Laser generating mechanism and exposure device

Abstract

The utility model provides a laser generating mechanism and exposure device, the laser generating mechanism comprises a shell, a mounting plate arranged in the shell, a plurality of lasers and a laser driver, the mounting plate is provided with a cooling water pipeline, the two ends of the cooling water pipeline are provided with a water inlet and a water outlet, and the water inlet and the water outlet are communicated with the shell. The water inlet and the water outlet are formed in one side of the mounting plate, the laser devices are arranged along the cooling water pipeline, and the laser device driver is connected with the laser devices. According to the utility model, the cooling water pipeline is arranged on the mounting plate, and the laser is arranged along the cooling water pipeline, so that the cooling efficiency is improved, the working temperature of the laser is reduced, the service life of the laser is further prolonged, and the working stability of the laser is improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor device processing, in particular to a laser generating mechanism and an exposure device. Background Art

[0002] The laser generator in the exposure device utilizes a laser light source for precise image transfer, a technology widely used in the microelectronics manufacturing and semiconductor industries. For example, in the production of integrated circuits, the laser generator is used to create tiny circuit patterns on silicon wafers. Laser lithography achieves high resolution and precision. During the production process, the laser typically generates a significant amount of heat. Failure to implement cooling measures can cause the following problems: First, as the laser converts electrical energy into light, some energy is lost as heat, reducing the laser's energy conversion efficiency. Second, this concentrated heat can damage optical components, affecting exposure accuracy and stability. Furthermore, the wavelength of the laser source is temperature-sensitive, and temperature changes can also cause variations in the output wavelength, impacting the exposure quality and accuracy of the exposure device.

[0003] Therefore, it is necessary to design a laser generating mechanism and an exposure device to solve the above problems. Utility Model Content

[0004] The purpose of the utility model is to provide a laser generating mechanism which can effectively perform self-cooling.

[0005] To achieve the above-mentioned purpose, the present invention adopts the following technical solution: a laser generating mechanism, which includes a shell, a mounting plate arranged in the shell, multiple lasers and a laser driver, the mounting plate is provided with a cooling water pipe, the two ends of the cooling water pipe are a water inlet and a water outlet, the water inlet and the water outlet are provided on one side of the mounting plate, the lasers are arranged along the cooling water pipe, and the laser driver is connected to the laser.

[0006] As a further improved technical solution of the present invention, the cooling water pipeline includes two vertical parts parallel to each other and a connecting part connecting the two vertical parts, and the lasers are arranged along the two vertical parts respectively.

[0007] As a further improved technical solution of the present invention, the lasers are divided into four groups, and there are two laser drivers, each laser driver being connected to two groups of lasers.

[0008] As a further improved technical solution of the present invention, the two vertical parts are respectively arranged close to the left and right edges of the mounting plate, the two laser drivers are respectively arranged on the left and right sides of the mounting plate, and the lasers are respectively arranged on the front and back sides of the mounting plate.

[0009] As a further improved technical solution of the present invention, a groove is provided on the mounting plate, a sealing plate is provided on the groove, and the groove and the sealing plate are arranged to form the cooling water pipeline.

[0010] As a further improved technical solution of the present invention, the water inlet and the water outlet are opened toward the same side in the vertical direction of the mounting plate.

[0011] As a further improved technical solution of the present invention, adapters are provided at both ends of the cooling water pipe, and the two adapters are respectively provided on the outside of the water inlet and the water outlet and are sealed and connected to the cooling water pipe.

[0012] As a further improved technical solution of the present invention, the adapter has an L-shaped channel, one end of the L-shaped channel is connected to the water inlet or outlet, and the other end is connected to the water inlet pipe or outlet pipe, and a sealing ring is provided between the adapter and the mounting plate.

[0013] As a further improved technical solution of the present invention, a hollow portion is provided on the mounting plate, and the mounting plate is made of brass.

[0014] Another object of the utility model is to provide an exposure device with high exposure stability and precision.

[0015] To achieve the above-mentioned purpose, the present invention adopts the following technical solution: an exposure device, which includes the laser generating mechanism described in any one of the above-mentioned items.

