Ultrapure water supply device

Abstract

The utility model relates to an ultrapure water supply device which comprises a pure water tank, the top of the pure water tank is connected with a nitrogen input pipeline, and a first overflow port is formed in the position, close to the top, of the side face of the pure water tank; one end of the main overflow pipe is connected to the first overflow port; the overflow water tank is connected with the other end of the main overflow pipe, and a second overflow opening is formed in the side, away from the main overflow pipe, of the overflow water tank; the floating ball switch is arranged on the liquid level in the overflow water tank in a floating mode, the floating ball switch is connected with a water supplementing pipeline extending into the overflow water tank from the outside, and the control liquid level of the floating ball switch is lower than the overflow liquid level of the overflow water tank; the liquid level switch mounting pipe is connected to the main overflow pipe in parallel, and a low liquid level switch and a middle liquid level switch which are arranged at intervals from low to high are mounted in the liquid level switch mounting pipe.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning water supply devices, in particular to an ultrapure water supply device. Background Art

[0002] Industries like electronic equipment and precision instruments often involve cleaning components or equipment, requiring the use of ultrapure water, typically produced using EDI. Because ultrapure water is a pure solvent with a strong dissolving power, its resistivity decreases rapidly upon contact with airborne impurities like dust and carbon dioxide, affecting its performance. Therefore, tanks used to store ultrapure water must be sealed with pure nitrogen to prevent the water from coming into contact with air.

[0003] Currently, an overflow port is located on the side near the top, connected to a water trap seal. A pressure sensor is installed on the top of the water tank to detect the pressure at the top of the water tank. A nitrogen source is connected to the top of the water tank via a pressure reducing valve and a solenoid valve. A 40cm high sealed water column is retained in the water trap. When the pressure at the top of the water tank is 1kPa lower than atmospheric pressure, the solenoid valve opens to replenish nitrogen into the water tank. When the pressure at the top of the water tank is 2kPa higher than atmospheric pressure, the solenoid valve closes to stop replenishing nitrogen. However, the pressure variation range at the top of the water tank is small, requiring a high resolution pressure sensor. If a high-precision pressure sensor is used, the high price will lead to increased procurement and operating costs. If a low-resolution pressure sensor is used, it is prone to malfunction, resulting in frequent nitrogen replenishment and nitrogen waste, or failure to replenish nitrogen in a timely manner, causing water seal damage. Utility Model Content

[0004] The purpose of the utility model is to provide an ultrapure water supply device, which is used to solve the problems of high price, high cost, waste of resources caused by malfunction and damage to water seal.

[0005] According to one aspect of the present invention, there is provided an ultrapure water supply device, comprising:

[0006] A pure water tank, wherein the top of the pure water tank is connected to a nitrogen input pipeline, and a first overflow port is opened on the side of the pure water tank near the top;

[0007] a main overflow pipe, one end of which is connected to the first overflow port;

[0008] an overflow water tank connected to the other end of the main overflow pipe, and a second overflow port is provided on a side of the overflow water tank away from the main overflow pipe;

[0009] a float switch, the float switch being arranged to float on the liquid surface inside the overflow water tank, and the float switch being connected to a water supply pipe extending from the outside into the overflow water tank, wherein the control liquid level of the float switch is lower than the overflow liquid level of the overflow water tank; and

[0010] A liquid level switch mounting pipe is connected in parallel to the main overflow pipe, and a low liquid level switch and a middle liquid level switch are installed inside the liquid level switch mounting pipe and are arranged in intervals from low to high.

[0011] In one embodiment, the ultrapure water supply device further includes a high liquid level switch, which is disposed in the liquid level switch mounting tube and spaced apart above the medium liquid level switch.

[0012] In one embodiment, the liquid level switch mounting tube includes a thick tube section and a thin tube section connected to each other, the end of the thin tube section away from the thick tube section is connected to the main overflow pipe, and the end of the thick tube section away from the thin tube section is connected to the main overflow pipe.

[0013] In one embodiment, a pressure reducing valve is installed in the nitrogen input pipeline, and one end of the nitrogen input pipeline away from the pure water tank is connected to a nitrogen source.

[0014] In one embodiment, a manual valve is further installed in the nitrogen input pipeline, and the manual valve is located downstream of the pressure reducing valve.

[0015] In one embodiment, the ultrapure water supply device further includes a drainage pipeline, one end of which is connected to the second overflow port.

[0016] In one embodiment, a control valve is installed in the water supply pipeline, and the control valve is used to control the on-off of the water supply pipeline.

[0017] In one embodiment, the ultrapure water supply device further includes a water supply pipeline, one end of the water supply pipeline extends into the pure water tank, and the other end of the water supply pipeline is used to be connected to the water production device.

