Target material gasket grinding equipment

Abstract

The utility model belongs to the technical field of target material gaskets, and particularly relates to target material gasket polishing equipment. The target gasket polishing equipment comprises a rack, a feeding system, a grabbing system, a grinding system and a cleaning system are arranged on the rack, the feeding system is located on one side of the rack and composed of a vibration feeding machine and a feeding groove, and the cleaning system is located on the other side of the rack. The grabbing system is composed of a longitudinal guide rail, a transverse guide rail and a pneumatic grabbing device which are connected in a sliding mode, a vacuum suction cup is arranged at the bottom of the pneumatic grabbing device, the grinding system is located on the side, close to the feeding system, in the rack, and the grinding system is a grinding wheel horizontally arranged relative to the ground. And the cleaning system is located on one side of the grinding system in the rack, and the cleaning system is an ultrasonic cleaner.

Description

Technical Field

[0001] The utility model belongs to the technical field of target material gaskets, and particularly relates to a target material gasket grinding device. Background Art

[0002] ITO (Indium Tin Oxide) target is a functional ceramic material. It is a black-gray ceramic semiconductor formed by mixing indium oxide and tin oxide powder in a certain proportion and then undergoing a series of production processes at high temperature.

[0003] During the sintering process of ITO (indium tin oxide) target, alumina gaskets are required as target support. A large number of gaskets are used in the sintering process. During the high-temperature sintering process, the gaskets and target materials will melt when in contact. If they are not treated during subsequent repeated use, the gaskets and target materials will stick together. Since alumina gaskets are consumables and the price of high-purity alumina gaskets is relatively high, manual grinding during repeated use is time-consuming and labor-intensive. Utility Model Content

[0004] The technical problem to be solved by the utility model is that melting will occur when the gasket contacts the target material during high-temperature sintering. If it is not processed during subsequent repeated use, the gasket and the target material will stick together, and manual grinding of the gasket is time-consuming and labor-intensive.

[0005] In order to solve the above technical problems, the technical solution provided by the utility model is a target material gasket grinding equipment, including a frame, on which a feeding system, a gripping system, a grinding system and a cleaning system are respectively arranged. The feeding system is located on one side of the frame and is composed of a vibrating loader and a feeding trough. The gripping system is composed of longitudinal guide rails, transverse guide rails and a pneumatic gripper that are slidably connected to each other. A vacuum suction cup is provided at the bottom of the pneumatic gripper. The grinding system is located on the side of the frame close to the feeding system, and the grinding system is a grinding wheel arranged horizontally with the ground. The cleaning system is located on one side of the grinding system in the frame, and the cleaning system is an ultrasonic cleaner.

[0006] Furthermore, a device host is provided at the bottom of the vibration loader, and the device host is electrically connected to the feeding system, the gripping system, the grinding system and the cleaning system.

[0007] Furthermore, the feeding trough is an L-shaped structure as a whole, and the feeding trough is horizontally arranged on one side of the top of the vibration loader.

[0008] Furthermore, the longitudinal guide rail and the transverse guide rail are both screw guide rails controlled by an electric motor, and the pneumatic gripper is slidably connected to the transverse guide rail via the electric motor.

[0009] Furthermore, the pneumatic grabber is a telescopic cylinder, the vacuum suction cup is connected to the protruding end of the pneumatic grabber, and a nozzle is provided on one side of the vacuum suction cup.

[0010] Furthermore, the grinding wheel is a corundum grinding wheel, and the bottom of the grinding wheel is driven by a motor, and protective plates are provided on both sides above the grinding wheel and located on the frame.

[0011] Furthermore, a slidingly connected buckle cover is provided on the top of the ultrasonic cleaner.

[0012] The advantages of this utility model compared with the prior art are:

[0013] This target gasket grinding equipment can grind and clean the gasket by automatic feeding, so that the alumina gasket can be reused, extending the service life of the alumina gasket, saving manpower and improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a top view of a target gasket grinding device of the utility model.

[0015] Figure 2 This is a front view of a target gasket grinding device according to the present invention.

[0016] As shown in the figure:

[0017] 1. Frame; 2. Vibrating loader; 3. Feed chute; 4. Longitudinal guide rail; 5. Horizontal guide rail; 6. Pneumatic gripper; 7. Vacuum suction cup; 8. Grinding wheel; 9. Ultrasonic cleaner; 10. Equipment main unit; 11. Nozzle; 12. Protective plate; 13. Buckle cover; 14. Alumina gasket. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0019] In the description of the utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "provided with," "connected," etc. should be understood in a broad sense. For example, "connected" can mean a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0020] Example 1:

