Dichlorosilane detection equipment

Abstract

The utility model discloses dichlorosilane detection equipment. The dichlorosilane detection equipment comprises a headspace sample injector main body and a sealing mechanism, a sampling tube is connected to the headspace sampler main body, and a sampling needle is mounted on the sampling tube; the sealing mechanism is mounted on the sampling tube and arranged on the outer side of the sampling needle, the sealing mechanism comprises a mounting plate, a telescopic part is connected to the mounting plate, a contact part is connected to the telescopic part, a pair of connecting plates are symmetrically connected to the mounting plate, telescopic pieces are mounted on the connecting plates, the free ends of the telescopic pieces are connected with the contact part, and the diameter of the mounting plate is larger than that of the sampling tube; the sampling needle can be wrapped by utilizing the mutual cooperation of the mounting plate and the telescopic part; and the telescopic part is made of an elastic material, so that the whole sealing mechanism can extend. According to the utility model, dichlorosilane can be sampled in a relatively vacuum environment, so that the dichlorosilane sampled by the headspace sampler is not easy to be mixed with air, the detection error is reduced, and the detection effect of the dichlorosilane is ensured.

Description

Technical Field

[0001] The utility model belongs to the technical field of gas detection, and in particular relates to dichlorosilane detection equipment. Background Art

[0002] Dichlorosilane is a colorless, highly toxic, corrosive, and flammable liquefied gas with a strong, pungent odor that can cause asphyxiation. Dichlorosilane is also a high-value raw material for the electronics industry. Its advantages include a low deposition temperature, easy opening of the silicon-chlorine bond in its molecular structure, ease of control, stable growth rate, and high crystal quality. It is used in the growth of epitaxial silicon and polycrystalline silicon, as well as in high-performance solar photovoltaic cells.

[0003] Since trace impurities in dichlorosilane can have adverse effects on semiconductor devices, the detection of trace impurities in dichlorosilane is particularly important. Existing detection of dichlorosilane is mainly carried out using a headspace sampler, which is a convenient and fast sample pretreatment method in gas chromatography. Its basic principle is to place the sample to be tested in a closed container, heat it to evaporate the volatile components from the sample matrix, and achieve equilibrium in the gas-liquid (or gas-solid) phase. The top gas is then directly extracted for chromatographic analysis to test the composition and content of the volatile components in the sample. This method can eliminate the lengthy and tedious sample pretreatment process, avoid the interference of organic solvents on the analysis, and reduce the contamination of the chromatographic column and injection port.

[0004] However, due to the lack of a sealing mechanism in the sampling tube of the existing head space sampler, air is easily mixed in when the head space sampler extracts dichlorosilane in the storage tank, which easily causes detection errors of dichlorosilane and cannot meet the detection requirements of dichlorosilane.

[0005] Therefore, in view of the above technical problems, it is necessary to provide a dichlorosilane detection device.

[0006] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as an admission or any form of suggestion that the information constitutes the prior art already known to those skilled in the art. Utility Model Content

[0007] The utility model aims to provide a dichlorosilane detection device, which can solve the problem that air is easily mixed into a head space sampler when sampling dichlorosilane.

[0008] In order to achieve the above-mentioned purpose, the technical solution provided by a specific embodiment of the present invention is as follows:

[0009] A dichlorosilane detection device comprises: a head space sampler body and a sealing mechanism;

[0010] The head space sampler body is connected to a sampling tube, and a sampling needle is installed on the sampling tube;

[0011] The sealing mechanism is installed on the sampling tube and is arranged on the outside of the sampling needle. The sealing mechanism includes a mounting plate, a telescopic part is connected to the mounting plate, a contact part is connected to the telescopic part, a pair of connecting plates are symmetrically connected to the mounting plate, a telescopic part is installed on the connecting plate, and the free end of the telescopic part is connected to the contact part.