[0018] In one embodiment, the ultrapure water supply device also includes a water supply pipeline, and a drain outlet is opened on the side of the pure water tank near the bottom. One end of the water supply pipeline is connected to the drain outlet, and the other end of the water supply pipeline is used to extend to a water intake point.

[0019] In one embodiment, the ultrapure water supply device further includes a driving water pump, which is installed in the water supply pipeline.

[0020] The implementation of the present invention will have the following beneficial effects:

[0021] When the ultrapure water supply device of this scheme is operating normally, ultrapure water is discharged from the pure water tank and transported to the water intake point, causing the liquid level in the pure water tank to drop, and the corresponding top pressure in the pure water tank to drop. Under the action of atmospheric pressure, the liquid level in the liquid level switch installation pipe rises from the low liquid level switch to the middle liquid level switch. At this time, the liquid level in the overflow water tank drops, and the float switch follows the liquid level in the overflow water tank to drop to a preset height and open to replenish water in the overflow water tank to ensure water sealing capacity; further, when the liquid level in the liquid level switch installation pipe rises to contact the middle liquid level switch, the nitrogen input pipeline is connected, and then nitrogen is input into the water blowing tank, so that The top pressure in the pure water tank gradually increases, and correspondingly, the liquid level in the liquid level switch installation pipe will gradually decrease, and the excess water in the overflow tank will flow out from the second overflow port. In this process, since the water level in the overflow tank is higher than the control liquid level of the float switch, the float switch remains closed. When the liquid level in the liquid level switch installation pipe drops to the low liquid level switch, the nitrogen input pipeline stops replenishing nitrogen into the pure water tank. This cycle repeats continuously to ensure the protection of the pure water tank by nitrogen. Compared with traditional technologies, the pressure sensor is eliminated, effectively solving a series of problems caused by high cost and malfunction. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 Schematic diagram of the structure of an ultrapure water supply device according to an embodiment.

[0024] in:

[0025] 100. Ultrapure water supply device; 10. Pure water tank; 11. First overflow port; 12. Drain port; 20. Nitrogen input pipeline; 20a. Pressure reducing valve; 20b. Manual valve; 30. Main overflow pipe; 40. Overflow tank; 41. Second overflow port; 50. Float switch; 50a. Water supply pipeline; 50b. Control valve; 60. Liquid level switch mounting pipe; 61. Thick pipe section; 62. Thin pipe section; 60a. Low liquid level switch; 60b. Medium liquid level switch; 60c. High liquid level switch; 70. Drain pipe; 80. Water delivery pipeline; 90. Water supply pipeline; 90a. Driving water pump. DETAILED DESCRIPTION

[0026] To facilitate understanding of the present invention, a more comprehensive description of the present invention will be provided below with reference to the accompanying drawings. The drawings illustrate preferred embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the disclosure of the present invention.

[0027] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly attached to the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used herein in the specification of this invention are intended only to describe specific embodiments and are not intended to limit the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0029] Please refer to Figure 1 , is an ultrapure water supply device 100 according to an embodiment, comprising a pure water tank 10, the top of which is connected to a nitrogen input pipeline 20, and a first overflow port 11 is provided on the side of the pure water tank 10 near the top; a main overflow pipe 30, one end of which is connected to the first overflow port 11; an overflow tank 40, the overflow tank 40 being connected to the other end of the main overflow pipe 30, and a second overflow port 41 is provided on the side of the overflow tank 40 away from the main overflow pipe 30; A float switch 50, which floats on the liquid surface inside the overflow water tank 40, and is connected to a water supply pipe 50a extending from the outside into the overflow water tank 40. The control liquid level of the float switch 50 is lower than the overflow liquid level of the overflow water tank 40; and a liquid level switch mounting tube 60, which is connected in parallel to the main overflow pipe 30. A low liquid level switch 60a and a medium liquid level switch 60b are installed inside the liquid level switch mounting tube 60, which are arranged from low to high.

[0030] The function of the pure water tank 10 is to temporarily store ultrapure water required for cleaning electronic equipment, precision instruments, etc.

[0031] Specifically, in one embodiment, the ultrapure water supply device 100 further includes a water delivery pipe 80. One end of the water delivery pipe 80 extends into the pure water tank 10, and the other end of the water delivery pipe 80 is connected to a water production device. For example, the water production device is an EDI generator that produces ultrapure water. The generated ultrapure water flows along the water delivery pipe under the action of a driving force and ultimately flows into the pure water tank 10 for temporary storage, so that water can be directly drawn from the pure water tank 10 during cleaning operations.

