Cantilever magnetic probe assembly
Through the design of the cantilever magnetic probe assembly, the difficulty of fixing probes in high and low temperature probe tables is solved, the probe body is flexible to adjust and stabilize downforce, the test accuracy and adaptability are improved, and the damage risk and cost are reduced.
Patent Information
- Application Number
- CN202422043379.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-22
- Publication Date
- 2025-08-19
- Estimated Expiration
- 2034-08-22
AI Technical Summary
The probe fixing method of the existing high and low temperature probe tables has difficulty replacing, assembly difficulty, poor adaptability, and unstable downforce at the probe detection end is difficult to adjust, which affects the test accuracy.
The cantilever magnetic probe assembly is adopted, including a mount, cantilever block and rotation shaft. The cantilever block is adsorbed through the magnetic block to realize the rotation adjustment of the probe body, provide stable downforce, and adapt to samples to be tested at different heights.
It improves the versatility of the probe assembly and the testing accuracy of the high and low temperature probe table, is easy to install, flexible adjustment, avoids damage to the sample and reduces costs.
Smart Images

Figure CN223244668U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of probe structures, in particular to a cantilever magnetic suction probe component. Background Art
[0002] High and low temperature probe stations are usually used for the development and research of semiconductors, electroluminescent materials, and flexible electronic materials. The high and low temperature probe stations are provided with a probe structure, and the probe is used to contact the sample to be tested and obtain its electrical signal, so as to achieve the purpose of testing and analyzing the electrical properties of the sample to be tested. At present, the probe fixing method of the high and low temperature probe station is mainly fixed probe. The fixed probe structure has the disadvantages that the probe is difficult to replace and the probe structure is difficult to assemble. At the same time, the adaptability of the fixed probe structure is poor. The downward pressure of the probe detection end on the sample to be tested is provided by its own elastic force. When testing samples of different heights, the downward pressure of the detection end is not stable enough and difficult to adjust. When the downward pressure of the detection end is too large, it is easy to puncture the sample to be tested. When the downward pressure of the detection end is too small, it is difficult to ensure the stable contact between the probe detection end and the sample to be tested. This will reduce the test accuracy of the high and low temperature probe station on the sample to be tested. Utility Model Content
[0003] In view of this, in order to improve the versatility of the probe structure of the high and low temperature probe station, so that it can adaptively adjust its downward pressure on samples of different heights to improve the test accuracy of the high and low temperature probe station, the utility model provides a cantilever magnetic probe assembly, including a mounting base, a cantilever block, a rotating shaft and a probe body;
[0004] The mounting base includes a fixed block and a connecting side plate. A magnetic block is provided at the bottom of the fixed block. The connecting side plate is connected to the side of the fixed block. Both the fixed block and the connecting side plate are provided with a rotating mounting hole.
[0005] The cantilever block is provided with a probe hole and a shaft mounting hole, the rotating shaft passes through the shaft mounting hole, and both ends of the shaft mounting hole are rotatably supported in the two rotating mounting holes, so that the cantilever block can be rotatably set on the mounting seat;
[0006] The end of the probe body is confined in the probe hole, the probe hole is located at the end of the cantilever block, and the magnetic block is located below the end of the cantilever block with the probe hole.
[0007] Furthermore, the magnetic block is a magnet with a rectangular block structure, and the connecting side plate and the fixing block clamp and fix the magnetic block.
[0008] Furthermore, a locking hole is provided on the cantilever block, a locking screw is provided in the locking hole, the locking screw is threadedly connected to the locking hole, and the locking screw presses the probe body.
[0009] Furthermore, the locking hole is perpendicular to the probe hole.
[0010] Furthermore, one end of the probe body is a limiting end, and the other end is a detecting end. The detecting end is bent, and the limiting end is limited in the probe hole.
[0011] Furthermore, the rotating shaft is made of a conductor, the probe hole is communicated with the shaft mounting hole, and the limiting end of the probe body is in contact with the rotating shaft.
[0012] Furthermore, a limiting hole is provided on the surface of the rotating shaft, and the limiting end of the probe body extends into the limiting hole.
[0013] Furthermore, the shaft mounting hole on the connecting side plate passes through the connecting side plate, and the end of the rotating shaft is also connected to a signal wire, and the signal wire passes through the connecting side plate.
[0014] Furthermore, it also includes a fixed base, a magnetic support plate is provided in the middle of the fixed base, and the mounting seat is supported on the magnetic support plate.
[0015] Furthermore, a rotatable mounting groove is provided on the fixed block, the cantilever block is rotatably arranged in the mounting groove, and the magnetic block is located below the mounting groove.