[0012] In one or more embodiments of the present invention, the diameter of the mounting plate is larger than the diameter of the sampling tube, and the sampling needle can be wrapped by the cooperation between the mounting plate and the telescopic portion;

[0013] The telescopic portion is made of elastic material, so that the sealing mechanism as a whole can be extended to wrap the sampling needle.

[0014] In one or more embodiments of the present invention, a sealing ring is embedded in a surface of the contact portion away from the telescopic portion. When the sampling needle is sampling dichlorosilane, the sealing ring can contact the side wall of the dichlorosilane storage tank, thereby allowing the sampling needle to be placed in a relatively closed space, preventing outside air from mixing into the dichlorosilane.

[0015] The sealing ring is made of rubber material, which can increase the contact effect between the contact part and the side wall of the dichlorosilane storage tank.

[0016] In one or more embodiments of the present invention, the maximum extension length of the telescopic member is greater than the maximum extension length of the telescopic portion, so that the telescopic portion can be fully extended.

[0017] In one or more embodiments of the present invention, a vacuum pump is installed on the mounting plate, and the suction end of the vacuum pump is arranged in the telescopic part. When the contact part contacts the side wall of the dichlorosilane storage tank, the vacuum pump is operated. The vacuum pump is used to vacuum the inside of the telescopic part, so that air is not easily mixed into the dichlorosilane sampled by the sampling needle.

[0018] In one or more embodiments of the present invention, the air pump is connected to an air delivery pipe, and the gas extracted by the air pump is delivered through the air delivery pipe;

[0019] One end of the gas pipe is connected to a purification box, which is mounted on the mounting plate, so that the gas in the gas pipe can enter the purification box.

[0020] In one or more embodiments of the present invention, a pair of filters are installed in the purification box for placing activated carbon;

[0021] Activated carbon is provided between a pair of the filter screens. When the sampling needle finishes sampling, the vacuum pump can also be operated to continue to extract the gas in the telescopic part, so that dichlorosilane is not easily left inside the telescopic part. The extracted dichlorosilane is transported to the purification box and adsorbed by activated carbon.

[0022] In one or more embodiments of the present invention, the side wall of the purification box is provided with an air outlet, and the air outlet is provided on a side of the filter away from the gas pipe, for discharging the gas in the purification box.

[0023] In one or more embodiments of the present invention, a cleaning port is provided on the side wall of the purification box, and a cover door is provided on the outside of the cleaning port. The cover door is hinged to the purification box, and the activated carbon in the purification box can be replaced by opening the cover door.

[0024] In one or more embodiments of the present invention, an observation panel is provided on the cover door. The observation panel is made of glass and is used to observe the activated carbon in the purification box so as to replace it in time.

[0025] Compared with the prior art, the dichlorosilane detection device of the present invention can sample dichlorosilane in a relatively vacuum environment, thereby making it difficult for air to mix into the dichlorosilane sampled by the headspace sampler, thereby reducing detection errors and ensuring the detection effect of dichlorosilane. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0027] Figure 1 This is a three-dimensional diagram of a dichlorosilane detection device in one embodiment of the present utility model;

[0028] Figure 2 for Figure 1 Schematic diagram of the structure at A in the middle;

[0029] Figure 3 This is a partial structural diagram of a dichlorosilane detection device in one embodiment of the present utility model;

[0030] Figure 4 for Figure 3 Schematic diagram of the structure at point B in the middle.

[0031] Description of main reference numerals:

[0032] 1-head space sampler body, 101-sampling tube, 102-sampling needle, 2-sealing mechanism, 201-mounting plate, 202-telescopic part, 203-contact part, 204-connecting plate, 205-telescopic part, 206-vacuum pump, 207-gas pipe, 208-purification box, 209-filter screen, 210-cover door, 211-sealing ring. DETAILED DESCRIPTION

[0033] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the following will be combined with the drawings of the embodiments of the present invention to clearly and completely describe the technical solutions of the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0034] like Figures 1 to 4 As shown, a dichlorosilane detection device in an embodiment of the present invention includes a head space sampler body 1 and a sealing mechanism 2.

