference. In the prior art, usually a manipulator is used to extract components one by one for individual testing, or multiple manipulators are used to transfer the components to a designated testing position and then multiple components are tested simultaneously. Its defects are as follows: First, using a manipulator to pick up components one by one and move them to the detection position for testing increases the number of operations. Frequent picking and moving operations result in a high operation frequency, affecting the overall testing efficiency. Moreover, each picking and moving requires a certain amount of time, which will significantly increase the time required for testing when accumulated, increasing the time consumption and causing low testing efficiency. Second, precise positioning is required for each picking, and precise positioning is also required for each shifting and placing of materials. Moreover, the above operations need to be precisely coordinated, making the entire testing process complex. The multi-step operation process increases the possibility of errors and makes it difficult to achieve high-efficiency automation for the entire testing process. At the same time, it consumes additional time, resulting in low testing efficiency. Summary of the Utility Model

[0003] In order to solve one or more of the above problems, the utility model provides a multi-chip variable pitch transfer device for semiconductor chips.

[0004] According to one aspect of the utility model, the multi-chip variable pitch transfer device for semiconductor chips includes: a claw base, a variable pitch mechanism, two transverse pull arms, two clamping plates, a synchronous belt drive system, and a plurality of positioning carriers;

[0005] A variable pitch through hole is provided in the middle of the upper end wall of the variable pitch cavity of the claw base, and transmission through holes are respectively provided at the left end and the right end of the lower end wall. One end of the claw base is connected to a motor base below;

[0006] The synchronous mechanism of the variable pitch mechanism is located in the variable pitch cavity. A plurality of reference blocks fixed on the synchronous mechanism are arranged horizontally at equal intervals and are slidably connected to the claw base;

[0007] Between the two horizontal pull arms is located within two transmission through holes. Its upper end passes through the pitch change cavity and the pitch change through hole and is fixedly connected to the leftmost and rightmost reference blocks. The clamping block at its lower end and the two clamping plates are detachably connected by threads, and the two of them clamp and fix the left end of a horizontal section of the synchronous belt and the right end of another horizontal section;

[0008] The driving component and the driven component of the synchronous belt drive system are rotatably connected to the lower sides of the two transverse ends of the claw seat, and both are surrounded by the synchronous belt. The driving component is located above the motor seat and is directly connected and fixed to the servo motor below the motor seat;

[0009] The positioning carriers of several positioning connection chips are respectively connected to the upper ends of the reference blocks. When the servo motor is started, the synchronous belt drives the two horizontal pull arms to contract inward or expand outward simultaneously. Under the action of the synchronization mechanism, several reference blocks and the connected positioning carriers move equidistantly towards the center or move equidistantly towards both ends simultaneously, realizing the variable pitch movement of multiple chips between different workstations.

[0010] In some embodiments, an induction sheet is threadedly connected to the outer side surface of the clamping block of the horizontal pull arm, the claw seat is connected to a fixing sheet, and a position sensor corresponding to the induction sheet is installed on the fixing sheet.

[0011] In some embodiments, the position sensor is a photoelectric sensor.

[0012] In some embodiments, the inner wall of the clamping plate is provided with a tooth-shaped end matching the tooth end of the synchronous belt, and the inner wall of the clamping block is provided with a rectangular belt positioning groove matching the outer wall of the synchronous belt.

[0013] In some embodiments, the left transmission through hole is located behind the horizontal center line of the lower end wall, and the right transmission through hole is located in front of the horizontal center line; the longitudinal rotating block at the upper end of the horizontal pull arm is threadedly connected to the outermost reference block.

[0014] In some embodiments, the upper end of the driving shaft of the driving component is rotatably connected to the lower end wall of the claw seat through a first bearing. An active synchronous pulley surrounded by the left end of the synchronous belt is integrally formed on the driving shaft, and the lower end of the driving shaft is connected to the motor shaft of the servo motor through a sleeve coupling.

[0015] In some embodiments, one end of the driven shaft of the driven component is connected to the adjustment hole at the other end of the lower end wall of the claw seat through a tensioning component, and the other end of the driven shaft is rotatably connected to a driven synchronous pulley.

[0016] In some embodiments, the two upper wall plates of the motor seat are connected to the lower side of one end of the claw seat through threaded parts, and a horizontal motor plate is connected to the vertical servo motor.

[0017] In some embodiments, the synchronization mechanism is a series of multi-shear fork and multi-parallelogram link mechanisms; the reference block is vertically connected to the middle hinge point of each shear fork through an upper connecting rod.

