Film drying device and film processing equipment

Abstract

The utility model provides a thin film drying device and thin film processing equipment, the thin film drying device is used for drying a perovskite thin film, the thin film drying device comprises an air knife, a buffer piece with a buffer cavity, and a rotation driving part; the air knife is connected to a power output shaft of the rotary driving part and is driven by the rotary driving part to rotate; an inlet of the buffering cavity is connected with an external air supply part, an outlet is connected with the air knife, and the external air supply part conveys blowing gas to the air knife through the buffering piece. According to the film drying device, the buffering cavity is formed in the buffering piece, the uniformity of blowing gas blown out by the air knife is improved, the air knife is driven to rotate through the rotary driving part, the drying area of the air knife is increased, the drying consistency of the front part and the rear part of a perovskite film is improved, and the film drying efficiency is improved. Therefore, the problem of inconsistent crystallization of the front part and the rear part of the perovskite thin film caused by the scheme that the perovskite thin film is fixedly blow-dried by a wind knife in the prior art is solved, and the performance of the perovskite thin film is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of batteries, in particular to a film drying device; at the same time, the utility model also relates to film production equipment provided with the film drying device. Background Art

[0002] In recent years, perovskite solar cells have attracted much attention due to their low cost and high efficiency. Laboratory-scale perovskite solar cells have demonstrated efficiencies exceeding 26%. During the preparation of perovskite thin films, due to the short time window for nucleation and crystallization, rapid removal of the perovskite wet film solvent is crucial for the nucleation and crystallization process.

[0003] Currently, the process for preparing large-area perovskite thin films includes: first, applying the perovskite precursor slurry to the substrate using a coating method; second, drying the liquid film using air knife drying or vacuum flash evaporation to obtain a dry film; and third, annealing the dry film at high temperature to obtain a stable, highly optically active perovskite film. The second step is crucial for the rapid and uniform removal of the non-volatile solvent from the wet film, which is crucial for perovskite crystallization.

[0004] With the air knife drying method, after coating, the wet film is typically purged by controlling the air knife's pressure, angle, and speed. This ensures uniform air output from the knife head. To ensure sufficient solvent evaporation, the air knife typically needs to be purged at a lower speed. This results in uneven solvent evaporation rates at the front and rear ends of the wet film. The front end is purged with solvent first, evaporating first, while the rear end is purged later, evaporating more slowly. This can lead to inconsistent crystallization at the front and rear ends of large-area perovskite films. Utility Model Content

[0005] In view of this, the present invention aims to provide a thin film drying device to improve the crystallization consistency and performance of perovskite thin films.

[0006] In order to achieve the above-mentioned purpose, the technical solution of the utility model is achieved as follows:

[0007] A thin film drying device for drying perovskite thin films, comprising an air knife, a buffer member having a buffer chamber, and a rotary drive unit; the air knife is connected to a power output shaft of the rotary drive unit and is driven to rotate by the rotary drive unit; the inlet of the buffer chamber is connected to an external air supply unit, and the outlet is connected to the air knife, and the external air supply unit delivers purge gas to the air knife through the buffer member.

[0008] Furthermore, the buffer member includes a ring-shaped fixed ring and a movable ring rotatably arranged on the fixed ring, and the buffer cavity is formed between the fixed ring and the movable ring; the inlet is arranged on the fixed ring, the outlet is arranged on the movable ring, and the movable ring rotates synchronously with the wind knife through a connecting pipe connected between the outlet and the wind knife.

[0009] Furthermore, the fixed ring is provided with an annular groove coaxially arranged with the power output shaft, the movable ring is rotatably arranged in the annular groove, and sealing structures are respectively provided between the inner and outer sides of the movable ring and the side walls of the annular groove.

[0010] Furthermore, the wind knife is rotatably mounted on the power output shaft via a rotating shaft, the axis of the rotating shaft is perpendicular to the axis of the power output shaft, and the angle between the air outlet direction of the wind knife and the perovskite film is adjustable.

[0011] Furthermore, a mounting seat is provided on the power output shaft, and the wind knife is rotated on the mounting seat through the rotating shaft; a locking part is provided between the wind knife and the mounting seat, and the locking part is used to lock the wind knife rotated into place on the mounting seat.

[0012] Furthermore, the locking portion includes a locking piece passing through the wind knife and a plurality of locking grooves spaced along the rotation center of the wind knife. The locking piece can be selectively detachably connected to the locking groove to lock the wind knife rotated into place on the mounting seat.

