Device for testing motion performance of linear motor

Abstract

The utility model relates to the technical field of motor performance testing, in particular to a device for testing motion performance of a linear motor, the linear motor is applied to an optical detection system of a gene sequencer, and the linear motor comprises a base, a supporting structure, a light path adjusting assembly, an objective lens, a light source, an image acquisition assembly, a position adjusting assembly, a light carrying plate and a driving assembly, wherein the light path adjusting assembly is fixed on the base through the supporting structure, the light source and the image acquisition assembly are respectively arranged on two opposite side surfaces of the light path adjusting assembly, a to-be-tested linear motor is arranged at the bottom of the light path adjusting assembly, the objective lens is arranged on a rotor of the to-be-tested linear motor, and the image acquisition assembly is arranged on the rotor of the to-be-tested linear motor. The central axis of the image acquisition assembly coincides with the central axis of the objective lens. The device is simple in structure and convenient to operate, evaluation can be rapidly completed even if the motion performance of a large number of linear motor modules is evaluated, and the test time is shortened.

Description

Technical Field

[0001] This application relates to the technical field of motor performance testing, and particularly to a device for realizing the motion performance inspection of a linear motor. Background Art

[0002] Gene sequencing is to sequence the genes of human samples using instruments, and predict the risk of suffering from a certain disease through a comprehensive high-tech physical examination of genomics and clinical medicine, so as to take measures. Its principle is to analyze the base sequence of specific gene fragments and interpret the meanings and arrangement patterns of the four bases A, T, C, and G. With the continuous development of the precision medicine industry, gene sequencing technology has been paid more and more attention by people.

[0003] In a gene sequencer, a nanoscale high-precision linear motor plays a crucial role. The nanoscale high-precision linear motor has high-precision characteristics and can achieve nanoscale positioning control. The high speed and high smoothness of the nanoscale high-precision linear motor enable the gene sequencer to perform sequencing operations efficiently and improve the sequencing efficiency. At the same time, the nanoscale high-precision linear motor is suitable for harsh environments and can work stably in the gene sequencer to ensure the accuracy of sequencing results.

[0004] Currently, a high-precision laser interferometer is usually used to measure the motion performance of a nanoscale high-precision linear motor to evaluate key motion performances such as the positioning accuracy and repeat positioning accuracy of the linear motor.

[0005] However, the laser interferometer has relatively high requirements for the use environment, the proficiency of personnel is required for the construction of the optical measurement system, the cost of the laser interferometer is relatively high, there are many steps in measuring the micron-level stroke and the static jitter of the motor, and the operation is relatively cumbersome. When evaluating the motion performance of a large number of linear motor modules, a large amount of time is required, which increases the test time. Summary of the Utility Model

[0006] One technical problem to be solved by this application is that the cost of the laser interferometer is relatively high, there are many steps in measuring the micron-level stroke and the static jitter of the motor, the operation is relatively cumbersome, and when evaluating the motion performance of a large number of linear motor modules, a large amount of time is required, which increases the test time.

[0007] To solve the above technical problems, an embodiment of the present application provides a device for realizing the motion performance inspection of a linear motor. The linear motor is applied to the optical detection system of a gene sequencer and includes a base, a support structure, an optical path adjustment component, an objective lens, a light source, an image acquisition component, a position adjustment component, a light-carrying plate, and a driving component, where: The optical path adjustment component is fixed on the base through the support structure. The light source and the image acquisition component are respectively arranged on two opposite side surfaces of the optical path adjustment component. The bottom of the optical path adjustment component is equipped with the linear motor to be tested. The objective lens is arranged on the rotor of the linear motor to be tested. The central axis of the image acquisition component coincides with the central axis of the objective lens. The position adjustment component and the driving component are arranged on the base. The light-carrying plate is arranged on the position adjustment component, and the light-carrying plate is located below the objective lens. The driving component is electrically connected to the linear motor to be tested.

[0008] In some embodiments, the driving component includes: a driver arranged on the base; a circuit board arranged on the support structure, and the circuit board is electrically connected to the driver.

[0009] In some embodiments, the circuit board is electrically connected to the light source.

[0010] In some embodiments, the support structure includes: two support plates symmetrically arranged on the base; a cross beam arranged on the two support plates, and the optical path adjustment component is arranged on the cross beam.

[0011] In some embodiments, the circuit board is arranged on any one of the two support plates.

