Supporting assembly and single crystal preparation device

Abstract

The utility model provides a supporting assembly and a single crystal preparation device. The supporting assembly comprises a first supporting component and a second supporting component. The second supporting component is arranged between the heat preservation cylinder and the first supporting component; the end face, facing the heat preservation cylinder, of the second supporting component and the end face, facing the first supporting component, of the second supporting component are stepped faces. A first clamping position is formed on the step surface, facing the heat preservation cylinder, of the second supporting component and is used for clamping the heat preservation cylinder; a second clamping position is formed on the step face, facing the first supporting component, of the second supporting component, and the second clamping position is used for clamping the first supporting component. By means of combination of the first supporting component and the second supporting component, the supporting strength of the heat preservation cylinder is improved, and the heat preservation cylinder can be effectively supported; in addition, the first supporting component and the second supporting component are connected together in a clamping mode, the second supporting component and the heat preservation cylinder are connected together in a clamping mode, stable and fixed connection between the first supporting component and the second supporting component can be achieved, and disassembly can be convenient.

Description

Technical Field

[0001] This application relates to the technical field of crystal preparation, and particularly to a support component and a single crystal preparation device. Background Art

[0002] In a single crystal furnace, the support cylinder is an important component for supporting the heat preservation cylinder. It works in a high-temperature environment. After long-term use, it is found that the middle part of the support cylinder is prone to fracture. Once a fracture occurs, the entire support cylinder needs to be directly replaced, which increases the cost. In addition, after long-term use, it is found that the current support cylinder has insufficient support strength, often causing the heat preservation cylinder to shake.

[0003] Therefore, there is an urgent need for a support component and a single crystal preparation device to solve the technical problems existing in the prior art to a certain extent. Summary of the Utility Model

[0004] The purpose of this application is to provide a support component and a single crystal preparation device, which can improve the service life of the support component, reduce costs, and also improve the support strength of the support component to a certain extent.

[0005] This application provides a support component for supporting the heat preservation cylinder in a single crystal furnace; the support component includes a first support member and a second support member;

[0006] The second support member is disposed between the heat preservation cylinder and the first support member;

[0007] The end face of the second support member facing the heat preservation cylinder and the end face of the second support member facing the first support member are both stepped surfaces;

[0008] A first clamping position is formed on the stepped surface of the second support member facing the heat preservation cylinder, and the first clamping position is used to clamp the heat preservation cylinder;

[0009] A second clamping position is formed on the stepped surface of the second support member facing the first support member, and the second clamping position is used to clamp the first support member.

[0010] In the above technical solution, further, the second support member includes a support ring, a first protrusion, and a second protrusion;

[0011] At least part of the end face of the support ring facing the heat preservation cylinder protrudes towards the heat preservation cylinder with the first protrusion, so that the end face of the second support member facing the heat preservation cylinder is the stepped surface;

[0012] The end face of the support ring facing the first support member protrudes with the second protrusion towards the first support member, so that the end face of the second support member facing the first support member is the stepped surface.

[0013] In the above technical solution, further, the first protrusion and the second protrusion are arranged in one-to-one correspondence on the support ring.

[0014] In the above technical solution, further, both the first protrusion and the second protrusion are annular and are arranged on the edge of the support ring close to its axis.

[0015] In the above technical solution, further, the first support member includes a first support cylinder and a second support cylinder;

[0016] The second support cylinder is arranged between the first support cylinder and the support ring;

[0017] The first support cylinder and the second support cylinder are snap-connected together, so that the first support cylinder and the second support cylinder are detachably connected;

[0018] The second support cylinder and the support ring are snap-connected together, so that the second support cylinder and the support ring are detachably connected.

[0019] In the above technical solution, further, the first support cylinder includes a first cylinder body; at least part of the end face of the first cylinder body facing the second support cylinder protrudes towards the second support cylinder with a third protrusion, the second support cylinder includes a second cylinder body, and the end face of the second cylinder body facing the first cylinder body and corresponding to the first protrusion is concave with a first recess; the third protrusion and the first recess are adapted to each other so that the first cylinder body and the second cylinder body are snap-connected together;

[0020] The end face of the second cylinder body facing the support ring and corresponding to the second protrusion is concave with a second recess, and the second protrusion and the second recess are adapted to each other so that the first cylinder body and the second cylinder body are snap-connected together.

