Thermal insulation cylinder and single crystal furnace system

Abstract

The utility model provides a thermal insulation cylinder and single crystal furnace system, including outer cylinder subassembly and a plurality of inner cylinder subassembly arranged in the outer cylinder subassembly, each inner cylinder subassembly is connected with the outer cylinder subassembly, and there is the accommodation space between the inner cylinder subassembly and the outer cylinder subassembly, a plurality of inner cylinder subassembly along the circumferential direction of outer cylinder subassembly in proper order, and the inner cylinder subassembly is equipped with the accommodation space between the inner cylinder subassembly and the outer cylinder subassembly. A gap is formed between every two adjacent inner cylinder assemblies and used for containing electrode pins of the main heater. The carbon-carbon crucible has the beneficial effects that a certain distance is formed between the inner cylinder assembly and the outer cylinder assembly, and the distance between the heat preservation cylinder and the carbon-carbon crucible is shortened, so that the heat preservation cylinder can block heat field transmission and prevent the heat field from being transmitted to the bottom of the quartz crucible, and the heat convection at the bottom of the quartz crucible is reduced; and oxygen generated by reaction of the quartz crucible and the silicon solution is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon single crystal production, in particular to a heat preservation tube and a single crystal furnace system. Background Art

[0002] Oxygen content is an important indicator for evaluating the quality of single crystals. The oxygen concentration of the crystal is affected by three factors: the melting rate of the quartz crucible, the amount of surface volatilization, and thermal convection. In particular, with the increase in the market share of N-type single crystals, the requirements for the oxygen content of single crystals have become more stringent. How to reduce the oxygen content through effective means is currently the main technical difficulty to be overcome. There is a certain gap between the insulation tube and the heater used in the industry to prevent the contact between the heater and the insulation tube from causing arcing and ignition. A channel is formed between the insulation tube and the carbon-carbon crucible. The flow of argon gas drives the flow of heat from the heater to heat and melt the silicon material inside the quartz crucible. At the same time, thermal convection will inevitably occur, causing the quartz crucible to react with the silicon liquid to produce oxygen, affecting the quality of the single crystal. Summary of the Invention

[0003] In view of the above problems, the present invention provides a heat preservation tube and a single crystal furnace system to solve the above or other problems existing in the prior art.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: an insulation cylinder, including an outer cylinder assembly and multiple inner cylinder assemblies arranged inside the outer cylinder assembly, each inner cylinder assembly is connected to the outer cylinder assembly, and an accommodating space is provided between the inner cylinder assembly and the outer cylinder assembly, multiple inner cylinder assemblies are arranged in sequence along the circumferential direction of the outer cylinder assembly, and there is a gap between adjacent inner cylinder assemblies to accommodate the electrode feet of the main heater.

[0005] Furthermore, any inner cylinder assembly is coaxially arranged with the outer cylinder assembly.

[0006] Furthermore, the inner cylinder assembly includes an inner cylinder member and a first connecting member and a second connecting member provided at both ends of the inner cylinder member, the first connecting member being connected to one end of the inner cylinder member and one end of the outer cylinder assembly respectively, and the second connecting member being connected to the other end of the inner cylinder member and the other end of the outer cylinder assembly respectively.

[0007] Furthermore, the outer cylinder assembly includes an outer cylinder member, and the outer cylinder member is an annular structure.

[0008] Furthermore, the outer cylinder assembly includes an outer cylinder member and a first connecting member and a second connecting member provided at both ends of the outer cylinder member, the two ends of the first connecting member are respectively connected to one end of the outer cylinder member and one end of the inner cylinder assembly, and the two ends of the second connecting member are respectively connected to the other end of the outer cylinder member and the other end of the inner cylinder assembly.

[0009] Furthermore, the number of the first connecting members and the number of the second connecting members are consistent with the number of the inner cylinder assembly. The inner cylinder assembly includes an inner cylinder member, and the inner cylinder member is a curved plate-shaped structure.

