Coating evaporation boat and vacuum coating device

Abstract

The utility model provides a coating evaporation boat and a vacuum coating device, the coating evaporation boat comprises an evaporation boat body and a cover plate arranged on the evaporation boat body, and the evaporation boat body is provided with a first groove and a second groove; the cover plate is located above the first groove; the cover plate and the first groove jointly form a liquid cavity used for containing molten metal, the liquid cavity is provided with a liquid outlet, the position of the liquid outlet is higher than the bottom face of the liquid cavity and lower than the top face of the liquid cavity, the liquid level of the molten metal in the liquid cavity is higher than the liquid outlet, and the molten metal in the liquid cavity flows into the second groove from the liquid outlet. And carrying out evaporation coating. By arranging the cover plate, the problem that molten metal splashes is solved; according to the evaporation coating device, impurities are prevented from entering an evaporation coating area along with molten metal, the cleanliness of the molten metal entering the second groove is further improved, the evaporation coating quality can be effectively improved, and the uniformity and the film forming quality of a metal coating formed after evaporation coating are guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment, and more specifically, to a coating evaporation boat and a vacuum coating device. Background Art

[0002] Vacuum coating refers to a method of heating a metal or non-metal material under high vacuum conditions to evaporate it and condense it on the surface of a workpiece (metal, semiconductor, or insulator) to form a coating; for example, when aluminizing a thin film surface, an evaporation boat is used to heat aluminum material to a gaseous state (for example, first heated to a liquid state, and then continuously heated or insulated in the evaporation area to make the liquid aluminum evaporate into gaseous aluminum vapor), so that the gaseous aluminum is coated on the thin film surface.

[0003] The evaporation boat is an important working component of the evaporation source, usually used in metal evaporation coating equipment. During the vacuum coating process, a wire feeding structure sends a metal wire (such as an aluminum wire) to the upper surface of the evaporation boat. Through current heating, the evaporation boat melts and vaporizes the metal wire on it, and the vaporization forms metal vapor. The metal vapor is evenly deposited on the substrate layer to complete the coating; therefore, the performance of the evaporation boat has an important impact on parameters such as the coating uniformity and film formation quality of the metal coating.

[0004] Currently, there are various forms of existing evaporation boats, mainly including rectangular evaporation boats, T-shaped evaporation boats, laser-etched evaporation boats, and linear evaporation boats, etc.; the upper surface of the evaporation boat usually accommodates molten metal liquid to serve as the metal evaporation surface, and grooves are usually designed on the upper surface of the evaporation boat to guide the flow of the liquefied metal liquid.

[0005] However, during the wire feeding, melting, and evaporation processes of the existing evaporation boats, there are often problems such as splashing of the metal liquid (such as aluminum liquid) and mixing of impurities into the evaporation area (i.e., the evaporation surface of the evaporation boat), which seriously affect the coating quality and efficiency; that is, the traditional evaporation boat design is simple and lacks effective control over the splashing of the metal liquid and impurities, making it easy for the metal liquid to splash during the melting and flowing processes. At the same time, impurities easily enter the evaporation area along with the metal liquid, resulting in a decline in the coating quality and even damage to the evaporation boat. Summary of the Utility Model

[0006] The utility model provides a coating evaporation boat and a vacuum coating device to solve the problems that the existing evaporation boat is prone to splashing during the melting and flowing processes of the metal liquid and impurities enter the evaporation area along with the metal liquid in the prior art.

[0007] To solve the above problems, according to one aspect of the present utility model, there is provided a coating evaporation boat, which includes an evaporation boat body and a cover plate arranged on the evaporation boat body. The evaporation boat body has a first groove and a second groove; the cover plate is located above the first groove; the cover plate and the first groove jointly form a liquid chamber for accommodating molten metal. The liquid chamber has a liquid outlet, and the position where the liquid outlet is located is higher than the bottom surface of the liquid chamber and lower than the top surface of the liquid chamber. The liquid level of the molten metal in the liquid chamber is higher than the liquid outlet, and the molten metal in the liquid chamber flows into the second groove from the liquid outlet for evaporation coating.