[0021] In the above technical solution, further, the third protrusion protrudes from the edge of the first cylinder body close to the axis of the first cylinder body, and the first recess is concave in the edge of the second cylinder body close to the second cylinder body, so that the third protrusion and the first recess are adapted to each other;

[0022] The second recess is concave in the edge of the second cylinder body close to the second cylinder body, so that the second protrusion and the second recess are adapted to each other.

[0023] In the above technical solution, further, the third protrusion protrudes from the middle position of the end face of the first cylinder body facing the second cylinder body; the first recess is recessed from the middle position of the end face of the second cylinder body facing the first cylinder body, so that the protrusion is adapted to the recess.

[0024] In the above technical solution, further, the inner diameters and outer diameters of the first cylinder body, the second cylinder body, and the support ring are the same.

[0025] The present application also provides a single crystal preparation device, including the above-mentioned support assembly.

[0026] Compared with the prior art, the present application has the following beneficial effects:

[0027] The present application provides a support assembly for supporting a heat preservation cylinder in a single crystal furnace; the support assembly includes a first support member and a second support member;

[0028] The second support member is disposed between the heat preservation cylinder and the first support member;

[0029] The end face of the second support member facing the heat preservation cylinder and the end face of the second support member facing the first support member are both stepped surfaces;

[0030] A first clamping position is formed on the stepped surface of the second support member facing the heat preservation cylinder, and the first clamping position is used for clamping the heat preservation cylinder;

[0031] A second clamping position is formed on the stepped surface of the second support member facing the first support member, and the second clamping position is used for clamping the first support member.

[0032] In summary, the support assembly of the present application includes a first support member and a second support member. The combination of the two improves the support strength for the heat preservation cylinder and can provide effective support for the heat preservation cylinder; in addition, the first support member and the second support member are connected together by a clamping method, and the second support member and the heat preservation cylinder are also connected together by a clamping method, which can not only achieve stable fixed connection with each other but also facilitate disassembly.

[0033] The present application also provides a single crystal preparation device, including the above-mentioned support assembly. Therefore, it has all the beneficial effects of the above-mentioned support assembly, and will not be specifically described here. Description of the Drawings

[0034] To more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the accompanying drawings required for the description of the specific embodiments or the prior art. Obviously, the accompanying drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can also be obtained based on these drawings.

[0035] Figure 1 Installation demonstration diagram of the support component provided by the present application and the insulation cylinder installed as a whole;

[0036] Figure 2 For Figure 1 Cross-sectional view;

[0037] Figure 3 For Figure 2 Enlarged view at position A in

[0038] Figure 4 Structural schematic diagram of the first cylinder in the support component provided by the present application;

[0039] Figure 5 For Figure 4 Cross-sectional view;

[0040] Figure 6 Structural schematic diagram of the second cylinder in the support component provided by the present application from the first perspective;

[0041] Figure 7 Structural schematic diagram of the second cylinder in the support component provided by the present application from the second perspective;

[0042] Figure 8 Cross-sectional view of the second cylinder in the support component provided by the present application;

[0043] Figure 9 Structural schematic diagram of the support ring in the support component provided by the present application from the first perspective;

[0044] Figure 10 Structural schematic diagram of the support ring in the support component provided by the present application from the second perspective;

[0045] Figure 11 Cross-sectional view of the support ring in the support component provided by the present application.

[0046] Reference numerals: 1 - insulation cylinder; 2 - first support member; 3 - second support member; 4 - first clamping position; 5 - second clamping position; 6 - support ring; 7 - first protrusion; 8 - second protrusion; 9 - first support cylinder; 10 - second support cylinder; 11 - first cylinder; 12 - third protrusion; 14 - second cylinder; 15 - first depression; 16 - second depression. Detailed embodiments

[0047] The following specific embodiments are provided to assist the reader in obtaining a comprehensive understanding of the methods, devices, and / or systems described herein. However, after understanding the disclosure of this application, various changes, modifications, and equivalents of the methods, devices, and / or systems described herein will be apparent. For example, the order of operations described herein is merely exemplary and is not limited to the order set forth herein, but rather, changes that will be apparent after understanding the disclosure of this application may be made, except for operations that must occur in a specific order. In addition, descriptions of features known in the art may be omitted for the sake of clarity and conciseness.

