Jig for pressurizing and glue discharging of silicon nitride ceramic substrate

Abstract

The utility model provides a jig for pressurizing and glue discharging of a silicon nitride ceramic substrate, which comprises an upper layer plate, a middle plate and a lower layer plate which are arranged in parallel, a plurality of screws are arranged between the upper layer plate and the lower layer plate, the axes of the screws are parallel, the middle plate is arranged between the upper layer plate and the lower layer plate, the middle plate is connected with the screws in a sliding manner, and the screws are connected with the upper layer plate and the lower layer plate in a sliding manner. A plurality of springs are arranged between the upper-layer plate and the middle plate, a plurality of criss-cross ventilation grooves are formed in the middle plate and the lower-layer plate, and ventilation holes are formed in the intersection points of longitudinal grooves and transverse grooves of the ventilation grooves. According to the jig for pressurizing and glue discharging of the silicon nitride ceramic substrate, the middle plate and the lower plate are adopted to pressurize the stacked ceramic green sheets, and the ventilation grooves, the ventilation holes and the ventilation windows arranged on the middle plate and the lower plate ensure the volatilization and exhaust effects when the ceramic green sheets are heated, so that the performance and the quality of products are ensured; the defects of air holes, cracks, warping and the like are prevented.

Description

Technical Field

[0001] The utility model relates to the technical field of ceramic substrate processing equipment, in particular to a fixture for pressure degreasing of silicon nitride ceramic substrates. Background Art

[0002] During the forming process of ceramic green bodies, in order to improve their plasticity and forming properties, a certain amount of organic matter is usually added as a binder and plasticizer. During the hot pressing and degreasing process of ceramic green bodies, pressure is applied to the ceramic green bodies through two hot pressing plates. These organic matters will decompose and generate gases during the sintering process. If not discharged in time, it may cause defects such as pores and cracks in the sintered ceramic substrates, affecting the performance and quality of the products. Summary of the Utility Model

[0003] The technical problem to be solved by the utility model is: in order to overcome the deficiency that when two hot pressing plates apply pressure to a ceramic green body in the prior art, there may be a chance for gases to volatilize in the ceramic green body and cannot be effectively discharged, affecting the performance and quality of the product, the utility model provides a fixture for pressure degreasing of silicon nitride ceramic substrates.

[0004] The technical solution adopted by the utility model to solve its technical problem is: a fixture for pressure degreasing of silicon nitride ceramic substrates, including an upper plate, a middle plate and a lower plate arranged in parallel. A plurality of screws are arranged between the upper plate and the lower plate, and the axes of the plurality of screws are parallel. The middle plate is arranged between the upper plate and the lower plate, and the middle plate is slidably connected to the screws. A plurality of springs are arranged between the upper plate and the middle plate. A plurality of vertically and horizontally staggered air vents are formed on the middle plate and the lower plate, and air holes are arranged at the intersection points of the longitudinal slots and the horizontal slots of the air vents.

[0005] After laminating ceramic green body sheets, they are arranged between the middle plate and the lower plate. The middle plate is pressurized through the springs to tightly press the ceramic green body sheets, preventing the ceramic green body sheets from warping and deforming during sintering in the degreasing furnace. A plurality of vertically and horizontally staggered air vents are formed on the middle plate and the lower plate, and air holes are arranged at the intersection points of the longitudinal slots and the horizontal slots of the air vents. Through the arrangement of the air vents and the air holes, the discharge path of the organic matter is determined, the effect of hot pressing and degreasing is ensured, and the volatilization of the organic matter is facilitated.

[0006] Further, in order to improve the volatilization effect of the organic matter, the air vents on the middle plate and the lower plate are arranged in a staggered manner in the vertical direction.

[0007] Further, in order to avoid excessive concentration of organic matter aggregation, a ventilation window is arranged at the middle position of the lower plate.

[0008] Furthermore, in order to avoid excessive concentration of organic matter aggregation, the upper layer plate is densely provided with ventilation holes, and a plurality of reinforcing ribs are provided on the upper layer plate. Since the structural strength of the upper layer plate is insufficient after several ventilation holes are opened, in order to prevent the bending deformation of the upper layer plate from causing changes in the positions of the middle layer plate, the lower layer plate and the screw rod, thereby affecting the hot pressing effect of the ceramic green sheet, this application uses reinforcing ribs to strengthen the structural strength of the upper layer plate and ensure the hot pressing effect of the ceramic green sheet.

[0009] Furthermore, in order to prevent the upper layer plate, the middle layer plate and the lower layer plate from deforming at high temperatures, the upper layer plate, the middle layer plate and the lower layer plate are made of 316S stainless steel. Using 316S stainless steel can withstand high temperatures of 600 °C, prevent the upper layer plate, the middle layer plate and the lower layer plate from deforming at high temperatures, thereby affecting the performance and quality of the product.

[0010] Furthermore, in order to adjust the distance between the upper layer plate and the lower layer plate, the lower end of the screw rod is fixedly connected to the lower layer plate, and a nut for adjusting the distance between the upper layer plate and the lower layer plate is provided at the upper end of the screw rod. During the debinding process of the ceramic green body, appropriate pressure helps the gas to quickly discharge from the green body, but excessive pressure may also cause the green body to crack or deform. When the number of stacked layers of the ceramic green sheet remains unchanged, by adjusting the distance between the upper layer plate and the lower layer plate, the pressure of the middle layer plate on the ceramic green sheet can be adjusted.

