Electrostatic chuck cutting device

Abstract

The utility model discloses an electrostatic chuck cutting device, which comprises a workbench; a first guide rail and a second guide rail are arranged on the upper surface of the workbench, and the extension line of the first guide rail perpendicularly intersects with the second guide rail. The supporting table is arranged on the first guide rail and used for bearing the electrostatic chuck and driving the electrostatic chuck to reciprocate along the first guide rail; the vertical frame is arranged on the second guide rail; a blade is arranged on the side, close to the supporting table, of the vertical frame, the length direction of the blade is parallel to the extending direction of the second guide rail, and the length of the blade is larger than the outer diameter of the electrostatic chuck. The vertical frame is used for driving the blade to reciprocate along the second guide rail so as to cut a bonding layer in the electrostatic chuck; and the liquid dropping device is fixed on the vertical frame, is positioned above the blade and is used for dropping an organic solvent to the blade when the blade cuts the bonding layer. According to the utility model, the probability of ceramic plate damage can be reduced, and workers are prevented from being cut by steel wires and the damaged ceramic plate.

Description

Technical Field

[0001] The utility model relates to the technical field of electrostatic chucks, in particular to an electrostatic chuck splitting device. Background Art

[0002] In semiconductor etching equipment, an electrostatic chuck is usually used to carry and fix a wafer for process treatment of the wafer. The electrostatic chuck generally includes a ceramic plate located on the upper layer and a substrate located on the lower layer. Among them, electrodes for adsorbing the wafer are provided in the ceramic plate, and the ceramic plate and the substrate are connected through an adhesive layer (such as thermally conductive insulating silicone).

[0003] Due to continuous erosion by a harsh etching environment, the service life of the electrostatic chuck is usually only several thousand hours. After reaching this time limit, the thermally conductive insulating silicone between the upper ceramic plate and the lower substrate in the electrostatic chuck will be damaged and aged. To repair the electrostatic chuck, it is necessary to first cut the old thermally conductive insulating silicone layer, then peel off the upper ceramic plate, and then bond the ceramic plate and the substrate with new thermally conductive insulating silicone.

[0004] In the traditional repair method, a steel wire is manually used to reciprocally cut the old thermally conductive insulating silicone layer. However, the thickness of the ceramic plate in most electrostatic chucks is less than 1 mm, and the thickness of the adhesive layer is less than 0.1 mm (100 microns). In addition, the texture of the ceramic plate itself is relatively brittle. If the force application is uneven when manually cutting the adhesive layer, it is easy to cause the ceramic plate to break, thereby resulting in product scrapping. Therefore, it is necessary to adjust the cutting method of the adhesive layer. Summary of the Utility Model

[0005] The purpose of the utility model is to provide an electrostatic chuck splitting device, which can avoid the phenomenon of uneven force application when manually using a steel wire in the prior art, thereby reducing the probability of ceramic plate breakage and avoiding staff being cut by the steel wire and the broken ceramic plate.

[0006] To achieve the above purpose, the utility model is realized through the following technical solutions:

[0007] An electrostatic chuck splitting device, the electrostatic chuck includes a ceramic plate located on the upper layer and a substrate located on the lower layer, and the ceramic plate and the substrate are connected through an adhesive layer; the electrostatic chuck splitting device includes:

[0008] A workbench; a first guide rail and a second guide rail are provided on the upper surface of the workbench, and the extension line of the first guide rail is perpendicular to and intersects the second guide rail;

[0009] A support table, which is arranged on the first guide rail and is used for carrying the electrostatic chuck and driving the electrostatic chuck to reciprocate along the first guide rail;

[0010] A vertical frame is arranged on the second guide rail; a blade is provided on one side of the vertical frame close to the support table, the length direction of the blade is parallel to the extension direction of the second guide rail, and the length of the blade is greater than the outer diameter of the electrostatic chuck; the vertical frame is used to drive the blade to reciprocate along the second guide rail so as to cut the bonding layer in the electrostatic chuck;

[0011] A dropper is fixed on the vertical frame and is located above the blade, and is used to drip an organic solvent onto the blade when the blade cuts the bonding layer.