[0010] Furthermore, the inner cylinder assembly includes an inner cylinder member, and the outer cylinder assembly includes an outer cylinder member. One end of the inner cylinder member is connected to one end of the outer cylinder member through a first connecting member, and the other end of the inner cylinder member is connected to the other end of the outer cylinder member through a second connecting member.

[0011] Furthermore, grooves are provided on the opposite surfaces of the first connecting member and the second connecting member, and the two ends of the inner cylinder member are respectively inserted into the groove of the first connecting member and the groove of the second connecting member.

[0012] Furthermore, a heat-insulating material is provided between the outer cylinder assembly and the inner cylinder assembly.

[0013] A single crystal furnace system includes a single crystal furnace body, a main heater and the insulation tube as described above. The main heater and the insulation tube are both arranged in the single crystal furnace body, and the insulation tube is arranged below the main heater. The distance between the inner tube assembly and the carbon-carbon crucible is no greater than the distance between the main heater and the carbon-carbon crucible.

[0014] Due to the adoption of the above technical solution, the heat preservation cylinder is arranged below the main heater, and comprises an inner cylinder assembly and an outer cylinder assembly. There is an accommodation space between the inner cylinder assembly and the outer cylinder assembly, so that there is a certain distance between the inner cylinder assembly and the outer cylinder assembly, and the distance between the inner cylinder assembly and the carbon-carbon crucible is no greater than the distance between the main heater and the carbon-carbon crucible. The heat preservation cylinder can block the transfer of the heat field, block the transfer of the heat field to the bottom of the quartz crucible, reduce the heat convection at the bottom of the quartz crucible, and reduce the oxygen generated by the reaction between the quartz crucible and the silicon solution;

[0015] There are multiple inner cylinder assemblies, and there is a gap between adjacent inner cylinder assemblies to accommodate the electrode pins of the main heater. There is also a gap between the outer cylinder assembly and the inner cylinder assembly and the electrode pins of the main heater to prevent arcing and sparking.

[0016] The inner cylinder assembly and the outer cylinder assembly are detachably connected, and the production is simple and the production cost is low. Insulation material is arranged in the accommodating space between the inner cylinder assembly and the outer cylinder assembly, which can improve the insulation performance of the insulation cylinder. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a structural schematic diagram of an embodiment of the present invention when the heat preservation tube is installed in a single crystal furnace;

[0018] Figure 2 It is a structural schematic diagram of a heat preservation cylinder in one embodiment of the present utility model.

[0019] In the picture:

[0020] 1. Insulation tube 2. Main heater 3. Carbon crucible

[0021] 10. Outer cylinder 11. Inner cylinder 12. First connecting piece

[0022] 13. Second connecting piece DETAILED DESCRIPTION

[0023] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0024] Figure 1 and 2 A structural schematic diagram of an embodiment of the present invention is shown. This embodiment relates to an insulation cylinder and a single crystal furnace system. The insulation cylinder is arranged below the main heater. The insulation cylinder has an inner cylinder assembly and an outer cylinder assembly. There is a certain gap between the inner cylinder assembly and the outer cylinder assembly, which narrows the gap between the insulation cylinder and the carbon-carbon crucible, blocks heat from being transferred to the bottom of the quartz crucible, reduces heat convection at the bottom of the quartz crucible, and reduces oxygen generated by the reaction of the quartz crucible with the silicon solution.

[0025] A heat preservation tube, such as Figure 1 and 2 As shown, it is arranged below the main heater 2, and the insulation cylinder 1 can accommodate the electrode pins of the main heater 2. The distance between the inner side of the insulation cylinder 1 and the carbon-carbon crucible 3 is no greater than the distance between the main heater 2 and the carbon-carbon crucible 3, which reduces the gap between the insulation cylinder 1 and the carbon-carbon crucible 3. The insulation cylinder 1 and the electrode pins of the main heater 2 will not contact each other, and arcing and sparking will not occur. The heat is blocked from being transferred to the bottom of the quartz crucible, reducing the thermal convection at the bottom of the quartz crucible and reducing the oxygen generated by the reaction between the quartz crucible and the silicon solution.

