Plasma equipment facilitating machining of peripheral side face of workpiece

Abstract

The utility model relates to the field of plasma processing, in particular to plasma equipment convenient for processing the peripheral side surface of a workpiece, which comprises a rack main body, a processing chamber is formed in the rack main body, and a mounting jig and at least one plasma gun are arranged in the processing chamber; the mounting jig comprises a mounting table, at least one surface of the mounting table is provided with a positioning seat, the positioning seat can rotate relative to the mounting table, and the peripheral side face of the positioning seat is sleeved with a workpiece; during working, the working end of the plasma gun directly faces the peripheral side face. According to the utility model, the positioning seat is arranged on at least one surface of the mounting table, so that a cover-shaped workpiece or an annular workpiece can be directly sleeved on the positioning seat conveniently, and the positioning of the workpiece is realized; by arranging the positioning seat capable of rotating, plasma treatment of the whole peripheral side face of a cover-shaped workpiece or an annular workpiece is completed in the one-time clamping process, time and labor are saved, and the plasma treatment effect can be guaranteed.

Description

Technical Field

[0001] The utility model relates to the field of plasma processing, in particular to a plasma device which is convenient for processing the peripheral side surface of a workpiece. Background Art

[0002] Plasma is a highly active and reactive gas composed of high-energy electrons, positive ions, and free radicals. Plasma treatment technology works by exciting a gas into a plasma, then using the high-energy particles in the plasma to bombard and etch the surface of a material, thereby achieving functions such as cleaning, modifying, and coating the surface. Therefore, plasma treatment technology is often used to clean workpieces to be printed, improving the surface energy of the printed surface and thus increasing the adhesion of the printed ink.

[0003] In order to prevent the workpiece from shaking during the plasma treatment process and affecting the treatment effect, the existing plasma treatment equipment generally sets a fixing mechanism to fix the workpiece. For example, the Chinese utility model patent CN221028687U adopts two sets of relatively set fixing plates to clamp the workpiece, and the Chinese utility model patent CN221127535U adopts a fixed limit clamping plate and a dynamic limit clamping plate to clamp the workpiece. The above-mentioned fixing mechanism is mainly suitable for the case where the upper surface of the workpiece is subjected to plasma treatment; when the outer peripheral side of the cover-shaped workpiece or the annular workpiece needs to be treated, etc. During ion treatment, since the thickness of the cover-shaped workpiece or the ring-shaped workpiece is small and there is a cavity inside, it is difficult to fix it using the above-mentioned fixing mechanism. Moreover, the above-mentioned fixing mechanism can only perform plasma treatment on the part of the outer peripheral side opposite to the plasma gun when clamped at one time. When the remaining part needs to be plasma treated, the workpiece needs to be removed from the fixing mechanism, rotated a certain angle, and then clamped and plasma treated. The operation is time-consuming and labor-intensive, and the manual rotation error is large, and it is easy for some positions to not be plasma treated, thereby affecting the effect of the plasma treatment.

[0004] Therefore, it is necessary to provide a technical solution to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to provide a plasma device that is convenient for processing the outer peripheral side of a workpiece, which can solve the technical problem in the prior art that the plasma device cannot complete the plasma treatment of the entire outer peripheral side of a cover-shaped workpiece or annular workpiece in one clamping process.

[0006] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0007] A plasma device for processing the peripheral side of a workpiece includes a frame body, a processing chamber formed in the frame body, a mounting fixture and at least one plasma gun provided in the processing chamber; the mounting fixture includes a mounting table, at least one surface of the mounting table is provided with a positioning seat, the positioning seat can rotate relative to the mounting table, and the workpiece is sleeved on the peripheral side of the positioning seat; when in operation, the working end of the plasma gun faces the peripheral side.

[0008] Furthermore, there are two positioning seats, which are symmetrically arranged on the left and right surfaces of the mounting platform; correspondingly, two plasma guns are also arranged.

[0009] Furthermore, the mounting fixture is also provided with a clamping assembly corresponding to each positioning seat, and the clamping assembly includes a clamping member, which is arranged opposite to the outer bottom surface of the corresponding positioning seat, and the distance between the clamping member and the positioning seat is adjustable.