[0021] As the instruction manual Figure 1-2 As shown, a target gasket grinding device includes a frame 1, on which a feeding system, a gripping system, a grinding system and a cleaning system are respectively provided. The feeding system is located on one side of the frame 1 and is composed of a vibrating feeder 2 and a feeding trough 3. The feeding trough 3 is an L-shaped structure as a whole, and the feeding trough 3 is horizontally arranged on the top side of the vibrating feeder 2. A device host 10 is provided at the bottom of the vibrating feeder 2. The device host 10 is electrically connected to the feeding system, the gripping system, the grinding system and the cleaning system. The gripping system is composed of a longitudinal guide rail 4, a transverse guide rail 5 and a pneumatic gripper 6 that are slidably connected to each other. The longitudinal guide rail 4 and the transverse guide rail 5 are both screw guide rails controlled by motors, and the pneumatic The grabber 6 is slidably connected to the transverse guide rail 5 through an electric motor. A vacuum suction cup 7 is provided at the bottom of the pneumatic grabber 6. The pneumatic grabber 6 is a telescopic cylinder. The vacuum suction cup 7 is connected to the protruding end of the pneumatic grabber 6. A nozzle 11 is provided on one side of the vacuum suction cup 7. The grinding system is located on the side of the frame 1 close to the feeding system, and the grinding system is a grinding wheel 8 set horizontally with the ground. The grinding wheel 8 is a corundum grinding wheel 8, and the bottom of the grinding wheel 8 is driven by an electric motor. Protective plates 12 are provided on both sides above the grinding wheel 8 on the frame 1. The cleaning system is located on one side of the grinding system in the frame 1, and the cleaning system is an ultrasonic cleaner 9. The top of the ultrasonic cleaner 9 is provided with a slidingly connected buckle cover 13.

[0022] During the specific implementation of the present invention, the vibrating loader 2 moves the alumina gasket 14 through the feeding trough 3 to the specified position of the pneumatic gripper 6, and then the alumina gasket 14 is adsorbed by the vacuum suction cup 7 through the vacuum suction method, and the pneumatic gripper 6 moves to the top of the grinding wheel 8 with the cooperation of the longitudinal guide rail 4 and the transverse guide rail 5, and the adsorbed alumina gasket 14 is lowered by the pneumatic gripper 6 by extending the vacuum suction cup 7, so that the alumina gasket 14 is abutted against one side of the grinding wheel 8 to grind the high point of the surface. After the grinding is completed, the pneumatic gripper 6 moves to the top of the ultrasonic cleaner 9 with the cooperation of the longitudinal guide rail 4 and the transverse guide rail 5, the vacuum suction cup 7 is released, and high-pressure gas is sprayed from the nozzle 11 on one side of the pneumatic gripper 6 to separate the alumina gasket 14 from the vacuum suction cup 7, so that the alumina gasket 14 enters the interior of the ultrasonic cleaner 9 for ultrasonic cleaning, completing the entire processing flow.

[0023] The above description of the present invention and its embodiments is non-limiting. The specific embodiments shown in the specific embodiments are only one embodiment of the present invention, and the actual structure is not limited thereto. In short, if a person skilled in the art is inspired by the above, and does not deviate from the purpose of the present invention, without creatively designing a structure and embodiment similar to the technical solution, they shall fall within the scope of protection of the present invention.

Claims

1. A target gasket grinding device, comprising a frame, characterized in that: The frame is respectively provided with a feeding system, a gripping system, a grinding system and a cleaning system. The feeding system is located on one side of the frame and is composed of a vibrating loader and a feeding trough. The gripping system is composed of longitudinal guide rails, transverse guide rails and a pneumatic gripper that are slidably connected to each other. A vacuum suction cup is provided at the bottom of the pneumatic gripper. The grinding system is located on the side of the frame close to the feeding system, and the grinding system is a grinding wheel arranged horizontally with the ground. The cleaning system is located on one side of the grinding system in the frame, and the cleaning system is an ultrasonic cleaner.

2. The target gasket grinding device according to claim 1, characterized in that: A main device is provided at the bottom of the vibration loader, and the main device is electrically connected to the feeding system, the gripping system, the grinding system and the cleaning system.

3. The target gasket grinding device according to claim 1, characterized in that: The feeding trough is an L-shaped structure as a whole, and the feeding trough is horizontally arranged on one side of the top of the vibration feeder.

4. The target gasket grinding device according to claim 1, characterized in that: The longitudinal guide rail and the transverse guide rail are both screw guide rails controlled by an electric motor, and the pneumatic gripper is slidably connected to the transverse guide rail through the electric motor.

5. The target gasket grinding device according to claim 1, characterized in that: The pneumatic material grabber is a telescopic cylinder, the vacuum suction cup is connected to the protruding end of the pneumatic material grabber, and a nozzle is provided on one side of the vacuum suction cup.

6. The target gasket grinding device according to claim 1, characterized in that: The grinding wheel is a corundum grinding wheel, and the bottom of the grinding wheel is driven by an electric motor. Protective plates are arranged on both sides of the upper side of the grinding wheel and located on the frame.

7. The target gasket grinding device according to claim 1, characterized in that: The top of the ultrasonic cleaner is provided with a slidingly connected buckle cover.

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