[0012] In some embodiments, the optical path adjustment component is fixed on the cross beam through fasteners.

[0013] In some embodiments, the position adjustment component is a three-dimensional slide table.

[0014] In some embodiments, the optical path adjustment component includes: a diaphragm and an attenuation sheet, a convex lens, and a dichroic mirror.

[0015] In some embodiments, the image acquisition component includes an image sensor and a tube lens.

[0016] In some embodiments, the image sensor is a camera.

[0017] In some embodiments, the light source includes a semiconductor laser and a light-emitting diode.

[0018] In some embodiments, it further includes two radiators arranged on the optical path adjustment component. One radiator dissipates heat for the circuit board, and the other radiator dissipates heat for the light source.

[0019] Through the above technical solution, the device for realizing the motion performance inspection of the linear motor provided by the present application, wherein the linear motor is applied to the optical detection system of a gene sequencer, includes a base, a support structure, an optical path adjustment component, an objective lens, a light source, an image acquisition component, a position adjustment component, a light-carrying plate, and a driving component, wherein: the optical path adjustment component is fixed on the base through the support structure, the light source and the image acquisition component are respectively arranged on two opposite side surfaces of the optical path adjustment component, the bottom of the optical path adjustment component is installed with the linear motor to be tested, the objective lens is arranged on the rotor of the linear motor to be tested, and the central axis of the image acquisition component coincides with the central axis of the objective lens; the position adjustment component and the driving component are arranged on the base, the light-carrying plate is arranged on the position adjustment component, and the light-carrying plate is located below the objective lens, and the driving component is electrically connected to the linear motor to be tested.

[0020] By providing a support structure on the base, it is convenient to install the optical path adjustment component on the support structure, which provides an installation position for the optical path adjustment component and ensures the installation stability of the optical path adjustment component. At the same time, the light source and the image acquisition component are installed on the optical path adjustment component, and the motor to be tested is installed at the bottom of the optical path adjustment component. The motor to be tested can move relative to the optical path adjustment component, and the movement range is about mm on each side of the optical path adjustment component. The position adjustment component is arranged on the base and can move relative to the base, and the light-carrying plate is arranged on the position adjustment component.

[0021] During actual use, the driving component controls the motor to be tested to move to a specified position and turns on the light source. The light source irradiates on the optical path adjustment component, and the light passes through the optical path adjustment component and hits above the objective lens, generating a light spot on the light-carrying plate. The position coordinates of the light spot correspond to the position coordinates of the motor to be tested. Adjust the position adjustment component to make the position on the light-carrying plate clear. The driving component controls the motor to be tested to move within the depth of field of the objective lens to ensure clear images. After the motor to be tested moves into place, the image acquisition component takes a picture of the light spot through the objective lens, that is, image grabbing is performed. The position of the motor to be tested and the image are in one-to-one correspondence. Since the objective lens is arranged on the rotor of the motor to be tested and the central axis of the image acquisition component coincides with the central axis of the objective lens, the objective lens can move along with the movement of the motor to be tested, that is, the position of the light spot can be adjusted, so as to take pictures of light spots at different positions, and then calculate the motion characteristics of the motor according to the images, that is, the motion performance near this position can be quickly measured.

[0022] The device for quickly measuring the motion performance of a nanoscale high-precision linear motor has a relatively simple structure and is easy to operate. Even when evaluating the motion performance of a large number of linear motor modules, it can be quickly completed, reducing the test time. Description of the Drawings

[0023] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can also be obtained based on these drawings.

[0024] Figure 1 is a schematic structural diagram of the gene sequencing system / instrument disclosed in the embodiments of the present application;

[0025] Figure 2 is a schematic structural diagram of the optical detection system disclosed in the embodiments of the present application;

[0026] Figure 3 is a schematic structural diagram of the device for realizing the motion performance inspection of the linear motor disclosed in the embodiments of the present application;

[0027] Figure 4 is a perspective view of the device for realizing the motion performance inspection of the linear motor disclosed in the embodiments of the present application;

[0028] Figure 5 is an exploded view of the device for quickly measuring the motion performance of a nanoscale high-precision linear motor disclosed in the embodiments of the present application.