[0010] Furthermore, the clamping assembly also includes a first driving member and a fixed plate, a guide rail is provided on the fixed plate, a clamping seat is slidably connected to the guide rail, the clamping member is installed on the clamping seat, and the working end of the first driving member is connected to the clamping seat.

[0011] Furthermore, the mounting fixture also includes a base and a second driving member, a movable plate is slidably provided on the base, a working end of the second driving member is connected to the movable plate, and the mounting platform and the clamping assembly are both provided on the movable plate.

[0012] Furthermore, the mounting fixture also includes a rotational drive assembly for driving the positioning seat to perform rotational motion, the rotational drive assembly includes a gear, a rack meshing with the gear, and a third drive member, the working end of the third drive member is connected to the rack, and the gear is connected to the positioning seat.

[0013] Furthermore, the gear and rack are both arranged inside the mounting platform, and a connecting rod is provided on the inner bottom surface of the positioning seat. The other end of the connecting rod passes through the mounting platform and is connected to the side of the gear, and the working end of the third driving member passes through the mounting platform and is connected to the rack.

[0014] Furthermore, an opening communicating with the processing chamber is provided on the frame body, and a safety door for closing the opening is provided on the frame body.

[0015] Furthermore, a dual start switch is provided on the rack body.

[0016] Furthermore, at least one exhaust mechanism is provided on the frame body, and the exhaust mechanism is communicated with the processing chamber.

[0017] The beneficial effects of the utility model are as follows:

[0018] (1) By providing a positioning seat on at least one surface of the mounting table, it is convenient for a cover-shaped workpiece or an annular workpiece to be directly mounted on the positioning seat, thereby achieving positioning of the workpiece; by providing a positioning seat capable of rotating, the plasma treatment of the entire outer peripheral side of the cover-shaped workpiece or annular workpiece can be completed in one clamping process, saving time and labor, and ensuring the effect of the plasma treatment;

[0019] (2) By providing a second driving member and a movable plate, when loading or unloading is required, the second driving member drives the movable plate to move forward to bring it close to the operator's operating position, thereby bringing the positioning seat close to the operator. The operator does not need to extend his hand deep into the interior of the processing chamber to operate, which, on the one hand, facilitates the operator to load and unload the workpiece, and on the other hand, ensures the safety of the operator;

[0020] (3) By setting up a rotary drive assembly, on the one hand, the rotary drive assembly can automatically drive the positioning seat and the workpiece to rotate, so that the plasma treatment of the entire peripheral side of the workpiece can be completed in one clamping process; on the other hand, the rotary drive assembly can accurately control the angle of each rotation of the positioning seat and the workpiece, thereby ensuring that the peripheral side of the workpiece can be evenly plasma treated, avoiding the situation where some positions are not plasma treated due to rotation angle errors. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the overall structure of the plasma equipment of the present utility model.

[0022] Figure 2 This is a partial structural diagram of the plasma equipment of the present utility model.

[0023] Figure 3 This is a schematic diagram of the overall structure of the installation fixture of the present utility model.

[0024] Figure 4 It is a partial structural schematic diagram of the installation fixture of the present utility model.

[0025] Description of reference numerals:

[0026] 1-frame body; 10-processing chamber; 11-opening; 12-safety door; 2-plasma gun; 3-mounting fixture; 31-mounting table; 32-positioning seat; 321-peripheral side; 322-outer bottom; 323-connecting rod; 33-clamping assembly; 331-clamping member; 332-fixed plate; 333-guide rail; 334-clamping seat; 335-first drive member; 34-base; 35-second drive member; 36-movable plate; 37-rotating drive assembly; 371-gear; 372-rack; 373-third drive member; 4-dual start switch; 5-exhaust mechanism. DETAILED DESCRIPTION

[0027] In order to facilitate understanding by those skilled in the art, the present invention is further described below with reference to embodiments and drawings. The contents mentioned in the embodiments are not intended to limit the present invention.