[0032] Preferably, one end of the water supply pipe 80 extending into the pure water tank 10 extends close to the bottom of the pure water tank 10, reducing the impact of the water flow on the liquid level of the water tank, thereby reducing the fluctuation of the nitrogen pressure on the water surface, avoiding malfunction caused by pressure fluctuations, and at the same time preventing the nitrogen in the water tank from leaking out along the water inlet pipe when there is no water in the water inlet pipe.

[0033] See also Figure 1 To facilitate water collection for cleaning, the ultrapure water supply device 100 also includes a water supply line 90. A drain outlet 12 is provided on the side of the pure water tank 10, near the bottom. One end of the water supply line 90 is connected to the drain outlet 12, and the other end of the water supply line 90 extends to a water collection point. The water supply line 90 connects the pure water tank 10 to the water collection point, allowing the ultrapure water stored in the pure water tank 10 to be efficiently transported to the water collection point for use.

[0034] For example, in order to achieve effective flow of ultrapure water in the water supply pipe 90, the water supply pipe 90 is set at an angle so that the height of the end of the water supply pipe 90 connected to the pure water tank 10 is greater than the height of the end extending to the water intake point, so that the ultrapure water can flow in the pipe by itself with the help of its own gravity.

[0035] Furthermore, the ultrapure water supply device 100 also includes a driving water pump 90a, which is installed in the water supply pipeline 90. The driving water pump 90a provides the power required for the flow of ultrapure water, allowing the ultrapure water to flow effectively in the water supply pipeline 90 under all conditions. The flow rate can be adjusted to control the flow rate of ultrapure water delivered to the water intake, thereby meeting the water intake requirements of different water intakes.

[0036] The implementation of the embodiment of the present utility model will have the following beneficial effects: when the ultrapure water supply device 100 of this scheme is operating normally, ultrapure water is discharged from the pure water tank 10 and transported to the water intake point, so that the liquid level in the pure water tank 10 drops, and the corresponding top pressure in the pure water tank 10 drops. Under the action of atmospheric pressure, the liquid level in the liquid level switch installation tube 60 rises from the low liquid level switch 60a to the middle liquid level switch 60b. At this time, the liquid level in the overflow water tank 40 drops, and the float switch 50 follows the liquid level in the overflow water tank 40 to drop to a preset height and opens to replenish water into the overflow water tank 40 to ensure water sealing capacity; further, when the liquid level in the liquid level switch installation tube 60 rises to contact the middle liquid level switch 60b, the nitrogen input pipeline 20 is connected , and then nitrogen is input into the water blowing tank, so that the top pressure in the pure water tank 10 gradually increases. Correspondingly, the liquid level in the liquid level switch mounting tube 60 will gradually decrease at this time, and the excess water in the overflow water tank 40 will flow out from the second overflow port 41. In this process, since the water level in the overflow water tank 40 is higher than the control liquid level of the float switch 50, the float switch 50 remains in the closed state. When the liquid level in the liquid level switch mounting tube 60 drops to the low liquid level switch 60a, the nitrogen input pipeline 20 stops replenishing nitrogen into the pure water tank 10. This cycle is repeated continuously to ensure that nitrogen protects the pure water tank 10. Compared with traditional technologies, the pressure sensor is eliminated, effectively solving a series of problems caused by high cost and malfunction.

[0037] See also Figure 1 In yet another embodiment, the ultrapure water supply device 100 further includes a high liquid level switch 60c, which is disposed within the liquid level switch mounting tube 60 and spaced apart above the intermediate liquid level switch 60b. In extreme situations, such as when the liquid level in the pure water tank 10 drops, the nitrogen replenishment manual valve 20b is broken and cannot be opened, or when the manual valve 20b is opened but the nitrogen pressure is insufficient, the liquid level within the liquid level switch mounting tube 60 continues to rise. When the maximum liquid level switch 60c is reached, an alarm is triggered, the system shuts down, and a host computer prompts the user to refill nitrogen and inspect and repair the manual valve 20b.

[0038] It is easy to understand that the liquid level in the pure water tank 10 continues to rise, and the excess water will flow out from the overflow main pipe into the overflow water tank 40, and then be discharged from the second overflow port 41 of the overflow water tank 40. The water seal is not damaged during the whole process.

[0039] There is a preset installation height difference between the high liquid level switch 60c, the middle liquid level switch 60b and the low liquid level switch 60a in the liquid level switch mounting tube 60. For example, the high liquid level switch 60c is determined to be 30CM higher than the control liquid level of the float switch 50, the middle liquid level switch 60b is determined to be 10CM higher than the control liquid level of the float switch 50, and the low liquid level switch 60a is determined to be 20CM lower than the control liquid level of the float switch 50.

