Heat exchange device and coating production equipment

Abstract

The utility model discloses a heat exchange device and coating production equipment, and the heat exchange device comprises a vacuum box which is provided with a vacuum cavity, a feed port and a discharge port; the translation mechanism is positioned in the vacuum cavity and is used for conveying a product from the feeding hole to the discharging hole; and the heat exchange piece is located in the vacuum cavity and used for exchanging heat with a product on the translation mechanism, a heat exchange channel is arranged in the heat exchange piece, the heat exchange channel communicates with the outside of the vacuum box, and a heat exchange medium is contained in the heat exchange channel. According to the heat exchange device and the coating production equipment, heat exchange can be accelerated, and time is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating equipment, in particular to a heat exchange device and film coating production equipment. Background Art

[0002] Perovskite stacking technology is a method used to manufacture perovskite solar cells. It involves depositing perovskite materials on different material layers to form high-efficiency solar cells that can absorb a wider solar spectrum. This technology can improve the photoelectric conversion efficiency of the cell because it can utilize photons of different energies.

[0003] For film layers of different materials, the ambient temperature required for the coating process is different.

[0004] In order not to affect the film effect, the carrier board is generally transported from a vacuum environment to an atmospheric environment, where it is cooled.

[0005] However, the above cooling methods consume a lot of time and affect production efficiency. Utility Model Content

[0006] The present invention aims to solve at least one of the technical problems in the prior art. To this end, the present invention provides a heat exchange device that can speed up heat exchange and save time.

[0007] The utility model also provides a film coating production equipment with the above heat exchange device.

[0008] A heat exchange device according to a first embodiment of the present invention includes:

[0009] A vacuum box having a vacuum chamber, a feed port and a discharge port;

[0010] A translation mechanism, located in the vacuum chamber, for conveying the product from the feed port to the discharge port;

[0011] A heat exchange component is located in the vacuum chamber and is used to exchange heat with the product on the translation mechanism. A heat exchange channel is provided in the heat exchange component, and the heat exchange channel is connected to the outside of the vacuum box. The heat exchange channel contains a heat exchange medium.

[0012] The heat exchange device according to the embodiment of the present invention has at least the following beneficial effects:

[0013] The utility model provides a vacuum box, so that when heat exchange is performed, the product is still in a vacuum environment, the external environment of the product is not changed, the stress on the product is less changed, and the product itself is less affected.

[0014] The utility model is provided with a translation mechanism, so that products can be transported horizontally, and is particularly convenient for horizontally transporting flat products such as carriers or substrates.

[0015] The utility model provides a heat exchange element, so when the product enters the vacuum chamber, the heat exchange element is close to the product, thereby increasing the temperature difference between the product and the surroundings and improving the heat exchange effect of the product.

[0016] The utility model provides a heat exchange channel so that a heat exchange medium is present in the heat exchange channel. Therefore, under the flow of the heat exchange medium, the heat exchange channel has a continuous heat exchange capability, which is particularly convenient for cooling products.

[0017] The utility model provides a heat exchange channel, which can not only enable the heat exchange element to maintain its heat exchange capacity, but also avoid the heat exchange element from continuously entering and exiting the vacuum chamber. Little modification is made to the vacuum box, and there is no need to provide a cooling chamber or other facilities outside the vacuum box to cool the heat exchange element, thereby optimizing the layout.

[0018] The utility model also provides a film coating production equipment, which has the above beneficial effects.

[0019] According to the heat exchange device of the first aspect embodiment of the present utility model, the number of the translation mechanisms is at least two, and the translation mechanisms are arranged up and down. The heat exchange device also includes a lifting mechanism, and the lifting mechanism is used to drive the translation mechanism and the heat exchange element to rise and fall synchronously so that the translation mechanism is aligned with the feed port, and / or so that the translation mechanism is aligned with the discharge port.