[0018] In some embodiments, the output end of the multi-directional motion mechanism;

[0019] The multi-directional motion mechanism has at least vertical, lateral, and longitudinal motions.

[0020] The multi-chip variable pitch transfer device for a semiconductor chip realizes taking multiple chips with a reduced pitch and simultaneously testing multiple chips with an increased pitch. Its beneficial effects are as follows: First, simultaneously clamping multiple chips and simultaneously testing after increasing the pitch reduces the number of times of clamping parts, lowers the operation frequency of the manipulator, saves time, and significantly improves the overall testing efficiency. Second, only one positioning is required for multiple chips, effectively reducing the number of repetitions in the positioning process, making the entire testing process simple. The multi-step operation process reduces the possibility of errors and makes the entire testing process easily and highly automated, further significantly improving the testing efficiency. Third, through the parameter design of the servo motor, the pitch can be automatically adjusted by presetting parameters, realizing an automatic pitch adjustment mechanism, improving the automation level, reducing the possibility of human errors, and improving the accuracy, reliability, and efficiency of testing. Fourth, adopting a synchronous belt drive system, the shifting position accuracy is high, which can improve the pitch position accuracy, that is, improve the product placement position accuracy and improve the testing efficiency. Fifth, the variable pitch mechanism has a synchronization mechanism, all pitches are the same and the pitch changes simultaneously, with no pitch error and mutual interference, fast speed, high efficiency, and improved overall testing efficiency. Brief Description of the Drawings

[0021] Figure 1 Is a three-dimensional schematic diagram of a multi-chip variable pitch transfer device for a semiconductor chip according to an embodiment of the present invention;

[0022] Figure 2 Is Figure 1 A cross-sectional schematic diagram of the multi-chip variable pitch transfer device shown;

[0023] Figure 3 Is Figure 2 A partially enlarged schematic diagram (one) of the multi-chip variable pitch transfer device shown;

[0024] Figure 4 Is Figure 2 A partially enlarged schematic diagram (two) of the multi-chip variable pitch transfer device shown;

[0025] Figure 5 Is Figure 2 A three-dimensional schematic diagram of the synchronous belt drive system and the lateral pull arm shown;

[0026] Figure 6 Is Figure 5 A three-dimensional schematic diagram of the active component shown;

[0027] Figure 7is Figure 5 A three-dimensional schematic diagram of the passive component shown;

[0028] Figure 8 is Figure 5 A three-dimensional schematic diagram of the lateral pulling arm shown;

[0029] Figure 9 is Figure 1 A three-dimensional schematic diagram of the claw base shown;

[0030] Claw base 1, variable pitch cavity 10, variable pitch through hole 11, transmission through hole 12, motor base 13, upper wall plate 131, horizontal motor plate 132, fixing block 14, adjusting hole 15;

[0031] Variable pitch mechanism 2, synchronization mechanism 20, reference block 21, upper connecting rod 22;

[0032] Lateral pulling arm 3, arm body 30, clamping block 31, belt positioning groove 32, lateral adjustment hole 33, longitudinal rotating block 34;

[0033] Clamping plate 4, toothed end 41;

[0034] Synchronous belt drive system 5, synchronous belt 50, active component 51, active synchronous belt pulley 510, active shaft 511, first bearing 512, clamping sleeve coupling 513, passive component 52, passive shaft 521, single gland bearing 522, passive synchronous belt pulley 523, fastening screw 524, tensioning component 53, adjusting plate 531, adjusting bolt 532;

[0035] Positioning carrier 6; servo motor 7; sensing piece 8; fixing piece 9. Specific embodiments

[0036] The present invention will be further described in detail below with reference to the accompanying drawings. It should be noted that the terms "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the directions in the drawings, and the terms "inner" and "outer" refer to the directions towards or away from the geometric center of a specific component respectively.

[0037] Figures 1 to 9 Schematically shows a multi-chip variable pitch transfer device for semiconductor chips according to an embodiment of the present invention. As shown in the figure, the multi-chip variable pitch transfer device for semiconductor chips includes: a claw base 1, a variable pitch mechanism 2, two lateral pulling arms 3, two clamping plates 4, a synchronous belt drive system 5, and a plurality of positioning carriers 6;

[0038] In the middle of the upper end wall of the variable pitch cavity 10 of the claw base 1, there is a variable pitch through hole 11, and on the left end and the right end of the lower end wall, there are transmission through holes 12 respectively. One end of the claw base 1 is connected to the motor base 13 below.