[0028] like Figures 1 to 4 As shown, the utility model provides a plasma device that is convenient for processing the outer peripheral side of a workpiece, including a frame body 1, a processing chamber 10 is formed in the frame body 1, and a mounting fixture 3 and at least one plasma gun 2 are provided in the processing chamber 10; the mounting fixture 3 includes a mounting table 31, and a positioning seat 32 is provided on at least one surface of the mounting table 31. The positioning seat 32 can rotate relative to the mounting table 31, and the workpiece is sleeved on the outer peripheral side 321 of the positioning seat 32; when working, the working end of the plasma gun 2 faces the outer peripheral side 321.

[0029] In actual use, the cover-shaped workpiece or the annular workpiece is sleeved on the outer peripheral side surface 321 of the positioning seat 32. Specifically, the positioning seat 32 of an adaptive shape can be replaced according to the shape of the workpiece, such as the cross section of the positioning seat can be circular, rectangular, irregular, etc. After the workpiece is installed, the outer peripheral side surface of the workpiece is facing the working end of the plasma gun 2. Specifically, the plasma gun 2 is installed above the inside of the processing chamber 10, and the mounting fixture 3 is set below the inside of the processing chamber 10, and the positioning seat 32 is set on the front, rear, left and right sides of the mounting table, so that the working end of the plasma gun 2 is facing downward to the outer peripheral side surface 321 of the positioning seat 32, that is, the working end of the plasma gun 2 The end is downwardly facing the outer peripheral side of the workpiece, thereby ensuring the processing effect of the plasma gun 2 on the outer peripheral side of the workpiece; then, the plasma gun 2 is started to perform plasma treatment on the outer peripheral side of the workpiece. When the treatment of this position is completed, the positioning seat 32 is rotated to drive the workpiece to rotate, so that the plasma gun 2 processes another position of the outer peripheral side of the workpiece, and the plasma gun 2 completes the plasma treatment of various positions of the outer peripheral side of the workpiece in turn. Therefore, by providing a positioning seat 32 that can perform rotational movement, the plasma treatment of the entire outer peripheral side of the cover-shaped workpiece or the annular workpiece can be completed in one clamping process, which saves time and effort and can ensure the effect of the plasma treatment.

[0030] In this embodiment, by providing a positioning seat 32 on at least one surface of the mounting table 31, it is convenient to directly mount the cover-shaped workpiece or the annular workpiece on the positioning seat 32 to achieve positioning of the workpiece; by providing a positioning seat 32 that can perform rotational motion, the plasma treatment of the entire outer peripheral side of the cover-shaped workpiece or the annular workpiece can be completed in one clamping process, which saves time and effort and can ensure the effect of plasma treatment.

[0031] Furthermore, two positioning seats 32 are symmetrically arranged on the left and right surfaces of the mounting platform 31; accordingly, two plasma guns 2 are also provided. In this embodiment, by providing positioning seats 32 on both the left and right surfaces of the mounting platform 31, when loading materials, a worker can grasp a workpiece with their left and right hands respectively and place the workpiece on the left and right positioning seats 32, completing the loading of two workpieces simultaneously. Furthermore, the corresponding provision of two plasma guns 2 allows plasma treatment of two workpieces simultaneously, thereby improving production efficiency.

[0032] Furthermore, the mounting fixture 3 is provided with a clamping assembly 33 corresponding to each positioning seat 32. The clamping assembly 33 includes a clamping member 331, which is disposed opposite the outer bottom surface 322 of the corresponding positioning seat 32, and the spacing between the clamping member 331 and the positioning seat 32 is adjustable. Specifically, the clamping assembly 333 also includes a first driving member 335 and a fixing plate 332. The fixing plate 332 is provided with a guide rail 333, and a clamping seat 334 is slidably connected to the guide rail 333. The clamping member 331 is mounted on the clamping seat 334, and the working end of the first driving member 335 is connected to the clamping seat 334.

