Silicon wafer pickling basket with limiting function

Abstract

The utility model discloses a silicon wafer pickling basket with a limiting function, which comprises a basket and a handle arranged on the basket, the basket is of a hollow structure, and a plurality of mounting grooves for mounting silicon wafers are arranged on the basket. An end table is arranged at the upper end of the basket, clamping blocks are arranged on the middle portion and the end portion of the end table, a movable limiting piece is further arranged at the upper end of the basket, clamping heads are arranged at the two ends of the limiting piece, the limiting piece can be transversely arranged in the middle of the basket or arranged on the end table on the side face in a contained mode, and the clamping heads of the limiting piece are clamped below the limiting piece. According to the pickling basket, the movable limiting piece is arranged at the upper end of the basket, after a silicon wafer is installed, the limiting piece is moved to the middle of the basket to be limited, and when the pickling basket is placed in a sulfuric acid solution to be subjected to a photoresist removing reaction and the silicon wafer floats upwards due to heat, the limiting piece at the top can play a role in limiting the floating silicon wafer; and the silicon wafer is prevented from floating and separating from the pickling basket.

Description

Technical Field

[0001] The utility model belongs to the technical field of electronic component production, and particularly relates to a silicon wafer pickling basket with a limiting function. Background Art

[0002] A wafer is a silicon wafer used in the manufacture of semiconductor integrated circuits. Due to its round shape, it is called a wafer or silicon chip. Wafers can be processed into various circuit component structures, resulting in integrated circuit products with specific electrical functions. During processing, the glue on the surface of the silicon wafer needs to be removed using sulfuric acid. To do this, the wafer is placed in an acid cleaning basket, which is then placed in the sulfuric acid for pickling. The sulfuric acid reacts with the glue on the surface of the wafer to remove it, but this reaction generates a large amount of heat, which can cause the wafer to float and escape from the pickling basket. This floating of the wafer from the basket makes it difficult to remove the wafer, and also affects the wafer's quality. Utility Model Content

[0003] In view of the above-mentioned shortcomings, the purpose of the present invention is to provide a silicon wafer pickling basket with a limiting function, which solves the problem in the prior art that after the silicon wafers are loaded and pickled for degumming in the pickling tank, a large amount of heat is generated, causing the silicon wafers to float, thereby affecting the quality of the silicon wafers.

[0004] In order to achieve the above-mentioned purpose, the technical solution provided by the present utility model is:

[0005] A silicon wafer pickling basket with a limiting function comprises a basket and a handle arranged on the basket. The basket is a hollow structure and is provided with a plurality of mounting slots for mounting silicon wafers. An end platform is provided at the upper end of the basket, and holding blocks are provided at the middle and ends of the end platform. A movable limiting piece is also provided at the upper end of the basket, and holding heads are provided at both ends of the limiting piece. The limiting piece can be horizontally arranged in the middle of the basket or accommodated on the end platform on the side, and the holding head of the limiting piece is held below the holding block.

[0006] With the above structural design, a movable limiting plate is provided at the upper end of the basket. When not in use, the limiting plate can be moved to the side for fixation without affecting the installation of the silicon wafer. After the silicon wafer is installed, the limiting plate is moved to the middle of the basket for limiting. When the pickling basket is placed in a sulfuric acid solution for degumming reaction, when heat causes the silicon wafer to float up, the limiting plate on the top can limit the floating silicon wafer, preventing the silicon wafer from floating up and falling off the pickling basket.

[0007] Preferably, the end platforms are each provided with a limit platform, and the clamping blocks are respectively provided at the top corners of the end platforms and the middle of both sides. The clamping blocks are fixed on the limit platform, and the lower surface of the limit platform is spaced a certain distance from the surface of the end platform to form a clamping groove.

[0008] With the above structural design, clamping grooves are set at multiple positions on the end platform to facilitate the fixation of the limiting piece. When fixed in the middle, it limits the silicon wafer when it floats up. When the limiting piece is fixed on the side, it stores the limiting piece.

