Feeder of sintering device

Abstract

The utility model relates to a feeder of a sintering device. The feeder comprises a feeder shell, a push rod and a push rod sealing piece. The push rod sealing piece comprises a push rod elastic sealing ring and a push rod sliding sleeve, the push rod penetrates through the push rod sliding sleeve, and the push rod elastic sealing ring is located in an annular space between the push rod sliding sleeve and the feeder shell; the end of the feeder is connected to the furnace body shell in a sealed mode, the feeder and the furnace tube form a through closed space, and by means of the push rod elastic sealing ring and the push rod sliding sleeve which are located between the push rod and the feeder shell, sealing of the push rod can be achieved, and smooth sliding of the push rod can be guaranteed. Accurate feeding is achieved under the condition that a vacuum environment or an inert gas environment is kept in the furnace tube.

Description

Technical Field

[0001] The utility model relates to the technical field of high-temperature sintering, in particular to a feeder for a sintering device, and is particularly suitable for a feeder for material sintering and two-dimensional material preparation in the fields of material science, chemistry, physics, etc. Background Art

[0002] High-temperature sintering is an important step in the technical processes of crystal growth, material synthesis, metal heat treatment, and surface coating. Among them, thin film deposition process, as a common application of high-temperature sintering, is an important technology in semiconductor processing and manufacturing. Common thin film deposition processes are divided into physical vapor deposition (PVD) and chemical vapor deposition (CVD). Chemical vapor deposition (CVD) refers to the process of generating target products on the substrate under specific temperature and pressure conditions through the interaction between reactants or between reactants and substrate materials. Chemical vapor deposition technology (CVD) has gradually become an important method for the manufacture of two-dimensional semiconductor materials due to its advantages such as simple preparation process, large growth area, and easy transfer. It has also led to the development of atomic layer deposition (ALD) technology, which is widely used in the preparation of various material systems such as graphene, carbon nanotubes, and disulfides.

[0003] Obtaining in-situ, online information about a material's morphology, structure, and phase transitions during high-temperature sintering is crucial for understanding its properties. Prior art CN110068535A discloses a high-temperature tube furnace suitable for in-situ optical microscopy and spectral analysis. This furnace provides a stable sintering environment up to 1100°C. A through-hole 1-10 is provided in the furnace body 1. An observation window 1-5-3 on the furnace tube 1-5 is located directly below the observation hole 1-10. The objective lenses of a microscope and spectrometer peer through the observation hole 1-10 to observe the microscopic morphology and collect spectra of the material within the high-temperature furnace tube 1-5. When using this equipment for chemical vapor deposition (CVD), it is sometimes necessary to introduce another sample after one sample has reacted to a certain degree. This requires maintaining a vacuum or inert gas atmosphere within the furnace tube during the introduction of the additional sample. Therefore, maintaining a sealed seal during the feeding process is a technical challenge that needs to be addressed. Utility Model Content

[0004] In order to solve the above technical problems, the utility model proposes a feeder for a sintering device, which optimizes the sealing structure inside the feeder to meet the sealing requirements of the feeding process.

[0005] In the present invention, the end of the feeder is sealed and connected to the furnace housing of the sintering device. The sealing connection component adopts the seal of the end of the furnace tube in the sintering device, such as the furnace tube seal located between the end of the furnace tube and the furnace housing, or a separate seal is provided between the end of the feeder and the furnace housing, so that the feeder and the furnace tube form a continuous enclosed space. The feeder includes a feeder housing, a push rod, and a push rod seal. The feeder housing is provided with a gas interface for connecting to a vacuum system or an inert gas system. The push rod extends through the feeder housing and into the interior of the furnace tube. The end of the push rod is provided with a crucible for placing a sample or substrate material. A push rod seal is provided between the feeder housing and the push rod.

[0006] The push rod seal includes a push rod elastic sealing ring. Ordinary push rod elastic sealing rings, such as rubber sealing rings, are squeezed and deformed and pressed against the push rod. The push rod will produce a sense of frustration during the push-pull process, and cannot achieve smooth and accurate feeding. For this reason, preferably, a push rod sliding sleeve is also provided between the push rod elastic sealing ring and the push rod. The push rod passes through the push rod sliding sleeve. The push rod elastic sealing ring is located in the annular space between the push rod sliding sleeve and the feeder housing. The push rod elastic sealing ring squeezes the push rod sliding sleeve. The push rod sliding sleeve is squeezed to gather toward the center and seal with the push rod to achieve sealing, while not causing a sense of frustration when sliding the push rod. Preferably, the material of the push rod sliding sleeve is selected from engineering plastics, which can not only produce slight deformation to achieve sealing, but also ensure smooth sliding of the push rod.

[0007] Compared with the existing technology, the utility model has the following beneficial effects:

[0008] The end of the feeder is sealed and connected to the furnace body shell. The feeder and the furnace tube form a continuous closed space. With the help of the push rod elastic sealing ring and push rod sliding sleeve located between the push rod and the feeder shell, the push rod can be sealed and the push rod can slide smoothly, thereby achieving accurate feeding while maintaining a vacuum environment or inert gas environment inside the furnace tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a cross-sectional view of the feeder and furnace shell.

[0010] Figure 2 is a 3D view of the feeder.

[0011] Figure 3 This is a three-dimensional view of the feeder from another angle.

[0012] Figure 4 It is a cross-sectional view of the feeder.