[0020] What is beneficial is that: the utility model increases the number of translation mechanisms and arranges the translation mechanisms up and down, and at the same time, provides a lifting mechanism. Therefore, under the drive of the lifting mechanism, the translation mechanism rises or falls, and different translation mechanisms can be aligned with the feed port, which facilitates the movement of products to different translation mechanisms, and different translation mechanisms can be aligned with the discharge port, which facilitates the removal of products from the translation mechanism. Furthermore, the number of products in the heat exchange device is increased, which can not only extend the heat exchange time of a single product, but also ensure that the heat exchange device can produce quickly without affecting the production rhythm.

[0021] At the same time, the utility model arranges the translation mechanism up and down by providing a lifting mechanism, thereby reducing the space occupied by the heat exchange device in the horizontal direction, reducing the occupation of the production site, and facilitating layout and implementation.

[0022] At the same time, the translation mechanism and the heat exchange element rise and fall synchronously, without changing the distance between the product and the heat exchange element and affecting the heat exchange effect.

[0023] According to the heat exchange device of the first embodiment of the present utility model, the lifting mechanism includes a lifting column passing through the vacuum box and a power part that drives the lifting column to rise and fall. The power part is located outside the vacuum box, and the lifting column is located at one end of the vacuum chamber to set the translation mechanism.

[0024] What is beneficial is that: the utility model provides a lifting column and configures the power that drives the lifting column to rise and fall outside the vacuum box. Therefore, there is no need to reserve space for arranging power parts in the vacuum box. Furthermore, more space can be reserved for arranging the translation mechanism, so that the heat exchange device can exchange heat for more products at the same time, thereby improving the production capacity of the heat exchange device.

[0025] According to the heat exchange device of the first embodiment of the present invention, the lifting column is provided with a feed channel and a discharge channel connected to the heat exchange channel, and the heat exchange channel is connected to the heat exchange medium supply equipment outside the vacuum box through the feed channel and the discharge channel.

[0026] Advantageously, the utility model provides a feeding channel and a discharging channel on the lifting column, thereby eliminating the need for additional holes to be opened on the vacuum box, thereby reducing the modification of the vacuum box.

[0027] At the same time, the utility model can also reduce exposed pipelines, avoid pipelines from bursting due to vacuum, and avoid pipelines from being worn due to pulling during repeated lifting.

[0028] According to the heat exchange device of the first embodiment of the present invention, the vacuum box includes a box body and a box cover located on the top of the box body, and the lifting column is provided on the bottom wall of the box body.

[0029] Advantageously, the present invention provides a box body and a box cover, so that the box body can form the main part of the vacuum chamber, thereby improving the sealing reliability and meeting the use needs. By opening the box cover, the translation mechanism and the lifting mechanism can be disassembled and assembled in the up and down directions, which is convenient for installation and maintenance.

[0030] According to the heat exchange device of the first embodiment of the present invention, the heat exchange element includes a first plate portion, and the first plate portion is arranged on the top of the translation mechanism.

[0031] Advantageously, the present invention enables the heat exchange element to include a first plate portion, which is located at the top of the translation mechanism. Thus, the area covered by the heat exchange element can be increased, making it easier to exchange heat for various parts of the product, especially for heat exchange and cooling of the carrier plate and substrate of a large flat plate.

[0032] At the same time, the translation mechanism is mostly used to support and transport products, so the first plate portion can be closer to and closer to the product, thereby improving heat exchange efficiency.

[0033] According to the heat exchange device of the first embodiment of the present invention, the heat exchange component is a box body, the translation mechanism is arranged in the box body, and the two opposite sides of the box body in the horizontal direction are open to accommodate the entry and exit of products.

[0034] What is beneficial is that: the utility model sets the heat exchange component as a box body, and sets the translation mechanism in the box body, thereby forming a heat exchange cavity in the vacuum cavity, and performing heat exchange in the form of wrapping the product, which can further increase the heat exchange amount and thus improve the heat exchange efficiency.

[0035] According to the heat exchange device of the first embodiment of the present invention, the top wall, the bottom wall and the side walls of the box body are all provided with the heat exchange channels.