[0035] The head space sampler body 1 is connected to a sampling tube 101 , on which a sampling needle 102 is installed. By cooperating with the sampling tube 101 and the sampling needle 102 , dichlorosilane can be sampled for detection using the head space sampler body 1 .

[0036] Preferably, the head space sampler body 1, sampling tube 101 and sampling needle 102 used in this application are commercially available products and can be purchased and used directly.

[0037] like Figures 1 to 4 As shown, the sealing mechanism 2 is installed on the sampling tube 101 and is arranged on the outside of the sampling needle 102. Through the setting of the sealing mechanism 2, the sampling needle 102 can sample dichlorosilane in a relatively sealed state, effectively reducing the mixing of external air, thereby reducing the detection error of dichlorosilane, and thus ensuring the detection effect of dichlorosilane.

[0038] The sealing mechanism 2 includes a mounting plate 201 for mounting a connecting plate 204 and an air pump 206. The mounting plate 201 is connected to a telescopic portion 202, which can be telescoped to wrap the sampling needle 102.

[0039] Preferably, the diameter of the mounting plate 201 is larger than the diameter of the sampling tube 101 , and the sampling needle 102 can be wrapped by the cooperation between the mounting plate 201 and the telescopic portion 202 .

[0040] In addition, the telescopic portion 202 is made of elastic material, so that the sealing mechanism 2 as a whole can be extended to wrap the sampling needle 102 .

[0041] Specifically, the telescopic portion 202 is connected to a contact portion 203, which can contact the side wall of the dichlorosilane storage tank, and then the sampling needle 102 can be wrapped inside the telescopic portion 202, so that the sampling needle 102 is in a relatively closed space to reduce the influence of external air.

[0042] like Figures 1 to 4 As shown, a pair of connecting plates 204 are symmetrically connected to the mounting plate 201, and a telescopic member 205 is installed on the connecting plate 204. The free end of the telescopic member 205 is connected to the contact portion 203. By the expansion and contraction of the pair of telescopic members 205, the expansion and contraction of the telescopic portion 202 can be controlled.

[0043] Preferably, the maximum extension length of the telescopic member 205 is greater than the maximum extension length of the telescopic portion 202, so that the telescopic portion 202 can be fully extended.

[0044] An air pump 206 is mounted on the mounting plate 201, and the air suction end of the air pump 206 is located within the telescopic portion 202. When the contact portion 203 contacts the sidewall of the dichlorosilane storage tank, the air pump 206 is activated to evacuate the telescopic portion 202, thereby preventing air from entering the dichlorosilane sampled by the sampling needle 102.

[0045] In addition, the air pump 206 is connected to an air pipe 207, and the gas extracted by the air pump 206 is transported through the air pipe 207. One end of the air pipe 207 is connected to a purification box 208, which is installed on the mounting plate 201. The gas in the air pipe 207 can enter the purification box 208.

[0046] Specifically, a pair of filters 209 are installed within the purification box 208 to house activated carbon. Activated carbon is placed between the filters 209. After the sampling needle 102 completes sampling, the vacuum pump 206 can continue to operate, extracting gas from the telescopic section 202 to reduce the amount of dichlorosilane remaining in the telescopic section 202. The extracted dichlorosilane is then transported to the purification box 208 for adsorption by the activated carbon.

[0047] In addition, a side wall of the purification box 208 is provided with an air outlet. The air outlet is located on a side of the filter 209 away from the gas pipe 207 for discharging the gas in the purification box 208 .

[0048] like Figures 1 to 4 As shown, a cleaning port is provided on the side wall of the purification box 208, and a cover door 210 is covered on the outside of the cleaning port. The cover door 210 is hingedly connected to the purification box 208. The activated carbon in the purification box 208 can be replaced by opening the cover door 210.

[0049] The cover door 210 is provided with an observation panel made of glass for observing the activated carbon in the purification box 208 so as to replace it in time.