[0008] Further, the uppermost surface of the liquid chamber is the bottom surface of the cover plate, the height where the bottom surface of the cover plate is located is the first height, the lowermost surface of the liquid chamber is the bottom surface of the first groove, and the height where the bottom surface of the first groove is located is the second height. The uppermost part of the liquid outlet is less than the first height, and the lowermost part of the liquid outlet is greater than the second height.

[0009] Further, the height where the uppermost surface of the first groove is located is the third height, the height where the uppermost surface of the second groove is located is the fourth height, and the height where the lowermost surface of the second groove is located is the fifth height; wherein, the third height is less than the fifth height; the fourth height is less than the first height.

[0010] Further, the cover plate includes a plate body and a stop projection arranged on the plate body. The height where the bottom surface of the plate body is located is the first height; the stop projection is arranged on the bottom surface of the plate body and is spaced from one end of the first groove close to the second groove. The gap between the lower surface of the stop projection and the first groove forms at least a part of the liquid outlet; wherein, the stop projection stops the impurities floating above the molten metal to prevent the impurities from flowing into the second groove.

[0011] Further, the height where the lower surface of the stop projection is located is the sixth height. The difference between the first height and the sixth height is greater than or equal to 1 mm and less than or equal to 3 mm; the plate body is detachably arranged on the evaporation boat body and closes the upper part of the first groove; the plate body has a through hole communicated with the liquid chamber, and the through hole penetrates the plate body in the vertical direction for passing a metal wire or the molten metal injected into the liquid chamber.

[0012] Further, the first groove is a stepped groove structure, which sequentially includes a melting pool groove and a precipitation groove from top to bottom. The precipitation groove is used for storing the impurities precipitated at the bottom of the molten metal; the melting pool groove is used for accommodating the molten metal and is communicated with the liquid outlet; the height where the bottom surface of the precipitation groove is located is the second height, the height where the bottom surface of the melting pool groove is located is the seventh height, and the difference between the seventh height and the second height is greater than or equal to 0.5 mm and less than or equal to 2 mm.

[0013] Further, the bottom surface of the second groove has a plurality of drainage grooves and spreading grooves. The drainage grooves are communicated with the liquid outlet and are used for guiding the molten metal to flow along the extending direction of the second groove. The plurality of drainage grooves are arranged in parallel or crosswise. The two ends of the spreading groove are respectively communicated with the same drainage groove or two drainage grooves and are used for guiding the molten metal to fill the bottom surface of the second groove.

[0014] Further, the extending direction of the drainage groove is parallel to the extending direction of the second groove, and the plurality of drainage grooves are arranged in parallel at equal intervals on the bottom surface of the second groove. The extending direction of the spreading groove is perpendicular to the extending direction of the drainage groove and is respectively communicated with the plurality of drainage grooves. The plurality of spreading grooves are arranged in parallel at equal intervals on the bottom surface of the second groove so as to jointly form a circulation network with the plurality of drainage grooves, and the circulation network covers at least a part of the bottom surface of the second groove.

[0015] Further, the connection positions of the drainage grooves and the spreading grooves and the connection positions of the drainage grooves and the liquid outlet are all provided with rounded corners; and / or, both the drainage grooves and the spreading grooves are square grooves, and the drainage grooves and the spreading grooves have the same depth.

[0016] According to another aspect of the present invention, a vacuum coating device is provided. The vacuum coating device includes the above-mentioned coating evaporation boat. The cover plate has through holes respectively communicated with the outside and the liquid chamber, and the through holes are used for passing metal wires, and the metal wires are used for melting to form molten metal. The vacuum coating device further includes a wire feeding structure, and the wire feeding structure controls the height and the changing speed of the liquid level of the molten metal in the liquid chamber by controlling the length and speed of the metal wires entering the liquid chamber.

[0017] Applying the technical solution of the present invention, the present invention provides a coating evaporation boat, which includes an evaporation boat body and a cover plate arranged on the evaporation boat body. The evaporation boat body has a first groove and a second groove. The cover plate is located above the first groove. The cover plate and the first groove jointly form a liquid chamber for accommodating molten metal. The liquid chamber has a liquid outlet, and the position where the liquid outlet is located is higher than the bottom surface of the liquid chamber and lower than the top surface of the liquid chamber. The liquid level of the molten metal in the liquid chamber is higher than the liquid outlet, and the molten metal in the liquid chamber flows into the second groove from the liquid outlet for evaporation coating.