[0033] In this embodiment, it is mainly designed for cover-shaped workpieces. After the staff puts the cover-shaped workpiece on the positioning seat 32, the first driving member 335 drives the clamping seat 334 to move along the guide rail 333 toward the positioning seat 32 until the clamping member 331 presses the workpiece against the outer bottom surface 322 of the positioning seat 32, thereby clamping the cover-shaped workpiece and preventing it from shaking during processing. Specifically, the clamping member 331 can be set to be able to rotate relative to the clamping seat 334. When the positioning seat 32 drives the workpiece to rotate, the clamping member 331 can also follow and rotate synchronously. Preferably, the first driving member 335 is a driving cylinder, and the front and rear sides of the bottom of the mounting table 31 are provided with avoidance space for installing the first driving member 335, so that the overall structure of the mounting fixture 3 is more reasonable and compact.

[0034] Furthermore, the mounting fixture 3 also includes a base 34 and a second driving member 35 , a movable plate 36 is slidably provided on the base 34 , a working end of the second driving member 35 is connected to the movable plate 36 , and the mounting platform 31 and the clamping assembly 33 are both provided on the movable plate 36 .

[0035] In this embodiment, by setting a second driving member 35 and a movable plate 36, when loading or unloading is required, the second driving member 35 drives the movable plate 36 to move forward so that it is close to the operating position of the staff, so that the positioning seat 32 is close to the staff, and the staff does not need to reach into the deep interior of the processing chamber 10 to operate. On the one hand, it is convenient for the staff to load and unload the workpiece, and on the other hand, it ensures the safety of the staff; when the loading or unloading operation is completed, the second driving member 35 drives the movable plate 36 to move backward so that the positioning seat 32 is located directly below the plasma gun 2, thereby ensuring the effect of plasma treatment.

[0036] Furthermore, the mounting fixture 3 also includes a rotational drive assembly 37 for driving the positioning seat 32 to perform rotational motion. The rotational drive assembly 37 includes a gear 371, a rack 372 meshing with the gear 371, and a third drive member 373. The working end of the third drive member 373 is connected to the rack 372, and the gear 371 is connected to the positioning seat 32.

[0037] In this embodiment, by setting up a rotation drive component 37, on the one hand, the rotation drive component 37 can automatically drive the positioning seat 32 and the workpiece to rotate, so as to complete the plasma treatment of the entire peripheral side of the workpiece in one clamping process; on the other hand, the rotation drive component 37 can accurately control the angle of each rotation of the positioning seat 32 and the workpiece, thereby ensuring that the peripheral side of the workpiece can be evenly plasma treated, avoiding the situation where some positions are not plasma treated due to rotation angle errors.

[0038] Furthermore, the gear 371 and the rack 372 are both disposed within the mounting platform 31. A connecting rod 323 is disposed on the inner bottom surface of the positioning seat 32. The other end of the connecting rod 323 extends through the mounting platform 31 and is connected to the side of the gear 371. The working end of the third driving member 373 extends through the mounting platform 31 and is connected to the rack 372. Specifically, positioning seats 32 are disposed on the left and right surfaces of the mounting platform 31. Connecting rods 323 are disposed on the inner bottom surfaces of the left and right positioning seats 32, i.e., on the opposing end surfaces of the left and right positioning seats 32. The other ends of the two connecting rods 323 extend through the left and right surfaces of the mounting platform 31 and into the interior of the mounting platform 31, respectively connecting to the left and right side surfaces of the gear 371. When the third driving member 373 drives the rack 372 to move back and forth, the gear 371 meshing with the rack 372 rotates, thereby driving the left and right positioning seats 32 to rotate via the two connecting rods 323. Preferably, the third driving member 373 is a driving cylinder. Furthermore, the gear 371 and the rack 372 are both arranged inside the mounting platform 31 , effectively preventing external impurities from falling onto the gear 371 and the rack 372 to affect the transmission engagement between the two.

[0039] Furthermore, the frame body 1 is provided with an opening 11 communicating with the processing chamber 10, and a safety door 12 is provided on the frame body 1 for closing the opening 11. Preferably, a dual-start switch 4 is provided on the frame body 1. In this embodiment, the provision of the safety door 12 and the dual-start switch 4 effectively ensures that the operator's hands are clear of the processing chamber 10 during plasma processing, thereby ensuring personal safety.