[0036] Advantageously, the present invention provides heat exchange channels on the top, side and bottom walls of the box body, which can achieve multi-directional heat exchange and reduce or even eliminate the need for hoses, so that the heat exchange channels are all arranged inside the box body, simplifying the structure.

[0037] According to the heat exchange device of the first aspect of the present invention, the translation mechanism includes several pairs of conveying wheels, several pairs of the conveying wheels are arranged horizontally, and several pairs of the conveying wheels are installed on opposite sides of the box body, and the conveying wheels support two opposite sides of the product for conveying.

[0038] The benefit is that: the utility model provides a conveying wheel so that the conveying wheel supports two opposite sides of the product for conveying, which can reduce the obstruction of the product in the upper and lower directions, facilitate heat exchange of the product from the upper and lower directions, and especially facilitate heat exchange of the top and bottom surfaces of the carrier plate.

[0039] A coating production device according to an embodiment of the second aspect of the present invention includes a heat exchange device as described in any one of the above items, and the heat exchange device is used to cool a carrier plate or a substrate.

[0040] The benefit is that: the utility model can improve the cooling efficiency by applying the heat exchange device to the cooling of the carrier and the substrate, so that the temperature of the carrier and the substrate is consistent with the temperature required for the next process, which facilitates the processing of the next process.

[0041] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0043] Figure 1 This is a schematic structural diagram of a heat exchange device according to an embodiment of the present utility model;

[0044] Figure 2 for Figure 1 Assembly diagram of the heat exchanger;

[0045] Figure 3 for Figure 2 Schematic diagram of the structure of the central translation mechanism and heat exchange element;

[0046] Figure 4 for Figure 3 A front view of the translation mechanism and heat exchange component;

[0047] Figure 5 for Figure 2 Schematic diagram of the lifting mechanism;

[0048] Figure 6 for Figure 3 Schematic diagram of the layout of the heat exchange channels of the heat exchange components.

[0049] Reference numerals: 100 - vacuum chamber, 110 - translation mechanism, 120 - heat exchange element, 130 - heat exchange channel, 140 - lifting mechanism, 150 - lifting column, 160 - power element, 170 - feed channel, 180 - discharge channel, 190 - box body, 200 - box cover, 210 - first plate portion, 220 - second plate portion. DETAILED DESCRIPTION

[0050] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0051] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0052] In the description of this utility model, "several" means one or more, "more" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. If a first or second is mentioned, this is solely for the purpose of distinguishing the technical features and is not to be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.

[0053] In the description of this utility model, it should be noted that, unless otherwise specified or limited, the terms "mounted, connected, and connected" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integral connection; mechanical connection, electrical connection; direct connection, indirect connection through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0054] The heat exchange device and coating production equipment according to the embodiments of the present invention are described below with reference to the accompanying drawings.

[0055] The utility model aims to provide an embodiment of a coating production equipment, which has high heat exchange efficiency. At the same time, it has a large output per unit time, smoothly connects with the previous and subsequent processes, and does not affect the production efficiency of the coating production line.

[0056] Reference Figure 1 and Figure 2 , the utility model aims to provide an embodiment of a heat exchange device of a coating production equipment.

[0057] Unless otherwise agreed, the heat exchange device of this embodiment can also be used in other technical fields to implement heat exchange and have heating or cooling functions to speed up heat exchange and save time.

[0058] In this embodiment, the heat exchange device includes a vacuum box with a vacuum cavity 100 inside. The side wall of the vacuum box has a feed port and a discharge port, which are located on opposite sides of the vacuum box, thereby facilitating the entry and exit of products.

[0059] In some specific embodiments of the present invention, the feed port and the discharge port can be arranged in a horizontal direction to transport the product in a horizontal manner, thereby facilitating the connection between the previous and next working processes.

[0060] In some specific embodiments of the present invention, the feed port and the discharge port can be flat to match the end face shape of the product, which not only meets the feeding and discharging needs, but also reduces the cross-sectional area of the feed port and the discharge port, reducing the difficulty of closing.