[0050] In addition, a sealing ring 211 is embedded on the side of the contact portion 203 away from the telescopic portion 202. When the sampling needle 102 samples dichlorosilane, the sealing ring 211 can contact the side wall of the dichlorosilane storage tank, thereby allowing the sampling needle 102 to be placed in a relatively closed space, making it difficult for outside air to mix into the dichlorosilane.

[0051] Preferably, the sealing ring 211 is made of rubber, which can increase the contact effect between the contact portion 203 and the side wall of the dichlorosilane storage tank.

[0052] During specific use, when it is necessary to sample dichlorosilane, the pair of telescopic parts 205 are controlled to extend, and the telescopic parts 205 drive the contact part 203 to move, so that the telescopic part 202 extends until the contact part 203 contacts the side wall of the dichlorosilane storage tank. At this time, the sampling needle 102 is wrapped in the telescopic part 202, so that the sampling needle 102 is in a relatively sealed environment.

[0053] The vacuum pump 206 is operated to extract the air inside the telescopic portion 202, placing the telescopic portion 202 in a relatively vacuum state. The vacuum pump 206 is stopped, and the dichlorosilane is sampled using the sampling needle 102 to prevent air from mixing into the dichlorosilane, thereby reducing the detection error of the dichlorosilane and ensuring the detection result of the dichlorosilane.

[0054] After sampling of dichlorosilane is complete, vacuum pump 206 is operated again to extract dichlorosilane from telescopic section 202, preventing any residual dichlorosilane from remaining within the telescopic section. Furthermore, contact section 203 is positioned away from the sidewalls of the dichlorosilane, preventing the dichlorosilane from dispersing into the air and potentially harming personnel. The extracted dichlorosilane is then transported via air pipe 207 to purification chamber 208, where it is adsorbed by activated carbon.

[0055] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be encompassed within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0056] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A dichlorosilane detection device, characterized in that: include: A head space sampler body, wherein the head space sampler body is connected to a sampling tube, and a sampling needle is installed on the sampling tube; A sealing mechanism is installed on the sampling tube and is provided on the outside of the sampling needle. The sealing mechanism includes a mounting plate, a telescopic portion is connected to the mounting plate, a contact portion is connected to the telescopic portion, a pair of connecting plates are symmetrically connected to the mounting plate, a telescopic member is installed on the connecting plate, and the free end of the telescopic member is connected to the contact portion.

2. A dichlorosilane detection device according to claim 1, characterized in that, The diameter of the mounting plate is larger than the diameter of the sampling tube, and the telescopic part is made of elastic material.

3. A dichlorosilane detection device according to claim 1, characterized in that, A sealing ring is embedded in a side of the contact portion away from the telescopic portion, and the sealing ring is made of rubber.

4. A dichlorosilane detection device according to claim 1, characterized in that, The maximum stretching length of the telescopic member is greater than the maximum stretching length of the telescopic portion.

5. The dichlorosilane detection device according to claim 1, characterized in that: An air pump is installed on the mounting plate, and an air suction end of the air pump is arranged in the telescopic part.

6. The dichlorosilane detection device according to claim 5, characterized in that: The air pump is connected to an air supply pipe, one end of the air supply pipe is connected to a purification box, and the purification box is installed on the mounting plate.

7. The dichlorosilane detection device according to claim 6, characterized in that: A pair of filter screens are installed in the purification box, and activated carbon is arranged between the pair of filter screens.

8. The dichlorosilane detection device according to claim 7, characterized in that: The side wall of the purification box is provided with an air outlet, and the air outlet is arranged on a side of the filter away from the air pipe.

9. The dichlorosilane detection device according to claim 7, characterized in that: A cleaning port is provided on the side wall of the purification box. The outer side of the cleaning port is covered with a cover door, and the cover door is hingedly connected to the purification box.

10. The dichlorosilane detection device according to claim 9, characterized in that: An observation panel is provided on the cover door, and the observation panel is made of glass.

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