Automatic control device for synthesizing indium phosphide polycrystalline material
Through the temperature sensor and air pressure sensor of the automatic control device, combined with reaction theory calculation, a matching curve is generated, which solves the problem of mismatch between temperature and air pressure adjustment in indium phosphide polycrystalline synthesis, realizes precise control, and promotes industrial production.
Patent Information
- Application Number
- CN202521212759.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-13
- Publication Date
- 2025-07-25
- Estimated Expiration
- 2035-06-13
AI Technical Summary
During the existing polycrystalline indium phosphide synthesis, the regulation of pressure and temperature depends on manual experience, resulting in mismatch of time nodes, which easily leads to explosive tubes and is difficult to achieve stable production.
Automatic control devices are adopted, including temperature sensors, air pressure sensors and automatic pressure regulating mechanisms, and by calculating the temperature field distribution and reaction theory, matching curves are generated to achieve accurate control of the temperature and air pressure in the furnace.
It realizes precise temperature and air pressure control during the synthesis of indium phosphide polycrystalline materials, improves production stability and safety, and supports industrial development.
Smart Images
Figure CN223150694U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of inorganic chemical preparation, in particular to an automatic control device for synthesizing indium phosphide polycrystalline materials. Background Art
[0002] Indium phosphide is one of the important group III-V compound semiconductor materials and is a new generation of microelectronic and optoelectronic materials, which is of great strategic importance. Due to its high electron mobility, large band gap, strong anti-radiation performance, good thermal conductivity and other characteristics, it has important applications in optoelectronic and radio frequency fields such as 6G high-speed communication, data centers, lidar, AI, photonic integrated circuits, satellite communication, 3D sensors, high-frequency millimeter-wave devices, etc. The preparation of indium phosphide polycrystals is the front end of the industrial chain, and the efficient preparation of indium phosphide polycrystals is one of the important prerequisites for the steady development of the industrial chain. The synthesis of indium phosphide polycrystals is to place a certain purity of phosphorus and indium in a quartz product of a certain purity, and place the sealed vacuum material tube in the reaction synthesis equipment, and the equipment will complete the crystal synthesis growth by controlling the pressure and growth temperature.
[0003] During the synthesis growth of indium phosphide, the pressure and temperature in the reactor need to be adjusted according to different reaction time points. At present, the growth pressure is manually adjusted by opening the tube according to the temperature reading, and it is easy to have the time node advanced and delayed, which is extremely easy to cause tube explosion; the temperature control is also adjusted manually according to the empirical data, and the time points of adjustment do not match, and the individual differences are very large, so it is impossible to produce and synthesize stably, which restricts the industrialization of material synthesis. Summary of the Utility Model
[0004] The purpose of the utility model is to solve the problems put forward by the existing technology, and to propose an automatic control device for synthesizing indium phosphide polycrystalline materials.
[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:
[0006] An automatic control device for synthesizing indium phosphide polycrystalline materials, including a furnace body, an air supply pipe is fixedly connected to the inner wall of the furnace body, an air outlet pipe is fixedly connected to the inner wall of the furnace body, a heating sleeve is fixedly connected to the inner wall of the furnace body, a quartz tube is installed inside the heating sleeve, a temperature sensor and a pressure sensor are fixedly connected inside the heating sleeve, a control thermocouple is fixedly connected to the inner wall of the heating sleeve, and an automatic pressure regulating mechanism is arranged inside the air supply pipe.
[0007] Preferably, the automatic pressure regulating mechanism includes a sealing barrel fixedly connected to the surface of the air supply pipe, a motor is fixedly connected to the surface of the air supply pipe, a U-shaped plate is fixedly connected to the surface of the sealing barrel, an output end of the motor is fixedly connected to a driving shaft, and one end of the driving shaft is rotatably connected to the surface of the U-shaped plate.
[0008] Furthermore, a threaded rod is threadedly connected to the inner wall of the U-shaped plate. One end of the threaded rod is fixedly connected to a friction wheel, the surface of the friction wheel is in pressing contact with the surface of the drive shaft, a moving rod is slidably connected to the inner wall of the sealed barrel, and one end of the moving rod is rotatably connected to one end of the threaded rod.