[0061] In some specific embodiments of the present invention, a vacuum port can be provided on one side of the vacuum box adjacent to the feed port and the discharge port, and the vacuum port is connected to a vacuum pumping mechanism to facilitate the formation of a vacuum cavity 100 in the vacuum box without affecting the arrangement of the feed port and the discharge port.

[0062] In some specific embodiments of the present invention, various installation openings can be provided on the side wall where the vacuum port is located to install various components to meet the needs of film coating production.

[0063] In some specific embodiments of the present invention, the vacuum box may include a box body 190 and a box cover 200 located on the top of the box body 190 .

[0064] It is easy to understand that in this embodiment, by providing the box body 190 and the box cover 200, the box body 190 can form the main part of the vacuum chamber 100, improve the sealing reliability, and meet the needs of use. By opening the box cover 200, the translation mechanism 110 and the lifting mechanism 140 can be disassembled and assembled in the up and down directions, which is convenient for installation and maintenance.

[0065] In some specific embodiments of the present invention, the box body 190 can be manufactured by casting or machining, which reduces the number of parts and assemblies while meeting the sealing requirements.

[0066] In some specific embodiments of the present invention, the box body 190 may be formed by splicing together a number of panels to reduce manufacturing costs.

[0067] In some specific embodiments of the present invention, the box body 190 may include a mounting frame, the top of the mounting frame being connected to the box cover 200 , thereby reducing the difficulty of sealing between the box body 190 and the box cover 200 .

[0068] In some specific embodiments of the present invention, ribs can be provided on the top of the box cover 200. The ribs can be arranged in a cross, a field or a well shape to improve the strength of the box cover 200 and prevent the box cover 200 from deformation. At the same time, the ribs are arranged outside the vacuum box and do not occupy the internal space of the vacuum box, thereby avoiding reducing the effective space of the vacuum chamber 100.

[0069] Reference Figure 3 and Figure 4 A translation mechanism 110 is provided in the vacuum box, and the translation mechanism 110 is used to transport the product from the feed port to the discharge port.

[0070] In some specific embodiments of the present invention, the translation mechanism 110 may include a plurality of conveying rollers, so that the carrier plate is translated and conveyed under the rotation of the conveying rollers.

[0071] In some specific embodiments of the present invention, the translation mechanism 110 includes several pairs of conveying wheels, which are arranged horizontally and installed on opposite sides of the box body. The conveying wheels support two opposite sides of the product for conveying.

[0072] It is easy to understand that this embodiment uses conveying wheels to support two opposite sides of the product for conveying, which can reduce obstruction of the product in the upper and lower directions, facilitate heat exchange of the product from the upper and lower directions, and especially facilitate heat exchange of the top and bottom surfaces of the carrier plate.

[0073] At the same time, the conveying wheel supports the two opposite sides of the product for conveying, and avoids contact with the middle position of the carrier plate to avoid affecting the coating quality.

[0074] In some specific embodiments of the present invention, a pair of conveying wheels may be connected via a rotating shaft so that the pair of conveying wheels rotate synchronously, thereby reducing the risk of the carrier plate tilting during the conveying process.

[0075] In some specific embodiments of the present invention, the translation mechanism 110 may include two side-by-side conveyor belts, which support two opposite sides of the product for conveyance, thereby improving translation stability.

[0076] In some specific embodiments of the present invention, one side of the conveying rollers or conveying wheels can be connected through a conveyor belt to achieve synchronous rotation and conveying of multiple conveying rollers and synchronous rotation and conveying of multiple pairs of conveying wheels.

[0077] In some specific embodiments of the present invention, multiple conveyor belts can be used to connect multiple conveyor rollers or conveyor wheels to improve synchronization capabilities and overcome the problem of slow response of a single conveyor belt.

[0078] Reference Figure 2 and Figure 5 In some specific embodiments of the present invention, the number of translation mechanisms 110 can be multiple. In this embodiment, the number of translation mechanisms 110 is two, and the two translation mechanisms 110 are arranged up and down. The lower translation mechanism 110 is connected to the lifting mechanism 140, and the lifting mechanism 140 is installed on the bottom wall of the box 190.

