Light filtering device and laser photoetching equipment

Abstract

The utility model provides a light filtering device and laser photoetching equipment. The light filtering device comprises a driving motor and a light filtering wheel, the driving motor comprises an annular stator, an annular rotor and a hollow main shaft which are coaxially arranged, the hollow main shaft penetrates through the annular rotor and the annular stator and is fixedly connected with the annular rotor, and the annular stator can drive the annular rotor and the hollow main shaft to rotate together; the filter wheel and the hollow main shaft are coaxially arranged, the filter wheel comprises a wheel disc and a plurality of optical filters installed on the wheel disc, the wheel disc is fixedly connected with the hollow main shaft, and the optical filters are arranged corresponding to the position of a central cavity of the hollow main shaft. The technical problem that an existing light filtering device needs a large installation space is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of optical equipment, in particular to a filter device and a laser lithography device. Background Art

[0002] A filter device generally includes a driving motor and a filter wheel. The driving motor is in transmission connection with the filter wheel, and the driving motor drives the filter wheel to rotate. In the field of an optical light path, the filter device rotates the filter wheel to select different optical filters to change or adjust the characteristics of a light source, thereby achieving a specific effect. For example, in the field of laser lithography, according to the thickness of a photoresist, by rotating the filter wheel of the filter device, light in a target band can be selected to hit the photoresist for exposure, and thus a rectangular groove with a regular shape can be cut out on the photoresist, improving the lithography quality. Generally speaking, the greater the thickness of the photoresist, the smaller the band of the light in the selected target band.

[0003] Existing filter devices generally have two structural forms. In the filter device of the first structural form, a servo motor or a stepper motor is directly connected to the filter wheel to drive the filter wheel to rotate. In the filter device of the second structural form, the driving motor drives the filter wheel to rotate through a synchronous belt. Filter devices of these two structural forms both require a large installation space. In addition, since the synchronous belt will generate powder due to friction during movement, it will contaminate the lens.

[0004] Moreover, when applying the filter devices of the above two structural forms to a laser lithography device, the laser beam will be exposed outside, which may cause harm to the staff.

[0005] Therefore, there is an urgent need for an improved filter device and a laser lithography device. Summary of the Utility Model

[0006] (1) Technical Problems to be Solved

[0007] In view of the problems existing in the above technology, the utility model is at least solved to a certain extent. For this reason, the first object of the utility model is to propose a filter device, which solves the technical problem that the existing filter device requires a large installation space.

[0008] The second object of the utility model is to propose a laser lithography device, which solves the technical problem that the laser beam is exposed outside at the filter part of the existing laser lithography device.

[0009] (2) Technical Solutions

[0010] In order to achieve the above object, the main technical solutions adopted by the utility model include:

[0011] In a first aspect, the present utility model provides a light filtering device, comprising a driving motor and a light filtering wheel; the driving motor includes an annular stator, an annular rotor and a hollow main shaft coaxially arranged, the hollow main shaft penetrates through the annular rotor and the annular stator, the hollow main shaft is fixedly connected to the annular rotor, and the annular stator can drive the annular rotor and the hollow main shaft to rotate together; the light filtering wheel is coaxially arranged with the hollow main shaft, the light filtering wheel includes a wheel disc and a plurality of light filtering sheets mounted on the wheel disc, the wheel disc is fixedly connected to the hollow main shaft, and the plurality of light filtering sheets are arranged corresponding to the position of the central cavity of the hollow main shaft.

[0012] Optionally, the front end of the hollow main shaft is the end where the light beam exits the hollow main shaft, the rear end of the hollow main shaft is the end where the light beam enters the hollow main shaft, and the wheel disc is fixedly connected to the front end of the hollow main shaft.

[0013] Optionally, the inner wall of the front end of the hollow main shaft has a first annular surface and a second annular surface arranged in sequence from front to back, the diameter of the first annular surface is larger than that of the second annular surface, the first annular surface is connected to the second annular surface through an annular step surface, and the step surface is perpendicular to the axial direction of the hollow main shaft; the circumferential edge portion of the wheel disc abuts against the step surface, and the circumferential edge portion of the wheel disc is fixedly connected to the step surface.

[0014] Optionally, the driving motor further includes an annular housing and a bearing, the hollow main shaft is inserted into the annular housing, the annular housing is connected to the hollow main shaft through the bearing, and the annular stator is fixedly installed on the inner wall of the annular housing.