[0009] Preferably, a baffle is fixedly connected to the inner wall of the sealed barrel. A ventilation hole is formed on the surface of the baffle. One end of the moving rod penetrates through one side of the baffle and is fixedly connected to a piston head.
[0010] Furthermore, the inner wall of the ventilation hole and the surface close to the piston head are provided with an inverted chamfer, and a groove is formed on the surface of the inverted chamfer.
[0011] Preferably, a pressure gauge is fixedly connected to the inner wall of the furnace body. One end of the air supply pipe is fixedly connected to an intake pipeline. A main valve is installed on the surface of the air supply pipe. A heating power supply is fixedly connected to the surface of the furnace body. A data calculation control cabinet is arranged on one side of the furnace body. The heating power supply and the data calculation control cabinet are electrically connected through a wire.
[0012] The beneficial effects of the present utility model are as follows:
[0013] 1. According to the temperature requirements of each stage of the reaction, calculate the temperature field distribution that needs to be provided by the equipment in each stage, generate a distribution curve graph and set it in the upper computer in the control cabinet. The display controller collects the temperatures of each point in the furnace body through temperature sensors, compares and calculates them with the temperature set value of the upper computer, and then calculates the real-time working power of the heating power supply and the cooling water flow through the power output calculator, so as to realize precise control of the temperature in the furnace.
[0014] 2. The process control temperature of each point is no longer measured and fed back at a single point according to the traditional process. This technology adopts multi-point measurement of the corresponding temperature zone and calculates a more reasonable process control temperature for this temperature zone according to a pre-established calculation program. According to the reaction theory, calculate the reaction pressure that needs to be matched with the reaction temperature in different stages, generate a matching curve and load it into the controller. The controller issues a pressure regulation instruction through calculation according to the data collected by the temperature sensor and the pressure sensor. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 is a three-dimensional structural schematic diagram of an automatic control device for indium phosphide polycrystalline material synthesis proposed by the present utility model;
[0016] Figure 2 is a sectional structural schematic diagram of the furnace body in an automatic control device for indium phosphide polycrystalline material synthesis proposed by the present utility model;
[0017] Figure 3Schematic cross-sectional structure diagram of a sealing barrel in an automatic control device for synthesizing indium phosphide polycrystalline materials proposed by the present utility model;
[0018] Figure 4 Schematic three-dimensional structure diagram of a ventilation hole in an automatic control device for synthesizing indium phosphide polycrystalline materials proposed by the present utility model;
[0019] Figure 5 Schematic three-dimensional structure diagram of an inclined chamfer in an automatic control device for synthesizing indium phosphide polycrystalline materials proposed by the present utility model.
[0020] In the figure: 1, furnace body; 2, inlet gas pipeline; 3, gas supply pipe; 4, heating power supply; 5, main valve; 6, sealing barrel; 7, heating sleeve; 8, motor; 9, control thermocouple; 10, temperature sensor; 11, quartz tube; 12, drive shaft; 13, friction wheel; 14, U-shaped plate; 15, moving rod; 16, baffle; 17, piston head; 18, groove; 19, ventilation hole; 20, air pressure sensor; 21, threaded rod; 22, outlet gas pipe; 23, inclined chamfer; 24, pressure gauge; 25, data calculation control cabinet. Specific embodiments
[0021] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments.
[0022] Refer to Figures 1 - 5 , an automatic control device for synthesizing indium phosphide polycrystalline materials, including a furnace body 1, an inner wall of the furnace body 1 is fixedly connected with a gas supply pipe 3, an inner wall of the furnace body 1 is fixedly connected with an outlet gas pipe 22, an inner wall of the furnace body 1 is fixedly connected with a heating sleeve 7, a quartz tube 11 is installed inside the heating sleeve 7, a temperature sensor 10 and an air pressure sensor 20 are fixedly connected inside the heating sleeve 7, a control thermocouple 9 is fixedly connected to an inner wall of the heating sleeve 7, and an automatic pressure regulating mechanism is arranged inside the gas supply pipe 3.