[0009] Preferably, the clamping head is an arc-shaped structure with a middle portion higher than two sides, and the clamping head is clamped and fixed to the clamping groove.

[0010] Preferably, the lower surface of the holding block is inclined from the inlet to the other side.

[0011] With the above structural design, the arc-shaped design of the clamping head makes it easier to clamp the limit piece, while the inclined setting of the lower end of the clamping block can ensure the stability of the clamping head.

[0012] Preferably, a limiting portion fixed to the end platform is provided in the middle of the lower end of the holding block in the middle of the end platform.

[0013] The above structural design facilitates the positioning of the limiting piece during installation, ensuring that the limiting piece is installed in the middle position of the pickling basket, that is, the highest position of the silicon wafer, thereby facilitating the positioning of the silicon wafer.

[0014] Preferably, the basket, handle, holding block and limiting plate are all made of polytetrafluoroethylene.

[0015] With the above structural design, the entire pickling basket is made of polytetrafluoroethylene material, which is acid-resistant, high-temperature-resistant and low-temperature-resistant and has a long service life.

[0016] Compared with the prior art, the beneficial effects of the present invention are:

[0017] 1. The utility model sets a movable limiting plate in the middle of the pickling basket. When the silicon wafer floats during pickling, the limiting plate can limit the silicon wafer, thereby ensuring the production quality of the silicon wafer.

[0018] 2. In the present invention, clamping grooves are set at multiple positions on the end platform to facilitate the fixation of the limiting piece. When fixed in the middle, the silicon wafer is limited when floating up. When the limiting piece is fixed on the side, the limiting piece is stored without affecting the installation of the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present invention but do not constitute a limitation of the present invention. In the accompanying drawings:

[0020] Figure 1 It is a structural diagram of the utility model;

[0021] Figure 2 yes Figure 1 Enlarged view at point A.

[0022] In the picture:

[0023] Basket 1, mounting groove 1a, end platform 1b, limiting platform 1c, handle 2, holding block 3, holding groove 3a, limiting part 3b, limiting piece 4, holding head 4a. DETAILED DESCRIPTION

[0024] In order to explain the technical content, structural features, achieved objectives and effects of the present invention in detail, the following is a detailed description in conjunction with the embodiments and the accompanying drawings.

[0025] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. In the description of the present invention, it should be noted that the orientation or position relationship indicated by the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0026] See also Figure 1 and Figure 2 A silicon wafer pickling basket with a limiting function comprises a basket 1 and a handle 2 provided on the basket 1. The basket 1 is a hollow structure, which is convenient for placing silicon wafers into a pickling tank or a cleaning tank after installation so that they can fully react with a solution or clean water. The basket 1 is provided with a number of mounting slots 1a for mounting silicon wafers. The mounting slots 1a are evenly spaced at a certain distance to prevent the silicon wafers from sticking to each other due to the heat generated after reacting with sulfuric acid, and at the same time improve the cleaning effect of the adhesive on the surface of the silicon wafers. The upper end of the basket 1 is provided with an end table 1b, and the end table 1b is provided with a clamping block 3 in the middle and at the end. The upper end of the basket 1 is also provided with a movable limiting plate 4, and the two ends of the limiting plate 4 are provided with a clamping head 4a. The limiting plate 4 can be arranged horizontally in the middle of the basket 1 or accommodated on the end table 1b arranged on the side, and the clamping head 4a of the limiting plate 4 is clamped below the clamping block 3.

[0027] Specifically, each end platform 1b is equipped with a limit platform 1c, which serves to limit the movement of the limit plate 4. The clamping blocks 3 are located at the top corners and in the middle of both sides of the end platform 1b. These clamping blocks 3 are fixed to the limit platforms 1c, and the lower surface of the limit platforms 1c is spaced a certain distance from the surface of the end platform 1b to form a clamping groove 3a. Once the limit plate 4 is fixed in a fixed position, the clamping heads 3 at both ends are fixed to the corresponding clamping groove 3a.

