Integrated vacuum pump nitrogen control system

Abstract

The utility model relates to an integrated vacuum pump nitrogen control system, the system comprises: a shunting module, the shunting module comprises at least one inlet and a plurality of outlets arranged in a limited space, the inlet is communicated with a nitrogen source through a pipeline, and each outlet is respectively communicated with a plurality of air inlets of a vacuum pump chamber through pipelines one by one; the sensor is used for collecting state information of nitrogen between at least one outlet in the flow dividing module and the corresponding air inlet of the vacuum pump chamber; the valve body is used for adjusting the gas flow from the at least one outlet to the corresponding gas inlet of the vacuum pump chamber; and the main control board is electrically connected with the sensor and is used for adjusting working parameters of at least one valve body according to the state information until the compression ratio of the nitrogen in the vacuum pump chamber reaches a preset compression ratio threshold value. The nitrogen regulation and control precision can be improved, and then the working performance of the vacuum pump can be improved.

Description

Technical Field

[0001] The present application relates to the field of automatic control, and in particular to an integrated vacuum pump nitrogen control system. Background Art

[0002] In modern industry and scientific research, the demand for vacuum pumps is growing. Nitrogen, due to its chemical stability, is widely used in vacuum pump systems. For example, nitrogen can be used to dilute and purge corrosive gases and dust from the pump body, making nitrogen regulation an essential function.

[0003] At present, the existing technology is not precise enough in regulating nitrogen in vacuum pumps, and usually only the entire transmission pipeline can be regulated. When faced with different regulation requirements, it is necessary to lay out the pipeline from the nitrogen source to the vacuum pump chamber according to the corresponding requirements. The flexibility is poor and the cost is high, so it is in urgent need of improvement. Utility Model Content

[0004] The embodiment of the present application provides an integrated vacuum pump nitrogen control system, which improves the nitrogen adjustment accuracy, meets the nitrogen regulation requirements, and thus improves the vacuum pump performance.

[0005] In order to achieve the above objectives, according to a first aspect of the present application, an integrated vacuum pump nitrogen control system is provided, the system comprising:

[0006] A flow diversion module, the flow diversion module comprising at least one inlet and multiple outlets arranged in a limited space, the inlet being connected to a nitrogen source via a pipeline, and each of the outlets being connected one by one to multiple air inlets of a vacuum pump chamber via a pipeline;

[0007] A sensor for collecting nitrogen status information between at least one outlet of the diversion module and the corresponding air inlet of the vacuum pump chamber;

[0008] a valve body for regulating the flow of gas from at least one outlet to a corresponding gas inlet of the vacuum pump chamber;

[0009] A main control board is electrically connected to the sensor and is used to adjust the working parameters of the at least one valve body according to the status information until the compression rate of the nitrogen in the vacuum pump chamber reaches a preset compression rate threshold.

[0010] Optionally, the diversion module further includes a diversion branch:

[0011] The branch path is formed between the inlet and each outlet;

[0012] The sensor is arranged on the diversion branch, and / or the valve body is arranged on the diversion branch.

[0013] Optionally, the sensor includes a first sensor and a second sensor;

[0014] The first sensor is used to detect a flow parameter of nitrogen gas between at least one of the outlets and a corresponding air inlet of the vacuum pump chamber;

[0015] The second sensor is used to detect the pressure parameter of the nitrogen gas between at least one of the outlets and the corresponding gas inlet of the vacuum pump chamber.

[0016] Optionally, the integrated vacuum pump nitrogen control system further includes:

[0017] a first power supply, connected to the first sensor and configured to provide an operating voltage for the first sensor;

[0018] A second power supply is connected to the second sensor and is used to provide an operating voltage for the second sensor.

[0019] Optionally, the operating voltage provided by the first power supply is the same as the operating voltage provided by the second power supply; or

[0020] The operating voltage provided by the first power supply is different from the operating voltage provided by the second power supply.

[0021] Optionally, the integrated vacuum pump nitrogen control system further includes:

[0022] A signal processing module, wherein the input end of the signal processing module is electrically connected to the sensor, and the output end of the signal processing module is electrically connected to the main control board, and is used to convert the current signal corresponding to the status information to obtain a corresponding digital signal, and send the digital signal to the main control board.

