Vacuum magnetron sputtering coating device for glass

Abstract

The utility model discloses a vacuum magnetron sputtering coating device for glass, which comprises a box body, and an adjustable coating mechanism and a vacuum pumping mechanism are mounted on the box body; the adjustable coating mechanism comprises a connecting ring, a working cavity, a fixing plate, an emitting electrode, a coating target material, a positive electrode, a U-shaped fixing groove, a connecting plate, a fixing block, an electric telescopic rod, a rotating motor, a motor box, a first mounting door and a handle. Through the arrangement of the connecting ring, the working cavity, the fixing plate, the emitting electrode, the coating target material, the positive electrode, the U-shaped fixing groove, a connecting plate, a fixing block, an electric telescopic rod, a rotating motor, a motor box, a first mounting door and a handle, a user can conveniently rotate and adjust the glass body through the electric telescopic rod, and the uniformity of a film layer of the glass body is improved; through the connection arrangement of the vacuum pumping mechanism, the vacuum magnetron sputtering coating technology can be used for coating treatment, so that the vacuum magnetron sputtering coating device has the advantages of uniform film layer, strong adhesive force, capability of accurately controlling the film thickness and the like.

Description

Technical Field

[0001] The utility model relates to the technical field of Low-E glass coating, in particular to a vacuum magnetron sputtering coating device for glass. Background Technique

[0002] Glass is an important building material. With the continuous improvement of the decorative requirements for buildings, the usage of glass in the construction industry is also increasing continuously. Low-E glass, also known as low-emissivity glass, is a film system product with multiple layers of metals or other compounds coated on the glass surface. The vacuum magnetron sputtering coating technology is one of the main methods for preparing Low-E glass.

[0003] The existing coating devices for Low-E glass have the following disadvantages:

[0004] 1. Traditional coating methods such as thermal evaporation technology are difficult to meet the requirements of high-quality Low-E glass and may cause damage to the glass substrate.

[0005] 2. When the traditional coating equipment is coating, it is not convenient to adjust and rotate the glass body, and the film layer uniformity is poor, and the coating efficiency is low. Content of the Utility Model

[0006] The purpose of the utility model is to solve the disadvantages existing in the prior art, and to propose a vacuum magnetron sputtering coating device for glass.

[0007] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0008] A vacuum magnetron sputtering coating device for glass, including a box body, on which an adjustable coating mechanism and a vacuum pumping mechanism are installed;

[0009] The adjustable coating mechanism includes a connecting ring, a working cavity, a fixing plate, an emission electrode, a coating target, a positive electrode, a U-shaped fixing groove, a connecting plate, a fixing block, an electric telescopic rod, a rotating motor, a motor box, a first installation door and a handle. The two sides of the fixing plate are fixedly connected with the inner walls of the two sides of the top of the working cavity. The emission electrode is fixedly installed inside the fixing plate. The coating target is connected to the output end of the emission electrode. The top of the electric telescopic rod is fixedly connected with the connecting plate through the fixing block. The bottom of the electric telescopic rod is connected with the output shaft of the rotating motor through a coupling. The rotating motor is fixedly placed on the inner wall of the bottom of the motor box.

[0010] Through the above solution, an adjustable coating mechanism is installed. The connection ring, working chamber, fixing plate, emission electrode, coating target, positive electrode, U-shaped fixing groove, connecting plate, fixing block, electric telescopic rod, rotating motor, motor box, first installation door and handle are arranged to enable the user to conveniently rotate and adjust the glass body through the electric telescopic rod, improving the uniformity of its film layer.

[0011] Preferably, the vacuum pumping mechanism includes a control button, a second installation door, a support table, a placement frame, a display screen, an installation box, a vacuum pump and a pumping chamber. The control button is inlaid on the second installation door. The placement frame is fixedly connected to one side surface of the support table. The four corners of the display screen are in contact with the inner walls of the four corners of the placement frame.

[0012] Through the above solution, a vacuum pumping mechanism is installed. The connection settings of the control button, the second installation door, the support table, the placement frame, the display screen, the installation box, the vacuum pump and the pumping chamber can perform coating treatment by vacuum magnetron sputtering coating technology, making it have the advantages of uniform film layer, strong adhesion, and precise film thickness control.

[0013] Preferably, the positive electrode is placed on the surface of the connecting plate. The bottoms of the two U-shaped fixing grooves are welded to both ends of the surface of the connecting plate.

[0014] Preferably, the vacuum pump is connected to the inside of the installation box. One end of the vacuum pump is fixedly connected to one side of the pumping chamber through a connecting pipe. The support table is fixedly connected to one side surface of the box body.