[0026] The heat preservation tube 1 includes an outer tube component and a plurality of inner tube components arranged inside the outer tube component. The inner tube component is connected to the outer tube component, and a receiving space is provided between the inner tube component and the outer tube component. The setting of the receiving space allows a certain distance between the inner tube component and the outer tube component, so that the inner tube component is close to the carbon-carbon crucible 3, and the distance between the inner tube component and the carbon-carbon crucible 3 is not greater than the distance between the main heater and the carbon-carbon crucible, thereby reducing the gap between the heat preservation tube 1 and the carbon-carbon crucible 3; at the same time, when heat is transferred, the heat enters the receiving space between the inner tube component and the outer tube component through the inner tube component, and the heat is dissipated slowly in the space, so that the heat preservation tube 1 dissipates heat slowly, thereby enabling the heat preservation tube 1 to play a role in heat preservation;

[0027] The number of the aforementioned inner cylinder assemblies is multiple, and the multiple inner cylinder assemblies are arranged in sequence along the circumferential direction of the outer cylinder assembly. There is a gap between adjacent inner cylinder assemblies to accommodate the electrode pins of the main heater 2, so that the insulation cylinder 1 does not interfere with the main heater 2 during installation. The multiple inner cylinder assemblies can be arranged at equal intervals or at unequal intervals, depending on actual needs. No specific requirements are made here. The gap distance between two adjacent inner cylinder assemblies is greater than the width of the electrode pins of the main heater 2. At the same time, there is a gap between the outer cylinder assembly and the electrode pins of the main heater 2 to avoid contact between the insulation cylinder 1 and the electrode pins of the main heater 2, thereby preventing arcing and sparking.

[0028] The distance between each inner cylinder assembly and the outer cylinder assembly can be the same or different, depending on actual needs. Preferably, in some feasible embodiments, the distance between each inner cylinder assembly and the outer cylinder assembly is the same, that is, multiple inner cylinder assemblies are arranged on the same circumference, thereby ensuring that the distance between the outer side of each inner cylinder assembly and the carbon-carbon crucible is consistent, facilitating the manufacture of the thermal insulation cylinder 1. The distance between the outer cylinder assembly and the main heater is smaller than the distance between the outer cylinder assembly and the inner cylinder assembly, thereby reducing the gap between the thermal insulation cylinder and the carbon-carbon crucible and blocking the flow of heat.

[0029] When the insulation tube 1 is in use, the insulation tube 1 is installed on the outside of the carbon-carbon crucible 3, and the insulation tube 1 is located below the main heater 2. The electrode pins of the main heater 2 are located in the gap between adjacent inner tube components. There is a gap between the inner tube component and the electrode pins of the main heater 2. There is a gap between the inner tube component and the electrode pins of the main heater 2. There is a gap between the inner wall of the outer tube component and the electrode pins of the main heater 2. The inner wall of the outer tube component does not contact the electrode pins of the main heater 2, and the end of the inner tube component does not contact the electrode pins of the main heater 2, so as to avoid arcing and sparking. The setting of the inner tube component reduces the distance between the insulation tube 1 and the carbon-carbon crucible 3, blocks heat from being transferred to the bottom of the quartz crucible, reduces heat convection at the bottom of the quartz crucible, and thus reduces oxygen generated by the reaction of the quartz crucible with the silicon solution.

[0030] The number of the above-mentioned inner cylinder components is selected according to the number of electrode pins of the main heater 2, so that the number of gaps constructed by adjacent inner cylinder components is consistent with the number of electrode pins of the main heater 2, so as to accommodate all the electrode pins of the main heater 2, facilitate the installation of the insulation cylinder 1, and ensure that the installation of the insulation cylinder 1 and the main heater 2 will not interfere with each other.