[0012] Optionally, the blade is connected to the vertical frame through a height adjustment component; the height adjustment component includes:

[0013] Two third guide rails; the two third guide rails are relatively fixed on the side surface of the vertical frame close to the support table and are laid along the vertical direction;

[0014] Two first sliders, each first slider is correspondingly arranged on one of the third guide rails; and a clip is provided on one side of each first slider close to the support table for clamping the blade;

[0015] A connecting rod is fixedly connected to the two first sliders;

[0016] A first lead screw, the first end of which is threadedly connected to the connecting rod;

[0017] A first turntable is rotatably fixed at one end of the vertical frame far from the second guide rail and is fixedly connected to the second end of the first lead screw; and the rotation of the first turntable drives the connecting rod to reciprocate in the vertical direction through the first lead screw so as to drive the first slider to reciprocate along the third guide rail and adjust the vertical distance between the clip and the workbench.

[0018] Optionally, the clip is connected to the first slider through a length adjustment component; the length adjustment component includes:

[0019] A first support block is fixed on the side surface of one of the first sliders close to the support table;

[0020] A fourth guide rail is fixed on the side surface of the other first slider close to the support table; and the extension direction of the fourth guide rail is parallel to the extension direction of the second guide rail;

[0021] A second support block is arranged on the fourth guide rail; and a clip is respectively fixed on the side surfaces of the first support block and the second support block close to the support table;

[0022] A second lead screw, the first end of which is threadedly connected to the second support block;

[0023] A second turntable, rotatably fixed on the first slider where the second support block is located, is fixedly connected to the second end of the second lead screw; and the rotation of the second turntable drives the second support block to reciprocate along the fourth guide rail through the second lead screw, so as to adjust the horizontal distance between the two clips.

[0024] Optionally, the dropper includes:

[0025] A liquid storage bottle, located above the blade, is fixed on the side surface of the connecting rod close to the support table, and is used for storing the organic solvent;

[0026] An electromagnetic valve nozzle, arranged at one end of the liquid storage bottle close to the blade and communicated with the liquid storage bottle, is used for dripping the organic solvent onto the blade.

[0027] Optionally, the electrostatic chuck splitting device further includes: a reciprocating driving assembly; the reciprocating driving assembly includes:

[0028] A servo motor, fixed on the workbench;

[0029] A ball screw, one end of which is fixedly connected to the output shaft of the servo motor, and the other end of which is fixed on the workbench; the extending direction of the ball screw is the same as the extending direction of the second guide rail, and the nut in the ball screw is fixedly connected to the vertical frame; the output shaft of the servo motor rotates to drive the vertical frame to reciprocate along the second guide rail through the ball screw.

[0030] Optionally, the electrostatic chuck splitting device further includes: a control box; the control box is electrically connected to the electromagnetic valve nozzle and the servo motor, and is used for controlling the opening and closing of the electromagnetic valve nozzle and the servo motor.

[0031] Optionally, an electric heating coil is arranged at the bottom of the support table, and is used for heating the electrostatic chuck to a preset temperature.

[0032] Optionally, the preset temperature is 80°C to 120°C.

[0033] Optionally, a handle for holding is arranged on one side of the support table away from the vertical frame.

[0034] Optionally, a first guide rail sleeve or a first groove matching the first guide rail is arranged on the lower surface of the support table;

[0035] A second guide rail sleeve or a second groove matching the second guide rail is arranged on the lower surface of the vertical frame;

[0036] A third guide rail sleeve or a third groove matching the third guide rail is arranged on the side surface of each first slider close to the vertical frame;

[0037] The side surface of the second support block close to the vertical frame is provided with a fourth guide rail sleeve or a fourth groove that matches the fourth guide rail.