[0039] The pitch-changing mechanism 2 includes a synchronization mechanism 20 and a plurality of reference blocks 21 connected to the synchronization mechanism 20. The synchronization mechanism 20 of the pitch-changing mechanism 2 is located in the pitch-changing cavity 10. The plurality of reference blocks 21 fixed on the synchronization mechanism 20 are arranged at equal intervals horizontally and are slidably connected to the claw seat 1.

[0040] The middle parts of the two horizontal pull arms 3 are located in the two transmission through holes 12. Their upper ends pass through the pitch-changing cavity 10 and the pitch-changing through hole 11 and are fixedly connected to the leftmost and rightmost reference blocks 21. The clamping blocks 31 at their lower ends are detachably connected to the two clamping plates 4 by threads, and the two of them clamp and fix the left end of a horizontal section and the right end of another horizontal section of the synchronous belt 50.

[0041] The driving component 51 and the driven component 52 of the synchronous belt transmission system 5 are rotatably connected to the lower ends of the two horizontal ends of the claw seat 1, and the two of them are surrounded by the synchronous belt 50. The driving component 52 is located above the motor base 13 and is directly connected and fixed to the servo motor 7 below the motor base 13. According to different preset parameters of the servo motor, the spacing can be automatically adjusted.

[0042] The positioning carriers 6 of a plurality of positioning connection chips are respectively connected to the upper ends of the reference blocks 21. When the servo motor 7 is started, the synchronous belt 50 drives the two horizontal pull arms 3 to contract inward or expand outward simultaneously. Under the action of the synchronization mechanism 20, the plurality of reference blocks 21 and the connected positioning carriers 6 move equidistantly towards the center or move equidistantly towards both ends simultaneously, realizing the variable-spacing movement of multiple chips between different workstations.

[0043] Preferably, the rear end plate of the claw seat 1 is connected to the fixed block 14, which is the output end of the multi-directional movement mechanism. The multi-directional movement mechanism has at least vertical, horizontal, and longitudinal movements.

[0044] The multi-chip variable pitch transfer device for a semiconductor chip realizes picking multiple chips with a reduced pitch and simultaneously testing multiple chips with an increased pitch. Its beneficial effects are as follows: First, picking multiple chips simultaneously and testing them simultaneously after increasing the pitch reduces the number of times of picking parts, lowers the operation frequency of the manipulator, saves time, and significantly improves the overall testing efficiency. Second, only one positioning is required for multiple chips, effectively reducing the number of repetitions in the positioning process, simplifying the entire testing process, reducing the possibility of errors in the multi-step operation process, and making the entire testing process easy to automate efficiently, further significantly improving the testing efficiency. Third, through the parameter design of the servo motor 7, the pitch can be automatically adjusted by presetting parameters, realizing an automatic pitch adjustment mechanism, improving the automation level, reducing the possibility of human errors, and improving the accuracy, reliability, and efficiency of testing. Fourth, the synchronous belt drive system 5 is adopted, with high shifting position accuracy, which can improve the pitch position accuracy, that is, improve the product placement position accuracy and the testing efficiency. Fifth, the variable pitch mechanism 2 has a synchronization mechanism 20, with all pitches being the same and changing simultaneously, without pitch errors and mutual interference, fast speed, high efficiency, and improving the overall testing efficiency.

[0045] Furthermore, an induction sheet 8 is also threadedly connected to the outer side of the clamping block 31 of the transverse pulling arm 3. The claw seat 1 is connected with a fixing sheet 9, and a position sensor is installed on the fixing sheet 9. The position sensor is preferably a photoelectric sensor. The position sensor and the induction sheet 8 are opposite in position. The position sensor controls the start and stop of the servo motor 7 according to the detected signal of the induction sheet 8, thereby controlling the relative pitch of the positioning carrier 6. Its beneficial effect is that this setting further improves the position accuracy and thus the testing accuracy.

[0046] Furthermore, the inner wall of the clamping plate 4 is provided with a tooth-shaped end 41 matching the tooth end of the synchronous belt 50. The inner wall of the clamping block 31 is provided with a rectangular belt positioning groove 32 matching the outer wall of the synchronous belt 50. The synchronous belt 50 is placed in the belt positioning groove 32 and is pressed and fixed by the tooth-shaped end 41, thereby achieving high-precision fastening and fixing. The clamping block 31 is provided with a stepped-hole-shaped transverse adjustment hole 33, and a threaded part passes through the transverse adjustment hole 33 and is threadedly connected to the threaded hole of the clamping plate 4, thereby realizing transverse micro-adjustment. Its beneficial effect is that this setting can accurately position the installation position of the synchronous belt, ensure no pitch change, displacement, and jumping phenomena during the movement on both sides, and thus achieve accurate displacement.