[0018] By arranging the cover plate above the first groove, the space above the first groove is effectively blocked, realizing reliable blocking of the splashing molten metal in the first groove, solving the problem of molten metal splashing, and avoiding the attachment of molten metal and other impurities on the surface of the coating evaporation boat after long-term use; by arranging the first groove, the second groove and the liquid outlet to cooperate, reliable zoning of the molten metal wire melting area and the evaporation coating area is realized, so that the melting of the molten metal wire to form molten metal and the evaporation coating do not interfere with each other, ensuring the smooth progress of the work; by arranging the position of the liquid outlet higher than the bottom surface of the liquid chamber and lower than the top surface of the liquid chamber, when the liquid level of the molten metal in the liquid chamber is higher than the liquid outlet, low-density impurities floating above the molten metal and high-density impurities settling below the molten metal cannot enter the second groove through the liquid outlet, that is, impurities are prevented from entering the evaporation coating area along with the molten metal, further improving the cleanliness of the molten metal entering the second groove, and then effectively improving the quality of the evaporation coating, ensuring the uniformity and film-forming quality of the metal coating formed after evaporation coating; the structure of the present utility model is simple and the cost is low, which is convenient for assembly and subsequent maintenance, and is suitable for large-scale popularization and use. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The specification drawings forming a part of this application are used to provide a further understanding of the present utility model. The schematic embodiments of the present utility model and their descriptions are used to explain the present utility model and do not constitute an improper limitation to the present utility model. In the drawings:

[0020] Figure 1 The external structural schematic diagram of the coating evaporation boat provided by the embodiment of the present utility model is shown in a top view angle;

[0021] Figure 2 The internal structural schematic diagram of the coating evaporation boat provided by the embodiment of the present utility model is shown in a front view angle;

[0022] Figure 3 The external structural schematic diagram of the evaporation boat body provided by the embodiment of the present utility model is shown in a top view angle.

[0023] Among them, the above-mentioned drawings include the following reference numerals:

[0024] 10. Evaporation boat body; 11. First groove; 111. Melting pool groove; 112. Precipitation groove; 12. Second groove; 121. Drainage groove; 122. Stretching groove;

[0025] 20. Cover plate; 21. Plate body; 211. Through hole; 22. Stopping protrusion;

[0026] 30. Liquid chamber;

[0027] 40. Liquid outlet. Detailed implementation manners

[0028] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and in no way constitutes a limitation on the present utility model and its application or use. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model.

[0029] As Figures 1 to 3 shown, an embodiment of the present utility model provides a coating evaporation boat, which includes an evaporation boat body 10 and a cover plate 20 provided on the evaporation boat body 10. The evaporation boat body 10 has a first groove 11 and a second groove 12; the cover plate 20 is located above the first groove 11; the cover plate 20 and the first groove 11 together form a liquid chamber 30 for accommodating molten metal. The liquid chamber 30 has a liquid outlet 40. The position where the liquid outlet 40 is located is higher than the bottom surface of the liquid chamber 30 and lower than the top surface of the liquid chamber 30. The liquid level of the molten metal in the liquid chamber 30 is higher than the liquid outlet 40. The molten metal in the liquid chamber 30 flows into the second groove 12 from the liquid outlet 40 for evaporation coating.