[0029] Explanation of the reference numerals:

[0030] 1, base; 2, support structure; 3, optical path adjustment component; 4, motor to be tested; 5, objective lens; 6, light source; 7, image acquisition component; 8, position adjustment component; 9, light-carrying plate; 10, drive component; 11, driver; 12, circuit board; 13, support plate; 14, cross beam; 15, radiator; 16, light-emitting diode emitting red light; 17, light-emitting diode emitting green light;

[0031] 10, chip; 20, chip platform; 30, reagent storage container; 40, diversion system; 50, optical detection system; computer system 60;

[0032] 501, light source; 502, imaging component; 5021, aperture plate; 5022-1, dichroic mirror; 5023, microscope; 50231, objective lens; 50232, tube lens; 5024, image sensor; 5026, attenuation sheet; 5027, convex lens. Detailed implementation manners

[0033] The following further describes in detail the implementation manners of the present application in conjunction with the accompanying drawings and embodiments. The detailed descriptions and drawings of the following embodiments are used to exemplarily illustrate the principles of the present application, but cannot be used to limit the scope of the present application. The present application can be implemented in many different forms, not limited to the specific embodiments disclosed in the text, but including all technical solutions falling within the scope of the claims.

[0034] These embodiments are provided by the present application to make the present application thorough and complete, and to fully convey the scope of the present application to those skilled in the art. It should be noted that: unless otherwise specifically stated, the relative arrangements of components and steps, the components of materials, numerical expressions and values described in these embodiments should be construed as merely exemplary, rather than as limitations.

[0035] It should be noted that in the description of the present application, unless otherwise specified, the meaning of "a plurality" is greater than or equal to two; the orientation or positional relationships indicated by terms such as "upper", "lower", "left", "right", "inner", "outer", etc. are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation to the present application. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0036] In addition, the "first", "second" and similar terms used in the present application do not denote any order, quantity or importance, but are only used to distinguish different parts. "Vertical" is not strictly vertical, but within the allowable error range. "Parallel" is not strictly parallel, but within the allowable error range. Words such as "including" or "comprising" mean that the elements before the word cover the elements listed after the word, and do not exclude the possibility of also covering other elements.

[0037] It should also be noted that in the description of the present application, unless otherwise clearly specified and limited, the terms "mounted", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations. When it is described that a specific device is located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device.

[0038] All terms used in this application have the same meaning as those understood by those of ordinary skill in the art to which this application belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries, such as general dictionaries, should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined herein.

[0039] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0040] Figure 1 The structure diagram of a gene sequencing system / instrument provided by the embodiment of the present disclosure is shown in FIG. Figure 1 As shown, the gene sequencing system / instrument (also called a nucleic acid sequencing system) provided by the embodiment of the present disclosure includes: a chip 10, a chip platform 20, a reagent storage container 30, a flow guide system 40, an optical detection system 50 and a computer system 60.

[0041] Among them, one or more sequencing objects are attached to the chip 10; the sequencing object here can be a nucleic acid fragment, which includes a base sequence of a certain length, for example, 150 bp in length; the sequencing object can also be a nucleic acid molecule.

[0042] A chip platform 20 configured to fix and support the chip 10;

[0043] The reagent storage container 30 is configured to store one or more reagents; here, the reagents may exemplarily include polymerase chain reaction (PCR) fluorescent reagents.

[0044] The flow guiding system 40 is configured to controllably transport the one or more reagents from the reagent storage container 30 to the chip 10 so as to contact and chemically react with the sequencing object, so that the sequencing object is fluorescently labeled;

[0045] An optical detection system 50 is configured to excite the fluorescent marker carried on the sequencing object, detect the fluorescent signal generated by the excited fluorescent marker, and generate a fluorescent image;

[0046] The computer system 60 is configured to acquire the fluorescence image from the optical detection system 50 and identify the nucleic acid sequence of the sequencing object according to the fluorescence image.

[0047] See also Figure 2 As shown, Figure 2 This is a schematic diagram of the structure of an optical detection system provided in an embodiment of the present disclosure. The optical detection system 50 at least includes a light source 501 and an imaging component 502.

[0048] Among them, the imaging component 502 at least includes a diaphragm 5021, a dichroic mirror 5022-1, a microscope 5023, and an image sensor 5024. A plurality of light passing holes 5025 are provided on the diaphragm 5021. The image sensor 5024 can be, for example, an industrial camera.