[0023] Optionally, the signal processing module includes:

[0024] a signal conversion circuit, wherein an input end of the signal conversion circuit is electrically connected to the sensor and is used to convert a current signal corresponding to the state information into a voltage signal;

[0025] an operational amplifier, wherein an input terminal of the operational amplifier is electrically connected to an output terminal of the signal conversion circuit and is used to amplify the voltage signal;

[0026] An analog-to-digital conversion circuit, wherein the input end of the analog-to-digital conversion circuit is electrically connected to the output end of the operational amplifier, and the output end of the analog-to-digital conversion circuit is electrically connected to the main control board, for converting the amplified voltage signal into a digital signal and outputting the digital signal to the main control board through the output end.

[0027] Optionally, the integrated vacuum pump nitrogen control system further includes:

[0028] A valve body switch, the valve body switch is electrically connected to each valve body, and is used to control the conduction state of each valve body to adjust the working mode of the valve body, wherein the valve body working mode includes a single valve working mode or a multi-valve working mode.

[0029] Optionally, the integrated vacuum pump nitrogen control system further includes:

[0030] A valve body control circuit is connected to the valve body switch and is used to control the working mode of the valve body by controlling the opening and closing of the valve body switch.

[0031] Optionally, the integrated vacuum pump nitrogen control system further includes:

[0032] A display panel is electrically connected to the main control board, and is used to receive the working status corresponding to the status information sent by the main control board and display the working status.

[0033] In the integrated vacuum pump nitrogen control system of the embodiment of the present application, a diversion module, a nitrogen source, a vacuum pump chamber, a sensor, a valve body, and a main control board are included. The inlet of the diversion module is connected to the nitrogen source through a pipeline, and each outlet is connected to multiple air inlets of the vacuum pump chamber through a pipeline. The sensor is used to collect the state information of the nitrogen between the above outlets and the corresponding air inlets of the vacuum pump chamber. In this way, the main control board can adjust the operating parameters of the valve body according to the state information collected by the sensor so that the compression rate of the nitrogen in the vacuum pump chamber can reach the preset compression rate threshold. It can be seen that in this embodiment, a diversion module with an integrated inlet and multiple outlets is used to divert the nitrogen source. By detecting the state of each nitrogen after diversion and regulating the gas flow, precise control of the nitrogen state in the chamber is achieved, effectively improving the compression rate of the nitrogen in the chamber, and thus effectively improving the gas compression rate of the vacuum pump, improving the working performance of the vacuum pump, and having good versatility, it can meet most nitrogen control needs.

[0034] Other features and advantages of the present application will be described in detail in the subsequent detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] To more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present application. Those skilled in the art can also derive other drawings based on these drawings without inventive effort.

[0036] In order to more completely understand the present application and its beneficial effects, the following description will be given in conjunction with the accompanying drawings, wherein the same drawing numbers represent the same parts in the following description.

[0037] Figure 1 1 is a first structural schematic diagram of an integrated vacuum pump nitrogen control system provided in an exemplary embodiment of the present application;

[0038] Figure 2 1 is a second structural schematic diagram of an integrated vacuum pump nitrogen control system provided in an exemplary embodiment of the present application;

[0039] Figure 3-1 2 is a schematic diagram of a current signal input interface circuit for nitrogen gas flow provided in an exemplary embodiment of the present application;

[0040] Figure 3-2 is a schematic diagram of a nitrogen flow acquisition circuit provided in an exemplary embodiment of the present application;

[0041] Figure 4-1 1 is a schematic diagram of a current signal input interface circuit for nitrogen pressure provided in an exemplary embodiment of the present application;

[0042] Figure 4-2 is a schematic diagram of a nitrogen pressure acquisition circuit provided in an exemplary embodiment of the present application;

[0043] Figure 5-1 is a schematic diagram of power input of a valve body control circuit provided in an exemplary embodiment of the present application;

[0044] Figure 5-2 is a schematic diagram of a valve body control circuit provided in an exemplary embodiment of the present application;

[0045] Figure 6-1 1 is a schematic diagram of a CAN communication bus terminal provided in an exemplary embodiment of the present application;

[0046] Figure 6-2 is a schematic diagram of a CAN communication circuit provided in an exemplary embodiment of the present application;

[0047] Description of reference numerals:

[0048] Diversion module 101 , nitrogen source 102 , vacuum pump chamber 103 , sensor 104 , valve body 105 , main control board 106 . DETAILED DESCRIPTION

[0049] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the embodiments described are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0050] The following will provide a clear and complete description of the technical solutions in the embodiments of this application, in conjunction with the accompanying drawings. Obviously, the described embodiments are only some of the embodiments of this application, and not all of them. Based on the embodiments of this application, all other embodiments derived by persons skilled in the art without inventive effort are within the scope of protection of this application. Furthermore, it should be understood that the specific embodiments described herein are intended only to illustrate and explain this application and are not intended to limit this application. In this application, unless otherwise indicated, directional terms such as "upper" and "lower" generally refer to the upper and lower parts of the system in actual use or operation, specifically the directions in the drawings; while "inner" and "outer" refer to the outline of the system. Furthermore, in the description of the embodiments of this application, the terms "first" and "second" are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance. Therefore, features defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise specifically defined.