[0031] When multiple inner cylinder assemblies are set, any inner cylinder assembly is coaxially arranged with the outer cylinder assembly, that is, the multiple inner cylinder assemblies are located on the same circumference, and the circumference where the multiple inner cylinder assemblies are located is coaxially arranged with the outer cylinder assembly. The distance from each inner cylinder assembly to the outer cylinder assembly is consistent, and the volume of the accommodating space between each inner cylinder assembly and the outer cylinder assembly is consistent, which facilitates the symmetry of the structure of the insulation cylinder 1, simple production, and low production cost.

[0032] In some feasible embodiments, the structure of the inner cylinder assembly and the outer cylinder assembly can be: the inner cylinder assembly includes an inner cylinder member 11 and a first connecting member 12 and a second connecting member 13 provided at both ends of the inner cylinder member 11, the first connecting member 12 is respectively connected to one end of the inner cylinder member 11 and one end of the outer cylinder assembly, and the second connecting member 13 is respectively connected to the other end of the inner cylinder member 11 and the other end of the outer cylinder assembly, that is, the inner cylinder assembly is a concave structure, the first connecting member 12 and the second connecting member 13 are located on the same side of the inner cylinder member 11, and the first connecting member 12 and the second connecting member 13 are respectively provided at both ends of the inner cylinder member 11. The connecting member 13, both sides of the first connecting member 12 are respectively connected to the inner cylinder member 11 and the outer cylinder assembly at one end, and the second connecting member 13 is respectively connected to the inner cylinder member 11 and the outer cylinder assembly at the other end. The first connecting member 12 blocks the space between the inner cylinder member 11 and the outer cylinder assembly at one end, and the second connecting member 13 blocks the space between the inner cylinder member 11 and the outer cylinder assembly at the other end. The inner cylinder member 11, the first connecting member 12, the second connecting member 13 and the outer cylinder assembly form an accommodating space, which can slow down heat loss.

[0033] The inner cylinder member 11 is a curved plate-like structure with a certain curvature. The curvature of the inner cylinder member 11 is consistent with the curvature of the corresponding portion of the outer cylinder assembly, so that the inner cylinder member 11 can be positioned inside the outer cylinder assembly, arranged parallel to the outer cylinder assembly, and connected to the outer cylinder assembly via a first connecting member 12 and a second connecting member 13. To facilitate installation of the inner cylinder member 11, the height of the inner cylinder member 11 is consistent with the height of the outer cylinder assembly along the axial direction of the outer cylinder assembly, so that the first connecting member 12 can be connected to the inner cylinder member 11 and the outer cylinder assembly, respectively, and the second connecting member 13 can also be connected to the inner cylinder member 11 and the outer cylinder assembly, respectively.

[0034] The above-mentioned first connecting member 12 and second connecting member 13 are both plate-shaped structures, and the first connecting member 12 and second connecting member 13 both have a certain curvature, the curvature of the first connecting member 12 and second connecting member 13 is consistent with the curvature of the inner cylinder member 11, and the first connecting member 12 and second connecting member 13 are arranged in parallel.

[0035] The first connecting member 12 is fixedly connected to the inner cylinder member 11 , and the second connecting member 13 is fixedly connected to the inner cylinder member 11 . The fixed connection method is preferably integrally formed.

[0036] In this structure, the outer cylinder assembly includes an outer cylinder member 10. The outer cylinder member 10 is annular in structure, and the cross-section of the outer cylinder member 10 is preferably circular, so that the heat preservation cylinder 1 can be installed outside the carbon-carbon crucible 3. The first connecting member 12 is fixedly connected to the outer cylinder member 10, and the second connecting member 13 is fixedly connected to the outer cylinder member 10. The fixed connection method is to fix the outer cylinder member 10 with a connecting member such as a bolt.