[0049] The light source 501 emits scattered excitation light. The excitation light passes through at least some of the plurality of light passing holes on the diaphragm 5021 to form a plurality of excitation light beams and irradiates the dichroic mirror 5022-1; the dichroic mirror 5022-1 reflects the excitation light beams passing through the light passing holes onto the chip 10 to assist the microscope 5023 in focusing and imaging; the microscope 5023 collects the fluorescence signals generated after the chemical reaction of the sequencing object on the chip 10; the image sensor 5024 senses the fluorescence signals and generates a fluorescence image.

[0050] The dichroic mirror 5022-1 can be fixed at a certain angle of inclination. Exemplarily, it can be fixed by dispensing glue.

[0051] In a possible implementation manner, the light source 501 can be, for example, a light-emitting diode, or can also be a semiconductor laser (Laser Diode, LD). In a specific implementation manner, the light source 501 can include both a light-emitting diode and a semiconductor laser, and different light source components can be selected according to actual needs at different stages. The diaphragm 5021 can be made of a light-impermeable material. Exemplarily, it can be a metal sheet. The scattered excitation light emitted by the light source 501 can only pass through the light passing holes, and the non-light passing hole part of the diaphragm 5021 will block the excitation light.

[0052] In a possible implementation manner, the imaging component 502 further includes an attenuation sheet 5026. The attenuation sheet 5026 is arranged in parallel with the diaphragm 5021 and is configured to attenuate the intensity of the excitation light beams. Refer to Figure 2 As shown, the attenuation sheet 5026 can be arranged behind the diaphragm 5021. After the excitation light beams pass through the light passing holes, they can directly irradiate onto the attenuation sheet 5026.

[0053] In a possible implementation manner, the imaging component 502 further includes a convex lens 5027. The convex lens 5027 is arranged in parallel with the attenuation sheet 5026 and is located between the attenuation sheet 5026 and the dichroic mirror 5022-1, and is configured to collimate the excitation light beams into parallel beams.

[0054] The microscope 5023 may include an objective lens 50231 and a tube lens 50232. The objective lens 50231 is located below the dichroic mirror 5022-1, the tube lens 50232 is located above the dichroic mirror 5022-1, and the image sensor 5024 is located above the tube lens 50232.

[0055] A linear motor is arranged on one side of the objective lens 50231. For example, it can be a voice coil motor (VCM). The objective lens 50231 can be controlled to move up and down through the voice coil motor to achieve focusing on the imaging assembly 502 and obtain the best image quality.

[0056] As analyzed above, the laser interferometer has relatively high requirements for the use environment, the construction of the optical measurement system requires a high level of proficiency of personnel, the cost of the laser interferometer is relatively high, there are many steps in measuring the micron-level stroke and the static jitter of the motor, and the operation is relatively cumbersome. When evaluating the motion performance of a large number of linear motor modules, a large amount of time is required, increasing the test time. The technical solution of the present application will be described below to solve the existing technical problems.

[0057] Please refer to Figures 3 to 5 As shown, an embodiment of the present application provides a device for realizing the inspection of the motion performance of a linear motor. The linear motor is applied to the optical detection system of a gene sequencer, and includes a base 1, a support structure 2, an optical path adjustment component 3, an objective lens 5, a light source 6, an image acquisition component 7, a position adjustment component 8, a light-carrying plate 9, and a driving component 10, wherein: the optical path adjustment component 3 is fixed on the base 1 through the support structure 2, the light source 6 and the image acquisition component 7 are respectively arranged on two opposite side surfaces of the optical path adjustment component 3, the bottom of the optical path adjustment component 3 is installed with a to-be-tested linear motor 4, the objective lens 5 is arranged on the rotor of the to-be-tested linear motor 4, and the central axis of the image acquisition component 7 coincides with the central axis of the objective lens 5; the position adjustment component 8 and the driving component 10 are arranged on the base 1, the light-carrying plate 9 is arranged on the position adjustment component 8, and the light-carrying plate 9 is located below the objective lens 5, and the driving component 10 is electrically connected to the to-be-tested linear motor 4.

[0058] By providing the support structure 2 on the base 1, it is convenient to install the optical path adjustment component 3 on the support structure 2, that is, it provides an installation position for the optical path adjustment component 3 and ensures the installation stability of the optical path adjustment component 3. At the same time, the light source 6 and the image acquisition component 7 are installed on the optical path adjustment component 3, and the to-be-tested motor 4 is installed at the bottom of the optical path adjustment component 3. The to-be-tested motor 4 can move relative to the optical path adjustment component 3, and the moving range is about 1 mm on each side of the optical path adjustment component 3. The position adjustment component is arranged on the base 1 and can move relative to the base 1, and the light-carrying plate 9 is arranged on the position adjustment component 8.