[0015] Preferably, the bottom of the working chamber is fixedly connected to the top of the pumping chamber through a connection ring. The bottom surface of the pumping chamber is fixedly connected to the other side surface of the box body.

[0016] Preferably, a first installation door is hinged to one side of the box body. The handle is adhered to the top outer wall of the first installation door. Multiple support legs are welded to the four corners of the bottom of the box body.

[0017] The beneficial effects of the present utility model are as follows:

[0018] 1. By installing an adjustable coating mechanism, the connection ring, working chamber, fixing plate, emission electrode, coating target, positive electrode, U-shaped fixing groove, connecting plate, fixing block, electric telescopic rod, rotating motor, motor box, first installation door and handle are arranged to enable the user to conveniently rotate and adjust the glass body through the electric telescopic rod, improving the uniformity of its film layer;

[0019] 2. By installing a vacuum pumping mechanism, the connection settings of the control button, the second installation door, the support table, the placement frame, the display screen, the installation box, the vacuum pump and the pumping chamber can perform coating treatment by vacuum magnetron sputtering coating technology, making it have the advantages of uniform film layer, strong adhesion, and precise film thickness control. Brief Description of the Drawings

[0020] Figure 1 FIG. is a schematic structural view of a vacuum magnetron sputtering coating device for glass proposed by the present utility model;

[0021] Figure 2 FIG. is a structural cross-sectional view of an adjustable coating mechanism of a vacuum magnetron sputtering coating device for glass proposed by the present utility model;

[0022] Figure 3 FIG. is a side view of the structure of a vacuum magnetron sputtering coating device for glass proposed by the present utility model.

[0023] In the figure: 1, box body; 2, support leg; 3, control button; 4, second installation door; 5, support table; 6, placement frame; 7, display screen; 8, installation box; 9, vacuum pump; 10, pumping cavity; 11, connecting ring; 12, working cavity; 13, fixing plate; 14, emission electrode; 15, coating target; 16, positive electrode; 17, U-shaped fixing groove; 18, connecting plate; 19, fixing block; 20, electric telescopic rod; 21, rotating motor; 22, motor box; 23, first installation door; 24, handle. Detailed Description of the Preferred Embodiments

[0024] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments.

[0025] Embodiment 1, referring to Figure 1 and Figure 2 , a vacuum magnetron sputtering coating device for glass includes a box body 1, and an adjustable coating mechanism and a vacuum pumping mechanism are installed on the box body 1;

[0026] The adjustable coating mechanism includes a connecting ring 11, a working chamber 12, a fixing plate 13, an emitting electrode 14, a coating target 15, a positive electrode 16, a U-shaped fixing groove 17, a connecting plate 18, a fixing block 19, an electric telescopic rod 20, a rotating motor 21, a motor box 22, a first installation door 23 and a handle 24. Both sides of the fixing plate 13 are fixedly connected to the inner walls of the top two sides of the working chamber 12. The emitting electrode 14 is fixedly installed inside the fixing plate 13. The coating target 15 is connected to the output end of the emitting electrode 14. The top of the electric telescopic rod 20 is fixedly connected to the connecting plate 18 through the fixing block 19. The bottom of the electric telescopic rod 20 is connected to the output shaft of the rotating motor 21 through a coupling. The rotating motor 21 is fixedly placed on the inner wall of the bottom of the motor box 22. By installing the adjustable coating mechanism, the settings of the connecting ring 11, the working chamber 12, the fixing plate 13, the emitting electrode 14, the coating target 15, the positive electrode 16, the U-shaped fixing groove 17, the connecting plate 18, the fixing block 19, the electric telescopic rod 20, the rotating motor 21, the motor box 22, the first installation door 23 and the handle 24 can facilitate the user to rotate and adjust the glass body through the electric telescopic rod 20, improving the uniformity of its film layer.

[0027] Example 2, referring to Figure 1 , Figure 2 and Figure 3 , the vacuum pumping mechanism includes a control button 3, a second installation door 4, a support platform 5, a placement frame 6, a display screen 7, an installation box 8, a vacuum pump 9 and a pumping chamber 10. The control button 3 is inlaid on the second installation door 4. The placement frame 6 is fixedly connected to one side surface of the support platform 5. The four corners of the display screen 7 are connected to the inner walls of the four corners of the placement frame 6. By installing the vacuum pumping mechanism, the connection settings of the control button 3, the second installation door 4, the support platform 5, the placement frame 6, the display screen 7, the installation box 8, the vacuum pump 9 and the pumping chamber 10 can perform coating treatment using the vacuum magnetron sputtering coating technology, making it have the advantages of uniform film layer, strong adhesion, and precise control of film thickness.