[0028] In this embodiment, the clamping head 4a is an arc-shaped structure with its middle portion higher than the two sides. The lower surface of the clamping block 3 is inclined from the entrance toward the other side, and the clamping head 4a is fixedly engaged with the clamping groove 3a. The arc-shaped structure of the clamping head 4a facilitates clamping. At the same time, the width of the clamping groove 3a at the notch is greater than the width of the other sides. Therefore, when the clamping head 4a is installed, the clamping stability is improved.

[0029] Furthermore, a limiting portion 3b fixed to the end platform 1b is provided in the middle of the lower end of the holding block 3 in the middle of the end platform 1b, which can play a role in position limitation when the limiting piece 4 is installed.

[0030] In this embodiment, the basket 1, handle 2, holding block 3 and limiting plate 4 are all made of polytetrafluoroethylene material, and therefore have the functions of acid resistance and high temperature resistance.

[0031] The working principle of this utility model is as follows:

[0032] The initial position of the limiting plate 4 is located on the side of the basket 1 and fixed in the retaining groove 3a to serve as a storage device. When degumming the surface of the silicon wafer, the silicon wafer is first installed in the mounting groove 1a of the basket 1. After the silicon wafer is installed, the limiting plate 4 is moved to the center of the basket 1 and fixed through the retaining groove 3a, thereby completing the position of the silicon wafer. The pickling basket is then placed in the pickling solution for degumming and pickling. When sulfuric acid reacts with the glue on the silicon wafer surface and generates heat, causing the silicon wafer to float, the limiting plate 4 acts as a limiter, preventing the silicon wafer from floating out of the basket, thereby improving the pickling effect and quality of the silicon wafer.

[0033] Based on the disclosures and teachings of the above description, those skilled in the art may also make changes and modifications to the above embodiments. Therefore, the present invention is not limited to the specific embodiments disclosed and described above, and modifications and variations of the present invention should also fall within the scope of protection of the claims of the present invention. In addition, although certain specific terms are used in this description, these terms are for convenience only and do not constitute any limitation to the present invention. Other devices that are identical or similar to the above devices are also within the scope of protection of the present invention.

Claims

1. A silicon wafer pickling basket with a limiting function, characterized in that: The invention comprises a basket (1) and a handle (2) arranged on the basket (1); the basket (1) is a hollow structure, and the basket (1) is provided with a plurality of mounting slots (1a) for mounting silicon wafers; an end platform (1b) is provided at the upper end of the basket (1), and a clamping block (3) is provided at the middle and end portions of the end platform (1b); a movable limiting piece (4) is also provided at the upper end of the basket (1); clamping heads (4a) are provided at both ends of the limiting piece (4); the limiting piece (4) can be arranged horizontally in the middle of the basket (1) or accommodated on the end platform (1b) arranged on the side, and the clamping head (4a) of the limiting piece (4) is clamped below the clamping block (3).

2. The silicon wafer pickling basket with a limiting function according to claim 1, characterized in that: The end platform (1b) is provided with a limiting platform (1c), and the clamping blocks (3) are respectively provided at the top corners and the middle of both sides of the end platform (1b). The clamping blocks (3) are fixed on the limiting platform (1c), and the lower surface of the limiting platform (1c) is spaced a certain distance from the surface of the end platform (1b) to form a clamping groove (3a).

3. The silicon wafer pickling basket with a limiting function according to claim 2, characterized in that: The clamping head (4a) is an arc-shaped structure with a middle portion higher than both sides, and the clamping head (4a) is clamped and fixed to the clamping groove (3a).

4. The silicon wafer pickling basket with a limiting function according to claim 2, characterized in that: A limiting portion (3b) fixed to the end platform (1b) is provided at the middle of the lower end of the holding block (3) in the middle of the end platform (1b).

5. The silicon wafer pickling basket with a limiting function according to claim 1, characterized in that: The lower surface of the holding block (3) is arranged to be inclined from the inlet to the other side.

6. The silicon wafer pickling basket with a limiting function according to claim 1, characterized in that: The basket (1), handle (2), holding block (3) and limiting piece (4) are all made of polytetrafluoroethylene material.

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