[0030] By setting the cover plate 20 above the first groove 11, the present utility model effectively blocks the space above the first groove 11, realizes reliable blocking of the splashing molten metal in the first groove 11, solves the problem of molten metal splashing, and avoids the attachment of molten metal and other impurities on the surface of the coating evaporation boat after long-term use; by setting the first groove 11, the second groove 12 and the liquid outlet 40 to cooperate, a reliable partition between the molten metal wire melting area and the evaporation coating area is realized, so that the melting of the molten metal wire to form molten metal and the evaporation coating do not interfere with each other, ensuring the smooth progress of the work; by setting the position where the liquid outlet 40 is located higher than the bottom surface of the liquid chamber 30 and lower than the top surface of the liquid chamber 30, when the liquid level of the molten metal in the liquid chamber 30 is higher than the liquid outlet 40, low-density impurities floating above the molten metal and high-density impurities settling below the molten metal cannot enter the second groove 12 through the liquid outlet 40, that is, the entry of impurities into the evaporation coating area along with the molten metal is avoided, further improving the cleanliness of the molten metal entering the second groove 12, and then effectively improving the quality of the evaporation coating and ensuring the uniformity and film-forming quality of the metal coating formed after the evaporation coating; the structure of the present utility model is simple and the cost is low, which is convenient for assembly and subsequent maintenance, and is suitable for large-scale popularization and use.

[0031] In addition, it should be noted that the liquid chamber 30, the second groove 12, and the liquid outlet 40 cooperate with each other, making efficient use of the principle of equal liquid levels. This enables the molten metal (e.g., aluminum melt) to naturally flow into the second groove 12 (i.e., the evaporation area) as the liquid level rises. This design ensures the smooth flow of the molten metal and avoids the entry of impurities into the second groove 12 due to turbulence caused by violent flow.

[0032] Specifically, the uppermost surface of the liquid chamber 30 is the bottom surface of the cover plate 20, and the height at which the bottom surface of the cover plate 20 is located is the first height. The lowermost surface of the liquid chamber 30 is the bottom surface of the first groove 11, and the height at which the bottom surface of the first groove 11 is located is the second height. The uppermost part of the liquid outlet 40 is at a height less than the first height, and the lowermost part of the liquid outlet 40 is at a height greater than the second height.

[0033] By setting the uppermost part of the liquid outlet 40 at a height less than the first height and the lowermost part of the liquid outlet 40 at a height greater than the second height, it is further ensured that low-density impurities floating above the molten metal and high-density impurities settling below the molten metal cannot enter the second groove 12 through the liquid outlet 40.

[0034] Specifically, the height at which the uppermost surface of the first groove 11 is located is the third height, the height at which the uppermost surface of the second groove 12 is located is the fourth height, and the height at which the lowermost surface of the second groove 12 is located is the fifth height. Among them, the third height is less than the fifth height; the fourth height is less than the first height.

[0035] By setting the third height less than the fifth height, the first groove 11 is located below the second groove 12. In this way, when the molten metal does not fill the first groove 11 (i.e., when the volume of the molten metal is small), it is ensured that the molten metal does not enter the second groove 12 for evaporation coating, thereby further ensuring the coating quality. By setting the fourth height less than the first height, it is ensured in terms of spatial position that the molten metal flowing out of the liquid outlet 40 can smoothly enter the second groove 12.

[0036] As Figure 1 and Figure 2 shown, the cover plate 20 includes a plate body 21 and a stop projection 22 provided on the plate body 21. The height at which the bottom surface of the plate body 21 is located is the first height. The stop projection 22 is provided on the bottom surface of the plate body 21 and is spaced from one end of the first groove 11 close to the second groove 12. The gap between the lower surface of the stop projection 22 and the first groove 11 forms at least a part of the liquid outlet 40. Among them, when the liquid level of the molten metal in the liquid chamber 30 is higher than the liquid outlet 40, the lower surface of the stop projection 22 extends into the molten metal so that the middle section of the molten metal in the vertical direction flows into the second groove 12 through the liquid outlet 40. The stop projection 22 stops the impurities floating above the molten metal to prevent the impurities from flowing into the second groove 12.

[0037] By providing the plate body 21 and the stop protrusion 22, it not only ensures the reliable shielding of the impurities floating above the molten metal by the cover plate 20, but also simplifies the structure of the cover plate 20, thereby facilitating processing and forming.

[0038] As Figure 2 shown, the height of the lower surface of the stop protrusion 22 is the sixth height, and the difference between the first height and the sixth height is greater than or equal to 1 mm and less than or equal to 3 mm; the plate body 21 is detachably arranged on the evaporation boat body 10 and closes the upper part of the first groove 11; the plate body 21 has a through hole 211 communicating with the liquid chamber 30, and the through hole 211 penetrates the plate body 21 in the vertical direction for passing a metal wire or injecting molten metal into the liquid chamber 30.

