Plasma evaporation coating equipment
By introducing an automatic loading mechanism into the plasma evaporation coating equipment, the high cost and low efficiency problems caused by manual addition of target materials are solved, and efficient target material transportation and production capacity are achieved.
Patent Information
- Application Number
- CN202422551579.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-22
- Publication Date
- 2025-08-12
- Estimated Expiration
- 2034-10-22
AI Technical Summary
The addition of target materials in existing plasma evaporation coating equipment relies on manual methods, resulting in high labor costs and low operating efficiency, which affects the production rhythm.
A plasma evaporation coating device including a loading mechanism and a coating mechanism is designed to automatically load the target material through the transport assembly and swing arm to reduce manual intervention.
It realizes automatic loading of target materials, improves operating efficiency, reduces labor costs, and improves production rhythm and production capacity.
Smart Images
Figure CN223214165U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of plasma evaporation coating, in particular to a plasma evaporation coating device. Background Art
[0002] Plasma evaporation deposition (PED) equipment is a common film-forming method that uses a plasma stream to bombard a target, heating the target and evaporating the target onto a substrate. This process is performed in a high vacuum environment, resulting in high-quality, pure, and dense films.
[0003] However, in the process of plasma evaporation coating, the target material is a consumable. At present, the target material of the plasma evaporation coating equipment is discharged by manual addition, which will undoubtedly increase labor costs, reduce operating efficiency and affect production rhythm.
[0004] Therefore, it is urgent to design a plasma evaporation coating equipment to solve the above technical problems. Utility Model Content
[0005] The purpose of the utility model is to provide a plasma evaporation coating device, which can improve operating efficiency, save costs, reduce manual intervention, and increase production capacity.
[0006] To achieve this purpose, the present invention adopts the following technical solutions:
[0007] The utility model provides a plasma evaporation coating device, comprising:
[0008] A loading mechanism, the loading mechanism comprising a first slide rail, a transfer assembly and a silo, the transfer assembly being slidably connected to the first slide rail, the silo being used for placing target materials; the transfer assembly being configured to transfer the target materials in the silo;
[0009] The coating mechanism comprises a loading port and a swing arm, wherein the swing arm is movably connected to the inner wall of the loading port, and a receiving groove is provided on the swing arm, and the receiving groove is configured to receive the target material transported by the transport component.
[0010] As an optional technical solution for plasma evaporation coating equipment, the feeding mechanisms are provided in plurality, the feeding ports are provided in plurality, and each of the feeding mechanisms corresponds to at least one feeding port.
[0011] As an optional technical solution for plasma evaporation coating equipment, the transfer assembly includes a first slider, a second slider, a turntable and a clamp. The first slider is slidably connected to the first slide rail, and the first slider is provided with a second slide rail. The second slider is slidably connected to the second slide rail to enable the second slider to move up and down; the turntable is provided on the second slider, one end of the clamp is connected to the turntable, and the other end of the clamp is used to clamp the target material.
[0012] As an optional technical solution for the plasma evaporation coating equipment, the transfer assembly further includes a clamping cylinder, the connecting end of the clamping cylinder is connected to the turntable, and the driving end of the clamping cylinder is connected to the clamping claw.
[0013] As an optional technical solution for plasma evaporation coating equipment, the hopper has a accommodating chamber, a tray is provided in the accommodating chamber, and the tray is slidably connected to the inner wall of the accommodating chamber; a groove is provided on the tray, and the groove is used to place the target material.
[0014] As an optional technical solution for plasma evaporation coating equipment, the grooves are provided in plurality, and a plurality of the grooves are provided in an array, and each of the grooves is used to place a target material.
[0015] As an optional technical solution of the plasma evaporation coating equipment, a sensor is provided in each of the grooves, and the sensor is configured to detect whether a target material is placed in the groove.