[0079] During feeding, the lifting mechanism 140 is used to drive the translation mechanism 110 to rise and fall, so that the translation mechanism 110 is aligned with the feeding port, making it convenient for the carrier plate to move from the feeding port to the translation mechanism 110 .

[0080] During discharge, the lifting mechanism 140 is used to drive the translation mechanism 110 to rise and fall, so that the translation mechanism 110 is aligned with the discharge port, so that the carrier plate can be moved to the discharge port and discharged.

[0081] It is easy to understand that this embodiment increases the number of translation mechanisms 110 and arranges the translation mechanisms 110 up and down, and at the same time, provides a lifting mechanism 140. Therefore, driven by the lifting mechanism 140, the translation mechanism 110 rises or falls, and different translation mechanisms 110 can be aligned with the feed port, which facilitates the movement of products to different translation mechanisms 110. Different translation mechanisms 110 can be aligned with the discharge port, which facilitates the removal of products from the translation mechanism 110. Furthermore, the number of products in the heat exchange device is increased, which can not only extend the heat exchange time of a single product, but also ensure that the heat exchange device can produce quickly without affecting the production rhythm.

[0082] At the same time, the present invention arranges the translation mechanism 110 up and down by providing the lifting mechanism 140, thereby reducing the horizontal space occupied by the heat exchange device, reducing the occupation of the production site, and facilitating layout and implementation.

[0083] Reference Figure 2 In some specific embodiments of the present invention, the lifting mechanism 140 can include a lifting column 150 that passes through the vacuum box and a power member 160 that drives the lifting column 150 to move up and down. The power member 160 is located outside the vacuum box, and the lifting column 150 is located at one end of the vacuum chamber 100 and a translation mechanism 110 is set.

[0084] It is easy to understand that in this embodiment, a lifting column 150 is provided, and the power for driving the lifting column 150 to rise and fall is configured outside the vacuum box. Therefore, there is no need to reserve space in the vacuum box for arranging the power component 160. Furthermore, more space can be reserved for arranging the translation mechanism 110, so that the heat exchange device can exchange heat for more products at the same time, thereby improving the production capacity of the heat exchange device.

[0085] In some specific embodiments of the present invention, the power member 160 can be a screw-sleeve combination driven by a motor, thereby converting the rotational motion of the motor into a lifting linear motion to meet the lifting needs.

[0086] In some specific embodiments of the present invention, since two translation mechanisms 110 are provided in this embodiment, a power form with two motion positions, such as a cylinder, can also be used. One position is that one translation mechanism 110 is aligned with the feed port and the discharge port, and the other position is that another translation mechanism 110 is aligned with the feed port and the discharge port.

[0087] Reference Figure 2 、 Figure 3 、 Figure 4 and Figure 6 A heat exchange element 120 is also provided in the vacuum box. The heat exchange element 120 is used to exchange heat with the product on the translation mechanism 110. A heat exchange channel 130 is provided in the heat exchange element 120. The heat exchange channel 130 is connected to the outside of the vacuum box, and the heat exchange channel 130 is filled with heat exchange medium.

[0088] In summary, in this embodiment, a vacuum box is provided, so that during heat exchange, the product is still in a vacuum environment, which does not change the external environment of the product, rarely changes the force on the product, and has little impact on the product itself.

[0089] In this embodiment, by providing the translation mechanism 110 , products can be transported horizontally, and it is particularly convenient to transport flat products such as carriers or substrates horizontally.

[0090] In this embodiment, the heat exchange element 120 is provided. Therefore, when the product enters the vacuum chamber 100, the heat exchange element 120 is close to the product, thereby increasing the temperature difference between the product and the surroundings and improving the heat exchange effect of the product.

[0091] In this embodiment, the heat exchange channel 130 is provided so that a heat exchange medium is present in the heat exchange channel 130 . Therefore, under the flow of the heat exchange medium, the heat exchange channel 130 has a continuous heat exchange capability, which is particularly convenient for cooling products.