[0013] Furthermore, the external air supply part includes a first air supply part for outputting nitrogen or compressed air.

[0014] Furthermore, the external gas supply part also includes a second gas supply part for outputting a gaseous anti-solvent, and the gaseous anti-solvent includes any one of isopropyl alcohol, ethyl acetate, chlorobenzene, toluene, and ether.

[0015] Furthermore, it also includes a lifting part, and the power output end of the lifting part is connected to the rotary driving part, which is used to drive the rotary driving part to drive the buffer and the wind knife to rise and fall synchronously.

[0016] Compared with the prior art, the present invention has the following advantages:

[0017] The thin film drying device described in the present invention is beneficial to improving the uniformity of the purge gas blown out by the wind knife by arranging a buffer chamber on the buffer part, and also driving the wind knife to rotate by a rotary drive part, which is beneficial to increasing the drying area of the wind knife and the solvent volatilization efficiency, and is beneficial to improving the consistency of the drying of the front and rear parts of the perovskite film, thereby improving the problem of inconsistent crystallization of the front and rear parts of the perovskite film caused by the solution of fixedly drying the perovskite film with the wind knife in the prior art, and further improving the performance of the perovskite film.

[0018] In addition, the fixed ring and the movable ring cooperate to form a buffer chamber, allowing the movable ring to rotate synchronously with the wind knife through the connecting tube, which helps ensure that the buffer can still deliver purge gas into the wind knife during the rotation of the wind knife, thereby ensuring the air outlet effect of the wind knife during rotation. The annular groove has a simple structure and is easy to process and form. By providing a sealing structure, it helps to reduce the waste of purge gas, thereby helping to improve the utilization rate of purge gas. The axis of the rotating shaft is perpendicular to the axis of the power output shaft, which helps to adjust the angle between the wind knife's air outlet direction and the perovskite film, thereby helping to improve the flexibility of the wind knife.

[0019] In addition, by providing a mounting seat, it is convenient for the wind knife to be rotatably mounted on the power output shaft, and by providing a locking portion, the wind knife rotated into position is locked on the mounting seat, which is convenient for improving the stability of the wind knife during use. The provision of a locking piece and a plurality of locking grooves in the locking portion not only facilitates the arrangement and operation, but also has a good locking effect. The first air supply portion is convenient for delivering nitrogen or compressed air into the buffer chamber, and has a good drying effect. The output of the gaseous anti-solvent in the second air supply portion is convenient for extracting the solvent that is difficult to volatilize in the perovskite film, which greatly improves the extraction efficiency of the solvent in the perovskite film. Compared with the traditional solution of only blowing out nitrogen or compressed air, it is convenient for achieving uniform volatilization of the solvent in the perovskite film in a shorter time, thereby helping to improve the drying efficiency of the perovskite film. By providing a lifting portion, it is convenient to adjust the distance between the wind knife outlet and the perovskite film according to the use requirements of the perovskite film, thereby improving the flexibility of the device in use.

[0020] In addition, another object of the present invention is to provide a thin film processing device, comprising a coating device and the thin film drying device as described above, which are sequentially arranged along a conveying path of a perovskite substrate.

[0021] The thin film processing equipment described in the present invention facilitates the coating and drying of the perovskite film on the substrate by sequentially arranging a coating device and a thin film drying device on the conveying path of the perovskite substrate, thereby facilitating the improvement of the processing efficiency of the perovskite film. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings:

[0023] Figure 1 This is a schematic structural diagram of a thin film drying device according to an embodiment of the present utility model;

[0024] Figure 2 This is a schematic structural diagram of the mounting base and the air knife in a connected state according to an embodiment of the present utility model;

[0025] Figure 3 This is a schematic structural diagram of the mounting base according to an embodiment of the present utility model;

[0026] Figure 4 This is a schematic structural diagram of a buffer member according to an embodiment of the present utility model;

[0027] Figure 5 This is a schematic diagram of the internal structure of the buffer member described in an embodiment of the present utility model.

[0028] Description of reference numerals:

[0029] 1. Lifting unit; 2. Rotating drive unit; 3. Buffer; 4. Mounting seat; 5. Air knife; 6. Locking member; 7. First air supply unit; 8. Second air supply unit; 9. Pipeline; 10. First control valve; 11. Second control valve

[0030] 201, power output terminal;

[0031] 300, buffer chamber; 301, fixed ring; 302, movable ring; 303, sealing ring; 3011, inlet; 3012, limit block; 3021, outlet;

[0032] 401, rotating shaft; 402, locking slot;

[0033] 501, connecting plate; 502, connecting pipe; 503, rotary joint; 5031, first part; 5032, second part. DETAILED DESCRIPTION

[0034] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features therein can be combined with each other.