[0016] As an optional technical solution for plasma evaporation coating equipment, the side wall of the silo is provided with a centering cylinder, and the side wall of the tray is provided with a positioning hole. The positioning hole is arranged corresponding to the output end of the centering cylinder, and the output end of the centering cylinder can be inserted into the positioning hole to position the tray.
[0017] As an optional technical solution for plasma evaporation coating equipment, a door panel is provided on the hopper, and the door panel is slidingly connected to the inner wall of the accommodating chamber. The loading mechanism also includes a lifting cylinder, and the lifting cylinder is driven and connected to the door panel so that the door panel opens or closes the accommodating chamber.
[0018] As an optional technical solution of the plasma evaporation coating equipment, the plasma evaporation coating equipment further includes a frame, the coating mechanism is arranged on the frame, and the loading mechanism is located beside the frame.
[0019] The beneficial effects of the present invention include at least:
[0020] The utility model provides a plasma evaporation coating device, comprising a loading mechanism and a coating mechanism. The loading mechanism comprises a first slide rail, a transfer assembly, and a silo. The transfer assembly is slidably connected to the first slide rail, the silo is used to hold target material, and the transfer assembly is configured to transfer the target material in the silo. The coating mechanism comprises a loading port and a swing arm, the swing arm movably connected to the inner wall of the loading port. The swing arm is provided with a receiving groove, which is configured to receive the target material transferred by the transfer assembly.
[0021] When the coating mechanism needs to be loaded, the transfer assembly slides on the first slide rail to the vicinity of the hopper. The transfer assembly then removes the target material from the hopper and transports it to the vicinity of the coating mechanism. At this point, a swing arm extends from the loading port, and the transfer assembly places the target material in the accommodating slot on the swing arm. The swing arm then rotates to transport the target material into the cavity of the coating mechanism. The configuration of the loading and coating mechanisms enables the automatic loading process of the plasma evaporation coating equipment, eliminating the need for manual loading of target materials by staff. This reduces manual intervention, improves work efficiency, increases production cycle time and production capacity, and achieves cost savings. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.
[0023] Figure 1 It is a structural diagram of the coating mechanism and the frame provided by the embodiment of the utility model;
[0024] Figure 2 for Figure 1 A partial enlarged view of point A in the middle;
[0025] Figure 3 It is a structural schematic diagram of two feeding mechanisms provided in an embodiment of the present utility model;
[0026] Figure 4 It is a structural schematic diagram of the transfer assembly provided by an embodiment of the utility model;
[0027] Figure 5 for Figure 4 A partial enlarged view of point B in the middle;
[0028] Figure 6 This is a schematic structural diagram of a silo provided by an embodiment of the present utility model;
[0029] Figure 7 It is a structural schematic diagram of a tray filled with target materials provided by an embodiment of the present utility model.
[0030] Reference numerals
[0031] 10. Target material;
[0032] 100, feeding mechanism; 110, first slide rail; 120, transfer assembly; 1201, first slider; 1202, second slider; 1203, turntable; 1204, gripper; 1205, gripper cylinder; 1206, second slide rail; 130, silo; 1301, tray; 1302, groove; 1303, positioning hole; 1304, door panel;
[0033] 200, coating mechanism; 210, loading port; 220, swing arm; 230, receiving tank;
[0034] 300, alignment cylinder; 400, lifting cylinder; 500, frame. DETAILED DESCRIPTION
[0035] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.
[0036] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.
[0037] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.
[0038] In the description of the present utility model, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the utility model product is usually placed when in use. They are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.
[0039] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed" and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.
[0040] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.
[0041] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.
[0042] This embodiment provides a plasma evaporation coating device, which can improve operating efficiency, save costs, reduce manual intervention, and increase production capacity.