[0048] The features described herein may be implemented in different forms and should not be construed as limited to the examples described herein. Rather, the examples described herein are provided only to illustrate some of the many possible ways of implementing the methods, devices, and / or systems described herein that will be apparent after understanding the disclosure of this application.

[0049] Throughout the specification, when an element (such as a layer, region, or substrate) is described as "on" another element, "connected to" another element, "coupled to" another element, "above" another element, or "covering" another element, it may be directly "on," "connected to," "coupled to," "above," or "covering" the other element, or there may be one or more other elements intervening therebetween. In contrast, when an element is described as "directly on" another element, "directly connected to" another element, "directly coupled to" another element, "directly above" another element, or "directly covering" another element, there may be no other elements intervening therebetween.

[0050] As used herein, the term "and / or" includes any one of the listed related items and any combination of any two or more of them.

[0051] Although terms such as "first," "second," and "third" may be used herein to describe various members, components, regions, layers, or parts, these members, components, regions, layers, or parts are not limited by these terms. Rather, these terms are only used to distinguish one member, component, region, layer, or part from another. Thus, a first member, component, region, layer, or part referred to in the examples described herein may also be referred to as a second member, component, region, layer, or part without departing from the teachings of the examples.

[0052] For ease of description, spatial relationship terms such as "above", "upper", "below", and "lower" may be used herein to describe the relationship of one element to another as shown in the accompanying drawings. Such spatial relationship terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the accompanying drawings. For example, if the device in the accompanying drawings is flipped, an element described as "above" or "upper" relative to another element will subsequently be "below" or "lower" relative to the other element. Thus, the term "above" includes both the orientation of "above" and "below" depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relationship terms used herein will be interpreted accordingly.

[0053] The terms used herein are for the purpose of describing various examples only and are not intended to limit the disclosure. Unless the context clearly dictates otherwise, the singular forms are also intended to include the plural forms. The terms "comprises", "comprising", and "having" list the stated features, quantities, operations, components, elements, and / or combinations thereof that exist, but do not preclude the existence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0054] Due to manufacturing techniques and / or tolerances, variations in the shapes shown in the accompanying drawings may occur. Accordingly, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that occur during manufacturing.

[0055] The features of the examples described herein can be combined in various ways that will be apparent after understanding the disclosure of the present application. In addition, although the examples described herein have a variety of configurations, other configurations will be apparent after understanding the disclosure of the present application.

[0056] Example 1

[0057] The following Figures 1-11 elaborates in detail a support assembly provided by the present application.

[0058] The present application provides a support assembly that can be used to support the heat preservation cylinder 1 in a single crystal furnace. By using the support assembly provided by the present application, it can, to a certain extent, ensure the effective support of the heat preservation cylinder 1. The following Figures 1-11 elucidates in detail the specific structure of the support assembly of the present application.

[0059] The support assembly includes a first support member 2 and a second support member 3; the second support member 3 is disposed between the heat preservation cylinder 1 and the first support member 2. Specifically, the end face of the second support member 3 facing the heat preservation cylinder 1 and the end face of the second support member 3 facing the first support member 2 are both stepped surfaces; a first clamping position 4 is formed on the stepped surface of the second support member 3 facing the heat preservation cylinder 1, and the first clamping position 4 is used to clamp the heat preservation cylinder 1; in addition, a second clamping position 5 is formed on the stepped surface of the second support member 3 facing the first support member 2, and the second clamping position 5 is used to clamp the first support member 2.

[0060] In summary, the support assembly of the present application includes a first support member 2 and a second support member 3. The combination of the two improves the support strength for the heat preservation cylinder 1 and can provide effective support for the heat preservation cylinder 1; in addition, the first support member 2 and the second support member 3 are connected together by a clamping method, which can not only achieve stable fixed connection with each other but also facilitate disassembly.