[0059] In actual use, the driving component 10 controls the motor 4 to be measured to move to a specified position, and turns on the light source 6. The light source 6 irradiates on the optical path adjusting component 3. After the light passes through the optical path adjusting component 3, it hits above the objective lens 5, generating a light spot on the light-carrying plate 9. The position coordinates of this light spot correspond to the position coordinates of the motor 4 to be measured. Adjust the position adjusting component 8 to make the position on the light-carrying plate 9 clear. The driving component 10 controls the motor 4 to be measured to move within the depth of field of the objective lens 5 to ensure clear images. After the motor 4 to be measured moves into place, the image acquisition component 7 takes a picture of the light spot through the objective lens 5, that is, performs image grabbing. The position of the motor 4 to be measured and the image are in one-to-one correspondence. Since the objective lens 5 is arranged on the rotor of the motor 4 to be measured, and the central axis of the image acquisition component 7 coincides with the central axis of the objective lens 5, therefore, the objective lens 5 can move along with the movement of the motor 4 to be measured, that is, the position of the light spot can be adjusted, so as to take pictures of the light spots at different positions, and then calculate the motion characteristics of the motor according to the images, that is, the motion performance near this position can be quickly measured.

[0060] The device for quickly measuring the motion performance of a nanoscale high-precision linear motor has a relatively simple structure and is easy to operate. Even when evaluating the motion performance of a large number of linear motor modules, it can be quickly completed, reducing the test time.

[0061] In some embodiments, the driving component 10 includes: a driver 11, arranged on the base 1; a circuit board 12, arranged on the support structure 2, and one end of the circuit board 12 is electrically connected to the driver 11.

[0062] By arranging the driver 11 on the base 1, that is, the base 1 provides an installation position for the driver 11. At the same time, the driver 11 is connected to the circuit board 12, so that the driver 11 can act, and then the circuit board 12 can control the motor 4 to be measured to move relative to the optical path adjusting component 3, that is, adjust the position of the motor 4 to be measured.

[0063] At the same time, the circuit board 12 is also connected to the light source 6, so that the on / off of the light source 6 and the adjustment of the light power can be controlled.

[0064] In some embodiments, the support structure 2 includes: two support plates 13, there are two of them, and the two support plates 13 are symmetrically arranged on the base 1; a cross beam 14, arranged on the two support plates 13, and the optical path adjusting component 3 is arranged on the cross beam 14.

[0065] Through the arrangement of the two support plates 13, and the two support plates 13 are symmetrically arranged on the base 1, the cross beam 14 can be arranged on the two support plates 13, so that the optical path adjusting component 3 arranged on the cross beam 14 can be installed at an appropriate height, leaving a certain space below the optical path adjusting component 3.

[0066] Among them, the circuit board 12 is disposed on the support plate 13, providing an installation position for the circuit board 12 and preventing the circuit board 12 from moving randomly.

[0067] The circuit board 12 is disposed on any one of the two support plates 13. Specifically, it can be set according to actual operations. In some embodiments, the optical path adjustment component 3 is fixed to the cross beam 14 by fasteners, increasing the connection reliability between the optical path adjustment component 3 and the cross beam 14. At the same time, the setting of the fasteners also facilitates the disassembly and installation of the subsequent optical path adjustment component 3.

[0068] Among them, the fastener is a screw.

[0069] Specifically, the position adjustment component 8 is located on the side of the motor under test 4 away from the cross beam 14, that is, the position adjustment component 8 is arranged on the side close to the motor under test 4, facilitating the formation of a light spot on the light carrier plate 9.

[0070] Among them, the position adjustment component 8 is a three-dimensional sliding table.

[0071] In some embodiments, the optical path adjustment component (3) includes: a diaphragm 5021, an attenuation sheet 5026, a convex lens 5027, and a dichroic mirror 5022-1. The diaphragm 5021, the attenuation sheet 5026, the convex lens 5027, and the dichroic mirror 5022-1 are all integrated in the optical path adjustment component 3.

[0072] In some embodiments, the image acquisition component 7 includes an image sensor 5024 and a tube lens 50232. Among them, the image sensor 5024 is a camera.