[0039] By setting the range of the difference between the first height and the sixth height, it not only ensures that the flow rate that can pass through the liquid outlet 40 meets the requirements of evaporation coating, but also ensures the reliable shielding of the impurities floating above the molten metal by the stop protrusion 22; by providing the through hole 211, the convenience of transporting the metal wire or injecting molten metal into the liquid chamber 30 in real time is realized.

[0040] As Figure 1 、 Figure 2 and Figure 3 shown, the first groove 11 is a stepped groove structure, which sequentially includes a molten pool groove 111 and a precipitation groove 112 from top to bottom. The precipitation groove 112 is used for receiving the impurities precipitated at the bottom of the molten metal; the molten pool groove 111 is used for accommodating the molten metal and is communicated with the liquid outlet 40; the height of the bottom surface of the precipitation groove 112 is the second height, and the height of the bottom surface of the molten pool groove 111 is the seventh height. The difference between the seventh height and the second height is greater than or equal to 0.5 mm and less than or equal to 2 mm.

[0041] By providing that the first groove 11 includes the molten pool groove 111 and the precipitation groove 112, it not only realizes the reliable accommodation of a certain volume of molten metal, but also realizes the reliable reception of the impurities precipitated at the bottom of the molten metal, avoiding the high-density impurities settled below the molten metal from entering the second groove 12; by setting the range of the difference between the seventh height and the second height, the depth of the molten pool groove 111 is within a suitable range, which neither affects the flow of the molten metal nor can accommodate a certain volume of molten metal.

[0042] As Figure 1 and Figure 3As shown, the bottom surface of the second groove 12 has a plurality of drainage grooves 121 and spreading grooves 122. The drainage grooves 121 are communicated with the liquid outlet 40 and are used to guide the metal liquid to flow along the extending direction of the second groove 12. The plurality of drainage grooves 121 are arranged in parallel or crosswise. The two ends of the spreading grooves 122 are respectively communicated with the same drainage groove 121 or two drainage grooves 121 and are used to guide the metal liquid to fill the bottom surface of the second groove 12.

[0043] By arranging the drainage grooves 121 and the spreading grooves 122, the bottom surface of the second groove 12 can be quickly filled with the metal liquid, thereby improving the efficiency of the evaporation coating operation and effectively increasing the coating weight.

[0044] It should be noted that: the drainage grooves 121 and the spreading grooves 122 make it easier for the metal liquid to cover the entire bottom surface of the second groove 12, thereby optimizing the overall wettability and temperature field distribution of the evaporation boat for coating, improving the uniformity of the coating, and reducing the occurrence of splashing phenomena.

[0045] As Figure 1 and Figure 3 shown, the extending direction of the drainage grooves 121 is parallel to the extending direction of the second groove 12, and the plurality of drainage grooves 121 are arranged in parallel at equal intervals on the bottom surface of the second groove 12. The extending direction of the spreading grooves 122 is perpendicular to the extending direction of the drainage grooves 121 and is respectively communicated with the plurality of drainage grooves 121. The plurality of spreading grooves 122 are arranged in parallel at equal intervals on the bottom surface of the second groove 12 to jointly form a circulation network with the plurality of drainage grooves 121, and the circulation network covers at least a part of the bottom surface of the second groove 12.

[0046] By arranging the circulation network, it is not only convenient for the orderly processing and forming of the drainage grooves 121 and the spreading grooves 122, but also maximally ensures that the bottom surface of the second groove 12 is quickly filled with the metal liquid. In addition, by arranging the circulation network, the evaporation area of the metal liquid is further optimized, ensuring the rapid evaporation of the metal liquid, realizing stable evaporation, and further improving the film forming quality.

[0047] Optionally, the connection positions of the drainage grooves 121 and the spreading grooves 122 and the connection positions of the drainage grooves 121 and the liquid outlet 40 are all provided with rounded corners; and / or, both the drainage grooves 121 and the spreading grooves 122 are square grooves, and the drainage grooves 121 and the spreading grooves 122 have the same depth.

