Silicon wafer number detection device

Abstract

The utility model belongs to the technical field of semiconductor technology, and particularly relates to a silicon wafer number detection device which comprises a rack, a counting assembly is arranged on the rack, the counting assembly comprises a double-layer circulating synchronous belt, a front roller and a rear roller are arranged at the two ends of the double-layer circulating synchronous belt, a synchronous belt wheel is arranged in the middle of the upper-layer synchronous belt, and the lower-layer synchronous belt is provided with a rear roller. The synchronous belt wheel is connected with the output end of the driving motor, the lower layer synchronous belt is provided with a counting sensor through a fixing assembly, and the counting sensor is installed on the double-layer circulation synchronous belt and moves linearly through the double-layer circulation synchronous belt. Therefore, the number of silicon wafers in a plurality of wafer boxes can be detected through one counting sensor, a detection mechanism is simplified, the manufacturing cost of an enterprise is reduced, and the maintenance cost is also greatly reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processes, and specifically relates to a silicon wafer quantity detection device. Background Art

[0002] Vertical annealing furnaces, vertical oxidation furnaces, and vertical LPCVD are applied in the fields of integrated circuits, discrete devices, MEMS devices, etc., and are used for processes such as alloying, annealing, oxidation, and LPCVD of wafers of different sizes. When silicon wafers are processed, a fully automatic wafer feeding method is mostly used, and the quantity of silicon wafers needs to be detected to ensure the normal progress of the process. For the silicon wafer detection of conventional equipment, multiple groups of sensors are used for silicon wafer detection, which has a complex structure and high cost. Content of the Utility Model

[0003] In order to overcome the above-mentioned defects existing in the prior art, the utility model provides a silicon wafer quantity detection device.

[0004] A silicon wafer quantity detection device includes a frame, a counting component is arranged on the frame, the counting component includes a double-layer circulating synchronous belt, the two ends of the double-layer circulating synchronous belt are provided with a front roller and a rear roller, a synchronous belt wheel is arranged in the middle of the upper synchronous belt, the synchronous belt wheel is connected to the output end of a driving motor, and a counting sensor is installed on the lower synchronous belt through a fixing component.

[0005] Further, guide wheels and tensioning wheels are arranged on both sides of the synchronous belt wheel, the synchronous belt wheel is located below the upper synchronous belt, the guide wheels and the tensioning wheels are located above the upper synchronous belt, and the upper synchronous belt passes through the gaps between the guide wheel and the synchronous belt wheel, and between the tensioning wheel and the synchronous belt wheel.

[0006] Further, a front limit sensor and a rear limit sensor are respectively arranged at the front end and the rear end of the synchronous belt for conveying, and the front limit sensor and the rear limit sensor are fixedly installed on the frame.

[0007] Further, the driving motor is installed on the frame through a motor mounting plate.

[0008] Further, the fixing component includes a fixing plate located above the lower synchronous belt, an L-shaped hook claw is arranged on the fixing plate, a fastening bolt passes through the hook claw and the synchronous belt and is connected to the fixing plate, a base is installed on the fixing plate, a slot is arranged on the base, and the counting sensor is inserted into the base.

[0009] Further, the slot is of a dovetail groove structure.

[0010] Further, the central axis heights of the guide wheel, the tensioning wheel, and the synchronous belt wheel are the same.

[0011] Due to the adoption of the above technical solution, the beneficial technical effects of the present utility model are as follows: In the present utility model, the counting sensor is installed on the double-layer circulating synchronous belt, and the counting sensor moves linearly through the double-layer circulating synchronous belt, so that the detection of the number of silicon wafers in multiple wafer boxes can be realized by one counting sensor, which simplifies the detection mechanism, reduces the manufacturing cost of the enterprise, and greatly reduces the maintenance cost at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 is a top view of a silicon wafer quantity detection device of the present utility model;

[0013] Figure 2 For the present utility model Figure 1 is a schematic cross-sectional structure view in the A-A direction;

[0014] Figure 3 is a side view of the fixing component in the present utility model;

[0015] Figure 4 is a front view of the fixing component in the present utility model.

[0016] In the figure, 1 is a frame, 2 is a double-layer circulating synchronous belt, 3 is a front roller, 4 is a rear roller, 5 is a synchronous belt pulley, 6 is a driving motor, 7 is a counting sensor, 8 is a guiding wheel, 9 is a tensioning wheel, 10 is a front limit sensor, 11 is a rear limit sensor, 12 is a motor mounting plate, 13 is a hook claw, 14 is a fastening bolt, 15 is a fixing plate, 16 is a base, and 17 is a slot. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0017] In order to more clearly illustrate the technical solution of the present utility model, the present utility model will be further described below with reference to the accompanying drawings. Obviously, the accompanying drawings described below are only one embodiment of the present utility model. For those of ordinary skill in the art, without creative efforts, other embodiments obtained based on this drawing and embodiment all fall within the protection scope of the present utility model.