[0061] In this embodiment, further, in combination Figures 9-11 as shown, the second support member 3 includes a support ring 6, a first protrusion 7, and a second protrusion 8.

[0062] Specifically, the support ring 6 is annular, and at least part of the end face of the support ring 6 facing the heat preservation cylinder 1 protrudes from the support ring 6 towards the heat preservation cylinder 1 to form a first protrusion 7, so that the end face of the second support member 3 facing the heat preservation cylinder 1 is a stepped surface; specifically, since the first protrusion 7 protrudes from part of the end face of the support ring 6 towards the heat preservation cylinder 1, the end face of the first protrusion 7 facing the heat preservation cylinder 1 will be higher than the end face of the support ring 6 facing the heat preservation cylinder 1, and thus the end face of the second support member 3 facing the heat preservation cylinder 1 is a stepped surface; the reason why the end face of the second support member 3 facing the heat preservation cylinder 1 is set as a stepped surface in the present application is to use this stepped surface to clamp the heat preservation cylinder 1, which is specifically described as follows.

[0063] In combination Figure 3 and Figure 9 as shown, a first clamping position 4 is formed between the side wall of the first protrusion 7 along the axis direction of the support ring 6 and the end face of the support ring 6 facing the heat preservation cylinder 1. When the heat preservation cylinder 1 is clamped on the second support member 3, the heat preservation cylinder 1 can be directly buckled on the first clamping position 4.

[0064] Specifically, the end face of the support ring 6 facing the first support member 2 protrudes with a second protrusion 8 towards the first support member 2, so that the end face of the second support member 3 facing the first support member 2 is a stepped surface. Specifically, since the second protrusion 8 protrudes from a partial end face of the support ring 6 towards the first support member 2, the end face of the second protrusion 8 facing the first support member 2 is higher than the end face of the support ring 6 facing the first support member 2, and thus the end face of the second support member 3 facing the first support member 2 is a stepped surface; the reason why the end face of the second support member 3 facing the first support member 2 is set as a stepped surface in this application is to use this stepped surface to clamp the first support member 2, which is specifically described as follows.

[0065] As shown in combination with Figures 9-10 , the first protrusion 7 and the second protrusion 8 are arranged in one-to-one correspondence on the support ring 6. Further, both the first protrusion 7 and the second protrusion 8 are annular and are arranged on the edge of the support ring 6 close to its axis, and the edges of the first protrusion 7 and the second protrusion 8 close to the axis of the support ring 6 are flush with the edge of the support ring 6 close to its axis; as shown in combination with Figure 3 and Figure 9 , a second clamping position is formed between the side wall of the second protrusion 8 along the axis direction of the support ring 6 and the end face of the support ring 6 facing the first support member 2. When connecting the second support member 3 to the first support member 2, the second support member 3 can be directly buckled on the second clamping position 5.

[0066] It should be noted that: the first protrusion 7 and the second protrusion 8 are not limited to Figures 9-10 the circular ring shape, but can also be cylinders, and there are multiple of them. The multiple cylinders are arranged at intervals along the circumferential direction of the support ring 6, and the multiple cylinders enclose a circle, and the outer diameter of this circle is exactly equal to the inner diameter of the heat preservation cylinder 1. In addition, a first clamping position 4 is formed between the side wall of the cylinder along the axis direction of the support ring 6 and the side wall of the support ring 6 facing the heat preservation cylinder 1. When clamping the heat preservation cylinder 1 on the second support member 3, the heat preservation cylinder 1 can be directly buckled on the first clamping position 4 and sleeved on the circle formed by the multiple cylinders (the cooperation relationship between the second protrusion 8 and the first support member 2 is the same as the cooperation relationship between the first protrusion 7 and the heat preservation cylinder 1). Preferably, the above-mentioned cylinder can be a cylinder or a rectangular prism.