[0016] The beneficial effects of the cantilever magnetic probe assembly of the utility model are as follows: the probe assembly includes a mounting base, a cantilever block, a rotating shaft and a probe body; a magnetic block is provided at the bottom of the fixed block, the cantilever block is rotatably supported on the fixed block by the rotating shaft, a probe hole is provided on the cantilever block, the end of the probe body is limited in the probe hole, and the magnetic block is located below the end of the cantilever block with the probe hole. The rotating structure of the cantilever block can make the detection end of the probe body fixed on the cantilever block rotate around the rotating shaft, so that the probe assembly can adjust the height of the detection end of the probe body within a larger range to match samples of different heights (thicknesses) to be tested, and the magnetic block under the cantilever block can adsorb the end of the cantilever block connected to the probe body, providing a stable downward pressure for the detection end of the probe body, thereby achieving the effect of improving the versatility of the probe assembly structure and improving the test accuracy of high and low temperature probe stations.
[0017] The probe assembly uses a micro-cantilever structure to control the downward pressure of the magnetic probe to avoid piercing the sample or failing to reach the sample. It has the advantages of easy installation, flexible adjustment, avoidance of sample damage, strong adaptability and reduced costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 It is a schematic diagram of the overall structure of a cantilever magnetic probe assembly of the utility model.
[0019] Figure 2This is a schematic diagram of the dispersed structure of a cantilever magnetic probe assembly of the utility model.
[0020] In the above figure: 1-fixed block, 2-connecting side plate, 21-axis mounting hole, 3-cantilever block, 31-rotation mounting hole, 32-probe hole, 33-locking hole, 4-magnetic block, 5-rotation axis, 51-limiting hole, 6-probe body, 61-detection end. DETAILED DESCRIPTION
[0021] In order to make the purpose, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described below with reference to the accompanying drawings.
[0022] Please refer to Figure 1 and Figure 2 A cantilever magnetic probe assembly of the present invention includes a mounting base, a cantilever block 3, a rotating shaft 5 and a probe body 6.
[0023] The mounting base is a rectangular block structure, and the mounting base includes a fixed block 1 and a connecting side plate 2. A magnetic block 4 is provided at the bottom of the fixed block 1. The connecting side plate 2 is connected to the side of the fixed block 1 by screws. The magnetic block 4 is a magnet with a rectangular block structure. The connecting side plate 2 and the fixed block 1 clamp and fix the magnetic block 4.
[0024] The fixing block 1 and the connecting side plate 2 are both provided with a rotation mounting hole 32.
[0025] The cantilever block 3 is made of a metal that can be attracted by a magnet. A probe hole 32 and a shaft mounting hole 21 are provided on the cantilever block 3. The rotating shaft 5 passes through the shaft mounting hole 21, and both ends of the shaft mounting hole 21 are rotatably supported in the two rotating mounting holes 32, so that the cantilever block 3 can be rotatably set on the mounting seat.
[0026] The end of the probe body 6 is limited to the probe hole 32, and the probe hole 32 is located at the end of the cantilever block 3. The fixed block 1 is also provided with a rotating mounting groove, and the cantilever block 3 is rotatably set in the mounting groove. The magnetic block 4 is located below the mounting groove, and the magnetic block 4 is located below the end of the cantilever block 3 with the probe hole 32.
[0027] The rotating structure of the cantilever block 3 can make the end of the probe body 6 fixed on the cantilever block 3 rotate around the rotating shaft 5, so that the probe assembly can adjust the height of the detection end of the probe body 6 within a large range to match the different installation heights of the sample to be tested (the installation height of the sample to be tested is usually determined by the thickness of the sample to be tested) and the magnetic block 3 below the cantilever block 3 can adsorb the end of the cantilever block connected to the probe body 6, providing a stable downward pressure for the probe body 6, thereby achieving the versatility of the probe assembly structure and improving the high and low temperature probe station test accuracy. The probe assembly uses a micro-cantilever structure to magnetically control the downward pressure of the probe body 6, avoiding the problem of the probe body piercing the sample to be tested or not being able to contact the sample to be tested. It has the advantages of easy installation, flexible adjustment, avoidance of damage to the sample to be tested, strong adaptability and low cost.
[0028] Preferably, the cantilever block 3 is further provided with a locking hole 33, which is in communication with the probe hole 32 and is perpendicular to the probe hole 32. A locking screw is provided in the locking hole 33 and is threadedly connected to the locking hole 33. The locking screw presses the probe body 6, thereby fixing the probe body 6 to the cantilever block 3, ensuring that the probe body can rotate synchronously with the cantilever block 3 and preventing the probe body from falling off from the probe hole 32.