[0048] By the smooth treatment of the connection positions, the flow resistance of the metal liquid can be effectively reduced, and the deposition of impurities in the metal liquid can also be reduced; by arranging square grooves, it is convenient for integral processing and forming.

[0049] The present utility model also provides a vacuum coating device. The vacuum coating device includes the above-mentioned coating evaporation boat; the cover plate 20 is provided with through holes 211 respectively communicating with the outside and the liquid chamber 30. The through holes 211 are used for passing metal wires, and the metal wires are used for melting to form metal liquid; the vacuum coating device further includes a wire feeding structure, and the wire feeding structure controls the height and the changing speed of the liquid level of the metal liquid in the liquid chamber 30 by controlling the length and speed of the metal wire entering the liquid chamber 30.

[0050] By providing the wire feeding structure, the height and the changing speed of the liquid level of the metal liquid in the liquid chamber 30 can be flexibly controlled, thus ensuring the controllability of the overall evaporation coating work.

[0051] In a specific embodiment of the present utility model, the metal wire is an aluminum wire. By providing the wire feeding structure in cooperation with the through holes 211 on the cover plate 20, the wire feeding structure can accurately control the transmission speed and the melting position of the aluminum wire, so as to ensure that the aluminum wire smoothly passes through the cover plate 20 and reaches the precipitation area (i.e., inside the precipitation tank 112) in the evaporation boat; moreover, by realizing the control of the melting of the aluminum wire and the liquid level, as the wire feeding structure controls the feeding of the aluminum wire, the height of the liquid level of the melted aluminum liquid automatically rises, and by accurately controlling the wire feeding speed and the heating power, the stable adjustment of the liquid level height is realized, ensuring the smooth progress of the subsequent process.

[0052] Now, the specific working process and principle of an embodiment of the present utility model will be described in detail as follows:

[0053] The coating evaporation boat and the vacuum coating device proposed by the present utility model can be used for depositing a thin film on a substrate; among them, the evaporation boat body 10 is one of the key components, which is used for heating and evaporating metal or compound materials; 1. The material of the evaporation boat body 10; the evaporation boat body 10 is made of materials with high melting points and high purity, such as molybdenum, tungsten or graphite and other materials, so as to withstand high temperatures and reduce pollution during the evaporation process; 2. The shape of the evaporation boat body 10; the shape of the evaporation boat body 10 may vary according to applications, but common shapes can be cylindrical, rectangular or boat-shaped to adapt to different evaporation requirements; 3. The heating elements provided on the evaporation boat body 10; heating elements such as resistance wires or induction coils are installed inside or outside the evaporation boat body 10 for heating the coating materials in the evaporation boat body 10; 4. The support structure provided on the evaporation boat body 10; the evaporation boat body 10 needs to be firmly fixed in the evaporation chamber, so a support structure such as a bracket or a hanging system is provided to achieve firm fixation;

[0054] The working principle of the coating evaporation boat proposed by the present utility model: 1. Heating process; when the power is turned on, the heating element starts to work, transferring heat to the evaporation boat body 10 to heat the metal or compound material inside it to the evaporation point; 2. Evaporation; at high temperature, the material changes from solid state to gaseous state, forming vapor; this process is called evaporation; 3. Transmission; the evaporated vapor diffuses in the vacuum chamber and moves towards the substrate direction, and this process may involve various transmission mechanisms such as convection and diffusion; 4. Condensation; when the vapor meets the colder substrate surface, the vapor condenses into a solid thin film; this process is called condensation or deposition; 5. Thin film formation; as the vapor continuously condenses on the substrate, the thin film gradually thickens to form the required thin film material.

[0055] The working process of the coating evaporation boat proposed by the present utility model: 1. Loading materials; before starting evaporation, the materials to be evaporated need to be loaded into the coating evaporation boat; this process requires careful operation to avoid contamination; 2. Preheating; usually, the coating evaporation boat needs to be preheated before heating to reduce thermal stress and ensure uniform heating; 3. Controlling temperature; during the evaporation process, the temperature of the coating evaporation boat needs to be precisely controlled to ensure that the materials evaporate at an appropriate rate; 4. Monitoring the thin film quality; during the evaporation process, various instruments (such as an optical monitoring system) may be needed to monitor the quality and thickness of the thin film.

