Reflection baffle clamp

Abstract

The utility model discloses a reflection baffle plate clamp, which is used for a semiconductor wafer automatic material carrying system, and comprises a connecting part, wherein one end of a telescopic rod is connected with a chuck; the chuck comprises a connecting part, a supporting part and an elastic part; the connecting part is formed at the lower end of the supporting part; the lower part of the elastic part is fixedly connected to the lower part of the supporting part and is inserted into the connector of the reflecting baffle; in a non-stress state, a gap is always formed between the upper part of the elastic part and the upper part of the supporting part. The clamping head is made of metal materials, so that the safety coefficient of rail climbing operation is guaranteed, maintenance manpower is reduced, the working efficiency of the climbing operation is obviously improved, and the clamping head has a great positive effect on smooth proceeding of whole production. The gap is always formed between the upper part of the elastic part and the upper part of the supporting part, so that the elastic part can be conveniently inserted into the connecting port, and the operation convenience can be improved. The utility model is firm and durable, is not only suitable for hanging a reflection baffle, but also can be used as an auxiliary tool for track maintenance.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, in particular to a reflection baffle clamp for an automatic material handling system of semiconductor wafers. Background Technique

[0002] The automatic material handling system (AMHS) of semiconductor wafers is a key technology in semiconductor manufacturing. It is responsible for automatically handling materials on the production line and consists of both software and hardware. The hardware mainly includes handling equipment such as overhead hoists (OHT), autonomous mobile robots (AMR), conveyors, etc., as well as storage equipment such as clean stockers, overhead buffer positions (OHB), and workstations. The software includes a material control system (MCS) and an equipment layer control system, which are responsible for overall scheduling and optimization. The AMHS system is crucial for improving the production efficiency and product yield of the wafer fab.

[0003] The application of the AMHS system in semiconductor wafer manufacturing also includes improving space utilization and reducing the idle time of machines. The overhead hoist system has become a standard configuration. During the daily high-altitude operation of the overhead hoist system, the hanging baffle is the most commonly used safety auxiliary tool, and its performance directly affects the safety of high-altitude operations. The main functions of the hanging baffle include:

[0004] 1. Ensure the correct positioning of the wafer: The reflection baffle may be used to help sensors and cameras more accurately identify and position the wafer, ensuring accuracy during the handling process.

[0005] 2. Prevent wafer collisions: During the movement of the wafers, the reflection baffle may be used to prevent contact and collision between the wafers, protecting the wafers from damage.

[0006] 3. Maintain the handling path: In an automated handling system, the reflection baffle may be part of the path, guiding the wafer to move along a predetermined path.

[0007] The top clamp of the existing hanging baffle telescopic rod is made of acrylic, with a short service life and prone to breakage. For example, when passing through the reflection baffle (blocking the overhead hoist), the breakage of the clamp will cause the reflection baffle to fall off the track, and the overhead hoist will hit construction workers or other obstacles, resulting in failures of the track or the overhead hoist, posing a great safety hazard. The existing hanging baffle telescopic rod cannot ensure construction safety during use and needs to be improved. Summary of the Utility Model

[0008] A series of simplified concepts are introduced in the utility model content section. These simplified concepts are simplified from the existing technologies in the field, which will be further elaborated in the detailed implementation section. The utility model content section of the present utility model does not mean to attempt to define the key features and essential technical features of the claimed technical solution, nor does it mean to attempt to determine the protection scope of the claimed technical solution.

[0009] The technical problem to be solved by the present utility model is to provide a reflective baffle fixture with durability and convenience in use.

[0010] To solve the above technical problem, the reflective baffle fixture provided by the present utility model is used for an automatic material handling system of semiconductor wafers and includes:

[0011] A telescopic rod 1, one end of which is connected to a connecting portion 3 of a chuck 2;

[0012] The chuck 2 includes: a connecting portion 3, a supporting portion 4 and an elastic portion 5;

[0013] The connecting portion 3 is formed at the lower end of the supporting portion 4;

[0014] The elastic portion 5, the lower part of which is fixedly connected to the lower part of the supporting portion 4, is used for inserting into the connection port of the reflective baffle;

[0015] In a non-loaded state, there is always a gap between the upper part of the elastic portion 5 and the upper part of the supporting portion 4, and this gap is beneficial for the elastic portion 5 to insert into the connection port of the reflective baffle.

[0016] Preferably, further improving the reflective baffle fixture, the telescopic rod 1 is made of thermoplastic or metal. Since the telescopic rod is not a contact component of the reflective baffle, it can be made into a relatively large size. Therefore, by using thermoplastic such as acrylic, sufficient strength can be provided while ensuring overall light weight.

[0017] Preferably, further improving the reflective baffle fixture, it is a single-section telescopic rod, a multi-section inner telescopic rod, a multi-section outer telescopic rod, a spring telescopic rod, a locking telescopic rod or a folding telescopic rod.

[0018] Single-section telescopic rod: This kind of telescopic rod is usually composed of a long rod and can adjust its length by telescoping.