[0015] Optionally, the driving motor further includes a first bearing retaining ring and a second bearing retaining ring coaxially arranged with the hollow main shaft, the inner wall of the annular housing has a first annular limiting portion coaxially arranged with the hollow main shaft, and the outer wall of the hollow main shaft has a second annular limiting portion coaxially arranged with the hollow main shaft; the front end of the annular housing is flush with the front end of the hollow main shaft, and the front end of the bearing is flush with the front end of the hollow main shaft; the outer ring portion of the first bearing retaining ring is fixedly connected to the front end face of the annular housing, the inner ring portion of the first bearing retaining ring abuts against the front end of the outer ring of the bearing correspondingly, the outer ring portion of the second bearing retaining ring is fixedly connected to the front end face of the hollow main shaft, the inner ring portion of the second bearing retaining ring abuts against the front end of the inner ring of the bearing correspondingly, the first annular limiting portion abuts against the rear end of the outer ring of the bearing correspondingly, and the second annular limiting portion abuts against the rear end of the inner ring of the bearing correspondingly.

[0016] Optionally, the bearing is a crossed roller bearing.

[0017] Optionally, the light filtering device further includes a rotary encoder for detecting the rotation angle of the hollow main shaft, and the rotary encoder is arranged in the cavity between the annular housing and the hollow main shaft.

[0018] Optionally, the annular stator is sleeved outside the annular rotor, and there is a gap between the annular stator and the annular rotor.

[0019] In a second aspect, the present utility model provides a laser lithography device having the filter device as described above.

[0020] (III) Advantageous Effects

[0021] The advantageous effects of the present utility model are as follows:

[0022] For the filter device provided by the present utility model, the light beam can pass through the inside of the hollow main shaft and irradiate through the filter, so as to achieve the purpose of optical filtering. For the filter device provided in this embodiment, by mounting the filter wheel on the annular rotor, the driving motor is driven to drive the filter wheel to rotate, which can drive the filter wheel to accurately stop at the position of the required filter, and has a compact structure, small external dimensions, and small occupied space.

[0023] For the laser lithography device provided by the present utility model, the laser beam can pass through the inside of the hollow main shaft and irradiate through the filter, without being exposed outside, and thus will not cause laser damage to the staff, greatly improving the safety. Description of the Drawings

[0024] The present utility model is described with the aid of the following drawings:

[0025] Figure 1 It is a schematic cross-sectional view of the filter device according to the specific embodiment of the present utility model;

[0026] Figure 2 It is a schematic three-dimensional structure view of the filter device according to the specific embodiment of the present utility model.

[0027]

Description of the Reference Numerals

[0028] 1: Annular stator;

[0029] 2: Annular rotor;

[0030] 3: Hollow main shaft;

[0031] 31: First annular surface; 32: Second annular surface; 33: Step surface; 34: Second annular limiting portion;

[0032] 4: Annular housing;

[0033] 41: First annular limiting portion;

[0034] [[ID= fifty]]5: Crossed roller bearing;

[0035] 61: First bearing retaining ring; 62: Second bearing retaining ring;

[0036] 7: Rotary encoder;

[0037] 8: Annular cover plate;

[0038] 9: Filter wheel;

[0039] 91: Roulette; 92: Filter

[0040] 10: Cable socket Detailed implementation mode

[0041] It should be noted that the orientation nouns such as "front" and "back" mentioned in this article are based on Figure 1 the orientation for reference

[0042] As Figure 1 and Figure 2 shown, this embodiment provides a filter device, which includes a driving motor and a filter wheel 9

[0043] Among them, the driving motor includes an annular stator 1, an annular rotor 2 and a hollow main shaft 3 arranged coaxially. The hollow main shaft 3 penetrates through the annular rotor 2, and the hollow main shaft 3 penetrates through the annular stator 1. The hollow main shaft 3 is fixedly connected to the annular rotor 2. An energizable coil winding is arranged in the annular stator 1. The annular rotor 2 is a magnet. After the coil winding in the annular stator 1 is energized, the magnetic field generated by the annular stator 1 drives the annular rotor 2 to rotate around its central axis, and then drives the hollow main shaft 3 to rotate around its central axis

[0044] Among them, the filter wheel 9 is arranged coaxially with the hollow main shaft 3. The filter wheel 9 includes a roulette 91 and a plurality of filters 92 installed on the roulette 91. The roulette 91 is fixedly connected to the hollow main shaft 3. The plurality of filters 92 are arranged corresponding to the position of the central cavity of the hollow main shaft 3

[0045] For the filter device provided in this embodiment, the light beam can pass through the inside of the hollow main shaft 3 and irradiate through the filter 92 to achieve the purpose of optical filtering. For the filter device provided in this embodiment, by installing the filter wheel 9 on the annular rotor 2, the driving motor is driven to drive the filter wheel 9 to rotate, which can drive the filter wheel 9 to accurately stop at the position of the required filter 92, and has a compact structure, a small external dimension and a small occupied space