[0038] The utility model has at least one of the following advantages:

[0039] When the electrostatic chuck splitting device provided by the utility model cuts the old or aged bonding layer in the electrostatic chuck, the support table drives the electrostatic chuck to move along the first guide rail towards the direction close to the blade, and the vertical frame drives the blade to reciprocate along the second guide rail, so as to cut the old or aged bonding layer in the electrostatic chuck. Compared with the prior art in which a steel wire is manually used to reciprocally cut the old heat-conducting and insulating silica gel layer, in the utility model, both the electrostatic chuck and the blade move along fixed paths, and the situation of oblique force application will not occur, thereby avoiding the phenomenon of uneven force application when manually using a steel wire in the prior art, further reducing the probability of ceramic plate breakage and preventing the staff from being cut by the steel wire and the broken ceramic plate.

[0040] When cutting the old or aged bonding layer in the electrostatic chuck in the utility model, the organic solvent can be dripped onto the blade through a dropper to keep the blade in a wet state, so that the blade will not be stuck by the residual glue in the bonding layer, avoiding bad phenomena such as residual glue agglomeration and caking in the cut bonding layer, and further improving the cutting efficiency and yield of the bonding layer.

[0041] In the utility model, the rotation of the first turntable drives the connecting rod to reciprocate vertically through the first lead screw, so as to drive the two first sliders to reciprocate along the corresponding third guide rails simultaneously, thereby simultaneously adjusting the vertical distance between the clamp on the first slider and the workbench, and further adjusting the height of the blade clamped by the clamp, so that the blade can cut and separate electrostatic chucks with different thicknesses after height adjustment, ensuring that the electrostatic chuck splitting device has good versatility.

[0042] In the utility model, the rotation of the second turntable drives the second support block to reciprocate along the fourth guide rail through the second lead screw, so that the clamp fixed on the second support block reciprocates along the fourth guide rail, thereby adjusting the horizontal distance between the clamp on the second support block and the clamp on the first support block, enabling the clamp to clamp blades with different lengths, and further being able to cut and separate electrostatic chucks with different diameters, further ensuring that the electrostatic chuck splitting device has good versatility. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 is a perspective view of an electrostatic chuck splitting device provided by an embodiment of the utility model;

[0044] Figure 2It is a side view of an electrostatic chuck splitting device provided by an embodiment of the present utility model;

[0045] Figure 3 It is a rear view of an electrostatic chuck splitting device provided by an embodiment of the present utility model. Detailed implementation manners

[0046] The following further elaborates in detail on an electrostatic chuck splitting device proposed by the present utility model in conjunction with the accompanying drawings and specific implementation manners. According to the following description, the advantages and features of the present utility model will be clearer. It should be noted that the accompanying drawings are in a very simplified form and all use non-precise scales, only for the purpose of conveniently and clearly assisting in explaining the implementation manners of the present utility model. In order to make the purpose, features, and advantages of the present utility model more obvious and understandable, please refer to the accompanying drawings. It should be noted that the structures, scales, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present utility model. Therefore, they do not have a substantial technical meaning. Any modification of the structure, change in the proportional relationship, or adjustment of the size, without affecting the effects that the present utility model can produce and the purposes that can be achieved, should still fall within the scope covered by the technical content disclosed by the present utility model.

[0047] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the term "comprising", "including", or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article, or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such process, method, article, or device. Without further limitation, an element defined by the statement "including one..." does not exclude the existence of additional identical elements in the process, method, article, or device including the said element.