[0019] Multi-section inner telescopic rod: It is composed of multiple rods, and the inner rods can be inserted into the outer rods, and the length can be adjusted by rotation or pulling.

[0020] Multi-section outer telescopic rod: Similar to the inner telescopic rod, but the rod sections are connected and locked externally.

[0021] Spring telescopic rod: It has a built-in spring mechanism and can adjust the length of the rod by compressing or releasing the spring.

[0022] Locking telescopic rod: The telescopic rod is fixed at a specific length through a rotation or button locking mechanism.

[0023] Folding telescopic rod: The structure allows the rod to be folded up for easy carrying and storage.

[0024] Preferably, further improve the reflection baffle clamp. The connecting portion 3 is formed with an internal thread, which cooperates with the external thread at the connecting end of the telescopic rod 1 to form a fixed connection. With this design, when the chuck 2 is damaged, the chuck 2 can be directly replaced, and the telescopic rod 1 can be reused.

[0025] Preferably, further improve the reflection baffle clamp. The connecting portion 3, the supporting portion 4 and the elastic portion 5 are made of metal. Correspondingly, since the elastic portion 5 needs to be inserted into the reflection baffle, its size is limited by the size of the connection port. The connecting portion 3, the supporting portion 4 and the elastic portion also need to bear the weight of the reflection baffle. Therefore, the present utility model is made of metal, such as stainless steel.

[0026] Preferably, further improve the reflection baffle clamp. The supporting portion 4 is formed into a plate-like structure, and the elastic portion 5 is formed into a plate-like structure adapted to the shape of the supporting portion 4.

[0027] Preferably, further improve the reflection baffle clamp. At least the upper end portion of the elastic portion 5 is formed into a guiding structure, and the purpose of designing the guiding structure is to facilitate the insertion into the connection port of the reflection baffle.

[0028] Preferably, further improve the reflection baffle clamp. The width of the upper end portion of the elastic portion 5 gradually increases from small to equal to the width of the supporting portion 4.

[0029] Preferably, further improve the reflection baffle clamp. The upper end portion of the elastic portion 5 is a triangular structure with a chamfer formed at the apex position.

[0030] The present utility model can at least achieve the following technical effects:

[0031] 1. The chuck of the present utility model is made of metal material, which ensures the safety factor of track climbing operation, basically eliminates the situation of OHT & track damage caused by fixture damage, reduces the maintenance manpower, significantly improves the working efficiency of climbing operation, and has a great positive effect on the smooth progress of the whole production.

[0032] 2. In the non-loaded state, there is always a gap between the upper part of the elastic portion 5 and the upper part of the supporting portion 4 of the present utility model, which is beneficial to the insertion of the elastic portion into the connection port and can improve the operation convenience.

[0033] Furthermore, setting the guiding structure is also beneficial to improving the operation convenience.

[0034] 3. The chuck and the telescopic rod of the present utility model form a modular structure, which can be replaced separately, reducing the usage cost and improving the convenience of use. For example, the same telescopic rod can be used in combination with different chucks.

[0035] 4. The present utility model is solid and durable, and is not only suitable for hanging reflection baffles, but also can be used as an auxiliary tool for track maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The drawings of the present utility model are intended to show the general characteristics of the methods, structures, and / or materials used in specific exemplary embodiments of the present utility model to supplement the description in the specification. However, the drawings of the present utility model are schematic diagrams that are not drawn to scale, and thus may not accurately reflect the precise structure or performance characteristics of any given embodiment. The drawings of the present utility model should not be construed as limiting or restricting the scope of the values or properties covered by the exemplary embodiments of the present utility model. The present utility model will be further described in detail below in conjunction with the drawings and the specific embodiments:

[0037] Figure 1 is a schematic diagram of the overall structure of the present utility model.

[0038] Figure 2 is a schematic diagram of a partial structure of the present utility model Figure 1 .

[0039] Figure 3 is a schematic diagram of a partial structure of the present utility model Figure 2 .

[0040] DESCRIPTION OF THE REFERENCE NUMERALS

[0041] Telescopic rod 1

[0042] Chuck 2

[0043] Connection part 3

[0044] Support part 4

[0045] Elastic part 5. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0046] The following describes the implementation manners of the present utility model through specific embodiments. Those skilled in the art can fully understand other advantages and technical effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through different specific implementation manners. The details in this specification can also be applied based on different viewpoints, and various modifications or changes can be made without departing from the overall design concept of the utility model. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. The following exemplary embodiments of the present utility model can be implemented in many different forms and should not be construed as being limited only to the specific embodiments described herein. It should be understood that these embodiments are provided to make the disclosure of the present utility model complete and thorough, and to fully convey the technical solutions of these exemplary specific embodiments to those skilled in the art. It should be understood that when an element is referred to as being "connected" or "coupled" to another element, the element can be directly connected or coupled to the other element, or there can be an intermediate element. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there is no intermediate element. In all the drawings, the same reference numerals always represent the same elements.