[0023] By providing the gas supply pipe 3 and the outlet gas pipe 22, gas supply and exhaust operations are carried out. By providing the furnace body 1, the quartz tube 11 is hermetically protected. By providing the heating sleeve 7, heating operation is carried out on the quartz tube 11. By providing the temperature sensor 10 and the air pressure sensor 20, the temperature and air pressure inside the furnace body 1 are detected. By providing the automatic pressure regulating mechanism, when the pressure is relatively large, the air pressure intensity entering the furnace body 1 inside the gas supply pipe 3 is automatically regulated.
[0024] In the present utility model, refer to Figure 1 and Figure 3, the automatic pressure regulating mechanism includes a sealing barrel 6 fixedly connected to the surface of the air supply pipe 3. A motor 8 is fixedly connected to the surface of the air supply pipe 3. A U-shaped plate 14 is fixedly connected to the surface of the sealing barrel 6. The output end of the motor 8 is fixedly connected to a driving shaft 12. One end of the driving shaft 12 is rotatably connected to the surface of the U-shaped plate 14.
[0025] By setting the motor 8, its output end drives the driving shaft 12. The surface of the driving shaft 12 contacts the surface of the friction wheel 13, driving the friction wheel 13 to rotate.
[0026] In this utility model, refer to Figure 3 , a threaded rod 21 is threadedly connected to the inner wall of the U-shaped plate 14. One end of the threaded rod 21 is fixedly connected to a friction wheel 13. The surface of the friction wheel 13 is in pressing contact with the surface of the driving shaft 12. A moving rod 15 is slidably connected to the inner wall of the sealing barrel 6. One end of the moving rod 15 is rotatably connected to one end of the threaded rod 21.
[0027] By setting the threaded rod 21, the positions of the moving rod 15 and the piston head 17 are adjusted.
[0028] In this utility model, refer to Figure 3 , a baffle 16 is fixedly connected to the inner wall of the sealing barrel 6. A ventilation hole 19 is formed on the surface of the baffle 16. One end of the moving rod 15 penetrates through one side of the baffle 16 and is fixedly connected to a piston head 17.
[0029] By setting the ventilation hole 19, exhaust operation is carried out. By setting the piston head 17, the distance between the piston head 17 and the ventilation hole 19 is adjusted, thereby controlling the volume of air pressure discharged from the ventilation hole 19.
[0030] In this utility model, refer to Figure 4 , the surface of the inner wall of the ventilation hole 19 close to the piston head 17 is provided with an inverted chamfer 23. A groove 18 is formed on the surface of the inverted chamfer 23.
[0031] By setting the inverted chamfer 23, the piston head 17 can better frictionally fit with the surface of the baffle 16 for sealing operation.
[0032] In this utility model, refer to Figure 2 , a pressure gauge 24 is fixedly connected to the inner wall of the furnace body 1. One end of the air supply pipe 3 is fixedly connected to an intake pipeline 2. A main valve 5 is installed on the surface of the air supply pipe 3. A heating power supply 4 is fixedly connected to the surface of the furnace body 1. A data calculation control cabinet 25 is arranged on one side of the furnace body 1. The heating power supply 4 is electrically connected to the data calculation control cabinet 25 through a wire.
[0033] By setting the barometer 24, the pressure inside the furnace body 1 is detected. By setting the data calculation control cabinet 25, according to the reaction theory, the reaction pressure required for the reaction temperature at different stages is calculated to generate a matching curve and loaded into the data calculation control cabinet 25. The data calculation control cabinet 25 sends a pressure adjustment instruction through calculation based on the data collected by the temperature sensor 10 and the pressure sensor 20.