[0035] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," and "back" appear, they are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, if terms such as "first" and "second" appear, they are used solely for descriptive purposes and should not be construed as indicating or implying relative importance.

[0036] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0037] This embodiment relates to a thin film drying device for drying perovskite thin films. Overall, the device comprises an air knife 5, a buffer member 3 having a buffer chamber 300, and a rotary drive unit 2. The air knife 5 is connected to the power output shaft of the rotary drive unit 2 and is driven to rotate by the rotary drive unit 2. The inlet 3011 of the buffer chamber 300 is connected to an external air supply, while the outlet 3021 is connected to the air knife 5. The external air supply delivers purge gas to the air knife 5 through the buffer member 3.

[0038] The film drying device described in this embodiment, by providing a buffer chamber 300 on the buffer member 3, is conducive to improving the uniformity of the purge gas blown out by the wind knife 5, and also driving the wind knife 5 to rotate by the rotary drive unit 2, is conducive to increasing the drying area of the wind knife 5 and the solvent volatilization efficiency, and is conducive to improving the consistency of the drying of the front and rear parts of the perovskite film, thereby improving the problem of inconsistent crystallization of the front and rear parts of the perovskite film caused by the solution of the prior art in which the wind knife 5 fixedly blows the perovskite film, and thus is conducive to improving the performance of the perovskite film.

[0039] Based on the above overall introduction, an exemplary structure of the film drying device described in this embodiment is as follows: Figure 1 As shown in . As a preferred embodiment, the buffer member 3 in this embodiment includes a ring-shaped fixed ring 301, and a movable ring 302 rotatably arranged on the fixed ring 301, and a buffer chamber 300 is formed between the fixed ring 301 and the movable ring 302. The above-mentioned inlet 3011 is arranged on the fixed ring 301, the outlet 3021 is arranged on the movable ring 302, and the movable ring 302 rotates synchronously with the wind knife 5 through the connecting pipe 502 connected between the outlet 3021 and the wind knife 5. Here, the cooperation between the fixed ring 301 and the movable ring 302 is conducive to the formation of the buffer chamber 300, so that the movable ring 302 rotates synchronously with the wind knife 5 through the connecting pipe 502, which is conducive to ensuring that the buffer member 3 can still transport the purge gas into the wind knife 5 during the rotation of the wind knife 5, thereby ensuring the wind outlet effect of the wind knife 5 during the rotation.

[0040] During specific implementation, the rotary drive unit 2 in this embodiment can adopt a motor, which is a mature product and easy to arrange and implement. In addition, the fixed ring 301 can be fixed on the frame, and the buffer chamber 300 is annular in shape following the setting of the buffer member 3. The inlet 3011 is relatively arranged on the top of the fixed ring 301, and the outlet 3021 is relatively arranged on the movable ring 302. The two outlets 3021 are respectively connected to the two ends of the air knife 5 through the connecting pipe 502. The purge gas flows into the buffer chamber 300 through the two inlets 3011, and is then transported to the air knife 5 through the connecting pipe 502, which is conducive to improving the uniformity of the air outlet of the air knife 5. Of course, during specific implementation, the number and position of the inlet 3011 and the outlet 3021 can be adjusted according to the use requirements.

[0041] In some embodiments, as Figure 4 and Figure 5 As shown in , the fixed ring 301 is provided with an annular groove coaxially arranged with the power output shaft. The movable ring 302 is rotatably arranged in the annular groove, and sealing structures are respectively provided between the inner and outer sides of the movable ring 302 and the side walls of the annular groove. Here, the annular groove has a simple structure and is easy to process and form. The provision of a sealing structure helps to reduce the waste of purge gas, thereby helping to improve the utilization rate of purge gas. The sealing structure can adopt the sealing ring 303 in the prior art, which has a simple structure. To improve the performance of the sealing ring 303, mounting grooves for mounting the sealing ring 303 can be provided on the side walls of the inner annular groove and on the outer periphery of the movable ring 302.