[0048] Combined with the attached Figures 1 to 3 As shown, this embodiment provides an electrostatic chuck splitting device. The electrostatic chuck 100 includes a ceramic plate (not shown in the figure) located on the upper layer and a substrate (not shown in the figure) located on the lower layer. The ceramic plate and the substrate are connected through an adhesive layer (not shown in the figure); optionally, the adhesive layer uses thermally conductive insulating silicone. The electrostatic chuck splitting device includes: a workbench 110, a support table 120, a vertical frame 130, and a dropper 150. The upper surface of the workbench 110 is provided with a first guide rail 111 and a second guide rail 112 (such as Figure 2As shown, the extension line of the first guide rail 111 is perpendicularly intersected with the second guide rail 112. The support table 120 is arranged on the first guide rail 111 and can reciprocate along the first guide rail 111; the support table 120 is used for carrying the electrostatic chuck 100 and driving the electrostatic chuck 100 to reciprocate along the first guide rail 111. The vertical frame 130 is arranged on the second guide rail 112 and can reciprocate along the second guide rail 112; a blade 140 is provided on one side of the vertical frame 130 close to the support table 120. The length direction of the blade 140 is parallel to the extension direction of the second guide rail 112, and the length of the blade 140 is greater than the outer diameter of the electrostatic chuck 100; the vertical frame 130 is used for driving the blade 140 to reciprocate along the second guide rail 112 to cut the bonding layer in the electrostatic chuck 100, so that the ceramic plate and the substrate are separated, thereby facilitating the operation of replacing the bonding layer. The dropper 150 is fixed on the vertical frame 130 and is located above the blade 140; the dropper 150 is used for dripping an organic solvent onto the blade 140 when the blade 140 cuts the bonding layer.

[0049] Specifically, the electrostatic chuck 100 is arranged on the upper surface of the support table 120, and the support table 120 can drive the electrostatic chuck 100 to reciprocate along the first guide rail 111, so that the electrostatic chuck 100 approaches or moves away from the blade 140. More specifically, when it is necessary to cut the old or aged bonding layer in the electrostatic chuck 100, the support table 120 can be pushed along the first guide rail 111 in the direction approaching the blade 140, so that the electrostatic chuck 100 to be cut approaches the blade 140, thereby facilitating the use of the blade 140 to cut the old or aged bonding layer. Further, after cutting the old or aged bonding layer, the support table 120 can be pulled along the first guide rail 111 in the direction away from the blade 140, so that the electrostatic chuck 100 that has been cut moves away from the blade 140, thereby facilitating the operations of applying a new bonding layer and re-bonding the ceramic plate and the substrate. Optionally, a handle 122 for holding is provided on one side of the support table 120 away from the vertical frame 130, and the operation of pushing or pulling the support table 120 is facilitated through the handle 122.

[0050] In some embodiments, a first guide rail sleeve 121 or a first groove (not shown in the figure) matching the first guide rail 111 is provided on the lower surface of the support table 120, so that the support table 120 can reciprocate along the first guide rail 111. Preferably, the first guide rail sleeve 121 is provided on the lower surface of the support table 120, and the first guide rail sleeve 121 is slidably sleeved on the outside of the first guide rail 111, but the present invention is not limited thereto.

[0051] Specifically, after the support table 120 drives the electrostatic chuck 100 to be cut close to the blade 140, the vertical frame 130 can drive the blade 140 to reciprocate along the second guide rail 112, so that the old or aged bonding layer in the electrostatic chuck 100 can be cut when the blade 140 reciprocates. Optionally, a second guide rail sleeve 131 or a second groove (not shown in the figure) matching the second guide rail 112 is provided on the lower surface of the vertical frame 130, so that the vertical frame 130 can reciprocate along the second guide rail 112. Preferably, the second guide rail sleeve 131 is provided on the lower surface of the vertical frame 130, and the second guide rail sleeve 131 is slidably sleeved on the outside of the second guide rail 112, but the present invention is not limited thereto.