[0034] Working principle: When preparing indium phosphide polycrystalline materials, a protective gas is introduced into the furnace body 1. The data calculation control cabinet 25 calculates the reaction pressure required for the reaction temperature at different stages according to the reaction theory based on the data collected by the temperature sensor 10 and the pressure sensor 20 to generate a matching curve, and sends a pressure adjustment instruction through calculation. The temperature sensor 10 collects the temperatures at various points inside the furnace body 1 and the water temperatures at the inlet and outlet, compares and calculates them with the temperature set value of the upper computer, and then calculates the real-time working power of the heating power supply 4 through the power output calculator, realizing precise control of the temperature inside the furnace. When the pressure sensor 20 detects that the pressure inside the furnace body 1 needs to be adjusted because it is unstable, the pressure value is transmitted to the data calculation control cabinet 25 through an electrical signal. The data calculation control cabinet 25 controls the start of the motor 8 through the PLC. The output end of the motor 8 drives the drive shaft 12 to rotate. The rotation of the drive shaft 12 drives the friction wheel 13 to rotate. The friction wheel 13 drives the threaded rod 21 to rotate. The threaded rod 21 drives the moving rod 15 to slide inside the sealed barrel 6 for position adjustment. The moving rod 15 drives the piston head 17 to displace, controlling the volume of gas discharged from the vent hole 19, achieving the effect of regulating the pressure. Through the detection and regulation of the pressure and temperature, precise control of the temperature inside the furnace is realized.
[0035] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent substitutions or changes, and all should be covered within the protection scope of the present invention.
Claims
1. An automatic control device for synthesizing indium phosphide polycrystalline materials, including a furnace body (1), characterized in that, The inner wall of the furnace body (1) is fixedly connected with an air supply pipe (3), the inner wall of the furnace body (1) is fixedly connected with an air outlet pipe (22), the inner wall of the furnace body (1) is fixedly connected with a heating sleeve (7), a quartz tube (11) is installed inside the heating sleeve (7), a temperature sensor (10) and a pressure sensor (20) are fixedly connected inside the heating sleeve (7), a control thermocouple (9) is fixedly connected to the inner wall of the heating sleeve (7), and an automatic pressure regulating mechanism is arranged inside the air supply pipe (3).
2. The automatic control device for synthesizing indium phosphide polycrystalline material according to claim 1, characterized in that, The automatic pressure regulating mechanism includes a sealing barrel (6) fixedly connected to the surface of the air supply pipe (3), a motor (8) is fixedly connected to the surface of the air supply pipe (3), a U-shaped plate (14) is fixedly connected to the surface of the sealing barrel (6), a driving shaft (12) is fixedly connected to the output end of the motor (8), and one end of the driving shaft (12) is rotatably connected to the surface of the U-shaped plate (14).
3. The automatic control device for synthesizing indium phosphide polycrystalline materials according to claim 2, characterized in that, A threaded rod (21) is threadedly connected to the inner wall of the U-shaped plate (14), a friction wheel (13) is fixedly connected to one end of the threaded rod (21), the surface of the friction wheel (13) is in pressing contact with the surface of the driving shaft (12), a moving rod (15) is slidably connected to the inner wall of the sealing barrel (6), and one end of the moving rod (15) is rotatably connected to one end of the threaded rod (21).
4. The automatic control device for synthesizing indium phosphide polycrystalline materials according to claim 3, wherein, A baffle (16) is fixedly connected to the inner wall of the sealing barrel (6), a ventilation hole (19) is formed in the surface of the baffle (16), and one end of the moving rod (15) penetrates through one side of the baffle (16) and is fixedly connected with a piston head (17).
5. The automatic control device for synthesizing indium phosphide polycrystalline materials according to claim 4, characterized in that, The surface of the inner wall of the ventilation hole (19) close to the piston head (17) is provided with an inverted chamfer (23), and a groove (18) is formed in the surface of the inverted chamfer (23).
6. The automatic control device for synthesizing indium phosphide polycrystalline material according to claim 1, characterized in that, A pressure gauge (24) is fixedly connected to the inner wall of the furnace body (1), an air inlet pipeline (2) is fixedly connected to one end of the air supply pipe (3), a main valve (5) is installed on the surface of the air supply pipe (3), a heating power supply (4) is fixedly connected to the surface of the furnace body (1), a data calculation control cabinet (25) is arranged on one side of the furnace body (1), and the heating power supply (4) is electrically connected to the data calculation control cabinet (25) through a wire.