[0043] like Figure 1-Figure 3As shown, the plasma evaporation coating equipment mainly includes a loading mechanism 100 and a coating mechanism 200. Among them, the loading mechanism 100 includes a first slide rail 110, a transfer assembly 120 and a silo 130. The silo 130 is arranged at one end of the first slide rail 110. The transfer assembly 120 is slidably connected to the first slide rail 110. The silo 130 is used to place the target material 10; the transfer assembly 120 is configured to transfer the target material 10 in the silo 130. The coating mechanism 200 has a loading port 210 and a swing arm 220. The swing arm 220 is movably connected to the inner wall of the loading port 210. The swing arm 220 is provided with a receiving groove 230. The receiving groove 230 is configured to receive the target material 10 transferred by the transfer assembly 120.
[0044] Based on the above design, in this embodiment, when the coating mechanism 200 needs to be loaded, the transfer component 120 can slide on the first slide rail 110 to the vicinity of the silo 130, and then the transfer component 120 clamps the target material 10 out of the silo 130, and then the transfer component 120 transports the target material 10 to the vicinity of the coating mechanism 200. At this time, the swing arm 220 extends from the loading port 210, and the transfer component 120 places the target material 10 in the receiving groove 230 on the swing arm 220, and then the swing arm 220 can transport the target material 10 to the cavity of the coating mechanism 200 by rotation.
[0045] As described above, through the setting of the loading mechanism 100 and the coating mechanism 200, the automatic loading process of the plasma evaporation coating equipment is realized, so that the staff does not need to manually add the target material 10, which reduces manual intervention, improves work efficiency, increases production rhythm and production capacity, and achieves the purpose of cost saving.
[0046] The plasma evaporation coating apparatus of this embodiment further includes a controller (not shown). The controller is electrically connected to the transfer assembly 120, the hopper 130, and the swing arm 220. This controller automatically controls the transfer assembly 120 to grasp the target material 10 from the hopper 130 and to place the target material 10 on the swing arm 220. This improves the automation level of the plasma evaporation coating apparatus and reduces manual intervention. It should be noted that the controller of this embodiment can be configured as a commercially available PLC controller, and its operating principle and specific structure will not be described in detail here.
[0047] Optionally, in this embodiment, there are multiple loading mechanisms 100, and multiple loading ports 210, and each loading mechanism 100 corresponds to at least one loading port 210. For example, in this embodiment, there are two loading mechanisms 100, and the coating mechanisms 200 are arranged in two groups, each group of coating mechanisms 200 has four loading ports 210, and each loading mechanism 100 corresponds to the four loading ports 210 on each coating mechanism 200. This can improve the working efficiency of the loading mechanism 100 in adding the target material 10, save time, and increase production capacity.
[0048] Of course, other numbers of loading mechanisms 100 and coating mechanisms 200 can be set according to actual needs, and they will not be described one by one here.
[0049] like Figure 3-Figure 5 As shown, in this embodiment, the transfer assembly 120 includes a first slider 1201, a second slider 1202, a turntable 1203 and a clamp 1204. The first slider 1201 is slidingly connected to the first slide rail 110. The first slider 1201 is provided with a second slide rail 1206. The second slider 1202 is slidingly connected to the second slide rail 1206 to enable the second slider 1202 to move up and down; the turntable 1203 is provided on the second slider 1202, one end of the clamp 1204 is connected to the turntable 1203, and the other end of the clamp 1204 is used to clamp the target material 10.
[0050] The first slider 1201 can slide on the first slide rail 110, thereby enabling the transfer assembly 120 to approach the silo 130 to facilitate the clamping of the target material 10 in the silo 130. The second slider 1202 can be raised and lowered on the second slide rail 1206, thereby changing the height of the second slider 1202 and the clamp 1204, making it easier for the clamp 1204 to lift and clamp the target material 10 out of the silo 130. The setting of the turntable 1203 can improve the rotation flexibility of the clamp 1204, thereby achieving the gripping effect on the target material 10 at different positions in the silo 130. In other words, the transfer assembly 120 can achieve lateral movement, lifting, and rotation, thereby improving work efficiency and flexibility.