[0067] Specifically, the first protrusion 7, the second protrusion 8 and the support ring 6 are all carbon-carbon composite materials. The carbon-carbon composite material has extremely high wear resistance and can reduce the wear between the second support member 3 and the heat preservation cylinder 1 during long-term high temperature and disassembly and assembly, and extend the service life of the second support member 3. In addition, the carbon-carbon material has good stability at high temperature and is not prone to thermal decomposition or structural change, ensuring the reliability in the high temperature environment of the single crystal furnace.

[0068] In summary, the above-mentioned clamping method between the heat preservation cylinder 1 and the second support member 3 facilitates the installation or disassembly of the heat preservation cylinder 1 on or from the second support member 3; the second support member 3 is made of carbon-carbon composite material, which can reduce the wear between the second support member 3 and the heat preservation cylinder 1 during long-term high temperature and disassembly and assembly, and prolong the service life of the second support member 3. In addition, the carbon-carbon material has good stability at high temperature and is not prone to thermal decomposition or structural changes, ensuring reliability in the high-temperature environment of the single crystal furnace.

[0069] In this embodiment, further, in combination with Figure 1 as shown, the first support member 2 includes a first support cylinder 9 and a second support cylinder 10; the second support cylinder 10 is disposed between the first support cylinder 9 and the support ring 6.

[0070] Specifically, the first support cylinder 9 and the second support cylinder 10 are clamped together, so that the first support cylinder 9 and the second support cylinder 10 are detachably connected; that is, when one of the first support cylinder 9 or the second support cylinder 10 is damaged and cannot achieve effective support, the first support cylinder 9 and the second support cylinder 10 can be manually disassembled, which is convenient and simple to operate.

[0071] Specifically, the second support cylinder 10 and the support ring 6 are clamped together, so that the second support cylinder 10 and the support ring 6 are detachably connected. That is, when one of the support ring 6 or the second support cylinder 10 is damaged and cannot achieve effective support, the support ring 6 and the second support cylinder 10 can be manually disassembled, which is convenient and simple to operate.

[0072] In this embodiment, in combination with Figure 4 and Figure 5 as shown, specifically, the first support cylinder 9 includes a first cylinder body 11, and at least part of the end surface of the first cylinder body 11 facing the second support cylinder 10 protrudes towards the second support cylinder 10 with a third protrusion 12; in combination with Figure 7 and Figure 8 as shown, the second support cylinder 10 includes a second cylinder body 14, and the end surface of the second cylinder body 14 facing the first cylinder body 11 and corresponding to the first protrusion 7 is recessed with a first recess 15; the third protrusion 12 is adapted to the first recess 15 so that the first cylinder body 11 and the second cylinder body 14 are clamped together;

[0073] Specifically, in combination with Figure 6 and Figure 8 as shown, the end surface of the second cylinder body 14 facing the support ring 6 and corresponding to the second protrusion 8 is recessed with a second recess 16, and the second protrusion 8 is adapted to the second recess 16 so that the first cylinder body 11 and the second cylinder body 14 are clamped together.

[0074] Further, in combination with Figure 4 and Figure 5As shown, the third protrusion 12 protrudes from the edge of the first cylinder 11 close to the axis of the first cylinder 11. Combining Figure 7 and Figure 8 As shown, the first recess 15 is concave in the second cylinder 14 close to the edge of the second cylinder 14, so that the third protrusion 12 is adapted to the first recess 15; Combining Figure 6 、 Figure 8 、 Figure 2 and Figure 3 As shown, the second recess 16 is concave in the second cylinder 14 close to the edge of the second cylinder 14, so that the second protrusion 8 is adapted to the second recess 16.

[0075] Furthermore, the inner diameters and outer diameters of the first cylinder 11, the second cylinder 14 and the support ring 6 are the same.

[0076] It should be noted that: the above adaptation of the third protrusion 12 to the first recess 15 means that the shapes and sizes of the third protrusion 12 and the first recess 15 are the same; the above adaptation of the second protrusion 8 to the second recess 16 means that the shapes and sizes of the second protrusion 8 and the second recess 16 are the same.

[0077] Embodiment 2

[0078] In this embodiment, an example different from that in Embodiment 1 is given for the positions of the third protrusion 12 and the first recess 15, which is specifically as follows.