[0013] Figure markings: 1-furnace body shell, 7-feeder, 8-push rod, 9-feeder shell, 10-gas interface, 13-furnace tube, 16-furnace tube seal, 39-crucible, 40-pressing piece, 41-push rod sliding sleeve, 42-push rod elastic sealing ring, 43-push rod metal sealing ring, 44-crucible groove, 45-shell flange. DETAILED DESCRIPTION

[0014] The following is a detailed description of the specific embodiments of the present invention in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to illustrate and explain the present invention and are not intended to limit the present invention.

[0015] Example 1

[0016] See attached Figure 1-4 A feeder 7 of a sintering device, the end of the feeder 7 is sealed and connected to the furnace shell 1 of the sintering device by means of a furnace tube seal 16. The furnace tube seal 16 is also used to seal the end of the furnace tube 13 and the furnace shell 1. The feeder 7 and the furnace tube 13 form a through closed space.

[0017] The feeder 7 includes a feeder housing 9, a push rod 8, and a push rod seal. The feeder housing 9 is provided with a gas interface 10 for connecting to a vacuum system or an inert gas system. Preferably, the feeder housing 9 is also provided with a housing flange 45, which is connected to the furnace housing 1 via fasteners.

[0018] The push rod 8 extends through the feeder housing 9 and into the furnace tube 13. A crucible 39 is provided at the end of the push rod 8. The crucible 39 includes a crucible groove 44 for placing samples or substrate materials. A push rod seal is provided between the feeder housing 9 and the push rod 8. The push rod seal comprises a push rod elastic sealing ring 42 and a push rod sleeve 41. The push rod 8 passes through the push rod sleeve 41. The push rod elastic sealing ring 42 is located in the annular space between the push rod sleeve 41 and the feeder housing 9. A protrusion is provided on the outer periphery of the push rod sleeve 41. A stop block is provided on the inner wall of the feeder housing 9. The push rod sleeve 41 is axially limited by abutting one end of the protrusion against the stop block, while the push rod elastic sealing ring 42 abuts the other end of the protrusion. A pressing member 40 is provided at the other end of the feeder housing 9. Preferably, the outer wall of the pressing member 40 is provided with an external thread, and the inner wall of the other end of the feeder housing 9 is provided with an internal thread. The pressing member 40 is screwed to the end of the feeder housing 9. The pressing member 40 squeezes the push rod elastic sealing ring 42 inward, so that the push rod elastic sealing ring 42 expands radially to squeeze the push rod sliding sleeve 41. The push rod sliding sleeve 41 is squeezed toward the center to achieve sealing with the push rod 8, and at the same time does not cause a sense of frustration when sliding the push rod 8. Preferably, the material of the push rod sliding sleeve 41 is selected from engineering plastics.

[0019] Preferably, a push rod metal sealing ring 43 is provided between the push rod elastic sealing ring 42 and the pressing member 40. The pressing member 40 horizontally squeezes the push rod elastic sealing ring 42 inward with the help of the push rod metal sealing ring 43, so that it can expand radially evenly, thereby preventing the push rod elastic sealing ring 42 from being twisted and deformed during the rotation of the pressing member 40. At the same time, the push rod metal sealing ring 43 can deform radially to squeeze the push rod sliding sleeve 41, thereby achieving sealing between the push rod sliding sleeve 41 and the push rod 8. The material of the push rod metal sealing ring 43 is a metal sealing material, preferably copper.

[0020] The above describes in detail the basic principles, main features and advantages of the utility model in the field of exploration, and details some usage examples. Finally, it should be noted that the examples cited above are only used to explain this patent and are not used to limit the utility model. Although we have described the utility model in detail with reference to the examples, those skilled in the art can still modify the examples and solutions described above, or replace the relevant technical parts. Therefore, any modifications and equivalent replacements made within the spirit and principles of the utility model are within the scope of protection of the claims of this utility model patent.

Claims

1. A feeder for a sintering device, characterized in that: The feeder includes a feeder housing, a push rod and a push rod seal; a gas interface is provided on the feeder housing; the push rod passes through the feeder housing, and the push rod seal is provided between the push rod and the feeder housing; a crucible is provided at one end of the push rod extending into the furnace tube in the sintering device, and the other end of the push rod extends out of the feeder housing, and the push rod can move axially relative to the feeder housing; a seal is provided on the end of the feeder housing connected to the furnace body housing of the sintering device.

2. The feeder for a sintering device according to claim 1, wherein: The push rod sealing component includes a push rod elastic sealing ring and a push rod sliding sleeve. The push rod passes through the push rod sliding sleeve. The push rod elastic sealing ring is located in the annular space between the push rod sliding sleeve and the feeder housing.

3. The feeder for a sintering device according to claim 2, wherein: A protrusion is provided on the outer periphery of the push rod sleeve, a limit block is provided on the inner wall of the feeder housing that abuts the protrusion, and the push rod elastic sealing ring abuts the other end of the protrusion; a clamping member is provided at the end of the feeder housing that squeezes the push rod elastic sealing ring; the push rod sleeve gathers toward the center under the squeezing of the push rod elastic sealing ring to achieve sealing with the push rod.

4. The feeder for a sintering device according to claim 3, wherein: The outer wall of the pressing member is provided with an external thread, the inner wall of the end of the feeder shell is provided with an internal thread, the pressing member is screwed to the end of the feeder shell and squeezes the push rod elastic sealing ring.

5. The feeder for a sintering device according to claim 2, wherein: The push rod sliding sleeve is made of engineering plastic.

6. The feeder for a sintering device according to claim 3, wherein: The push rod sealing member further comprises a push rod metal sealing ring, and the push rod metal sealing ring is located between the push rod elastic sealing ring and the pressing member.

7. The feeder for a sintering device according to claim 1, wherein: A shell flange is further provided on the end portion of the feeder shell connected to the furnace shell of the sintering device.

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