[0051] In modern industry and scientific research, with the rapid development of the photovoltaic and semiconductor industries, domestic demand for vacuum pumps is growing. Nitrogen, due to its chemical stability, is widely used in vacuum pumps. It not only dilutes and purges corrosive gases and dust from the pump body, but also forms a protective film on the pump's inner wall, effectively reducing wear and corrosion on the chamber and rotor.

[0052] However, existing technologies for nitrogen applications still have several shortcomings, which, to a certain extent, hinder further improvements in vacuum pump system performance and their wider application. For example, existing technologies lack precise control over nitrogen in vacuum pumps, typically only enabling control of the entire transmission pipeline. This requires tailoring the pipeline from the nitrogen source to the vacuum pump chamber to meet varying control requirements, resulting in limited flexibility and high costs, and thus urgent need for improvement.

[0053] In addition, the nitrogen control mode in existing technologies is relatively simple and lacks the ability to adapt to changing process requirements. This limitation makes it difficult to achieve precise nitrogen control when facing complex or special process conditions. In addition, when the system encounters abnormal situations, existing technologies often lack efficient error reporting and handling mechanisms, which not only increases the difficulty of fault diagnosis, but also prolongs the repair time, affecting the continuity and stability of production.

[0054] The above limitations restrict the application of vacuum pump systems in a wider range of fields and further improvement of their performance.

[0055] Therefore, in order to solve the above problems, the present application proposes an integrated vacuum pump nitrogen control system, which aims to achieve the following effects:

[0056] (1) By adding a nitrogen flow rate collection and detection device, the nitrogen flow rate can be monitored, and by adding a nitrogen pressure detection device, the nitrogen pressure can be monitored;

[0057] (2) A corresponding valve body is set at the key position of each air inlet of the vacuum pump chamber, and a corresponding valve body switch control circuit is set, so that the user can choose to open or close the valve body according to needs, adjust the valve body mode, and realize the configuration of single valve mode, double valve mode, and four valve mode, forming a combined purge of the local and overall inside of the vacuum pump, and the flow rate of nitrogen flowing into the vacuum pump chamber can be adjusted by adjusting the inner diameter of the valve core of the valve body, thereby realizing fine adjustment of the nitrogen flow rate;

[0058] (3) Using the CAN communication circuit, the error information detected on the nitrogen board is sent to the main control board through the CAN bus. The main control board is responsible for receiving the error information on the CAN bus. At the same time, the main control board is equipped with a display screen for real-time display of the error information and system status received from the CAN bus.

[0059] Specifically, the integrated vacuum pump nitrogen control system in the embodiment of the present application is as follows: Figure 1 As shown, this may include:

[0060] A flow diversion module, the flow diversion module comprising at least one inlet and multiple outlets arranged in a limited space, the inlet being connected to a nitrogen source via a pipeline, and each of the outlets being connected one by one to multiple air inlets of a vacuum pump chamber via a pipeline;

[0061] In this embodiment, if Figure 1 As shown, the diversion module 101 can include at least one inlet and multiple outlets within a limited space, wherein the inlet can be connected to the nitrogen source 102 through a pipeline, and each outlet can be connected to multiple air inlets of the vacuum pump chamber 103 through a pipeline, so that the nitrogen in the nitrogen source 102 can flow through the diversion module 101 and flow into the vacuum pump chamber 103.

[0062] It can be understood that since nitrogen can be used to dilute and purge corrosive gases and dust in the pump body, and form a protective film on the inner wall of the pump, effectively reducing the wear and corrosion of the cavity and rotor, this embodiment can use nitrogen as a test gas to test the vacuum pump using nitrogen to simulate the actual working conditions of the vacuum pump.