[0042] To enhance the stability of the movable ring 302 during rotation, a limiting surface is provided on the fixed ring 301, abutting against the top of the movable ring 302 to restrict its upward movement. Furthermore, a limiting block 3012 is provided on the fixed ring 301 to prevent the movable ring 302 from dislodging from the annular groove when installed. The limiting surface and the limiting block 3012 cooperate to restrict the axial movement of the movable ring 302 on the buffer 3, thereby ensuring that the movable ring 302 can only rotate about its own axis when pulled by the connecting tube 502, thereby rotating synchronously with the air knife 5. Multiple limiting blocks 3012 are arranged at intervals along the circumference of the fixed ring 301 to provide a good limiting effect.

[0043] In this embodiment, the middle portion of the air knife 5 is connected to the power output shaft of the rotary drive unit 2, and the air knife 5 has two parts located on either side of the power output shaft. During the synchronous rotation of the air knife 5 and the movable ring 302, the drying area formed is at least a circle with the power output shaft as the center and a radius of half the length of the air knife 5. Therefore, the air knife 5 can simultaneously dry the front and rear parts of the perovskite film. Compared with the conventional solution in which the air knife 5 is fixed to form a long strip of drying area, which can only dry the front part and then the rear part, the rotating air knife 5 in this embodiment can help increase the drying area, thereby helping to improve the consistency of the drying effect of the perovskite film.

[0044] As a preferred embodiment, in this embodiment, the air knife 5 is rotatably mounted on the power output shaft via a rotating shaft 401. The axis of the rotating shaft 401 is perpendicular to the axis of the power output shaft, and the angle between the air outlet direction of the air knife 5 and the perovskite film is adjustable. Here, the axis of the rotating shaft 401 and the axis of the power output shaft are perpendicular, which facilitates adjustment of the angle between the air outlet direction of the air knife 5 and the perovskite film, thereby facilitating increased flexibility in the use of the air knife 5. The angle here is not equal to 90° to prevent the purge gas blown out of the air outlet from directly impacting the perovskite film, thereby facilitating the avoidance of any impact on the surface of the perovskite film.

[0045] In terms of specific structure, Figure 2 and Figure 3 As shown in FIG, a mounting base 4 is provided on the power output shaft, and the wind knife 5 is rotatably mounted on the mounting base 4 via a rotating shaft 401. A locking portion is provided between the wind knife 5 and the mounting base 4, and the locking portion is used to lock the wind knife 5, which has been rotated into position, on the mounting base 4. In this embodiment, the provision of the mounting base 4 facilitates the rotatable installation of the wind knife 5 on the power output shaft, and the provision of the locking portion locks the wind knife 5, which has been rotated into position, on the mounting base 4, thereby improving the stability of the wind knife 5 during use.

[0046] The rotating shafts 401 can be mounted on the mounting base 4. Connecting plates 501 are provided on the top of the air knife 5, corresponding to the rotating shafts 401 and extending upward. The rotating shafts 401 are respectively passed through the corresponding connecting plates 501, so that the air knife 5 can rotate around the axis of the rotating shafts 401. Of course, the rotating shafts 401 can also be mounted on the air knife 5, as long as the installation requirements of the air knife 5 on the mounting base 4 are met.

[0047] In some embodiments, as Figure 3As shown in FIG, the locking portion includes a locking member 6 provided through the wind knife 5, and a plurality of locking grooves 402 spaced apart along the rotation center of the wind knife 5. The locking member 6 can be selectively detachably connected to the locking groove 402 to lock the wind knife 5 in place on the mounting base 4. In a specific implementation, the locking member 6 can be a bolt, and the locking grooves 402 each have an internal thread. The wind knife 5 in place can be locked on the mounting base 4 by screwing the locking member 6 to the corresponding locking groove 402.

[0048] like Figure 4 As shown in , in this embodiment, the connecting pipe 502 can be made of a hard pipe, and the outlet 3021 end of the connecting pipe 502 is connected to the wind knife 5. A rotary joint 503 is provided between the inlet 3011 end of the connecting pipe 502 and the outlet 3021 of the buffer 3. The rotary joint 503 can be a product in the prior art. As a structural example, the rotary joint 503 has a first part 5031 and a second part 5032 rotatably connected to the first part 5031. The axis of the first part 5031 is perpendicular to the axis of the second part 5032, so that the entire rotating structure is in an "L" shape. The axis of the first part 5031 is coaxial with the rotating shaft 401, and the free end of the first part 5031 is connected to the inlet 3011 end of the connecting pipe 502, and the free end of the second part 5032 is connected to the outlet 3021 of the buffer 3.

[0049] When the air knife 5 is driven to rotate, the connection pipe 502 and the rotary joint 503 cooperate to cause the movable ring 302 to rotate synchronously with the air knife 5. When the air knife 5 rotates about the rotating shaft 401, the second portion 5032 rotates relative to the first portion 5031 to ensure that the connection pipe 502 is connected, and the purge gas continues to be supplied to the air knife 5.