[0052] As can be seen from the above, when cutting the old or aged bonding layer in the electrostatic chuck 100, the support table 120 drives the electrostatic chuck 100 to move along the first guide rail 111 in a direction close to the blade 140, and the vertical frame 130 drives the blade 140 to reciprocate along the second guide rail 112, so as to cut the old or aged bonding layer in the electrostatic chuck 100. Compared with the prior art in which a steel wire is manually used to reciprocally cut an old thermally conductive insulating silicone layer, in the present invention, both the electrostatic chuck 100 and the blade 140 move along fixed paths, and there will be no situation of oblique force application, thus avoiding the phenomenon of uneven force application when using a steel wire manually in the prior art, thereby reducing the probability of breakage of the ceramic plate and avoiding the staff from being cut by the steel wire and the broken ceramic plate.

[0053] Further, when cutting the old or aged bonding layer in the electrostatic chuck 100, the organic solvent can be dropped onto the blade 140 through the dropper 150, so that the blade 140 is kept in a wet state, thereby preventing the blade 140 from being adhered by the residual glue in the bonding layer, avoiding adverse phenomena such as agglomeration and caking of the residual glue in the bonding layer to be cut, and further improving the cutting efficiency and yield of the bonding layer. Optionally, the organic solvent includes acetone, alcohol, etc., but the present invention is not limited thereto.

[0054] Please continue to refer to Figure 1 andFigure 3 , the electrostatic chuck splitting device further includes: a reciprocating drive assembly 180; the reciprocating drive assembly 180 includes: a servo motor 181 and a ball screw 182. The servo motor 181 is fixed on the workbench 110. One end of the ball screw 182 is fixedly connected to the output shaft of the servo motor 181, and the other end is fixed on the workbench 110; the extending direction of the ball screw 182 is the same as the extending direction of the second guide rail 112, and the nut 1821 in the ball screw 182 is fixedly connected to the vertical frame 130; the output shaft of the servo motor 181 rotates to drive the vertical frame 130 to reciprocate along the second guide rail 112 through the ball screw 182.

[0055] Specifically, the ball screw 182 can convert rotary motion into linear motion. The structure of the ball screw 182 is the same as that of a common ball screw, and will not be elaborated here. In this embodiment, the screw rod in the ball screw 182 is fixedly connected to the output shaft of the servo motor 181; when the output shaft of the servo motor 181 rotates, the screw rod in the ball screw 182 rotates synchronously, and the nut 1821 sleeved on the screw rod will be converted into linear motion according to the lead of the corresponding specification with the rotation angle of the screw rod, so that the vertical frame 130 connected to the nut 1821 reciprocates along the second guide rail 112, and further makes the vertical frame 130 drive the blade 140 to reciprocate along the second guide rail 112 to improve the cutting efficiency of the blade 140 on the bonding layer. Optionally, in some embodiments, the electrostatic chuck splitting device further includes: a control box 190; the control box 190 is electrically connected to the servo motor 181 for turning on and off the servo motor 181. Optionally, the control box 190 is fixed on the workbench 110, but the present invention is limited thereto.

[0056] Please continue to refer to Figure 1 and Figure 2, the blade 140 is connected to the vertical frame 130 through a height adjustment assembly 160; the height adjustment assembly 160 includes: two third guide rails 1601, two first sliders 1602, a connecting rod 1603, a first lead screw 1604, and a first turntable 1605. The two third guide rails 1601 are relatively fixed on the side surface of the vertical frame 130 close to the support table 120 and are laid in the vertical direction. Each first slider 1602 is correspondingly arranged on one of the third guide rails 1601; and on the side of each first slider 1602 close to the support table 120, there is a clip 141 for clamping the blade 140. The connecting rod 1603 is fixedly connected to the two first sliders 1602 for connecting the two first sliders 1602. The first end of the first lead screw 1604 is threadedly connected to the connecting rod 1603; the first turntable 1605 is rotatably fixed at one end of the vertical frame 130 away from the second guide rail 112 and is fixedly connected to the second end of the first lead screw 1604.