[0047] Furthermore, the drive through-hole 12 is a horizontally elongated oval through-hole. The drive through-hole 12 at the left end is located behind the horizontal center line of the lower end wall, and the drive through-hole 12 at the right end is located in front of the horizontal center line. The variable pitch through-hole 11 is a rectangular through-hole located in the middle of the upper end wall and penetrating from left to right. The arm body 30 of the horizontal pull arm 3 is located within the drive through-hole 12, and the longitudinal rotating block 34 at the upper end of the horizontal pull arm 3 is located above the variable pitch through-hole 11 and is threadedly connected to the outermost reference block 21. The beneficial effects are as follows: This setting streamlines the device volume, facilitates the installation and arrangement of other components, and there is no interference during movement.

[0048] Furthermore, the active component 51 includes an active shaft 511. The upper end of the active shaft 511 is rotatably connected within the bearing hole at one end of the lower end wall of the claw seat 1 through a first bearing 512. An active synchronous pulley 510 wrapped by the left end of the synchronous belt 50 is integrally formed on the active shaft 511. The lower end of the active shaft 511 is connected to the motor shaft of the servo motor 7 through a clamp coupling 513. The beneficial effects are as follows: This setting has fewer components, is convenient for assembly, and at the same time makes the equipment smaller in volume.

[0049] Preferably, one end of the passive shaft 521 of the passive component 52 is connected to the adjustment hole 15 at the other end of the lower end wall of the claw seat 1 through a tensioning component 53. The other end of the passive shaft 521 is rotatably connected to the passive synchronous pulley 523 through two single gland bearings 522. The shaft shoulder of the passive shaft 521 abuts against the outer gland of the inner single gland bearing 522, and the fastening screw 524 passes through the outer gland of the outer single gland bearing 522 and is threadedly connected to the central thread of the passive shaft 521. The beneficial effects are as follows: This setting has fewer components, is convenient for assembly, and at the same time makes the equipment smaller in volume.

[0050] Preferably, the tensioning component 53 includes an adjustment plate 531 and an adjustment bolt 532. The adjustment bolt 532 is threadedly connected to the external threaded hole of the adjustment hole 15 and the threaded hole of the passive shaft 521 and enters the internal positioning hole of the adjustment hole 15. The adjustment plate 531 is horizontally and adjustably connected to the adjustment plate 531 through a plurality of elongated holes. The beneficial effects are as follows: The tensioning component 53 has a simple structure, and at the same time enables good tensioning of the synchronous belt, without slipping and jumping phenomena.

[0051] Furthermore, the two upper wall plates 131 of the motor seat 13 are connected to the lower part of one end of the claw seat 1 through threaded parts, and the horizontal motor plate 132 is connected to the vertical servo motor 7. The beneficial effects are as follows: This setting enables the servo motor 7 to have good installation accuracy, and at the same time reduces the equipment volume.

[0052] Preferably, the synchronization mechanism 20 is a multi-shear fork and multi-parallelogram linkage mechanism in series; the reference block 21 is vertically connected to the middle hinge point of each shear fork through the upper connecting rod 22, and several reference blocks 21 are slidably connected to the claw seat 1 through the lateral guiding part, and the middle two hinge points are slidably connected to the claw seat through the longitudinal guiding part. The lateral guiding part and the longitudinal guiding part are sliding rails and sliders that cooperate with each other. The beneficial effects are as follows: First, the shear fork linkage mechanism can complete the adjustment of the spacing of multiple components at one time, greatly reducing the clamping and moving times of the manipulator, and thus significantly improving the test efficiency; Second, the shear fork linkage mechanism can efficiently adjust the spacing between components, making the entire test process more concise, reducing the complexity of operation, and helping to achieve a smoother work process; Third, by adopting the shear fork linkage mechanism, the automatic adjustment of the component spacing can be realized, reducing the need for manual intervention and improving the automation degree of the entire test process; Fourth, the shear fork linkage mechanism has high stability and accuracy, and can ensure the stability of the components while adjusting the spacing, thereby improving the accuracy of the test results.

[0053] Preferably, a blade cylinder is installed on the positioning carrier 6. The beneficial effect is that this setting can achieve good material picking and placing and positioning.

[0054] The above are only some embodiments of the present invention. For those of ordinary skill in the art, without departing from the creative concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention.