[0079] Specifically, the third protrusion 12 is annular and protrudes from the middle position of the end face of the first cylinder 11 facing the second cylinder 14, that is, the end face of the first cylinder 11 facing the second cylinder 14 will finally form a structure with both sides low and the middle high; the first recess 15 is annular and is concave in the middle position of the end face of the second cylinder 14 facing the first cylinder 11, that is, the end face of the second cylinder 14 facing the first cylinder 11 will form a structure with both sides high and the middle low, and the third protrusion 12 is adapted to the first recess 15.

[0080] Embodiment 3

[0081] The present application also provides a single crystal preparation device, including the above-mentioned support assembly. Therefore, it has all the beneficial effects of the above-mentioned support assembly, and will not be specifically elaborated here.

[0082] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A support component for supporting a heat preservation cylinder in a single crystal furnace; characterized in that, The support assembly includes a first support member and a second support member; The second support member is disposed between the heat preservation cylinder and the first support member; The end face of the second support member facing the heat preservation cylinder and the end face of the second support member facing the first support member are both stepped surfaces; A first clamping position is formed on the stepped surface of the second support member facing the heat preservation cylinder, and the first clamping position is used for clamping the heat preservation cylinder; A second clamping position is formed on the stepped surface of the second support member facing the first support member, and the second clamping position is used for clamping the first support member.

2. The support assembly according to claim 1, wherein The second support member includes a support ring, a first protrusion, and a second protrusion; At least a part of the end face of the support ring facing the heat preservation cylinder protrudes towards the heat preservation cylinder with the first protrusion, so that the end face of the second support member facing the heat preservation cylinder is the stepped surface; The end face of the support ring facing the first support member protrudes towards the first support member with the second protrusion, so that the end face of the second support member facing the first support member is the stepped surface.

3. The support assembly according to claim 2, wherein, The first protrusion and the second protrusion are arranged in one-to-one correspondence on the support ring.

4. The support assembly according to claim 3, wherein, Both the first protrusion and the second protrusion are annular and are arranged on the edge of the support ring close to its axis.

5. The support assembly according to claim 3, wherein, The first support member includes a first support cylinder and a second support cylinder; The second support cylinder is disposed between the first support cylinder and the support ring; The first support cylinder and the second support cylinder are clamped together, so that the first support cylinder and the second support cylinder are detachably connected; The second support cylinder and the support ring are clamped together, so that the second support cylinder and the support ring are detachably connected.

6. The support assembly according to claim 5, wherein The first support cylinder includes a first cylinder body; at least a part of the end face of the first cylinder body facing the second support cylinder protrudes towards the second support cylinder with a third protrusion, the second support cylinder includes a second cylinder body, and a first recess is concaved in the end face of the second cylinder body facing the first cylinder body and corresponding to the first protrusion; the third protrusion and the first recess are adapted to each other so that the first cylinder body and the second cylinder body are clamped together; A second recess is concaved in the end face of the second cylinder body facing the support ring and corresponding to the second protrusion, and the second protrusion and the second recess are adapted to each other so that the first cylinder body and the second cylinder body are clamped together.

7. The support assembly according to claim 6, wherein The third protrusion protrudes from the edge of the first cylinder body close to the axis of the first cylinder body, and the first recess is concaved in the edge of the second cylinder body close to the second cylinder body, so that the third protrusion and the first recess are adapted to each other; The second recess is concaved in the edge of the second cylinder body close to the second cylinder body, so that the second protrusion and the second recess are adapted to each other.

8. The support assembly according to claim 6, wherein, The third protrusion protrudes from the middle position of the end face of the first cylinder body facing the second cylinder body; the first recess is concaved in the middle position of the end face of the second cylinder body facing the first cylinder body, so that the third protrusion and the first recess are adapted to each other.

9. The support assembly according to any one of claims 6-8, characterized in that, The inner diameters and outer diameters of the first cylinder body, the second cylinder body, and the support ring are the same.

10. A single crystal preparation device, characterized in that, Comprising the support assembly according to any one of claims 1-9.

Images