[0046] Preferably, the front end of the hollow main shaft 3 is the end where the light beam exits the hollow main shaft 3, the rear end of the hollow main shaft 3 is the end where the light beam enters the hollow main shaft 3, and the roulette 91 is fixedly connected to the front end of the hollow main shaft 3

[0047] Further preferably, the inner wall of the front end of the hollow main shaft 3 has a first annular surface 31 and a second annular surface 32 arranged in sequence from front to back. The diameter of the first annular surface 31 is larger than that of the second annular surface 32. The first annular surface 31 is connected to the second annular surface 32 through an annular stepped surface 33. The stepped surface 33 is perpendicular to the axial direction of the hollow main shaft 3. The circumferential edge portion of the wheel disc 91 abuts against the stepped surface 33, and the circumferential edge portion of the wheel disc 91 is fixedly connected to the stepped surface 33. In this way, it is convenient to fixedly connect the wheel disc 91 to the hollow main shaft 3, and the structure is compact.

[0048] Preferably, the inner diameter of the hollow main shaft 3 is 20 - 130 mm. In this way, while facilitating the passage of the light beam through the hollow main shaft 3, it is convenient to connect the filter wheel 9 to the hollow main shaft 3.

[0049] Preferably, the drive motor further includes an annular housing 4 and a bearing. The hollow main shaft 3 is inserted into the annular housing 4. The annular housing 4 is connected to the hollow main shaft 3 through the bearing. The annular stator 1 is fixedly installed on the inner wall of the annular housing 4. The drive motor arranged in this way has a simple structure.

[0050] Further preferably, the annular stator 1 is sleeved outside the annular rotor 2 (that is, the annular rotor 2 is located inside the annular stator 1), and there is a gap between the annular stator 1 and the annular rotor 2. In this way, the structure of the drive motor is more compact.

[0051] Further preferably, the drive motor further includes a first bearing retaining ring 61 and a second bearing retaining ring 62 coaxially arranged with the hollow main shaft 3. The inner wall of the annular housing 4 has a first annular limiting portion 41 coaxially arranged with the hollow main shaft 3. The outer wall of the hollow main shaft 3 has a second annular limiting portion 34 coaxially arranged with the hollow main shaft 3. The front end of the annular housing 4 is flush with the front end of the hollow main shaft 3. The front end of the bearing is flush with the front end of the hollow main shaft 3. The outer ring portion of the first bearing retaining ring 61 is fixedly connected to the front end face of the annular housing 4. The inner ring portion of the first bearing retaining ring 61 correspondingly abuts against the front end of the outer ring of the bearing. The outer ring portion of the second bearing retaining ring 62 is fixedly connected to the front end face of the hollow main shaft 3. The inner ring portion of the second bearing retaining ring 62 correspondingly abuts against the front end of the inner ring of the bearing. The first annular limiting portion 41 correspondingly abuts against the rear end of the outer ring of the bearing. The second annular limiting portion 34 correspondingly abuts against the rear end of the inner ring of the bearing. In this way, the structure is simple and compact, making the installation of the bearing more stable.

[0052] Further preferably, the bearing is a crossed roller bearing 5. The bearing has a strong load-bearing capacity, which is beneficial to the precise positioning of the rotation of the filter wheel 9.

[0053] Preferably, the filter device further includes a rotary encoder 7 for detecting the rotation angle of the hollow main shaft. The rotary encoder 7 is located in the cavity between the annular housing 4 and the hollow main shaft 3, and the rotary encoder 7 is located at the rear side of the annular stator 1 and the annular rotor 2. Thus, by providing the rotary encoder 7, a structural basis is provided to facilitate the precise control of the rotation angle of the hollow main shaft 3.

[0054] Specifically, in this embodiment, the hollow rotor is located at the rear side of the bearing, and the rotary encoder 7 is located at the rear side of the hollow rotor. Thus, the structure is more compact.

[0055] Furthermore, the drive motor further includes an annular cover plate 8 for covering the cavity between the annular housing 4 and the hollow main shaft 3. The outer edge portion of the annular cover plate 8 is fixedly connected to the rear end of the annular housing 4, and the rotary encoder 7 is fixedly installed on the annular cover plate 8.

[0056] Furthermore, a cable socket 10 is provided at the rear end of the annular housing 4. The cable socket 10 is electrically connected to the rotary encoder 7 and is also electrically connected to the coil winding of the annular stator 1. Thus, power supply to the rotary encoder 7 and the annular stator 1 can be achieved.

[0057] This embodiment also provides a laser lithography device, which has the above-mentioned filter device. Thus, the laser beam irradiates through the filter 92 inside the hollow main shaft 3 without being exposed outside, and thus will not cause laser damage to the staff, greatly improving the safety.

[0058] In the description of the present invention, it should be understood that the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality" means two or more unless otherwise specifically defined.