[0037] In other feasible embodiments, the structure of the inner cylinder assembly and the outer cylinder assembly can be: the outer cylinder assembly includes an outer cylinder member 10 and a first connecting member 12 and a second connecting member 13 provided at both ends of the outer cylinder member 10, the two ends of the first connecting member 12 are respectively connected to one end of the outer cylinder member 10 and one end of the inner cylinder assembly, and the two ends of the second connecting member 13 are respectively connected to the other end of the outer cylinder member 10 and the other end of the inner cylinder assembly, that is, the outer cylinder assembly is a concave structure, the two ends of the outer cylinder member 10 are respectively provided with the first connecting member 12 and the second connecting member 13, the first connecting member 12 and the second connecting member 13 are located in the outer cylinder On the same side of the member 10, both sides of the first connecting member 12 are respectively connected to the corresponding ends of the inner cylinder assembly and the outer cylinder member 10, and both sides of the second connecting member 13 are respectively connected to the corresponding other ends of the inner cylinder assembly and the outer cylinder member 10. The first connecting member 12 blocks the space between the corresponding ends of the outer cylinder member 10 and the inner cylinder assembly, and the second connecting member 13 blocks the space between the outer cylinder member 10 and the corresponding other ends of the inner cylinder assembly. The outer cylinder member 10, the first connecting member 12, the second connecting member 13 and the inner cylinder assembly form an accommodating space, which can slow down heat loss.

[0038] The number of the above-mentioned first connecting members 12 is multiple, and the multiple first connecting members 12 are arranged in sequence along the circumferential direction of the outer cylinder member 10. The number of the above-mentioned second connecting members 13 is multiple, and the multiple second connecting members 13 are arranged in sequence along the circumferential direction of the outer cylinder member 10, and the number of the first connecting members 12 and the number of the second connecting members 13 are consistent with the number of the inner cylinder components. The multiple first connecting members 12 and the multiple second connecting members 13 correspond one to one and are arranged in pairs. Each pair of the first connecting member 12 and the second connecting member 13 is respectively connected to an inner cylinder component, so that the inner cylinder component is connected to the outer cylinder member 10 through the first connecting member 12 and the second connecting member 13.

[0039] The outer cylinder 10 is annular in structure, and its cross-section is preferably circular. The first and second connectors 12, 13 are both plate-like in structure, each having a certain curvature, with the curvatures of the first and second connectors 12, 13 being consistent. The first and second connectors 12, 13 are arranged parallel to each other. The first connector 12 is fixedly connected to the outer cylinder 10, and the second connector 13 is fixedly connected to the outer cylinder 10. This fixed connection is preferably integrally formed.

[0040] In this structure, the inner cylinder assembly includes an inner cylinder member 11. The inner cylinder member 11 is a curved plate-like structure with a certain curvature. The curvature of the inner cylinder member 11 is consistent with the curvature of the corresponding portion of the outer cylinder member 10. At the same time, the curvature of the inner cylinder member 11 is consistent with the curvature of the first connecting member 12, so that the inner cylinder member 11 is arranged inside the outer cylinder member 10. Along the axial direction of the outer cylinder member 10, the height of the inner cylinder member 11 is consistent with the height of the outer cylinder member 10. The inner cylinder member 11 is arranged parallel to the outer cylinder assembly, so that each inner cylinder member 11 is connected to the outer cylinder member 10 through the first connecting member 12 and the second connecting member 13. The connection between the first connecting member 12 and the second connecting member 13 and the inner cylinder member 11 can be fixed by connecting members such as bolts.

[0041] In some other feasible embodiments, the structure of the inner cylinder assembly and the outer cylinder assembly can be: the inner cylinder assembly includes an inner cylinder member 11, the outer cylinder assembly includes an outer cylinder member 10, one end of the inner cylinder member 11 is connected to one end of the outer cylinder member 10 via a first connecting member 12, and the other end of the inner cylinder member 11 is connected to the other end of the outer cylinder member 10 via a second connecting member 13, and the first connecting member 12 and the second connecting member 13 respectively block the space between the inner cylinder member 11 and the outer cylinder member 10 from both ends of the inner cylinder member 11 and the outer cylinder member 10. The outer cylinder 10 is an annular structure, and the inner cylinder 11 is a curved plate structure. There are multiple inner cylinders 11, and the multiple inner cylinders 11 are arranged in sequence along the circumferential direction of the outer cylinder 10. The multiple inner cylinders 11 are all coaxially arranged with the outer cylinder 10. The multiple inner cylinders 11 are located on the same circumference. The curvature of each inner cylinder 11 is adapted to the curvature of the portion corresponding to the outer cylinder 10, so that the inner cylinder 11 and the outer cylinder 10 are arranged in parallel.