[0040] See also Figure 1 Furthermore, the liquid level switch mounting tube 60 includes a thick tube section 61 and a thin tube section 62. The end of the thin tube section 62, away from the thick tube section 61, is connected to the main overflow tube 30, while the end of the thick tube section 61, away from the thin tube section 62, is connected to the main overflow tube 30. A small-diameter tube is used to connect the upper portion of the liquid level switch mounting tube 60 to the main overflow tube 30, preventing overflow water from directly impacting and damaging the liquid level switch.

[0041] In one embodiment, a pressure reducing valve 20a is installed in the nitrogen input line 20. The end of the nitrogen input line 20 away from the pure water tank 10 is connected to a nitrogen source. The pressure reducing valve 20a is used to reduce the pressure of the supplemental nitrogen input into the water storage tank, for example, to 0.1 MPa, to avoid safety hazards caused by excessive pressure.

[0042] Furthermore, a manual valve 20b is installed in the nitrogen inlet line 20, downstream of the pressure reducing valve 20a. By controlling the opening of the manual valve 20b, the flow of nitrogen into the pure water tank 10 can be regulated. Furthermore, by controlling the opening and closing of the manual valve 20b, the flow of nitrogen into the pure water tank 10 can be controlled or stopped.

[0043] See also Figure 1 In one embodiment, the ultrapure water supply device 100 further includes a drainage pipe 70, one end of which is connected to the second overflow port 41. When the overflow tank 40 overflows, the overflowing water can be directed to a fixed discharge point by the drainage pipe 70, thereby preventing the water from flowing freely and causing environmental pollution or being inconvenient for centralized treatment.

[0044] In one embodiment, a manual control valve 50b is installed in the water supply pipeline 50a. The manual control valve 50b is used to control the on-off of the water supply pipeline 50a, so as to facilitate manual shutoff of the water supply pipeline 50a when repairing equipment failure.

[0045] The above-described embodiments merely represent several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present utility model patent shall be determined by the appended claims.

Claims

1. An ultrapure water supply device, characterized in that: include: A pure water tank, wherein the top of the pure water tank is connected to a nitrogen input pipeline, and a first overflow port is opened on the side of the pure water tank near the top; a main overflow pipe, one end of which is connected to the first overflow port; an overflow water tank connected to the other end of the main overflow pipe, and a second overflow port is provided on a side of the overflow water tank away from the main overflow pipe; a float switch, the float switch being arranged to float on the liquid surface inside the overflow water tank, and the float switch being connected to a water supply pipe extending from the outside into the overflow water tank, wherein the control liquid level of the float switch is lower than the overflow liquid level of the overflow water tank; and A liquid level switch mounting pipe is connected in parallel to the main overflow pipe, and a low liquid level switch and a middle liquid level switch are installed inside the liquid level switch mounting pipe and are arranged in intervals from low to high.

2. The ultrapure water supply device according to claim 1, characterized in that: The ultrapure water supply device further includes a high liquid level switch, which is arranged in the liquid level switch mounting tube and spaced apart above the middle liquid level switch.

3. The ultrapure water supply device according to claim 2, characterized in that: The liquid level switch installation pipe includes a thick pipe section and a thin pipe section connected to each other. The end of the thin pipe section away from the thick pipe section is connected to the main overflow pipe, and the end of the thick pipe section away from the thin pipe section is connected to the main overflow pipe.

4. The ultrapure water supply device according to claim 1, characterized in that: A pressure reducing valve is installed in the nitrogen input pipeline, and one end of the nitrogen input pipeline away from the pure water tank is connected to a nitrogen source.

5. The ultrapure water supply device according to claim 4, characterized in that: A manual valve is also installed in the nitrogen input pipeline, and the manual valve is located downstream of the pressure reducing valve.

6. The ultrapure water supply device according to claim 1, characterized in that: The ultrapure water supply device further includes a drainage pipeline, one end of which is connected to the second overflow port.

7. The ultrapure water supply device according to claim 1, characterized in that: A control valve is installed in the water supply pipeline, and the control valve is used to control the on-off of the water supply pipeline.

8. The ultrapure water supply device according to claim 1, characterized in that: The ultrapure water supply device further comprises a water delivery pipeline, one end of which extends into the pure water tank, and the other end of which is used to be connected to the water production device.

9. The ultrapure water supply device according to claim 1, characterized in that: The ultrapure water supply device also includes a water supply pipeline. A drain outlet is provided on the side of the pure water tank near the bottom. One end of the water supply pipeline is connected to the drain outlet, and the other end of the water supply pipeline is used to extend to a water intake point.

10. The ultrapure water supply device according to claim 9, characterized in that: The ultrapure water supply device further includes a driving water pump, which is installed in the water supply pipeline.

Images