[0057] Specifically, when the first turntable 1605 rotates, it drives the connecting rod 1603 to reciprocate in the vertical direction through the first lead screw 1604, so as to drive the two first sliders 1602 to reciprocate along the corresponding third guide rails 1601 at the same time, thereby simultaneously adjusting the vertical distance between the clip 141 on the first slider 1602 and the workbench 110, and further adjusting the height of the blade 140 clamped by the clip 141, so that after the height of the blade 140 is adjusted, it can cut and separate the electrostatic chucks 100 with different thicknesses, ensuring that the electrostatic chuck splitting device has good versatility.

[0058] In some embodiments, on the side surface of each first slider 1602 close to the vertical frame 130, there is a third guide rail sleeve (not shown in the figure) or a third groove 1606 that matches the third guide rail 1601, so that the first slider 1602 can reciprocate along the third guide rail 1601. Preferably, the third groove 1606 is provided on the side surface of the first slider 1602 close to the vertical frame 130, and the third groove 1606 is sleeved outside the third guide rail 1601, but the present invention is not limited thereto.

[0059] In some embodiments, the connecting rod 1603 is fixedly connected to the top end of the first slider 1602 (i.e., the end far from the second guide rail), and a convex block 1607 extending toward the side surface of the vertical frame 130 away from the support table 120 is provided in the middle of the connecting rod 1603. A first threaded hole is formed in the convex block 1607, and the first end of the first lead screw 1604 is screwed into the first threaded hole, so that when the first turntable 1605 rotates, the connecting rod 1603 can be driven to reciprocate vertically by the first lead screw 1604, thereby driving the first slider 1602, the clamp 141, and the blade 140 to reciprocate vertically, and further facilitating the adjustment of the height of the blade 140.

[0060] Please continue to refer to Figure 1 and Figure 2 , the clamp 141 is connected to the first slider 1601 through a length adjustment assembly 170; the length adjustment assembly 170 includes: a first support block 1701, a fourth guide rail 1703, a second support block 1702, a second lead screw 1704, and a second turntable 1705. The first support block 1701 is fixed to the side surface of one of the first sliders 1602 close to the support table 120; the fourth guide rail 1703 is fixed to the side surface of the other first slider 1602 close to the support table 120; and the extending direction of the fourth guide rail 1703 is parallel to the extending direction of the second guide rail 112. The second support block 1702 is disposed on the fourth guide rail 1703, and a clamp 141 is respectively fixed to the side surfaces of the first support block 1701 and the second support block 1702 close to the support table 120. The first end of the second lead screw 1704 is threadedly connected to the second support block 1702; the second turntable 1705 is rotatably fixed to the first slider 1602 where the second support block 1702 is located and is fixedly connected to the second end of the second lead screw 1704.

[0061] Specifically, when the second turntable 1705 rotates, the second support block 1702 is driven to reciprocate along the fourth guide rail 1703 by the second lead screw 1704, so that the clamp 141 fixed to the second support block 1702 reciprocates along the fourth guide rail 1703, thereby adjusting the horizontal distance between the clamp 141 on the second support block 1702 and the clamp 141 on the first support block 1701, enabling the clamp 141 to clamp blades 140 of different lengths, and further enabling the electrostatic chuck 100 of different diameters to be cut and separated, further ensuring that the electrostatic chuck splitting device has good versatility.

[0062] In some embodiments, a fourth guide rail sleeve (not shown in the figure) or a fourth groove 1706 matching the fourth guide rail 1703 is provided on the side surface of the second support block 1702 close to the vertical frame 130, so that the second support block 1702 can reciprocate along the fourth guide rail 1703. Preferably, the fourth groove 1706 is provided on the side surface of the second support block 1702 close to the vertical frame 130, and the fourth groove 1706 is sleeved outside the fourth guide rail 1703, but the present invention is not limited thereto.