[0042] The first connecting member 12 and the second connecting member 13 are both plate-shaped structures with a certain curvature. The curvature of the first connecting member 12 and the curvature of the second connecting member 13 are consistent with the curvature of the inner cylinder member 11. The first connecting member 12 and the second connecting member 13 are arranged in parallel so that the first connecting member 11 and the second connecting member 13 are connected to the inner cylinder member 11 and the outer cylinder member 10 respectively.

[0043] The first connecting member 12 and the second connecting member 13 are both fixedly connected to the outer cylinder member 10, and the fixed connection method is preferably through connecting members such as bolts. The first connecting member 12 and the second connecting member 13 are both fixedly connected to the inner cylinder member 11, and the fixed connection method is preferably through connecting members such as bolts.

[0044] In order to facilitate the connection of the inner cylinder member 11 with the first connecting member 12 and the second connecting member 13 respectively, grooves are respectively provided at corresponding positions of the opposing surfaces of the first connecting member 12 and the second connecting member 13. The two ends of the inner cylinder member 11 are respectively arranged in the corresponding grooves. The grooves limit the inner cylinder member 11 to facilitate the installation of the inner cylinder member 11.

[0045] The gap between the outer wall of the inner cylinder assembly and the carbon-carbon crucible 3 is smaller than the gap between the main heater 2 and the carbon-carbon crucible 3, which blocks the heat from flowing downward to the quartz crucible. There is a gap between the outer wall of the inner cylinder assembly and the carbon-carbon crucible 3 to avoid contact. The distance between the inner wall of the outer cylinder assembly and the outer wall of the inner cylinder assembly is selected according to actual needs and no specific requirements are made here.

[0046] In a further optimized solution, a heat-insulating material is provided between the outer cylinder assembly and the inner cylinder assembly to improve the heat-insulating performance of the heat-insulating cylinder 1. The heat-insulating material may be graphite carbon felt.

[0047] A single crystal furnace system includes a single crystal furnace body, a main heater 2, and the above-mentioned insulation tube 1. The main heater 2 and the insulation tube 1 are both arranged in the single crystal furnace body, and the insulation tube 1 is arranged below the main heater 2. The distance between the inner tube assembly and the carbon-carbon crucible 3 is no greater than the distance between the main heater 2 and the carbon-carbon crucible 3. The electrode pins of the main heater 2 are located in the gap between adjacent inner tube assemblies of the insulation tube 1, and there is a gap between the electrode pins of the main heater 2 and the outer tube assembly. At the same time, there is a gap between the electrode pins of the main heater 2 and the inner tube assembly. The electrode pins of the main heater 2 do not contact the insulation tube 1 to prevent arcing and sparking. During the single crystal pulling process of the single crystal furnace system, the provision of the insulation tube 1 reduces the gap between the insulation tube 1 and the carbon-carbon crucible 3, preventing the heat of the main heater 2 from flowing downward to the quartz crucible, reducing thermal convection at the bottom of the quartz crucible, and thus reducing oxygen generation.

