Auxiliary positioning device for measuring crystal orientation of wafer by X-ray machine

Abstract

The utility model discloses an auxiliary positioning device for measuring the crystal orientation of a wafer by an X-ray machine, and relates to the technical field of wafer detection, the auxiliary positioning device comprises a rotating seat and a base, one side of the base is hinged on the rotating seat, the top surface of the base is rotatably connected with an angle-adjustable carrying disc, the angle-adjustable carrying disc is used for carrying the wafer, and the angle-adjustable carrying disc is used for supporting the wafer. An arc-shaped abutting block matched with the wafer is arranged on one side of the angle-adjustable carrying disc, and a positioning mechanism is arranged on the other side of the angle-adjustable carrying disc and used for fixing the notch of the wafer. According to the utility model, the notch of the wafer is fixed through the positioning mechanism of the angle-adjustable loading disc, then the angle-adjustable loading disc is rotated according to the angle requirement of the wafer, and the base is turned upwards after the rotation is completed, so that the wafer is attached to the back plate of the X-ray machine, and then the angle value can be measured, the process is simple to operate, and the deflection angle can be accurately positioned; and the measured angle value is more accurate.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer detection, in particular to an auxiliary positioning device for measuring the crystal orientation of a wafer using an X-ray machine. Background Art

[0002] At present, when using an X-ray machine to measure the degree of a chip, the chip needs to be vertically attached to the back plate of the X-ray machine, and the notch of the chip needs to be positioned consistently with the back plate of the X-ray machine as required. During the above process, the notch of the chip needs to be aligned with the corresponding angle. If the notch of the chip faces different angles, the detected angle values will be different. The existing equipment cannot accurately locate the angle of the notch of the chip, and it is necessary to mark the back plate of the X-ray machine, which is easily blocked. At the same time, there are many angle values and the markings are messy.

[0003] Therefore, there is an urgent need for an auxiliary positioning device for measuring the crystal orientation of a wafer using an X-ray machine. Utility Model Content

[0004] In view of this, the present invention provides an auxiliary positioning device for measuring the crystal orientation of a wafer using an X-ray machine to solve the problems raised in the above background technology, and specifically discloses the following contents:

[0005] An auxiliary positioning device for measuring the crystal orientation of a wafer using an X-ray machine comprises a rotating seat and a base, one side of the base being hinged to the rotating seat, the top surface of the base being rotatably connected to an adjustable angle carrier, the adjustable angle carrier being used to carry the wafer, one side of the adjustable angle carrier being provided with an arc-shaped stop block adapted to the wafer, and the other side being provided with a positioning mechanism, the positioning mechanism being used to fix the notch of the wafer.

[0006] Furthermore, the positioning mechanism includes a sliding rod, a fixed block, a spring and a positioning block. The sliding rod is fixedly arranged on the side of the adjustable angle carrier away from the arc-shaped stop block through the fixed block. One end of the positioning block is adapted to the chip notch, and the other end is sleeved on the sliding rod. The positioning block is slidably connected to the sliding rod. A spring is sleeved on the outside of the sliding rod. One end of the spring is fixedly connected to the side wall of the positioning block, and the other end is fixedly connected to the side wall of the fixed block.

[0007] Furthermore, the base is provided with an angle mark that matches the adjustable angle carrier.

[0008] The beneficial effects of the present invention are:

[0009] The utility model fixes the notch of the wafer through the positioning mechanism of the adjustable angle carrier, and then rotates the adjustable angle carrier according to the wafer angle requirement. After completion, the base is flipped upward to make the wafer fit with the back plate of the X-ray machine, and the angle value can be measured. The above process is simple to operate, and the deflection angle can be accurately positioned to make the measured angle value more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0011] Figure 1 The utility model is a structural schematic diagram of an auxiliary positioning device for measuring the crystal orientation of a wafer using an X-ray machine.

[0012] Figure 2 It is a structural diagram of the positioning mechanism in the utility model.

[0013] Among them, in the figure:

[0014] 1. Base; 2. Adjustable angle carrier; 3. Arc-shaped stopper; 4. Positioning mechanism; 41. Fixed block; 42. Slide bar; 43. Spring; 44. Positioning block; 5. Rotating seat; 6. Wafer; 7. X-ray machine back panel. DETAILED DESCRIPTION

[0015] The following is a clear and complete description of the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0016] It should be noted that the terms "first," "second," and the like in the specification and claims of the present application and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the numbers used in this manner are interchangeable where appropriate for the embodiments of the present application described herein. In addition, the terms "including" and "having," as well as any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or apparatus comprising a series of steps or components is not necessarily limited to those steps or components clearly listed, but may include other steps or components that are not clearly listed or inherent to these processes, methods, products, or apparatus.