[0059] In the present invention, unless otherwise clearly defined and limited, the terms "mounted", "connected", "connected with", "fixed" and other terms should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium; it may be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0060] In the present utility model, unless otherwise clearly specified and defined, when a first feature is "on" or "under" a second feature, it may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, when a first feature is "above", "over" and "on top of" a second feature, it may be that the first feature is directly above or obliquely above the second feature, or it merely means that the horizontal height of the first feature is higher than that of the second feature. When a first feature is "under", "below" and "beneath" a second feature, it may be that the first feature is directly below or obliquely below the second feature, or it merely means that the horizontal height of the first feature is lower than that of the second feature.

[0061] In the description of this specification, the descriptions of terms such as "one embodiment", "some embodiments", "embodiment", "example", "specific example" or "some examples", etc., mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0062] Although the embodiments of the present utility model have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present utility model. Those of ordinary skill in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present utility model.

Claims

1. A filter device, characterized in that, It includes a driving motor and a filter wheel (9); The driving motor comprises a coaxially arranged annular stator (1), an annular rotor (2) and a hollow main shaft (3); the hollow main shaft (3) penetrates the annular rotor (2) and the annular stator (1); the hollow main shaft (3) is fixedly connected to the annular rotor (2); and the annular stator (1) can drive the annular rotor (2) and the hollow main shaft (3) to rotate together; The filter wheel (9) is coaxially arranged with the hollow main shaft (3). The filter wheel (9) comprises a wheel disc (91) and a plurality of filters (92) mounted on the wheel disc (91). The wheel disc (91) is fixedly connected to the hollow main shaft (3). The plurality of filters (92) are arranged at positions corresponding to the central cavity of the hollow main shaft (3).

2. The filter device according to claim 1, characterized in that, The front end of the hollow main shaft (3) is an end through which the light beam passes through the hollow main shaft (3), and the rear end of the hollow main shaft (3) is an end through which the light beam enters the hollow main shaft (3). The wheel (91) is fixedly connected to the front end of the hollow main shaft (3).

3. The filter device according to claim 2, characterized in that, The front end inner wall of the hollow main shaft (3) has a first annular surface (31) and a second annular surface (32) arranged in sequence from front to back, the diameter of the first annular surface (31) is larger than the diameter of the second annular surface (32), the first annular surface (31) is connected to the second annular surface (32) via an annular step surface (33), and the step surface (33) is arranged perpendicular to the axial direction of the hollow main shaft (3); the circumferential edge of the wheel disc (91) abuts against the step surface (33), and the circumferential edge of the wheel disc (91) is fixedly connected to the step surface (33).

4. The filter device according to claim 1, characterized in that The drive motor further comprises an annular housing (4) and a bearing. The hollow main shaft (3) is inserted into the annular housing (4). The annular housing (4) is connected to the hollow main shaft (3) via the bearing. The annular stator (1) is fixedly mounted on the inner wall of the annular housing (4).

5. The optical filter device according to claim 4, characterized in that The drive motor further comprises a first bearing pressure ring (61) and a second bearing pressure ring (62) coaxially arranged with the hollow main shaft (3); the inner wall of the annular housing (4) comprises a first annular limiting portion (41) coaxially arranged with the hollow main shaft (3); and the outer wall of the hollow main shaft (3) comprises a second annular limiting portion (34) coaxially arranged with the hollow main shaft (3); The front end of the annular housing (4) is flush with the front end of the hollow main shaft (3), and the front end of the bearing is flush with the front end of the hollow main shaft (3); the outer ring of the first bearing pressure ring (61) is fixedly connected to the front end face of the annular housing (4), the inner ring of the first bearing pressure ring (61) is in corresponding contact with the front end of the outer ring of the bearing, the outer ring of the second bearing pressure ring (62) is fixedly connected to the front end face of the hollow main shaft (3), the inner ring of the second bearing pressure ring (62) is in corresponding contact with the front end of the inner ring of the bearing, the first annular limiting portion (41) is in corresponding contact with the rear end of the outer ring of the bearing, and the second annular limiting portion (34) is in corresponding contact with the rear end of the inner ring of the bearing.

6. The filter device according to claim 4, characterized in that The bearing is a cross roller bearing (5).

7. The filter device according to claim 4, characterized in that, It also includes a rotary encoder (7) for detecting the rotation angle of the hollow main shaft. The rotary encoder (7) is arranged in the cavity between the annular housing (4) and the hollow main shaft (3).

8. The optical filter device according to claim 1, wherein: The annular stator (1) is sleeved outside the annular rotor (2), and there is a gap between the annular stator (1) and the annular rotor (2).

9. A laser lithography device, characterized in that: It has the filter device according to any one of claims 1 to 8.

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