[0056] In summary, the present utility model provides a coating evaporation boat and a vacuum coating device. By arranging the cover plate 20 above the first groove 11, the space above the first groove 11 is effectively blocked, realizing reliable stopping of the splashing metal liquid in the first groove 11, solving the problem of metal liquid splashing, and avoiding the attachment of metal liquid and other impurities on the surface of the coating evaporation boat after long-term use; by arranging the first groove 11, the second groove 12 and the liquid outlet 40 to cooperate, reliable zoning of the metal wire melting area and the evaporation coating area is realized, thereby making the melting of the metal wire to form metal liquid and evaporation coating not interfere with each other, ensuring the smooth progress of the work; by arranging the position of the liquid outlet 40 to be higher than the bottom surface of the liquid chamber 30 and lower than the top surface of the liquid chamber 30, when the liquid level of the metal liquid in the liquid chamber 30 is higher than the liquid outlet 40, the low-density impurities floating above the metal liquid and the high-density impurities settling below the metal liquid cannot enter the second groove 12 through the liquid outlet 40, that is, it avoids the entry of impurities into the evaporation coating area along with the metal liquid, further improving the cleanliness of the metal liquid entering the second groove 12, and thus can effectively improve the quality of evaporation coating, ensuring the uniformity and film-forming quality of the metal coating formed after evaporation coating; the structure of the present utility model is simple and the cost is low, which is convenient for assembly and subsequent maintenance, and is suitable for large-scale popularization and use.

[0057] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they specify the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0058] Unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that, for the sake of convenience of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationship. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the said technologies, methods, and devices should be regarded as part of the specification. In all the examples shown and discussed herein, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, further discussion thereof is not required in subsequent drawings.

[0059] In the description of the present invention, it should be understood that the orientation or positional relationships indicated by orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal", and "top, bottom", etc. are generally based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description. Without contrary description, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus cannot be construed as limiting the protection scope of the present invention; the orientation words "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0060] For ease of description, spatial relative terms such as "above", "over", "on the upper surface", "upper" etc. may be used herein to describe the spatial positional relationship of one device or feature to other devices or features as shown in the figures. It should be understood that the spatial relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is inverted, a device described as "above" or "over" other devices or structures will then be positioned "below" or "under" the other devices or structures. Thus, the exemplary term "above" can include both the orientations of "above" and "below". The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the corresponding explanations for the spatial relative descriptions used herein will be made accordingly.

[0061] In addition, it should be noted that the use of terms such as "first" and "second" to define components is only for the convenience of differentiating the corresponding components. Without additional statements, the above terms have no special meanings, and thus should not be construed as limiting the protection scope of the present utility model.

[0062] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. For those skilled in the art, the present utility model may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A coating evaporation boat, characterized in that, It includes an evaporation boat body (10) and a cover plate (20) arranged on the evaporation boat body (10). The evaporation boat body (10) has a first groove (11) and a second groove (12); the cover plate (20) is located above the first groove (11); the cover plate (20) and the first groove (11) together form a liquid chamber (30) for accommodating molten metal. The liquid chamber (30) has a liquid outlet (40). The position where the liquid outlet (40) is located is higher than the bottom surface of the liquid chamber (30) and lower than the top surface of the liquid chamber (30). The liquid level of the molten metal in the liquid chamber (30) is higher than the liquid outlet (40). The molten metal in the liquid chamber (30) flows into the second groove (12) from the liquid outlet (40) for evaporation coating.

2. The evaporation boat for coating according to claim 1, characterized in that, The uppermost surface of the liquid chamber (30) is the bottom surface of the cover plate (20). The height where the bottom surface of the cover plate (20) is located is the first height. The lowermost surface of the liquid chamber (30) is the bottom surface of the first groove (11). The height where the bottom surface of the first groove (11) is located is the second height. The uppermost height of the liquid outlet (40) is less than the first height, and the lowermost height of the liquid outlet (40) is greater than the second height.