[0092] In this embodiment, by providing the heat exchange channel 130, the heat exchange element 120 can maintain its heat exchange capacity while preventing the heat exchange element 120 from continuously entering and exiting the vacuum chamber 100. With minimal changes to the vacuum chamber, there is no need to provide a cooling chamber or other facilities outside the vacuum chamber for cooling the heat exchange element 120, thereby optimizing the layout.

[0093] In some specific embodiments of the present invention, the lifting mechanism 140 can drive the heat exchange element 120 to rise and fall synchronously, without changing the distance between the product and the heat exchange element 120 and without affecting the heat exchange effect.

[0094] In some specific embodiments of the present invention, the lifting column 150 may be provided with a feed channel 170 and a discharge channel 180 connected to the heat exchange channel 130 , and the heat exchange channel 130 is connected to the heat exchange medium supply equipment outside the vacuum box through the feed channel 170 and the discharge channel 180 .

[0095] It is easy to understand that in this embodiment, by providing the lifting column 150 with the feed channel 170 and the discharge channel 180 , there is no need to open additional holes on the vacuum box, thereby reducing the modification of the vacuum box.

[0096] At the same time, this embodiment can also reduce exposed pipelines, avoid pipelines from bursting due to vacuum, and avoid pipelines from being worn due to pulling during repeated lifting.

[0097] In some specific embodiments of the present invention, the lifting mechanism 140 can include a frame, which is installed at the bottom of the vacuum box. A motor, a screw, etc. are set at the bottom of the frame. The horizontal gap of the frame is used to set a feed pipe connected to the feed channel 170 and a discharge pipe connected to the discharge channel 180, which can facilitate the installation of the power component 160 and the layout of the pipeline.

[0098] In some specific embodiments of the present invention, the heat exchange element 120 may include a first plate portion 210 , and the first plate portion 210 is disposed on the top of the translation mechanism 110 .

[0099] It is easy to understand that in this embodiment, the heat exchange element 120 includes a first plate portion 210, and the first plate portion 210 is located on the top of the translation mechanism 110. Therefore, the area covered by the heat exchange element 120 can be increased, which facilitates heat exchange for various parts of the product, especially facilitates heat exchange and cooling of the carrier plate and substrate of the large flat panel.

[0100] At the same time, the translation mechanism 110 is mostly used to support and transport the product, so the first plate portion 210 can be closer to and closer to the product, thereby improving the heat exchange efficiency.

[0101] In some specific embodiments of the present invention, the heat exchange element 120 may be a box body, the translation mechanism 110 may be disposed in the box body, and two horizontally opposite sides of the box body may be open to accommodate the entry and exit of products.

[0102] It is easy to understand that in this embodiment, the heat exchange element 120 is set as a box body, and the translation mechanism 110 is set in the box body. Therefore, a heat exchange cavity is formed in the vacuum cavity 100, and heat exchange is performed in the form of wrapping the product, which can further increase the heat exchange amount and thus improve the heat exchange efficiency.

[0103] At the same time, the box body of this embodiment also acts as a mounting frame for the translation mechanism 110 , and has a concise and simplified structure, taking up little space.

[0104] In some specific embodiments of the present invention, the top wall, bottom wall and side walls of the box body may all be provided with heat exchange channels 130 .

[0105] It is easy to understand that this embodiment provides heat exchange channels 130 on the top, side and bottom walls of the box body, which can not only achieve multi-directional heat exchange but also reduce or even eliminate the need for hoses, so that the heat exchange channels 130 are all arranged inside the box body, simplifying the structure.

[0106] In some specific embodiments of the present invention, the heat exchange element 120 may include a second plate portion 220, which is located at the bottom of the heat exchange element 120 and connected to the lifting column 150. Accordingly, the second plate portion 220 is provided with an interface connecting the feed channel 170 and the discharge channel 180 to facilitate the flow of the heat exchange medium. Figure 6 In the diagram, arrows are used to indicate the direction of heat transfer medium flow.

[0107] In some specific embodiments of the present invention, the heat exchange medium may be a refrigerant, such as water, and thus the heat exchange device is used to cool the carrier plate or substrate.