[0040] Furthermore, at least one exhaust mechanism 5 is provided on the frame body 1, and the exhaust mechanism 5 is connected to the processing chamber 10. In this embodiment, by providing the exhaust mechanism 5, the waste gas generated in the processing chamber 10 during the plasma treatment process can be discharged in a timely manner to ensure normal production.

[0041] The above embodiments merely represent several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A plasma device for processing the peripheral side of a workpiece, comprising a frame body (1), a processing chamber (10) formed in the frame body (1), a mounting fixture (3) and at least one plasma gun (2) provided in the processing chamber (10); characterized in that: The mounting fixture (3) includes a mounting platform (31), at least one surface of the mounting platform (31) is provided with a positioning seat (32), the positioning seat (32) can rotate relative to the mounting platform (31), and the workpiece is sleeved on the outer peripheral side surface (321) of the positioning seat (32); when working, the working end of the plasma gun (2) faces the outer peripheral side surface (321).

2. The plasma equipment for processing the outer peripheral side of a workpiece according to claim 1, characterized in that: There are two positioning seats (32) which are symmetrically arranged on the left and right surfaces of the mounting platform (31); accordingly, two plasma guns (2) are also arranged.

3. The plasma equipment for processing the outer peripheral side of a workpiece according to claim 1, characterized in that: The mounting fixture (3) is further provided with a clamping assembly (33) corresponding to each positioning seat (32). The clamping assembly (33) includes a clamping member (331). The clamping member (331) is arranged opposite to the outer bottom surface (322) of the corresponding positioning seat (32), and the distance between the clamping member (331) and the positioning seat (32) is adjustable.

4. The plasma equipment for processing the outer peripheral side of a workpiece according to claim 3, characterized in that: The clamping assembly (33) further includes a first driving member (335) and a fixing plate (332). A guide rail (333) is provided on the fixing plate (332). A clamping seat (334) is slidably connected to the guide rail (333). The clamping member (331) is mounted on the clamping seat (334). The working end of the first driving member (335) is connected to the clamping seat (334).

5. The plasma equipment for processing the outer peripheral side of a workpiece according to claim 3, characterized in that: The mounting fixture (3) further includes a base (34) and a second driving member (35). A movable plate (36) is slidably provided on the base (34). The working end of the second driving member (35) is connected to the movable plate (36). The mounting platform (31) and the clamping assembly (33) are both provided on the movable plate (36).

6. The plasma equipment for processing the outer peripheral side of a workpiece according to claim 1, characterized in that: The mounting fixture (3) further includes a rotational drive assembly (37) for driving the positioning seat (32) to perform rotational motion, the rotational drive assembly (37) including a gear (371), a rack (372) meshing with the gear (371), and a third drive member (373), wherein a working end of the third drive member (373) is connected to the rack (372), and the gear (371) is connected to the positioning seat (32).

7. The plasma equipment for processing the outer peripheral side of a workpiece according to claim 6, characterized in that: The gear (371) and the rack (372) are both arranged inside the mounting platform (31), and a connecting rod (323) is provided on the inner bottom surface of the positioning seat (32). The other end of the connecting rod (323) passes through the mounting platform (31) and is connected to the side of the gear (371). The working end of the third driving member (373) passes through the mounting platform (31) and is connected to the rack (372).

8. A plasma device for processing the outer peripheral side of a workpiece according to any one of claims 1 to 7, characterized in that: An opening (11) communicating with the processing chamber (10) is provided on the frame body (1), and a safety door (12) for closing the opening (11) is provided on the frame body (1).

9. The plasma equipment for processing the outer peripheral side of a workpiece according to claim 8, characterized in that: A double start switch (4) is provided on the frame body (1).

10. A plasma device for processing the outer peripheral side of a workpiece according to any one of claims 1 to 7, characterized in that: At least one exhaust mechanism (5) is provided on the frame body (1), and the exhaust mechanism (5) is communicated with the processing chamber (10).

Images