[0011] The beneficial effects of the present utility model are as follows: A jig for pressurized debinding of a silicon nitride ceramic substrate provided by the present utility model uses a middle layer plate and a lower layer plate to pressurize the stacked ceramic green sheets. The ventilation grooves, ventilation holes and ventilation windows provided on the middle layer plate and the lower layer plate ensure the volatilization and exhaust effect when the ceramic green sheets are heated, ensure the performance and quality of the product, and prevent defects such as pores, cracks and warping. Description of the Drawings

[0012] The following further describes the present utility model in conjunction with the drawings and embodiments.

[0013] Figure 1 is a schematic structural diagram of the best embodiment of the present utility model.

[0014] In the figure: 1. Upper layer plate, 2. Middle layer plate, 3. Lower layer plate, 4. Screw rod, 5. Spring, 6. Ventilation groove, 7. Ventilation hole, 8. Ventilation window, 9. Ventilation hole, 10. Reinforcing rib, 11. Nut. Detailed Embodiments

[0015] Now the present utility model will be described in detail in conjunction with the drawings. This figure is a simplified schematic diagram, which only illustrates the basic structure of the present utility model in a schematic manner, so it only shows the components related to the present utility model.

[0016] As Figure 1As shown in the figure, a fixture for pressure debinding of silicon nitride ceramic substrates according to the present utility model includes an upper plate 1, a middle plate 2, and a lower plate 3 arranged in parallel. The upper plate 1, the middle plate 2, and the lower plate 3 are made of 316S stainless steel. A plurality of screw rods 4 are provided between the upper plate 1 and the lower plate 3. The axes of the plurality of screw rods 4 are parallel. The middle plate 2 is arranged between the upper plate 1 and the lower plate 3. The middle plate 2 is slidably connected to the screw rods 4. A plurality of springs 5 are provided between the upper plate 1 and the middle plate 2. A plurality of vertically and horizontally intersecting ventilation grooves 6 are formed on the middle plate 2 and the lower plate 3. The ventilation grooves 6 on the middle plate 2 and the lower plate 3 are arranged in a staggered manner in the vertical direction. Ventilation holes 7 are provided at the intersections of the longitudinal grooves and the transverse grooves of the ventilation grooves 6.

[0017] A ventilation window 8 is provided at the middle position of the lower plate 3.

[0018] The upper plate 1 is densely provided with ventilation holes 9, and a plurality of reinforcing ribs 10 are provided on the upper plate 1.

[0019] The lower end of the screw rod 4 is fixedly connected to the lower plate 3, and a nut 11 for adjusting the distance between the upper plate 1 and the lower plate 3 is provided at the upper end of the screw rod 4.

[0020] Working process:

[0021] After laminating the green ceramic sheets, they are arranged between the middle plate 2 and the lower plate 3. Then, the upper plate 1 is fixed to the upper end of the screw rod 4 through the nut 11. By adjusting the position of the upper plate 1, the pressure of the spring 5 on the green ceramic sheets is adjusted to prevent the pressure from being too large or too small during the hot pressure debinding of the green ceramic sheets, and to avoid cracking or warping deformation of the green ceramic sheets during sintering in the debinding furnace. Ventilation grooves 6, ventilation holes 7, and ventilation windows 8 are formed on the middle plate 2 and the lower plate 3 to determine the discharge path of the organic matter, ensure the volatilization and exhaust effect during the heating of the green ceramic sheets, ensure the performance and quality of the product, prevent defects such as pores, cracks, and warping, and ensure the effect of hot pressure debinding.

[0022] In the present utility model, directions and references (such as up, down, left, right, etc.) can only be used to assist in the description of the features in the drawings. Therefore, the following specific embodiments are not adopted in a restrictive sense, and the scope of the claimed subject matter is only defined by the appended claims and their equivalents.

[0023] Based on the above-mentioned ideal embodiments of the present utility model as an inspiration, through the above description, relevant staff can make various changes and modifications without departing from the scope of the present utility model. The technical scope of this utility model is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A fixture for pressure debinding of silicon nitride ceramic substrates, characterized in that: It includes an upper plate (1), a middle plate (2) and a lower plate (3) which are arranged in parallel. A plurality of screws (4) are provided between the upper plate (1) and the lower plate (3). The axes of the plurality of screws (4) are parallel. The middle plate (2) is arranged between the upper plate (1) and the lower plate (3). The middle plate (2) is slidably connected to the screws (4). A plurality of springs (5) are provided between the upper plate (1) and the middle plate (2). A plurality of vertically and horizontally criss-crossing ventilation grooves (6) are formed in the middle plate (2) and the lower plate (3). Ventilation holes (7) are provided at the intersections of the longitudinal grooves and the transverse grooves of the ventilation grooves (6).

2. The jig for pressure debinding of silicon nitride ceramic substrates according to claim 1, characterized in that: The ventilation grooves (6) on the middle plate (2) and the lower plate (3) are arranged in a staggered manner in the vertical direction.

3. The jig for pressure debinding of silicon nitride ceramic substrates according to claim 1, characterized in that: A ventilation window (8) is provided at the middle position of the lower plate (3).

4. The jig for pressure debinding of silicon nitride ceramic substrates according to claim 1, wherein: The upper plate (1) is densely provided with ventilation holes (9), and a plurality of reinforcing ribs (10) are provided on the upper plate (1).

5. The jig for pressure debinding of silicon nitride ceramic substrates according to claim 1, wherein: The upper plate (1), the middle plate (2) and the lower plate (3) are made of 316S stainless steel.

6. The jig for pressure debinding of silicon nitride ceramic substrate according to claim 1, characterized in that: The lower end of the screw (4) is fixedly connected to the lower plate (3), and a nut (11) for adjusting the distance between the upper plate (1) and the lower plate (3) is provided at the upper end of the screw (4).

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