[0047] Embodiment

[0048] Reference Figure 1 Combined with Figure 2 And Figure 3 As shown, the present utility model provides a reflection baffle clamp, which is used for an automatic material handling system of semiconductor wafers, and includes:

[0049] A telescopic rod 1, one end of which is connected to a connection part 3 of a chuck 2. In this embodiment, the telescopic rod 1 is selected to be a multi-section threaded telescopic rod, and the telescopic movement is realized by rotation;

[0050] The chuck 2 includes: a connection part 3, a support part 4, and an elastic part 5;

[0051] The connection part 3 is formed at the lower end of the support part 4;

[0052] The elastic part 5 is fixedly connected to the lower part of the support part 4 at its lower part, and is used for inserting into the connection port of the reflection baffle;

[0053] In a non-loaded state, there is always a gap between the upper part of the elastic part 5 and the upper part of the support part 4. When in use, the reflection baffle is clamped between the support part 4 and the elastic part 5.

[0054] Preferably, in the above embodiment, the telescopic rod 1 is made of a thermoplastic such as acrylic, or the telescopic rod 1 is made of a metal, such as stainless steel.

[0055] The present utility model provides a preferred embodiment of a connecting portion 3. The connecting portion 3 is formed with an internal thread, which cooperates with the external thread at the connecting end of the telescopic rod 1 to form a fixed connection.

[0056] Preferably, in the above embodiment, the connecting portion 3, the supporting portion 4, and the elastic portion 5 are made of metal, which provides sufficient strength for the chuck 2.

[0057] Optionally, the supporting portion 4 is formed into a plate-like structure, and the elastic portion 5 is formed into a plate-like structure adapted to the shape of the supporting portion 4. It should be noted that the supporting portion 4 can also be formed into other shapes, as long as it can support the elastic portion 5 and be connected to the telescopic rod 1 through the connecting portion 3.

[0058] Preferably, without further improving the above embodiment, at least the upper end portion of the elastic portion 5 is formed into a guiding structure.

[0059] Correspondingly, it is also possible to form a guiding structure at the upper end portion of the supporting portion 4 that is adapted to the upper end portion of the elastic portion 5.

[0060] Exemplarily, the width of the upper end portion of the elastic portion 5 gradually increases from small to equal to the width of the supporting portion 4, that is, at least part of the elastic portion 5 can be inserted into the connection port. Correspondingly, in the preferred solution, the maximum width of the elastic portion 5 is less than or equal to the diameter of the connection port.

[0061] Preferably, the upper end portion of the elastic portion 5 is a triangular structure with a chamfer formed at the apex position.

[0062] Unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the art to which the present utility model belongs. It will also be understood that terms such as those defined in a general dictionary shall be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and shall not be interpreted in an ideal or overly formal sense unless explicitly defined herein.

[0063] The present utility model has been described in detail above through specific embodiments and examples, but these do not constitute a limitation to the present utility model. Without departing from the principle of the present utility model, those skilled in the art can also make many modifications and improvements, which should also be regarded as the protection scope of the present utility model.

Claims

1. A reflection baffle fixture, which is used for an automatic material handling system of semiconductor wafers, and is characterized in that Comprising: A telescopic rod (1), one end of which is connected to the connecting part (3) of the chuck (2); The chuck (2) includes: a connecting part (3), a supporting part (4) and an elastic part (5); The connecting part (3) is formed at the lower end of the supporting part (4); The elastic part (5), the lower part of which is fixedly connected to the lower part of the supporting part (4), is used for inserting into the connecting port of the reflection baffle; In a non-loaded state, there is always a gap between the upper part of the elastic part (5) and the upper part of the supporting part (4).

2. The reflection baffle fixture according to claim 1, wherein: The telescopic rod (1) is made of thermoplastic or metal.

3. The reflection baffle clamp according to claim 1, wherein: A single-section telescopic rod, a multi-section inner telescopic rod, a multi-section outer telescopic rod, a spring telescopic rod, a locking telescopic rod or a folding telescopic rod.

4. The reflection baffle clamp according to claim 1, wherein: The connecting part (3) is formed with an internal thread, which cooperates with the external thread at the connecting end of the telescopic rod (1) to form a fixed connection.

5. The reflection baffle fixture according to claim 1, characterized in that: The connecting part (3), the supporting part (4) and the elastic part (5) are made of metal.

6. The reflection baffle clamp according to claim 1, characterized in that: The supporting part (4) is formed into a plate-like structure, and the elastic part (5) is formed into a plate-like structure adapted to the shape of the supporting part (4).

7. The reflection baffle clamp according to claim 6, wherein: At least the upper end part of the elastic part (5) is formed into a guiding structure.

8. The reflection baffle clamp according to claim 7, wherein: The width of the upper end part of the elastic part (5) gradually increases from small to equal to the width of the supporting part (4).

9. The reflection baffle clamp according to claim 7, characterized in that: The upper end part of the elastic part (5) is a triangular structure with a chamfer formed at the apex position.

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