[0016] From the above technical solutions, it can be seen that the laser generating mechanism and exposure device of the present invention have the following technical effects:

[0017] 1. By opening a cooling water pipe on the mounting plate and arranging the laser along the cooling water pipe, effective cooling of the laser is achieved; this method allows the cooling water to directly contact the laser, improving the cooling efficiency and reducing the operating temperature of the laser.

[0018] 2. By quickly transferring the large amount of heat generated by the laser during operation to the cooling water, the operating temperature of the laser is effectively reduced, preventing excessive temperature from causing performance degradation or even damage to the laser, thereby extending the service life of the laser.

[0019] 3. Cooling the laser through the cooling water pipe can make the laser work at a constant temperature, avoiding the unstable performance of the laser caused by temperature fluctuations and improving the stability and reliability of the entire laser generating mechanism.

[0020] 4. The self-cooling laser generating mechanism of the present invention adopts a simple structural design, and the cooling water pipeline is integrated on the mounting plate, without the need for additional cooling equipment, thus simplifying the structure of the entire laser generating mechanism and reducing production costs.

[0021] 5. Since the laser is arranged along the cooling water pipe, the location of the laser is more centralized, which is convenient for maintenance personnel to inspect and replace. At the same time, the location design of the connection between the laser driver and the laser also facilitates the control and maintenance of the laser. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a three-dimensional diagram of the laser generating mechanism according to one embodiment of the present invention (part of the housing is hidden).

[0023] Figure 2 for Figure 1 A perspective view of the mounting plate.

[0024] Figure 3 for Figure 1 A three-dimensional image of the laser generating mechanism from another angle.

[0025] Figure 4 for Figure 3 A perspective view of the transfer connector. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0027] The present invention provides a laser generating mechanism 100 and an exposure device having the laser generating mechanism 100. Figure 1 As shown, the laser generating mechanism 100 includes a housing 10 , a mounting plate 20 disposed in the housing 10 , and a laser assembly 30 disposed on the mounting plate 20 .

[0028] The housing 10 includes left and right side panels 11, upper and lower side panels 12, and front and rear side panels (not shown). The mounting plate 20 is fixed between the upper and lower side panels 11. Figure 2As shown, the mounting plate 20 is in the shape of a rectangular plate as a whole and is used to install and support the laser assembly 30. The mounting plate 20 is provided with a cooling water pipe. Specifically, a groove 21 is provided on the mounting plate 20, and a sealing plate is provided on the groove 21. The groove 21 and the sealing plate are arranged to form a cooling water pipe. The cooling water pipe has a water inlet 21a and a water outlet 21b at both ends. The water inlet 21a and the water outlet 21b are provided on one side of the mounting plate. Preferably, the water inlet 21a and the water outlet 21b are provided on the same side of the vertical direction of the mounting plate 20, that is, in this embodiment, the water inlet 21a and the water outlet 21b are provided at the bottom of the groove 21. Such an arrangement facilitates connection with an external cooling water circulation system. The sealing plate is sealed and connected to the groove 21 by welding (such as friction welding). In this embodiment, the cooling water pipe is preferably "W"-shaped. Specifically, the cooling water pipe includes two vertical portions 211 parallel to each other and a connecting portion 212 connecting the two vertical portions 211.

[0029] Preferably, a hollow portion 24 is provided on the mounting plate 20 , which reduces the weight of the mounting plate 20 on the one hand and increases the heat dissipation area of the mounting plate 20 on the other hand.

[0030] Please refer to Figure 3 and Figure 4 As shown, adapters 22a and 22b are provided at both ends of the cooling water pipe. These adapters 22a and 22b are located outside the water inlet 21a and water outlet 21b, respectively, and are sealed to the cooling water pipe. Each adapter 22a and 22b has an L-shaped channel, with one end 222 connected to the water inlet 21a or water outlet 21b, and the other end 221 connected to the water inlet pipe 23a or water outlet pipe 23b. A sealing ring is provided between the adapters 22a and 22b and the mounting plate 20. A sealing groove 223 is defined on the side of the adapters 22a and 22b facing the mounting plate 20, and the sealing ring is located in the sealing groove 223. The mounting plate 20 is preferably made of brass, which provides a balance between mounting strength and heat dissipation performance.