[0063] In this embodiment, the nitrogen source 102 can be a high-pressure nitrogen cylinder, a liquid nitrogen storage tank, or a nitrogen generator. In this embodiment, the diversion module 101, the nitrogen source 102, and the vacuum pump chamber 103 can be connected by pipes using appropriate pipe materials and sizes based on the nitrogen pressure and flow requirements.

[0064] Furthermore, the vacuum pump chamber 103 in this embodiment is a key component for achieving the pump's vacuum function, and can be used to capture and compress gas. During the operation of the vacuum pump, the volume of the chamber can change periodically to draw in and compress gas. In this embodiment, there can be at least one vacuum pump chamber, or multiple vacuum pump chambers. If there are multiple chambers, the gas within the chamber can be transferred from one pressure level to a higher pressure level, effectively improving compression efficiency.

[0065] A sensor for collecting nitrogen status information between at least one outlet of the diversion module and the corresponding air inlet of the vacuum pump chamber;

[0066] In this embodiment, the integrated vacuum pump nitrogen control system may further include a sensor 104, which may be used to collect status information of nitrogen between at least one outlet of the diversion module 101 and the corresponding air inlet of the vacuum pump chamber 103, wherein the nitrogen information includes but is not limited to parameters such as nitrogen flow, pressure, and temperature.

[0067] a valve body for regulating the flow of gas from at least one outlet to a corresponding gas inlet of the vacuum pump chamber;

[0068] In this embodiment, the integrated vacuum pump nitrogen control system may further include a valve body 105, which can be used to adjust the gas flow from at least one outlet in the diversion module 101 to the corresponding air inlet of the vacuum pump chamber 103, so as to adjust the compression rate of the nitrogen flowing into the vacuum pump chamber 103.

[0069] Specifically, for example, Figure 2 As shown, the nitrogen source ( Figure 2 The diversion module (not shown) is connected to the diversion module through a pipeline to supply nitrogen to the diversion module. The diversion module diverts the incoming nitrogen to multiple outlets, and the nitrogen flows to the corresponding air inlet of the vacuum pump chamber through the corresponding nitrogen outlet pipe and enters the vacuum pump chamber, so that the vacuum pump chamber compresses the nitrogen in the chamber.

[0070] The valve body in this embodiment may be an adjustable valve body such as a ball valve, a needle valve, a pressure regulating valve, a check valve, etc., and there is no specific limitation on the type of the valve body.

[0071] A main control board is electrically connected to the sensor and is used to adjust the working parameters of the at least one valve body according to the status information until the compression rate of the nitrogen in the vacuum pump chamber reaches a preset compression rate threshold.

[0072] In this embodiment, the integrated vacuum pump nitrogen control system may further include a main control board 106, which is electrically connected to the sensor 104. At the same time, the main control board 106 is also electrically connected to the valve body 105. In this way, the main control board 106 can adjust the working parameters of at least one valve body 105 according to the status information collected by the sensor 104 to adjust the compression rate of the nitrogen in the vacuum pump chamber 103 until the compression rate of the nitrogen in the vacuum pump chamber 103 reaches a preset compression rate threshold.

[0073] The main control board 106 may be a core electronic component in the control system, which is responsible for controlling and monitoring the operating status of the pump. The main control board 106 integrates multiple functions to ensure that the vacuum pump can operate safely and efficiently.

[0074] On this basis, the valve body 105 can respond to the control operation of the main control board 106 and adjust the working parameters of the valve body 105 so that the compression rate of the nitrogen in the vacuum pump chamber 103 can reach a preset compression rate threshold. The preset compression rate threshold represents the optimal compression rate that the vacuum pump can achieve, and the optimal compression rate can be obtained through advance calibration.

[0075] It is worth noting that in this embodiment, according to the above description, nitrogen can be used as a test gas to test the compression performance of the vacuum pump, and then the working parameters of the valve body can be adjusted according to the compression results of the vacuum pump on nitrogen, such as the valve body's diameter, working voltage, valve type, etc., so as to use the adjusted vacuum pump with the best performance to perform vacuum operation on the sealed container.