3. The evaporation boat for coating according to claim 2, wherein The height where the uppermost surface of the first groove (11) is located is the third height. The height where the uppermost surface of the second groove (12) is located is the fourth height. The height where the lowermost surface of the second groove (12) is located is the fifth height; wherein, the third height is less than the fifth height; the fourth height is less than the first height.

4. The evaporation boat for coating according to claim 2, characterized in that, The cover plate (20) includes a plate body (21) and a stop projection (22) arranged on the plate body (21). The height where the bottom surface of the plate body (21) is located is the first height; the stop projection (22) is arranged on the bottom surface of the plate body (21) and is spaced from one end of the first groove (11) close to the second groove (12). The gap between the lower surface of the stop projection (22) and the first groove (11) forms at least a part of the liquid outlet (40); wherein, the stop projection (22) stops the impurities floating above the molten metal to prevent the impurities from flowing into the second groove (12).

5. The evaporation boat for coating according to claim 4, wherein, The height where the lower surface of the stop projection (22) is located is the sixth height. The difference between the first height and the sixth height is greater than or equal to 1 mm and less than or equal to 3 mm; the plate body (21) is detachably arranged on the evaporation boat body (10) and closes the upper part of the first groove (11); the plate body (21) has a through hole (211) communicated with the liquid chamber (30). The through hole (211) penetrates the plate body (21) in the vertical direction and is used for passing a metal wire or the molten metal injected into the liquid chamber (30).

6. The evaporation boat for coating according to claim 1, wherein The first groove (11) has a stepped groove structure, and successively includes a molten pool groove (111) and a precipitation groove (112) from top to bottom. The precipitation groove (112) is used for receiving impurities precipitated at the bottom of the molten metal. The molten pool groove (111) is used for containing the molten metal and is communicated with the liquid outlet (40). The height of the bottom surface of the precipitation groove (112) is the second height, and the height of the bottom surface of the molten pool groove (111) is the seventh height. The difference between the seventh height and the second height is greater than or equal to 0.5 mm and less than or equal to 2 mm.

7. The evaporation boat for coating according to claim 1, wherein The bottom surface of the second groove (12) has a plurality of drainage grooves (121) and spreading grooves (122). The drainage grooves (121) are communicated with the liquid outlet (40) and are used for guiding the molten metal to flow along the extending direction of the second groove (12). The plurality of drainage grooves (121) are arranged in parallel or crosswise. The two ends of the spreading groove (122) are respectively communicated with the same drainage groove (121) or two drainage grooves (121), and are used for guiding the molten metal to fill the bottom surface of the second groove (12).

8. The evaporation boat for coating according to claim 7, characterized in that, The extending direction of the drainage groove (121) is parallel to the extending direction of the second groove (12). The plurality of drainage grooves (121) are arranged in parallel at equal intervals on the bottom surface of the second groove (12). The extending direction of the spreading groove (122) is perpendicular to the extending direction of the drainage groove (121) and is respectively communicated with the plurality of drainage grooves (121). The plurality of spreading grooves (122) are arranged in parallel at equal intervals on the bottom surface of the second groove (12) to jointly form a circulation network with the plurality of drainage grooves (121), and the circulation network covers at least a part of the bottom surface of the second groove (12).

9. The evaporation boat for coating according to claim 7, characterized in that, The connection positions of the drainage groove (121) and the spreading groove (122), and the connection positions of the drainage groove (121) and the liquid outlet (40) are all provided with rounded corners; and / or, both the drainage groove (121) and the spreading groove (122) are square grooves, and the depths of the drainage groove (121) and the spreading groove (122) are the same.

10. A vacuum coating device, characterized in that, The vacuum coating device includes the coating evaporation boat according to any one of claims 1 to 9. The cover plate (20) has through holes (211) respectively communicated with the outside and the liquid chamber (30). The through holes (211) are used for passing metal wires, and the metal wires are used for melting to form molten metal. The vacuum coating device further includes a wire feeding structure, and the wire feeding structure controls the liquid level height and the liquid level change speed of the molten metal in the liquid chamber (30) by controlling the length and speed of the metal wires entering the liquid chamber (30).

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