[0018] According to Figures 1-4 shown, a silicon wafer quantity detection device includes a frame 1, a counting component is provided on the frame 1, the counting component includes a double-layer circulating synchronous belt 2, a front roller and a rear roller 4 are provided at both ends of the double-layer circulating synchronous belt 2, a synchronous belt pulley 5 is provided in the middle of the upper synchronous belt, the synchronous belt pulley 5 is connected to the output end of a driving motor 6, and a counting sensor 7 is installed on the lower synchronous belt through a fixing component.

[0019] In the above specific technical solution, the counting sensor 7 is installed on the double-layer circulating synchronous belt 2. The counting sensor 7 moves linearly through the double-layer circulating synchronous belt 2, so that the silicon wafer quantity in multiple wafer boxes can be detected by one counting sensor 7, simplifying the detection mechanism, reducing the manufacturing cost of the enterprise, and greatly reducing the maintenance cost at the same time.

[0020] Guide wheels 8 and tensioning wheels 9 are arranged on both sides of the synchronous belt pulley 5. The synchronous belt pulley 5 is located below the upper synchronous belt, and the guide wheels 8 and tensioning wheels 9 are located above the upper synchronous belt. The upper synchronous belt passes through the gaps between the guide wheel 8 and the synchronous belt pulley 5, and between the tensioning wheel 9 and the synchronous belt pulley 5. By setting the synchronous belt pulley 5, the guide wheel 8 and the tensioning wheel 9, it is more beneficial to the stable operation of the counting sensor 7, improving the stability and accuracy of detection.

[0021] A front limit sensor 10 and a rear limit sensor 11 are respectively arranged at the front end and the rear end of the conveying of the synchronous belt. The front limit sensor 10 and the rear limit sensor 11 are fixedly installed on the frame 1. The counting sensor 7 is positioned by the front limit sensor 10 and the rear limit sensor 11, and the counting sensor 7 moves from the position corresponding to the front limit sensor 10 to the position corresponding to the rear limit sensor 11 to complete counting.

[0022] The driving motor 6 is installed on the frame 1 through a motor mounting plate 12.

[0023] The fixing component includes a fixing plate 15 located above the lower synchronous belt. An L-shaped hook claw 13 is arranged on the fixing plate 15. A fastening bolt 14 passes through the hook claw 13 and the synchronous belt and is connected to the fixing plate 15. A base 16 is installed on the fixing plate 15. A slot 17 is arranged on the base 16. The counting sensor 7 is inserted into the base 16. When it is necessary to disassemble the counting sensor 7 for maintenance, it can be directly pulled out from the base 16, which is convenient for disassembly and replacement, further reducing the maintenance cost.

[0024] The slot 17 is of a dovetail groove structure.

[0025] The central axis heights of the guide wheel 8, the tensioning wheel 9 and the synchronous belt pulley 5 are the same, ensuring that the double-layer circulating synchronous belt 2 can run smoothly.

[0026] The above embodiments are only exemplary embodiments of the present invention and are not used to limit the present invention. The protection scope of the present invention is defined by the claims. Those skilled in the art can make various modifications or equivalent replacements within the essence and protection scope of the present invention, and such modifications or equivalent replacements should also be regarded as falling within the protection scope of the present invention.

Claims

1. A silicon wafer quantity detection device, comprising a frame (1), characterized in that, A counting component is provided on the frame (1). The counting component includes a double-layer circulating synchronous belt (2). The two ends of the double-layer circulating synchronous belt (2) are provided with a front roller and a rear roller (4). A synchronous belt pulley (5) is provided in the middle of the upper synchronous belt. The synchronous belt pulley (5) is connected to the output end of a driving motor (6). A counting sensor (7) is installed on the lower synchronous belt through a fixing component.

2. The silicon wafer quantity detection device according to claim 1, characterized in that, Guide wheels (8) and tension wheels (9) are provided on both sides of the synchronous belt pulley (5). The synchronous belt pulley (5) is located below the upper synchronous belt. The guide wheels (8) and the tension wheels (9) are located above the upper synchronous belt. The upper synchronous belt passes through the gaps between the guide wheels (8) and the synchronous belt pulley (5), and between the tension wheels (9) and the synchronous belt pulley (5).

3. The silicon wafer quantity detection device according to claim 2, wherein A front limit sensor (10) and a rear limit sensor (11) are respectively provided at the front end and the rear end of the synchronous belt for conveying. The front limit sensor (10) and the rear limit sensor (11) are fixedly installed on the frame (1).

4. The wafer quantity detection device according to claim 3, characterized in that, The driving motor (6) is installed on the frame (1) through a motor mounting plate (12).

5. The silicon wafer quantity detection device according to claim 4, characterized in that, The fixing component includes a fixing plate (15) located above the lower synchronous belt. An L-shaped hook (13) is provided on the fixing plate (15). A fastening bolt (14) passes through the hook (13) and the synchronous belt and is connected to the fixing plate (15). A base (16) is installed on the fixing plate (15). A slot (17) is provided on the base (16). The counting sensor (7) is inserted into the base (16).

6. The silicon wafer quantity detection device according to claim 5, characterized in that, The slot (17) is of a dovetail groove structure.

7. The wafer quantity detection device according to claim 5, characterized in that, The central axis heights of the guide wheels (8), the tension wheels (9) and the synchronous belt pulley (5) are the same.

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