[0076] Therefore, in an embodiment of the present application, an integrated vacuum pump nitrogen control system includes a diversion module, a nitrogen source, a vacuum pump chamber, a sensor, a valve body and a main control board, wherein the inlet of the diversion module is connected to the nitrogen source through a pipeline, and each outlet is connected one by one to multiple air inlets of the vacuum pump chamber through a pipeline, and the sensor is used to collect the status information of the nitrogen between the above-mentioned outlets and the corresponding air inlets of the vacuum pump chamber. In this way, the main control board can adjust the working parameters of the valve body according to the status information collected by the sensor, so that the compression rate of the nitrogen in the vacuum pump chamber can reach the preset compression rate threshold. It can be seen that compared with the rough control of nitrogen in the prior art, the present application adopts a diversion module with integrated inlet and multiple outlets to divert the nitrogen source. In this way, the main control board can use the sensor to collect the status information of the diverted nitrogen, and adjust the gas flow of the corresponding air inlet of the vacuum pump chamber by adjusting the working parameters of the valve body, thereby realizing fine adjustment of the nitrogen entering the vacuum pump chamber. The nitrogen regulation is more flexible and can meet the diversified nitrogen supply needs. At the same time, it also effectively improves the compression energy efficiency of the vacuum pump chamber. Moreover, the present application only needs to arrange sensors and valve bodies to achieve the above functions, which effectively saves costs, has good versatility, and can meet most nitrogen regulation needs.

[0077] Optionally, the diversion module further includes a diversion branch:

[0078] The branch path is formed between the inlet and each outlet;

[0079] The sensor is arranged on the diversion branch, and / or the valve body is arranged on the diversion branch.

[0080] In this embodiment, if Figure 1 As shown, the flow diversion module 101 may further include a flow diversion branch, wherein the flow diversion branch may be formed between the inlet and each outlet of the flow diversion module 101 .

[0081] In this way, the sensor 104 can be set in the shunt branch, and / or the valve body 105 can be set in the shunt branch, so that the sensor 104 can detect the status information of the nitrogen between at least one outlet of the shunt module 101 and the corresponding air inlet of the vacuum pump chamber, and the valve body 105 can adjust the gas flow from at least one outlet of the shunt module 101 to the corresponding air inlet of the vacuum pump chamber.

[0082] Optionally, the sensor includes a first sensor and a second sensor;

[0083] The first sensor is used to detect a flow parameter of nitrogen gas between at least one of the outlets and a corresponding air inlet of the vacuum pump chamber;

[0084] The second sensor is used to detect the pressure parameter of the nitrogen gas between at least one of the outlets and the corresponding gas inlet of the vacuum pump chamber.

[0085] In this embodiment, the sensor 104 may include a first sensor and a second sensor, wherein the first sensor may be used to detect the flow parameters of the nitrogen between at least one outlet of the diversion module 101 and the corresponding air inlet of the vacuum pump chamber 103, and the second sensor may be used to detect the pressure parameters of the nitrogen between at least one outlet of the diversion module 101 and the corresponding air inlet of the vacuum pump chamber 103.

[0086] like Figure 3-1 The current signal input interface circuit diagram corresponding to the flow parameters of nitrogen gas and Figure 3-2 The signal processing circuit in the circuit converts the input current signal into a voltage signal, and converts the converted voltage signal into a digital signal and transmits it to the processing in the main control board for data processing. The processor can monitor the input signal in real time and compare and analyze it with the preset threshold. When the input signal is within the threshold range, the system will maintain its operating state. Once it detects that the input signal exceeds the preset threshold, the system can automatically trigger the warning mechanism.

[0087] like Figure 4-1 The current signal input interface circuit diagram corresponding to the pressure parameters of nitrogen and Figure 4-2 The signal processing circuit in the circuit converts the input current signal into a voltage signal, and then converts the converted voltage signal into a digital signal and transmits it to the processor in the main control board for data processing. Similarly, the processor can monitor the input signal in real time and compare and analyze it with the preset threshold. When the input signal is within the threshold range, the system will maintain its operating state. Once it detects that the input signal exceeds the preset threshold, the system can automatically trigger the warning mechanism.

[0088] It is also worth noting that the first sensor and the second sensor can be set in the same shunt branch or in different shunt branches. For example, the first sensor and the second sensor can be set in the same shunt branch at the same time, or the first sensor and the second sensor can be set in different shunt branches. This embodiment does not specifically limit the setting position and number of sensors.

[0089] Optionally, the integrated vacuum pump nitrogen control system further includes:

[0090] a first power supply, connected to the first sensor and configured to provide an operating voltage for the first sensor;

[0091] A second power supply is connected to the second sensor and is used to provide an operating voltage for the second sensor.

[0092] In this embodiment, if Figure 3-1As shown, the first power supply can provide two power supply voltages of 5V and 24V for the first sensor, so that the first sensor can work for devices with different power supply voltages. Similarly, Figure 4-1 As shown, the second power supply can also provide two power supply voltages, 5V and 24V, for the second sensor, so that the second sensor can work for devices with different power supply voltages.