[0031] Please refer to Figure 1 and Figure 3 As shown, the laser assembly 30 includes a plurality of lasers 31 and a laser driver 32 connected to the lasers 31. The lasers 31 are arranged along the cooling water pipe. In this embodiment, the two vertical portions 211 are respectively arranged close to the left and right edges of the mounting plate 20. Preferably, the lasers 31 are respectively arranged along the two vertical portions 211. Preferably, lasers 31 are provided on both the front and rear sides of the mounting plate 20. Therefore, the lasers 31 are divided into four groups and are respectively arranged on the front and rear sides of the mounting plate 20, and close to the left and right edges of the mounting plate 20. There are two laser drivers 32, which are respectively arranged on the left and right sides of the mounting plate 20. Each laser driver 32 is correspondingly connected to two groups of lasers 31.

[0032] Terms such as "left," "right," "front," "back," "upper," and "lower" used herein to denote relative spatial positions are used for ease of explanation to describe the relationship of one feature relative to another, as shown in the accompanying drawings. It should be understood that, depending on the placement of the product, these terms may be intended to encompass orientations other than those depicted in the drawings and should not be construed as limitations on the claims.

[0033] In addition, the above embodiments are only used to illustrate the present invention and are not intended to limit the technical solutions described in the present invention. The understanding of this specification should be based on technical personnel in the relevant technical field. Although this specification has described the present invention in detail with reference to the above embodiments, ordinary technical personnel in this field should understand that technical personnel in the relevant technical field can still modify or replace the present invention with equivalents, and all technical solutions and improvements that do not depart from the spirit and scope of the present invention should be covered by the scope of the claims of the present invention.

Claims

1. A laser generating mechanism, characterized in that: The laser device comprises a shell, a mounting plate arranged in the shell, a plurality of lasers and a laser driver. The mounting plate is provided with a cooling water pipe, the two ends of the cooling water pipe are respectively a water inlet and a water outlet, the water inlet and the water outlet are provided on one side of the mounting plate, the lasers are arranged along the cooling water pipe, and the laser driver is connected to the laser.

2. The laser generating mechanism according to claim 1, wherein: The cooling water pipeline includes two vertical parts parallel to each other and a connecting part connecting the two vertical parts, and the lasers are arranged along the two vertical parts respectively.

3. The laser generating mechanism according to claim 2, wherein: The lasers are divided into four groups, and there are two laser drivers, each of which is connected to two groups of lasers.

4. The laser generating mechanism according to claim 2, wherein: The two vertical parts are respectively arranged close to the left and right edges of the mounting plate, the two laser drivers are respectively arranged on the left and right sides of the mounting plate, and the lasers are respectively arranged on the front and back sides of the mounting plate.

5. The laser generating mechanism according to claim 1, wherein: A groove is provided on the mounting plate, a sealing plate is provided on the groove, and the groove and the sealing plate are arranged to form the cooling water pipeline.

6. The laser generating mechanism according to claim 1, wherein: The water inlet and the water outlet are opened on the same side in the vertical direction of the mounting plate.

7. The laser generating mechanism according to claim 1, wherein: Adapters are provided at both ends of the cooling water pipeline. The two adapters are respectively arranged on the outside of the water inlet and the water outlet and are sealed and connected to the cooling water pipeline.

8. The laser generating mechanism according to claim 7, wherein: The adapter has an L-shaped channel, one end of the L-shaped channel is connected to the water inlet or the water outlet, and the other end is connected to the water inlet pipe or the water outlet pipe. A sealing ring is provided between the adapter and the mounting plate.

9. The laser generating mechanism according to claim 1, wherein: A hollow portion is provided on the mounting plate, and the mounting plate is made of brass.

10. An exposure device, characterized in that: The method comprises the laser generating mechanism as described in any one of claims 1 to 9.

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