[0028] Example 3, referring to Figure 1 and Figure 2 , the positive electrode 16 is placed on the surface of the connecting plate 18. The bottoms of the two U-shaped fixing grooves 17 are welded to both ends of the surface of the connecting plate 18. The vacuum pump 9 is connected to the inside of the installation box 8. One end of the vacuum pump 9 is fixedly connected to one side of the pumping chamber 10 through a connecting pipe. The support platform 5 is fixedly connected to one side surface of the box body 1. The bottom of the working chamber 12 is fixedly connected to the top of the pumping chamber 10 through the connecting ring 11. The bottom surface of the pumping chamber 10 is fixedly connected to the other side surface of the box body 1. One side of the box body 1 is hinged with a first installation door 23. The handle 24 is adhered to the top outer wall of the first installation door 23. Multiple support legs 2 are welded to the four corners of the bottom of the box body 1.

[0029] Working principle: Through the settings of the connecting ring 11, working chamber 12, fixed plate 13, emitting electrode 14, coating target 15, positive electrode 16, U-shaped fixing groove 17, connecting plate 18, fixing block 19, electric telescopic rod 20, rotating motor 21, motor box 22, first installation door 23 and handle 24, the user can conveniently rotate and adjust the glass body through the electric telescopic rod 20, improving the uniformity of its film layer; Through the connection settings of the control button 3, second installation door 4, support platform 5, placement frame 6, display screen 7, installation box 8, vacuum pumping pump 9 and pumping chamber 10, the vacuum magnetron sputtering coating technology can be used for coating treatment. Starting the vacuum pumping pump 9 makes the inside of the working chamber 12 in a vacuum state through the connecting pipe and the pumping chamber 10, making it have the advantages of uniform film layer, strong adhesion, and precise control of film thickness, etc.

[0030] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent substitutions or changes, and should be covered within the protection scope of the present invention.

Claims

1. A vacuum magnetron sputtering coating device for glass, comprising a box body (1), characterized in that, An adjustable coating mechanism and a vacuum pumping mechanism are installed on the box body (1). The adjustable coating mechanism includes a connecting ring (11), a working chamber (12), a fixing plate (13), an emitting electrode (14), a coating target (15), a positive electrode (16), a U-shaped fixing groove (17), a connecting plate (18), a fixing block (19), an electric telescopic rod (20), a rotating motor (21), a motor box (22), a first installation door (23) and a handle (24). Both sides of the fixing plate (13) are fixedly connected to the inner walls of the two sides of the top of the working chamber (12). The emitting electrode (14) is fixedly installed inside the fixing plate (13). The coating target (15) is connected to the output end of the emitting electrode (14). The top of the electric telescopic rod (20) is fixedly connected to the connecting plate (18) through the fixing block (19). The bottom of the electric telescopic rod (20) is connected to the output shaft of the rotating motor (21) through a coupling. The rotating motor (21) is fixedly placed on the inner wall of the bottom of the motor box (22).

2. The vacuum magnetron sputtering coating device for glass according to claim 1, characterized in that, The vacuum pumping mechanism includes a control button (3), a second installation door (4), a support platform (5), a placement frame (6), a display screen (7), an installation box (8), a vacuum pump (9) and an air extraction chamber (10). The control button (3) is embedded in the second installation door (4). The placement frame (6) is fixedly connected to one side surface of the support platform (5). The four corners of the display screen (7) are in contact with the inner walls of the four corners of the placement frame (6).

3. A vacuum magnetron sputtering coating device for glass according to claim 1, characterized in that, The positive electrode (16) is placed on the surface of the connecting plate (18). The bottoms of the two U-shaped fixing grooves (17) are welded to both ends of the surface of the connecting plate (18).

4. A vacuum magnetron sputtering coating device for glass according to claim 2, characterized in that, The vacuum pump (9) is connected to the inside of the installation box (8). One end of the vacuum pump (9) is fixedly connected to one side of the air extraction chamber (10) through a connecting pipe. The support platform (5) is fixedly connected to one side surface of the box body (1).

5. The vacuum magnetron sputtering coating device for glass according to claim 1, characterized in that, The bottom of the working chamber (12) is fixedly connected to the top of the air extraction chamber (10) through the connecting ring (11). The bottom surface of the air extraction chamber (10) is fixedly connected to the other side surface of the box body (1).

6. A vacuum magnetron sputtering coating device for glass according to claim 1, characterized in that, One side of the box body (1) is hinged with the first installation door (23). The handle (24) is bonded to the outer wall of the top of the first installation door (23). Multiple support legs (2) are welded to the four corners of the bottom of the box body (1).

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