[0093] Optionally, the operating voltage provided by the first power supply is the same as the operating voltage provided by the second power supply; or

[0094] The operating voltage provided by the first power supply is different from the operating voltage provided by the second power supply.

[0095] In this embodiment, the working voltage provided by the first power supply and the working voltage provided by the second power supply can be the same, or the working voltage provided by the first power supply and the working voltage provided by the second power supply can also be different, that is, multiple sensors in this embodiment can operate at different or the same voltages, so that the integrated vacuum pump nitrogen control system in this embodiment can respond to various working conditions more flexibly, has good versatility, and can meet most nitrogen control needs.

[0096] Specifically, for example, in this embodiment, the first power supply and the second power supply both provide an operating voltage of 24V or 5V; or, the first power supply provides an operating voltage of 24V and the second power supply provides an operating voltage of 5V; or, the first power supply provides an operating voltage of 5V and the second power supply provides an operating voltage of 24V.

[0097] It is understandable that in this embodiment, the operating voltage may be not only 24V or 5V, but also other values, so that the integrated vacuum pump nitrogen control system can be widely used. This embodiment does not make specific limitations on this.

[0098] Optionally, the integrated vacuum pump nitrogen control system further includes:

[0099] A signal processing module, wherein the input end of the signal processing module is electrically connected to the sensor, and the output end of the signal processing module is electrically connected to the main control board, and is used to convert the current signal corresponding to the status information to obtain a corresponding digital signal, and send the digital signal to the main control board.

[0100] In this embodiment, after the sensor 104 collects the current signal corresponding to the status information, it can send the current signal to the input end of the signal processing module. The signal processing module can convert the current signal to convert it into a corresponding digital signal and send it to the main control board 106, so that the main control board 106 can process the digital signal to detect whether the nitrogen state in the chamber is abnormal, such as whether the nitrogen flow rate is greater than a preset flow threshold.

[0101] It is understandable that if Figure 3-2 Or the circuit in 4-2 is only part of the signal processing circuit. U1 and U2 are both operational amplifiers. The signals output by the operational amplifiers can also be A / D converted to obtain the corresponding digital signals FLOW-ADC and PRESSURE-ADC. The A / D conversion circuit is not shown in the figure.

[0102] Optionally, the signal processing module includes:

[0103] a signal conversion circuit, wherein an input end of the signal conversion circuit is electrically connected to the sensor and is used to convert a current signal corresponding to the state information into a voltage signal;

[0104] an operational amplifier, wherein an input terminal of the operational amplifier is electrically connected to an output terminal of the signal conversion circuit and is used to amplify the voltage signal;

[0105] An analog-to-digital conversion circuit, wherein the input end of the analog-to-digital conversion circuit is electrically connected to the output end of the operational amplifier, and the output end of the analog-to-digital conversion circuit is electrically connected to the main control board, for converting the amplified voltage signal into a digital signal and outputting the digital signal to the main control board through the output end.

[0106] In this embodiment, the signal processing module may include a signal conversion circuit, an operational amplifier, and an analog-to-digital conversion circuit. According to the above description, the signal processing module is used to convert the current signal collected by the sensor 104 into a digital signal and send it to the main control board 106.

[0107] Specifically, for example, the sensor 104 sends the current signal corresponding to the collected status information to the input end of the signal conversion circuit through its output end. The signal conversion circuit can convert the current signal into a voltage signal and send it to the operational amplifier through the output end of the signal conversion circuit. The operational amplifier can amplify the voltage signal and send the amplified voltage signal to the analog-to-digital conversion circuit (A\D circuit) through the output end of the operational amplifier. The analog-to-digital conversion circuit can convert the voltage signal into a corresponding digital signal and send the digital signal to the main control board 106 through the output end of the analog-to-digital conversion phone. The main control board 106 can process the digital signal to detect whether the nitrogen state in the chamber is abnormal. No further details will be given here.

[0108] Optionally, the integrated vacuum pump nitrogen control system further includes:

[0109] A valve body switch, the valve body switch is electrically connected to each valve body, and is used to control the conduction state of each valve body to adjust the working mode of the valve body, wherein the valve body working mode includes a single valve working mode or a multi-valve working mode.