[0063] In some embodiments, a second threaded hole is formed at one end of the second support block 1702 away from the first support block 1701, and the first end of the second lead screw 1704 is screwed into the second threaded hole. When the second turntable 1705 rotates, the second support block 1702 can be driven to reciprocate along the fourth guide rail 1703 through the second lead screw 1704, so as to drive the clip 141 fixed on the second support block 1702 to reciprocate along the fourth guide rail 1703, thereby facilitating the adjustment of the horizontal distance between the two clips 141, so that the two clips 141 can clamp both ends of the blade 140 with different lengths.

[0064] Please continue to refer to Figure 1 , the dropper 150 includes: a liquid storage bottle 1501 and a solenoid valve nozzle 1502. The liquid storage bottle 1501 is located above the blade 140 and is fixed on the side surface of the connecting rod 160 close to the support table 120 for storing the organic solvent. The solenoid valve nozzle 1502 is arranged at one end of the liquid storage bottle 1501 close to the blade 140 and is communicated with the liquid storage bottle 1501 for dropping the organic solvent onto the blade 140. Optionally, the solenoid valve nozzle 1502 is electrically connected to the control box 190 to control the opening and closing of the solenoid valve nozzle 1502 through the control box 190, but the present invention is not limited thereto.

[0065] In addition, in some embodiments, an electric heating coil is provided at the bottom of the support table 120 for heating the electrostatic chuck 100 to a preset temperature to preheat and soften the adhesive layer in the electrostatic chuck 100, so that the residual glue in the cut adhesive layer can be easily cleaned by a conventional organic solvent machine. Optionally, the preset temperature is 80°C to 120°C; preferably, the preset temperature is 100°C, but the present invention is not limited thereto.

[0066] Although the content of the present utility model has been introduced in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation to the present utility model. After those skilled in the art have read the above content, various modifications and alternatives to the present utility model will be obvious. Therefore, the protection scope of the present utility model should be defined by the appended claims.

Claims

1. An electrostatic chuck splitting device, the electrostatic chuck (100) comprising a ceramic plate located in the upper layer and a substrate located in the lower layer, the ceramic plate and the substrate being connected by an adhesive layer; characterized in that, The electrostatic chuck splitting device includes: A workbench (110); a first guide rail (111) and a second guide rail (112) are provided on the upper surface of the workbench (110), and the extension line of the first guide rail (111) is perpendicular to and intersects with the second guide rail (112); A support table (120), arranged on the first guide rail (111), for carrying the electrostatic chuck (100) and driving the electrostatic chuck (100) to reciprocate along the first guide rail (111); A vertical frame (130), arranged on the second guide rail (112); a blade (140) is provided on one side of the vertical frame (130) close to the support table (120), the length direction of the blade (140) is parallel to the extension direction of the second guide rail (112), and the length of the blade (140) is greater than the outer diameter of the electrostatic chuck (100); the vertical frame (130) is used for driving the blade (140) to reciprocate along the second guide rail (112) to cut the bonding layer in the electrostatic chuck (100); A dropper (150), fixed on the vertical frame (130), located above the blade (140), for dripping organic solvent onto the blade (140) when the blade (140) cuts the bonding layer.

2. The electrostatic chuck splitting device according to claim 1, wherein The blade (140) is connected to the vertical frame (130) through a height adjustment assembly (160); the height adjustment assembly (160) includes: Two third guide rails (1601); the two third guide rails (1601) are relatively fixed on the side surface of the vertical frame (130) close to the support table (120) and are laid along the vertical direction; Two first sliders (1602), each first slider (1602) is correspondingly arranged on one third guide rail (1601); and a clip (141) is provided on one side of each first slider (1602) close to the support table (120) for clamping the blade (140); A connecting rod (1603), fixedly connected to the two first sliders (1602); A first lead screw (1604), the first end of which is threadedly connected to the connecting rod (1603); A first turntable (1605), rotatably fixed at one end of the vertical frame (130) away from the second guide rail (112), fixedly connected to the second end of the first lead screw (1604); and the rotation of the first turntable (1605) drives the connecting rod (1603) to reciprocate in the vertical direction through the first lead screw (1604) to drive the first slider (1602) to reciprocate along the third guide rail (1601) to adjust the vertical distance between the clip (141) and the workbench (110).