Claims

1. A multi-chip variable pitch transfer device for semiconductor chips, characterized in that, Including: a claw base (1), a pitch-changing mechanism (2), two lateral pulling arms (3), two clamping plates (4), a synchronous belt drive system (5), and a number of positioning carriers (6); In the middle of the upper end wall of the pitch-changing cavity (10) of the claw base (1), there is a pitch-changing through hole (11), and on the left end and the right end of the lower end wall, there are respectively provided transmission through holes (12). One end of the claw base (1) is connected to a motor base (13) below; The synchronous mechanism (20) of the pitch-changing mechanism (2) is located in the pitch-changing cavity (10). A number of reference blocks (21) fixed on the synchronous mechanism (20) are arranged horizontally at equal intervals and are slidably connected to the claw base (1); The middle of the two lateral pulling arms (3) is located in the two transmission through holes (12). Their upper ends pass through the pitch-changing cavity (10) and the pitch-changing through hole (11) and are fixedly connected to the leftmost and rightmost reference blocks (21). The clamping blocks (31) at their lower ends are threadedly detachably connected to the two clamping plates (4), and the two clamp and fix the left end of a horizontal section of the synchronous belt (50) and the right end of another horizontal section; The driving component (51) and the driven component (52) of the synchronous belt drive system (5) are rotatably connected to the lower ends of the two lateral ends of the claw base (1), and the two are surrounded by the synchronous belt (50). The driving component (51) is located above the motor base (13) and is directly connected to a servo motor (7) below the motor base (13); A number of positioning carriers (6) for positioning connection chips are respectively connected to the upper ends of the reference blocks (21). When the servo motor (7) is started, the synchronous belt (50) drives the two lateral pulling arms (3) to contract inward or expand outward simultaneously. Under the action of the synchronous mechanism (20), a number of the reference blocks (21) and the connected positioning carriers (6) move equidistantly towards the center or move equidistantly towards the two ends simultaneously, realizing the variable-spacing movement of multiple chips between different workstations.

2. The multi-sheet variable pitch transfer device according to claim 1, characterized in that An induction sheet (8) is threadedly connected to the outer side surface of the clamping block (31) of the lateral pulling arm (3). The claw base (1) is connected to a fixing sheet (9), and a position sensor corresponding to the induction sheet (8) is installed on the fixing sheet (9).

3. The multi-sheet variable pitch transfer device according to claim 2, wherein, The position sensor is a photoelectric sensor.

4. The multi-sheet variable pitch transfer device according to claim 2, characterized in that On the inner wall of the clamping plate (4), there is a tooth-shaped end (41) matching the tooth end of the synchronous belt (50). On the inner wall of the clamping block (31), there is a rectangular belt positioning groove (32) matching the outer wall of the synchronous belt (50).

5. The multi-sheet variable pitch transfer device according to claim 2, characterized in that The left transmission through hole (12) is located behind the horizontal center line of the lower end wall, and the right transmission through hole (12) is located in front of the horizontal center line; the longitudinal rotating block (34) at the upper end of the lateral pulling arm (3) is threadedly connected to the outside of the outermost reference block (21).

6. The multi-sheet variable pitch transfer device according to claim 1, characterized in that, The upper end of the driving shaft (511) of the driving component (51) is rotatably connected to the lower end wall of the claw base (1) through a first bearing (512). An active synchronous pulley (510) surrounded by the left end of the synchronous belt (50) is integrally formed on the driving shaft (511). The lower end of the driving shaft (511) is connected to the motor shaft of the servo motor (7) through a clamp coupling (513).

7. The multi-sheet variable pitch transfer device according to claim 6, characterized in that, One end of the passive shaft (521) of the passive component (52) is connected to the adjustment hole (15) at the other end of the lower end wall of the claw seat (1) through a tensioning component (53), and the other end of the passive shaft (521) is rotatably connected to a passive synchronous pulley (523).

8. The multi-sheet variable pitch transfer device according to claim 1, characterized in that, Two upper wall plates (131) of the motor seat (13) are connected to the lower end of one end of the claw seat (1) through threaded parts, and a horizontal motor plate (132) is connected to a vertical servo motor (7).

9. The multi-sheet variable pitch transfer device according to claim 1, characterized in that, The synchronization mechanism (20) is a series of multi-scissor and multi-parallelogram link mechanisms; the reference block (21) is vertically connected to the middle hinge point of each scissor through an upper connecting rod (22).

10. The multi-sheet variable pitch transfer device according to claim 1, wherein, The claw seat (1) is connected to the output end of the multi-directional movement mechanism through a fixing block (14); The multi-directional movement mechanism has at least vertical, horizontal, and longitudinal movements.

Images