[0110] In this embodiment, the integrated vacuum pump nitrogen control system may further include a valve body switch, which is electrically connected to each valve body 105 and can adjust the working mode of the valve body 105 by controlling the conduction state of each valve body 105.

[0111] It should be noted that in this embodiment, the user can select the valve body 105 to be opened through the integrated vacuum pump nitrogen control system, so that the main control board 106 can control the conduction of the corresponding valve body 105 to achieve control of the number of valve bodies 105 opened, such as single-valve working mode (only one valve body 105 is opened) or multi-valve working mode (multiple valve bodies 105 selected by the user are opened). For example, if the diversion module 101 has four diversion branches, then a valve body 105 and a corresponding valve body switch can be set for each diversion branch. By controlling the power supply to the valve body 105 by the valve body switch, the opening or closing of the valve body 105 is controlled to achieve a single-valve mode, a dual-valve mode, and a four-valve mode.

[0112] In this embodiment, in addition to controlling the number of valve bodies 105 opened, the nitrogen flow rate can also be precisely adjusted by controlling the working parameters of the opened valve body 105, such as the inner diameter of the valve core of the valve body 105.

[0113] Optionally, the integrated vacuum pump nitrogen control system further includes:

[0114] A valve body control circuit is connected to the valve body switch and is used to control the working mode of the valve body by controlling the opening and closing of the valve body switch.

[0115] In this embodiment, the integrated vacuum pump nitrogen control system may further include a valve body control circuit, which may be connected to the valve body switch to control the working mode of the valve body 105 by controlling the on and off of the valve body switch. For example, in this embodiment, a valve body 105 and a corresponding valve body switch and a valve body control circuit may be provided for each diversion branch. The valve body control circuit controls the on and off of the valve body switch to control the opening or closing of the valve body 105.

[0116] like Figure 5-1 3.0 pitch double row curved needle (2x1) and Figure 5-2In the valve control circuit, the main control board sends a valve opening (closing) signal to the nitrogen board through CAN communication. The CPU pin of the nitrogen board is connected to HARSH_Y (HARSH_Y is the valve control input signal). When HARSH_Y is high, the 4Q1 field effect tube is turned on, the 4D1 indicator light is on, and HARSH_OUT (valve control output signal) outputs a high-level signal to control the valve body to open; when HARSH_Y is low, the 4Q1 field effect tube is not turned on, the 4D1 indicator light is off, and HARSH_OUT outputs a low-level signal to control the valve body to close.

[0117] Optionally, the integrated vacuum pump nitrogen control system further includes:

[0118] A display panel is electrically connected to the main control board, and is used to receive the working status corresponding to the status information sent by the main control board and display the working status.

[0119] In this embodiment, the integrated vacuum pump nitrogen control system may further include a display panel, which may be electrically connected to the main control board 106, so that after the main control board 106 receives the status information sent by the sensor 104, if it is detected according to the status information that the flow rate or pressure of nitrogen exceeds a preset threshold, an alarm message may be generated and sent to the display panel. The display panel may display the alarm message to remind the tester to deal with the abnormality in a timely manner.

[0120] Specifically, for example, Figure 6-1 4.2MM pitch double row curved needles and Figure 6-2 The CAN communication circuit in the figure is electrically connected to the main control board through a 4.2MM pitch double-row bent pin (2x1). The error information (BUS-CAN-TX, BUS-CAN-TX) detected by the nitrogen board is converted into CAN-L and CAN-H through the CAN communication circuit and sent to the main control board (the main control board is not shown in the figure). The main control board is responsible for receiving error information on the CAN communication circuit. At the same time, the main control board is equipped with a display panel for displaying the error information and system status received from the CAN bus in real time. Among them, the circuit boards in the integrated vacuum pump nitrogen control system in this embodiment can be defined as nitrogen boards, for example, the circuit board used to collect nitrogen status information in this embodiment.

[0121] Therefore, in the embodiment of the present application, the nitrogen flow and pressure are monitored by adding a sensor to the shunt branch, and an independent valve body and a valve body control circuit are added to the shunt branch. The valve body can be opened or closed as needed to realize the configuration of single-valve working mode, dual-valve working mode or four-valve working mode, and the nitrogen module inlet flow is adjusted by adjusting the inner diameter of the nitrogen module valve core to achieve fine-tuning of the nitrogen flow rate; using the CAN communication circuit, the error information detected on the nitrogen board is sent to the main control board via the CAN bus, and the main control board is responsible for receiving the error information on the CAN bus. At the same time, the main control board is equipped with a display panel for displaying the error information and system status received from the CAN bus in real time, so that the operator can respond quickly and take timely measures.