[0050] When it is necessary to adjust the angle between the air outlet of the wind knife 5 and the perovskite film, the lock between the locking member 6 and the corresponding locking groove 402 is released, and then the air outlet of the wind knife 5 is rotated to the target angle, and then the locking member 6 and the corresponding locking groove 402 are screwed together. Here, the arrangement of the locking member 6 and the plurality of locking grooves 402 in the locking portion is not only convenient for arrangement and operation, but also has a good locking effect. Of course, in addition to bolts, the locking member 6 can also use a locking pin, and the wind knife 5 can also be locked on the mounting seat 4 by inserting the locking pin in the corresponding locking groove 402.

[0051] The thin film drying device in this embodiment also includes a lifting unit 1. The power output end 201 of the lifting unit 1 is connected to the rotary drive unit 2, which is used to drive the rotary drive unit 2 to synchronously raise and lower the buffer 3 and the air knife 5. The provision of the lifting unit 1 facilitates adjustment of the distance between the air outlet of the air knife 5 and the perovskite film according to the desired use of the perovskite film, thereby increasing the flexibility of the device during use. Preferably, the distance between the air outlet of the air knife 5 and the perovskite film can be 1 mm to 3 mm, which achieves the best drying effect for the perovskite film.

[0052] The lifting part 1 in this embodiment can be a cylinder, which can be fixed to a mounting carrier such as a frame. The power output end 201 of the cylinder is connected to the motor, and the fixing ring 301 is also connected to the power output end 201 of the cylinder. The cylinder can drive the air knife 5 and the buffer member 3 to move up and down through the motor, thereby adjusting the distance between the air outlet and the perovskite film. In a specific implementation, for example, the distance between the air outlet of the air knife 5 and the perovskite film can be 1mm, 1.5mm, 2mm, 2.5mm or 3mm, etc. Of course, the specific value of the distance here can also be adaptively adjusted according to demand.

[0053] Furthermore, a measuring part for measuring the distance between the air outlet and the perovskite film can be provided on the wind knife 5. In specific implementation, the measuring part can adopt products such as infrared rangefinder, which is easy to arrange on the wind knife 5 and has a good ranging effect.

[0054] As a preferred embodiment, the external air supply unit in this embodiment includes a first air supply unit 7 for outputting nitrogen or compressed air. The first air supply unit 7 is connected to the buffer chamber 300 via a pipeline 9, facilitating the delivery of nitrogen or compressed air into the buffer chamber 300, thereby achieving a better drying effect. In addition, the external air supply unit also includes a second air supply unit 8 for outputting a gaseous antisolvent, wherein the gaseous antisolvent includes any one of isopropyl alcohol, ethyl acetate, chlorobenzene, toluene, and diethyl ether.

[0055] Among them, the second gas supply part 8 is also connected to the buffer chamber 300 through the pipeline 9. The second gas supply part 8 can adopt the vaporization device in the prior art to convert the liquid anti-solvent into a gaseous anti-solvent. The gaseous anti-solvent is conducive to extracting the solvent that is difficult to volatilize in the perovskite film, greatly improving the extraction efficiency of the solvent in the perovskite film. Compared with the traditional solution of blowing out only nitrogen or compressed air, it is conducive to achieving uniform volatilization of the solvent in the perovskite film in a shorter time, thereby helping to improve the drying efficiency of the perovskite film. Among them, the buffer chamber 300 can also mix the gases delivered by the first gas supply part 7 and the second gas supply part 8, so as to help improve the uniformity of the outlet gas of the purge gas.

[0056] In addition, if Figure 1As shown in FIG, a first control valve 10 is provided between the first air supply portion 7 and the inlet 3011 of the buffer member 3, and a second control valve 11 is provided between the second air supply portion 8 and the buffer member 3. Here, the first control valve 10 is used to control the flow between the first air supply portion 7 and the inlet 3011, and the second control valve 11 is used to control the flow between the second air supply portion 8 and the inlet 3011 of the buffer member 3.

[0057] Preparatory steps for the thin film drying device described in this embodiment include injecting an antisolvent into the vaporizer of the second air supply unit 8. After coating is completed, the lifting unit 1 adjusts the distance between the air outlet of the air knife 5 and the perovskite film to the target distance. The motor is started to adjust the speed of the air knife 5 to the target speed and set the rotation time. The first control valve 10 and the second control valve 11 are opened to enable the air knife 5 to purge the perovskite film. During operation, the speed and rotation time of the air knife 5, the amount of antisolvent used, and the distance between the air outlet and the perovskite film can be determined according to the actual application requirements.