[0073] Among them, the light source 6 includes a semiconductor laser and light emitting diodes. Among them, there can be two light emitting diodes, one is a red light emitting diode 16, and the other is a green light emitting diode 17.

[0074] In some embodiments, the device for realizing the performance inspection of the linear motor further includes two radiators 15. The two radiators 15 are disposed on the optical path adjustment component 3. One radiator 15 dissipates heat from the circuit board 12, and the other radiator 15 dissipates heat from the light source 6.

[0075] Through the setting of the two radiators 15, heat can be dissipated from the circuit board 12 and the light source 6 respectively, thereby preventing the temperatures of the circuit board 12 and the light source 6 from being too high and affecting the normal use of the circuit board 12 and the light source 6.

[0076] So far, the embodiments of the present application have been described in detail. To avoid obscuring the concept of the present application, some details known in the art are not described. Those skilled in the art can fully understand how to implement the technical solutions disclosed herein based on the above description. Although some specific embodiments of the present application have been described in detail by way of examples, those skilled in the art should understand that the above examples are only for the purpose of illustration and not for the purpose of limiting the scope of the present application. Those skilled in the art should understand that the above embodiments can be modified or partial technical features can be equivalently replaced without departing from the scope and spirit of the present application. In particular, as long as there is no structural conflict, the technical features mentioned in each embodiment can be combined in any way.

Claims

1. A device for realizing the motion performance inspection of a linear motor, the linear motor being applied to the optical detection system of a gene sequencer, characterized in that, It includes a base (1), a support structure (2), an optical path adjustment component (3), an objective lens (5), a light source (6), an image acquisition component (7), a position adjustment component (8), a light-carrying plate (9), and a drive component (10), where: The optical path adjustment component (3) is fixed on the base (1) through the support structure (2). The light source (6) and the image acquisition component (7) are respectively arranged on two opposite sides of the optical path adjustment component (3). The bottom of the optical path adjustment component (3) is equipped with a linear motor to be measured (4), and the objective lens (5) is arranged on the rotor of the linear motor to be measured (4). The central axis of the image acquisition component (7) coincides with the central axis of the objective lens (5). The position adjustment component (8) and the drive component (10) are arranged on the base (1). The light-carrying plate (9) is arranged on the position adjustment component (8), and the light-carrying plate (9) is located below the objective lens (5). The drive component (10) is electrically connected to the linear motor to be measured (4).

2. The device for realizing the motion performance inspection of the linear motor according to claim 1, characterized in that The drive component (10) includes: A driver (11), arranged on the base (1); A circuit board (12), arranged on the support structure (2), and the circuit board (12) is electrically connected to the driver (11).

3. The device for realizing the motion performance inspection of the linear motor according to claim 2, characterized in that The circuit board (12) is electrically connected to the light source (6).

4. The device for realizing the motion performance inspection of the linear motor according to claim 2, characterized in that, The support structure (2) includes: Two support plates (13), symmetrically arranged on the base (1); A cross beam (14), arranged on the two support plates (13), and the optical path adjustment component (3) is arranged on the cross beam (14).

5. The device for realizing the motion performance inspection of a linear motor according to claim 4, characterized in that, The circuit board (12) is arranged on any one of the two support plates (13).

6. The device for realizing the motion performance inspection of the linear motor according to claim 4, characterized in that The optical path adjustment component (3) is fixed on the cross beam (14) through fasteners.

7. The device for realizing the motion performance inspection of the linear motor according to claim 1, characterized in that The position adjustment component (8) is a three-dimensional slide table.

8. The device for realizing the motion performance inspection of the linear motor according to claim 1, characterized in that, The optical path adjustment component (3) includes: a diaphragm (5021) and an attenuation sheet (5026), a convex lens (5027), and a dichroic mirror (5022-1).

9. The device for realizing the motion performance inspection of a linear motor according to claim 1, characterized in that The image acquisition component (7) includes an image sensor and a tube lens.

10. The device for realizing the motion performance inspection of the linear motor according to claim 9, characterized in that, The image sensor is a camera.

11. The device for realizing the motion performance inspection of the linear motor according to claim 1, characterized in that, The light source (6) includes a semiconductor laser and a light-emitting diode.

12. The device for realizing the motion performance inspection of the linear motor according to claim 2, wherein, It also includes two radiators (15), the two radiators (15) are arranged on the optical path adjustment component (3). One radiator (15) dissipates heat from the circuit board (12), and the other radiator (15) dissipates heat from the light source (6).

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