[0122] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0123] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0124] The embodiments, implementation methods and related technical features of the present application can be combined and replaced with each other without conflict.

[0125] The above are merely preferred embodiments of the present application and do not constitute any form of limitation to the present application. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present application without departing from the content of the technical solution of the present application are still within the scope of the technical solution of the present application.

Claims

1. An integrated vacuum pump nitrogen control system, characterized in that: The system comprises: A flow diversion module, the flow diversion module comprising at least one inlet and a plurality of outlets arranged in a limited space, the inlet being connected to a nitrogen source via a pipeline, and each of the outlets being connected one by one to a plurality of air inlets of a vacuum pump chamber via a pipeline; A sensor for collecting nitrogen status information between at least one outlet of the diversion module and the corresponding air inlet of the vacuum pump chamber; a valve body for regulating the flow of gas from at least one outlet to a corresponding gas inlet of the vacuum pump chamber; A main control board is electrically connected to the sensor and is used to adjust the working parameters of the at least one valve body according to the status information until the compression rate of the nitrogen in the vacuum pump chamber reaches a preset compression rate threshold.

2. The integrated vacuum pump nitrogen control system according to claim 1, characterized in that: The shunt module further includes a shunt branch: The branch path is formed between the inlet and each outlet; The sensor is arranged on the diversion branch, and / or the valve body is arranged on the diversion branch.

3. The integrated vacuum pump nitrogen control system according to claim 1, characterized in that: The sensor comprises a first sensor and a second sensor; The first sensor is used to detect a flow parameter of nitrogen gas between at least one of the outlets and a corresponding air inlet of the vacuum pump chamber; The second sensor is used to detect the pressure parameter of the nitrogen gas between at least one of the outlets and the corresponding gas inlet of the vacuum pump chamber.

4. The integrated vacuum pump nitrogen control system according to claim 3, characterized in that: The integrated vacuum pump nitrogen control system further includes: a first power supply, connected to the first sensor and configured to provide an operating voltage for the first sensor; A second power supply is connected to the second sensor and is used to provide an operating voltage for the second sensor.

5. The integrated vacuum pump nitrogen control system according to claim 4, characterized in that: The operating voltage provided by the first power supply is the same as the operating voltage provided by the second power supply; or The operating voltage provided by the first power supply is different from the operating voltage provided by the second power supply.

6. The integrated vacuum pump nitrogen control system according to claim 1, characterized in that: The integrated vacuum pump nitrogen control system further includes: A signal processing module, wherein the input end of the signal processing module is electrically connected to the sensor, and the output end of the signal processing module is electrically connected to the main control board, and is used to convert the current signal corresponding to the status information to obtain a corresponding digital signal, and send the digital signal to the main control board.

7. The integrated vacuum pump nitrogen control system according to claim 6, characterized in that: The signal processing module includes: a signal conversion circuit, wherein an input end of the signal conversion circuit is electrically connected to the sensor and is used to convert a current signal corresponding to the state information into a voltage signal; an operational amplifier, wherein an input terminal of the operational amplifier is electrically connected to an output terminal of the signal conversion circuit and is used to amplify the voltage signal; An analog-to-digital conversion circuit, wherein the input end of the analog-to-digital conversion circuit is electrically connected to the output end of the operational amplifier, and the output end of the analog-to-digital conversion circuit is electrically connected to the main control board, for converting the amplified voltage signal into a digital signal and outputting the digital signal to the main control board through the output end.

8. The integrated vacuum pump nitrogen control system according to claim 1, characterized in that: The integrated vacuum pump nitrogen control system further includes: A valve body switch, the valve body switch is electrically connected to each valve body, and is used to control the conduction state of each valve body to adjust the working mode of the valve body, wherein the valve body working mode includes a single valve working mode or a multi-valve working mode.

9. The integrated vacuum pump nitrogen control system according to claim 8, characterized in that: The integrated vacuum pump nitrogen control system further includes: A valve body control circuit is connected to the valve body switch and is used to control the working mode of the valve body by controlling the opening and closing of the valve body switch.

10. The integrated vacuum pump nitrogen control system according to claim 1, characterized in that: The integrated vacuum pump nitrogen control system further includes: A display panel is electrically connected to the main control board, and is used to receive the working status corresponding to the status information sent by the main control board and display the working status.

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