[0017] In this application, terms such as "upper," "lower," "left," "right," "front," "back," "top," "bottom," "inner," "outer," "center," "vertical," "horizontal," "transverse," and "longitudinal" indicate positions or locations based on the positions or locations shown in the accompanying drawings. These terms are primarily intended to better describe this application and its embodiments and are not intended to limit the devices, elements, or components indicated to having a specific orientation, or to being constructed or operated in a specific orientation.

[0018] Furthermore, some of the above terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0019] Furthermore, the terms "installed," "disposed," "provided with," "connected," "connected," and "socketed" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integral structures; mechanical connections or electrical connections; direct connections, indirect connections through an intermediary, or internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0020] See attached Figure 1-2 The utility model discloses an auxiliary positioning device for measuring the crystal orientation of a wafer using an X-ray machine, which is characterized in that it includes a rotating seat 5 and a base 1. One side of the base 1 is hinged to the rotating seat 5. The top surface of the base 1 is rotatably connected to an adjustable angle carrier 2. The adjustable angle carrier 2 is used to carry a wafer 6. One side of the adjustable angle carrier 2 is provided with an arc-shaped stop block 3 that is adapted to the wafer 6, and the other side is provided with a positioning mechanism 4. The positioning mechanism 4 is used to fix the notch of the wafer 6.

[0021] In this embodiment, the base 1 and the rotating base 5 are connected via a hinge.

[0022] The positioning mechanism 4 includes a slide rod 42, a fixed block 41, a spring 43 and a positioning block 44. The slide rod 42 is fixedly arranged on the side of the adjustable angle carrier 2 away from the arc-shaped stop block 3 through the fixed block 41. One end of the positioning block 44 is adapted to the notch of the chip 6, and the other end is sleeved on the slide rod 42. The positioning block 44 is slidably connected to the slide rod 42. A spring 43 is sleeved on the outside of the slide rod 42. One end of the spring 43 is fixedly connected to the side wall of the positioning block 44, and the other end is fixedly connected to the side wall of the fixed block 41.

[0023] The base 1 is provided with an angle mark that matches the angle-adjustable carrier 2 .

[0024] Working principle:

[0025] First, press the positioning block 44 to compress the spring 43, then place the wafer on the adjustable angle carrier 2, with one side of the wafer in contact with the arc-shaped abutment block 3 and the other side provided with a notch. Align the notch of the wafer with the positioning block 44, release the positioning block 44, and the positioning block 44 clamps the notch of the wafer under the action of the spring 43; rotate the adjustable angle carrier 2 to align the adjustable angle carrier 2 with the angle mark on the base 1 according to the wafer angle requirement, and after completion, flip the base 1 upwards to make the wafer fit with the X-ray machine back plate 7, and then measure the angle value;

[0026] After the measurement is completed, the base 1 is flipped downward and the wafer is removed.

[0027] The above are merely preferred embodiments of the present application and are not intended to limit the present application. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. An auxiliary positioning device for measuring the crystal orientation of a wafer using an X-ray machine, characterized in that: The invention comprises a rotating seat (5) and a base (1), wherein one side of the base (1) is hinged to the rotating seat (5), and the top surface of the base (1) is rotatably connected to an adjustable angle carrier (2), wherein the adjustable angle carrier (2) is used to carry a chip (6), and one side of the adjustable angle carrier (2) is provided with an arc-shaped stop block (3) adapted to the chip (6), and the other side is provided with a positioning mechanism (4), wherein the positioning mechanism (4) is used to fix the notch of the chip (6).

2. The auxiliary positioning device for measuring wafer crystal orientation using an X-ray machine according to claim 1, characterized in that: The positioning mechanism (4) includes a slide bar (42), a fixed block (41), a spring (43) and a positioning block (44). The slide bar (42) is fixedly arranged on the side of the adjustable angle carrier (2) away from the arc-shaped support block (3) through the fixed block (41). One end of the positioning block (44) is adapted to the notch of the chip (6), and the other end is sleeved on the slide bar (42). The positioning block (44) is slidably connected to the slide bar (42). A spring (43) is sleeved on the outside of the slide bar (42). One end of the spring (43) is fixedly connected to the side wall of the positioning block (44), and the other end is fixedly connected to the side wall of the fixed block (41).

3. The auxiliary positioning device for measuring wafer crystal orientation using an X-ray machine according to claim 1, characterized in that: The base (1) is provided with an angle mark that matches the angle-adjustable carrier (2).

Images