[0029] Preferably, one end of the probe body 6 is a limiting end, and the other end is a detection end 61. The end of the detection end 61 is bent, and the limiting end is limited in the probe hole 32. The detection end is used to press down the sample to be tested and contact the sample to be tested. The rotating shaft 5 is made of a conductor, and the probe hole 32 is connected to the shaft mounting hole 21. The limiting end of the probe body 6 is in contact with the rotating shaft 5. The shaft mounting hole 21 on the connecting side plate 2 passes through the connecting side plate 2. The end of the rotating shaft 5 is also connected to a signal wire. The signal wire passes through the connecting side plate 2 and is connected to the signal processor in the probe station. The signal wire is used to transmit the electrical signal measured by the probe body 6 to the signal processor in the high and low temperature.
[0030] Preferably, a limiting hole 51 is further provided on the surface of the rotating shaft 5 , and the limiting end of the probe body 6 extends into the limiting hole 51 , thereby ensuring that the rotating shaft 5 and the probe body 6 can fully contact each other.
[0031] Preferably, the probe assembly also includes a fixed base, a magnetic support plate is provided in the middle of the fixed base, the magnetic support plate is made of a magnet or a metal that can be adsorbed by a magnet, and the mounting seat is supported on the magnetic support plate, so that the mounting seat can be adsorbed and fixed on the fixed base through the magnetic block 4, and ensure that the position of the mounting seat can be easily adjusted.
[0032] In this document, directional terms such as front, back, top, and bottom are defined based on the positions of components in the accompanying drawings and relative to each other, and are intended only for clarity and convenience in describing the technical solution. It should be understood that the use of these directional terms should not limit the scope of protection claimed in this application.
[0033] In the absence of conflict, the above embodiments and features in the embodiments may be combined with each other.
[0034] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A cantilever magnetic probe assembly, characterized in that: It includes a mounting base, a cantilever block, a rotation axis and a probe body; The mounting base includes a fixed block and a connecting side plate. A magnetic block is provided at the bottom of the fixed block. The connecting side plate is connected to the side of the fixed block. Both the fixed block and the connecting side plate are provided with a rotating mounting hole. The cantilever block is provided with a probe hole and a shaft mounting hole, the rotating shaft passes through the shaft mounting hole, and both ends of the shaft mounting hole are rotatably supported in the two rotating mounting holes, so that the cantilever block can be rotatably set on the mounting seat; The end of the probe body is confined in the probe hole, the probe hole is located at the end of the cantilever block, and the magnetic block is located below the end of the cantilever block with the probe hole.
2. The cantilever magnetic probe assembly according to claim 1, characterized in that: The magnetic block is a magnet with a rectangular block structure, and the connecting side plate and the fixing block clamp and fix the magnetic block.
3. The cantilever magnetic probe assembly according to claim 1, characterized in that: The cantilever block is further provided with a locking hole, in which a locking screw is provided. The locking screw is threadedly connected to the locking hole, and the locking screw presses the probe body.
4. The cantilever magnetic probe assembly according to claim 3, characterized in that: The locking hole is perpendicular to the probe hole.
5. The cantilever magnetic probe assembly according to claim 1, characterized in that: One end of the probe body is a limiting end, and the other end is a detecting end. The detecting end is bent, and the limiting end is limited in the probe hole.
6. The cantilever magnetic probe assembly according to claim 5, characterized in that: The rotating shaft is made of a conductor, the probe hole is communicated with the shaft mounting hole, and the limiting end of the probe body is in contact with the rotating shaft.
7. The cantilever magnetic probe assembly according to claim 6, characterized in that: The surface of the rotating shaft is further provided with a limiting hole, and the limiting end of the probe body extends into the limiting hole.
8. The cantilever magnetic probe assembly according to claim 7, characterized in that: The shaft mounting hole on the connecting side plate passes through the connecting side plate. The end of the rotating shaft is also connected to a signal wire, and the signal wire passes through the connecting side plate.
9. The cantilever magnetic probe assembly according to claim 1, characterized in that: It also includes a fixed base, a magnetic support plate is provided in the middle of the fixed base, and the mounting seat is supported on the magnetic support plate.
10. The cantilever magnetic probe assembly according to claim 1, characterized in that: The fixed block is further provided with a rotation installation slot, the cantilever block is rotatably arranged in the installation slot, and the magnetic block is located below the installation slot.