3. The electrostatic chuck splitting device according to claim 2, wherein The clip (141) is connected to the first slider (1602) through a length adjustment assembly (170); the length adjustment assembly (170) includes: A first support block (1701), fixed on the side surface of one first slider (1602) close to the support table (120); The fourth guide rail (1703) is fixed on the side surface of the other first slider (1602) close to the support table (120); and the extending direction of the fourth guide rail (1703) is parallel to the extending direction of the second guide rail (112); The second support block (1702) is arranged on the fourth guide rail (1703); and on the side surfaces of the first support block (1701) and the second support block (1702) close to the support table (120), a clip (141) is respectively fixed; The second lead screw (1704), its first end is threadedly connected to the second support block (1702); The second turntable (1705) is rotatably fixed on the first slider (1602) where the second support block (1702) is located, and is fixedly connected to the second end of the second lead screw (1704); and the second turntable (1705) rotates to drive the second support block (1702) to reciprocate along the fourth guide rail (1703) through the second lead screw (1704), so as to adjust the horizontal distance between the two clips (141).

4. The electrostatic chuck dividing device according to claim 2, wherein The liquid dripper (150) includes: The liquid storage bottle (1501) is located above the blade (140), and is fixed on the side surface of the connecting rod (1603) close to the support table (120), and is used for storing the organic solvent; The electromagnetic valve nozzle (1502) is arranged at one end of the liquid storage bottle (1501) close to the blade (140) and is communicated with the liquid storage bottle (1501), and is used for dripping the organic solvent onto the blade (140).

5. The electrostatic chuck splitting device according to claim 4, wherein It further includes: The reciprocating drive assembly (180); The reciprocating drive assembly (180) includes: The servo motor (181) is fixed on the workbench (110); The ball screw (182), one end of which is fixedly connected to the output shaft of the servo motor (181), and the other end of which is fixed on the workbench (110); the extending direction of the ball screw (182) is the same as the extending direction of the second guide rail (112), and the nut (1821) in the ball screw (182) is fixedly connected to the vertical frame (130); the output shaft of the servo motor (181) rotates to drive the vertical frame (130) to reciprocate along the second guide rail (112) through the ball screw (182).

6. The electrostatic chuck dividing device according to claim 5, wherein It further includes: The control box (190); the control box (190) is electrically connected to the electromagnetic valve nozzle (1502) and the servo motor (181), and is used for controlling the opening and closing of the electromagnetic valve nozzle (1502) and the servo motor (181).

7. The electrostatic chuck splitting device according to claim 1, characterized in that, An electric heating coil is arranged at the bottom of the support table (120), and is used for heating the electrostatic chuck (100) to a preset temperature.

8. The electrostatic chuck dividing device according to claim 7, wherein, The preset temperature is 80°C to 120°C.

9. The electrostatic chuck dividing device according to claim 1, wherein A handle (122) for holding is arranged on one side of the support table (120) away from the vertical frame (130).

10. The electrostatic chuck splitting device according to claim 3, wherein The lower surface of the support table (120) is provided with a first guide rail sleeve or a first groove that matches the first guide rail (111); The lower surface of the vertical frame (130) is provided with a second guide rail sleeve or a second groove that matches the second guide rail (112); On the side surface of each first slider (1602) close to the vertical frame (130), there is provided a third guide rail sleeve or a third groove that matches the third guide rail (1601); On the side surface of the second support block (1702) close to the vertical frame (130), there is provided a fourth guide rail sleeve or a fourth groove that matches the fourth guide rail (1703).

Images