[0051] Furthermore, the transport assembly 120 in this embodiment further includes a clamping cylinder 1205, the connection end of the clamping cylinder 1205 being connected to the turntable 1203, and the driving end of the clamping cylinder 1205 being connected to the clamping jaws 1204. The clamping cylinder 1205 can be configured to control the clamping jaws 1204 so that the clamping jaws 1204 can clamp and transport the target material 10.
[0052] like Figure 3 、 Figure 6-Figure 7As shown, in this embodiment, the hopper 130 has a receiving chamber, in which a tray 1301 is disposed. The tray 1301 is slidably connected to the inner wall of the receiving chamber. The tray 1301 is provided with a groove 1302 for accommodating the target 10. The receiving chamber is filled with nitrogen to reduce the risk of the target 10 being oxidized in the air.
[0053] The groove 1302 can improve the stability of the target 10 and prevent the target 10 from falling. The tray 1301 is slidably connected to the inner wall of the accommodating chamber, which makes it easy for operators to take out the empty tray 1301 and replace the target 10.
[0054] Optionally, the grooves 1302 in this embodiment are provided in a plurality, and the plurality of grooves 1302 are arranged in an array, with each groove 1302 being used to accommodate a target 10. This can improve the efficiency of the loading mechanism 100 in adding targets 10 to the coating mechanism 200 and reduce manual intervention by operators. It can also provide a certain gap between two adjacent targets 10, making it easier for the clamping jaws 1204 to grip the targets 10.
[0055] Optionally, the operator can replace the empty tray 1301 every 24 hours and put the tray 1301 filled with target materials 10 into the silo 130, thereby reducing the frequency of manual intervention and improving work efficiency.
[0056] In this embodiment, a sensor (not shown) is provided in each groove 1302. The sensor is configured to detect whether a target 10 is placed in the groove 1302. In other words, the sensor can identify the number of empty positions for target 10 in the groove 1302, thereby counting the number of targets 10 remaining in the tray 1301. When the remaining number of targets 10 is insufficient, a buzzer sounds to remind the operator to replace the tray 1301 with one full of targets 10.
[0057] like Figure 6-Figure 7 As shown, in this embodiment, a straightening cylinder 300 is provided on the side wall of the silo 130, and a positioning hole 1303 is provided on the side wall of the tray 1301. The positioning hole 1303 is provided corresponding to the output end of the straightening cylinder 300. The output end of the straightening cylinder 300 can be inserted into the positioning hole 1303 to position the tray 1301.
[0058] By adjusting the cylinder 300 and the positioning hole 1303 , the tray 1301 can be positioned to ensure the accuracy of the placement of the tray 1301 and improve the accuracy of the clamping jaws 1204 in gripping the target material 10 .
[0059] like Figure 6As shown, in this embodiment, a door panel 1304 is provided on the hopper 130, and the door panel 1304 is slidably connected to the inner wall of the accommodating chamber. The loading mechanism 100 also includes a lifting cylinder 400, which is driven by the lifting cylinder 400 and connected to the door panel 1304 so as to open or close the accommodating chamber. Specifically, when it is necessary to manually place the tray 1301 or the clamp 1204 to pick up the target material 10, the operator can press a button to cause the lifting cylinder 400 to drive the door panel 1304 to descend. At this time, the accommodating chamber is opened to facilitate the replacement of the tray 1301 or the clamp 1204 to clamp the target material 10. When the tray 1301 is replaced or the clamp 1204 is finished picking up the target material 10, the lifting cylinder 400 can drive the door panel 1304 to rise and close the accommodating chamber, reducing the risk of oxidation of the target material 10.
[0060] like Figure 1 As shown, in this embodiment, the plasma evaporation coating apparatus further includes a frame 500, the coating mechanism 200 is disposed on the frame 500, and the loading mechanism 100 is located beside the frame 500. The frame 500 can support the coating mechanism 200, so that the height of the coating mechanism 200 can be as close as possible to that of the loading mechanism 100, or the height difference between the two is within a certain range, thereby improving the convenience of the loading mechanism 100 in transporting the target material 10, improving work efficiency, and saving costs.