[0058] The thin film drying device of this embodiment drives the wind knife 5 to rotate by the rotary drive unit 2. The setting of the buffer member 3 and the angle between the air outlet direction of the wind knife 5 and the perovskite film are adjustable, which can be beneficial to the wet film drying process of the perovskite film. Compared with the traditional solution of fixed setting of the wind knife 5, it is beneficial to achieve a rapid and uniform drying process of a large-area perovskite film, and makes the perovskite film smoother and the crystallization more uniform, so that the prepared battery has better photovoltaic performance.

[0059] In addition, this embodiment also relates to a thin film processing device, including a coating device and the thin film drying device described above, which are sequentially arranged along a conveying path of a perovskite substrate.

[0060] The thin film processing equipment described in this embodiment facilitates the coating and drying of the perovskite film on the substrate by sequentially arranging a coating device and a thin film drying device on the conveying path of the perovskite substrate, thereby facilitating the continuous production and processing efficiency of the perovskite film.

[0061] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A thin film drying device for drying a perovskite thin film, characterized in that: The film drying device comprises an air knife (5), a buffer member (3) having a buffer cavity (300), and a rotary drive unit (2); The wind knife (5) is connected to the power output shaft of the rotary drive unit (2) and is driven to rotate by the rotary drive unit (2); The inlet (3011) of the buffer chamber (300) is connected to an external air supply unit, and the outlet (3021) is connected to the air knife (5). The external air supply unit delivers purge gas to the air knife (5) through the buffer member (3).

2. The thin film drying device according to claim 1, characterized in that: The buffer member (3) comprises a ring-shaped fixed ring (301) and a movable ring (302) rotatably arranged on the fixed ring (301), and the buffer cavity (300) is formed between the fixed ring (301) and the movable ring (302); The inlet (3011) is provided on the fixed ring (301), the outlet (3021) is provided on the movable ring (302), and the movable ring (302) rotates synchronously with the wind knife (5) via a connecting pipe (502) connected between the outlet (3021) and the wind knife (5).

3. The thin film drying device according to claim 2, characterized in that: The fixed ring (301) is provided with an annular groove coaxially arranged with the power output shaft, the movable ring (302) is rotatably arranged in the annular groove, and sealing structures are respectively provided between the inner and outer sides of the movable ring (302) and the side walls of the annular groove.

4. The thin film drying device according to claim 1, characterized in that: The wind knife (5) is rotatably mounted on the power output shaft via a rotating shaft (401), the axis of the rotating shaft (401) is perpendicular to the axis of the power output shaft, and the angle between the wind outlet direction of the wind knife (5) and the perovskite film is adjustable.

5. The thin film drying device according to claim 4, characterized in that: A mounting seat (4) is provided on the power output shaft, and the wind knife (5) is rotatably mounted on the mounting seat (4) via the rotating shaft (401); A locking portion is provided between the wind knife (5) and the mounting seat (4), and the locking portion is used to lock the wind knife (5) rotated into position on the mounting seat (4).

6. The thin film drying device according to claim 5, characterized in that: The locking portion includes a locking piece (6) passing through the wind knife (5) and a plurality of locking grooves (402) spaced along the rotation center of the wind knife (5). The locking piece (6) can be selectively connected to the locking groove (402) in a detachable manner to lock the wind knife (5) rotated into place on the mounting seat (4).

7. The thin film drying device according to claim 1, characterized in that: The external air supply part comprises a first air supply part (7) for outputting nitrogen or compressed air.

8. The thin film drying device according to claim 7, characterized in that: The external gas supply part further comprises a second gas supply part (8) for outputting a gaseous anti-solvent, and the gaseous anti-solvent comprises any one of isopropyl alcohol, ethyl acetate, chlorobenzene, toluene, and ether.

9. The thin film drying device according to claim 1, characterized in that: It also includes a lifting part (1), wherein the power output end (201) of the lifting part (1) is connected to the rotary drive part (2) and is used to drive the rotary drive part (2) to drive the buffer part (3) and the wind knife (5) to rise and fall synchronously.

10. A thin film processing device, characterized in that: The device comprises a coating device and a thin film drying device according to any one of claims 1 to 9, which are sequentially arranged along a conveying path of a perovskite substrate.

Images