[0048] Due to the adoption of the above technical solution, the insulation cylinder is arranged below the main heater, and comprises an inner cylinder assembly and an outer cylinder assembly, and there is a accommodating space between the inner cylinder assembly and the outer cylinder assembly, so that there is a certain distance between the inner cylinder assembly and the outer cylinder assembly, and the distance between the inner cylinder assembly and the carbon-carbon crucible is not greater than the distance between the main heater and the carbon-carbon crucible. The insulation cylinder can block the transfer of the heat field, block the transfer of the heat field to the bottom of the quartz crucible, reduce the heat convection at the bottom of the quartz crucible, and reduce the oxygen generated by the reaction of the quartz crucible with the silicon solution; the number of the inner cylinder assemblies is multiple, and there is a gap between adjacent inner cylinder assemblies, which can accommodate the electrode pins of the main heater, and there is a gap between the outer cylinder assembly and the inner cylinder assembly and the electrode pins of the main heater to prevent arcing and sparking; the inner cylinder assembly and the outer cylinder assembly are detachably connected, and the production and manufacturing are simple and the production cost is low. Insulation material is provided in the accommodating space between the inner cylinder assembly and the outer cylinder assembly, which can improve the insulation performance of the insulation cylinder.

[0049] The above embodiments of the present invention are described in detail. However, the above contents are only preferred embodiments of the present invention and should not be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A heat preservation cylinder, characterized in that: It includes an outer cylinder assembly and multiple inner cylinder assemblies arranged inside the outer cylinder assembly. Each of the inner cylinder assemblies is connected to the outer cylinder assembly, and an accommodating space is provided between the inner cylinder assembly and the outer cylinder assembly. The multiple inner cylinder assemblies are arranged in sequence along the circumferential direction of the outer cylinder assembly, and there is a gap between adjacent inner cylinder assemblies to accommodate the electrode pins of the main heater.

2. The heat preservation tube according to claim 1, characterized in that: Any of the inner cylinder components is coaxially arranged with the outer cylinder component.

3. The heat preservation cylinder according to claim 1 or 2, characterized in that: The inner cylinder assembly includes an inner cylinder member and a first connecting member and a second connecting member provided at both ends of the inner cylinder member, the first connecting member being connected to one end of the inner cylinder member and one end of the outer cylinder assembly respectively, and the second connecting member being connected to the other end of the inner cylinder member and the other end of the outer cylinder assembly respectively.

4. The heat preservation tube according to claim 3, characterized in that: The outer cylinder assembly includes an outer cylinder member, and the outer cylinder member is an annular structure.

5. The heat preservation cylinder according to claim 1 or 2, characterized in that: The outer cylinder assembly includes an outer cylinder member and a first connecting member and a second connecting member provided at both ends of the outer cylinder member, the two ends of the first connecting member are respectively connected to one end of the outer cylinder member and one end of the inner cylinder assembly, and the two ends of the second connecting member are respectively connected to the other end of the outer cylinder member and the other end of the inner cylinder assembly.

6. The heat preservation cylinder according to claim 5, characterized in that: The number of the first connecting members and the number of the second connecting members are consistent with the number of the inner cylinder assembly. The inner cylinder assembly includes an inner cylinder member, and the inner cylinder member is a curved plate-shaped structure.

7. The heat preservation cylinder according to claim 1 or 2, characterized in that: The inner cylinder assembly includes an inner cylinder member, and the outer cylinder assembly includes an outer cylinder member. One end of the inner cylinder member is connected to one end of the outer cylinder member through a first connecting member, and the other end of the inner cylinder member is connected to the other end of the outer cylinder member through a second connecting member.

8. The heat preservation tube according to claim 7, characterized in that: The opposing surfaces of the first connecting member and the second connecting member are both provided with grooves, and the two ends of the inner cylinder member are respectively inserted into the grooves of the first connecting member and the grooves of the second connecting member.

9. The heat preservation tube according to claim 1, characterized in that: A heat-insulating material is provided between the outer cylinder assembly and the inner cylinder assembly.

10. A single crystal furnace system, characterized in that: It includes a single crystal furnace body, a main heater and an insulation tube as described in any one of claims 1 to 9, wherein the main heater and the insulation tube are both arranged in the single crystal furnace body, and the insulation tube is arranged below the main heater, and the distance between the inner tube assembly and the carbon-carbon crucible is not greater than the distance between the main heater and the carbon-carbon crucible.

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