[0061] Optionally, the target material 10 in this embodiment can be set as a metal target material, a ceramic target material, an alloy target material or a composite material target material.
[0062] Obviously, the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, and substitutions are possible for those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the scope of the present invention. The scope of the present invention is determined by the scope of the appended claims.
[0063] Note that throughout this specification, references to terms such as "some embodiments" and "other embodiments" indicate that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. Throughout this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Claims
1. Plasma evaporation coating equipment, characterized in that, include: A loading mechanism (100), the loading mechanism (100) comprising a first slide rail (110), a transfer assembly (120) and a silo (130), the transfer assembly (120) being slidably connected to the first slide rail (110), the silo (130) being used for placing a target material (10); the transfer assembly (120) being configured to transfer the target material (10) in the silo (130); A coating mechanism (200) is provided, wherein the coating mechanism (200) has a loading port (210) and a swing arm (220), wherein the swing arm (220) is movably connected to the inner wall of the loading port (210), and a receiving groove (230) is provided on the swing arm (220), and the receiving groove (230) is configured to receive the target material (10) transported by the transport component (120).
2. The plasma evaporation coating equipment according to claim 1, characterized in that: The feeding mechanisms (100) are provided in plurality, the feeding ports (210) are provided in plurality, and each of the feeding mechanisms (100) corresponds to at least one feeding port (210).
3. The plasma evaporation coating equipment according to claim 1, characterized in that: The transfer assembly (120) includes a first slider (1201), a second slider (1202), a turntable (1203) and a clamp (1204), wherein the first slider (1201) is slidably connected to the first slide rail (110), a second slide rail (1206) is provided on the first slider (1201), and the second slider (1202) is slidably connected to the second slide rail (1206) so that the second slider (1202) can move up and down; the turntable (1203) is provided on the second slider (1202), one end of the clamp (1204) is connected to the turntable (1203), and the other end of the clamp (1204) is used to clamp the target material (10).
4. The plasma evaporation coating equipment according to claim 3, characterized in that: The transfer assembly (120) further includes a clamping cylinder (1205), the connection end of the clamping cylinder (1205) is connected to the turntable (1203), and the driving end of the clamping cylinder (1205) is connected to the clamping claw (1204).
5. The plasma evaporation coating equipment according to claim 1, characterized in that: The silo (130) has a accommodating chamber, a tray (1301) is provided in the accommodating chamber, and the tray (1301) is slidably connected to the inner wall of the accommodating chamber; a groove (1302) is provided on the tray (1301), and the groove (1302) is used to place the target material (10).
6. The plasma evaporation coating equipment according to claim 5, characterized in that: The grooves (1302) are provided in a plurality, and the plurality of grooves (1302) are arranged in an array, and each groove (1302) is used to place a target material (10).
7. The plasma evaporation coating equipment according to claim 6, characterized in that: A sensor is provided in each of the grooves (1302), and the sensor is configured to detect whether a target material (10) is placed in the groove (1302).
8. The plasma evaporation coating equipment according to claim 5, characterized in that: The side wall of the silo (130) is provided with a centering cylinder (300), and the side wall of the tray (1301) is provided with a positioning hole (1303). The positioning hole (1303) is arranged corresponding to the output end of the centering cylinder (300). The output end of the centering cylinder (300) can be plugged into the positioning hole (1303) to position the tray (1301).
9. The plasma evaporation coating equipment according to claim 5, characterized in that: The silo (130) is provided with a door panel (1304), and the door panel (1304) is slidably connected to the inner wall of the accommodating chamber. The loading mechanism (100) further includes a lifting cylinder (400), and the lifting cylinder (400) is drivingly connected to the door panel (1304) so that the door panel (1304) opens or closes the accommodating chamber.
10. The plasma evaporation coating equipment according to any one of claims 1 to 9, characterized in that: The plasma evaporation coating device further comprises a frame (500), the coating mechanism (200) is arranged on the frame (500), and the loading mechanism (100) is located beside the frame (500).