[0108] It is easy to understand that this embodiment can improve the cooling efficiency by applying the heat exchange device to the cooling of the carrier and substrate, so that the temperature of the carrier and substrate is consistent with the temperature required for the next process, facilitating the processing of the next process.

[0109] Throughout this specification, references to terms such as "one embodiment, some embodiments, exemplary embodiments, examples, specific examples, or some examples" indicate that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, illustrative uses of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0110] The terms "first, second, third, fourth," etc., as used in the specification and claims of this application and in the accompanying drawings, where applicable, are used to distinguish similar items and are not necessarily used to describe a particular order or sequential sequence. It should be understood that the terms used in this manner are interchangeable where appropriate, such that the embodiments described herein can be practiced in an order other than that shown or described herein.

[0111] It should also be noted that in the description of this specification, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0112] In addition, the terms "comprises" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or apparatus that includes a series of steps or elements is not necessarily limited to those steps or elements explicitly listed, but may also include other steps or elements not explicitly listed or inherent to such process, method, product or apparatus.

[0113] Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not expressly listed or inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not preclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0114] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the scope of knowledge possessed by ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A heat exchange device, characterized in that: include: A vacuum box having a vacuum cavity (100), a feed port, and a discharge port; A translation mechanism (110), located in the vacuum chamber (100), for conveying the product from the feed port to the discharge port; A heat exchange element (120) is located in the vacuum chamber (100) and is used to exchange heat with the product on the translation mechanism (110). A heat exchange channel (130) is provided in the heat exchange element (120). The heat exchange channel (130) is connected to the outside of the vacuum box, and a heat exchange medium is placed in the heat exchange channel (130).

2. A heat exchange device according to claim 1, characterized in that: The number of the translation mechanisms (110) is at least two, and the translation mechanisms (110) are arranged up and down. The heat exchange device further includes a lifting mechanism (140), and the lifting mechanism (140) is used to drive the translation mechanism (110) and the heat exchange element (120) to rise and fall synchronously, so that the translation mechanism (110) is aligned with the feed port, and / or so that the translation mechanism (110) is aligned with the discharge port.

3. A heat exchange device according to claim 2, characterized in that: The lifting mechanism (140) comprises a lifting column (150) penetrating the vacuum box and a power member (160) for driving the lifting column (150) to move up and down. The power member (160) is located outside the vacuum box. The lifting column (150) is located at one end of the vacuum chamber (100) and the translation mechanism (110) is provided.

4. A heat exchange device according to claim 3, characterized in that: The lifting column (150) is provided with a feed channel (170) and a discharge channel (180) connected to the heat exchange channel (130), and the heat exchange channel (130) is connected to the heat exchange medium supply equipment outside the vacuum box through the feed channel (170) and the discharge channel (180).

5. A heat exchange device according to claim 3, characterized in that: The vacuum box comprises a box body (190) and a box cover (200) located on the top of the box body (190), and the lifting column (150) is provided on the bottom wall of the box body (190).

6. A heat exchange device according to claim 1, characterized in that: The heat exchange component (120) comprises a first plate portion (210), and the first plate portion (210) is arranged on the top of the translation mechanism (110).

7. The heat exchange device according to claim 1, characterized in that: The heat exchange component (120) is a box body, and the translation mechanism (110) is arranged in the box body. Two opposite sides of the box body in the horizontal direction are open to accommodate the entry and exit of products.

8. A heat exchange device according to claim 7, characterized in that: The top wall, bottom wall and side walls of the box body are all provided with the heat exchange channel (130).

9. The heat exchange device according to claim 7, characterized in that: The translation mechanism (110) comprises a plurality of pairs of conveying wheels, wherein the plurality of pairs of conveying wheels are arranged horizontally and are mounted on opposite sides of the box body, and the conveying wheels support two opposite sides of the product for conveying.

10. A coating production equipment, characterized in that, A heat exchange device comprising any one of claims 1 to 9, wherein the heat exchange device is used to cool a carrier plate or a substrate.

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