Connecting jig for testing machine and probe station testing head

Abstract

The utility model discloses a connecting jig for a testing machine and a probe station testing head, which comprises a bottom plate with a rectangular structure and a testing plate reinforcing rib, the bottom plate is provided with a via hole with a rectangular structure, the bottom plate is provided with a linear guide rail along the four sides of the via hole, each linear guide rail is connected with at least two sliding plates, and the sliding plates are connected with the testing plate reinforcing rib. A connecting rod is connected between every two adjacent sliding plates on the same linear guide rail, every two adjacent sliding plates on every two adjacent linear guide rails are connected through two connecting rods, a rotating block is connected between every two connecting rods, the rotating blocks are rotationally installed on the bottom plate, and the test plate reinforcing ribs are arranged in the via holes. A connecting assembly is arranged between the test plate reinforcing rib and each sliding plate, and at least one of the four rotating blocks is connected with a handle. The connecting jig has the advantages of being simple in structure, ingenious in design, capable of achieving rapid and accurate connection of the testing machine and the testing head, simple and easy in connection mode, and convenient to maintain and replace.

Description

Technical Field

[0001] The utility model relates to the technical field of chip testing fixtures, in particular to a connection fixture used for a testing machine and a probe station test head. Background Art

[0002] With the rapid advancement of chip manufacturing technology, wafer chip testing faces increasing challenges, and the proportion of testing costs has also increased significantly. Wafer chip testing involves probing each die on the wafer. Hair-thin probes made of gold wire are installed on the inspection head. These probes contact the pads on the die to test their electrical characteristics. Unqualified die are marked. When the wafer is then cut into individual die, these marked unqualified die are discarded and not processed for the next step, thus avoiding unnecessary waste. Wafer chip testing requires a tester, which requires the installation of a corresponding probe station test head for wafer chip testing. The probe station test head then performs wafer testing. However, existing wafer chip testers are generally complex in structure, making the installation of the probe station and tester relatively difficult and preventing rapid installation and replacement. Utility Model Content

[0003] The purpose of the present invention is to provide a connection fixture for a test machine and a probe station test head, so as to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: a connecting fixture for a test machine and a probe station test head, comprising a base plate of a rectangular structure and a test plate reinforcement rib, the base plate is provided with a through-hole of a rectangular structure, a linear guide rail is provided on the base plate along the four sides of the through-hole, each of the linear guide rails is connected to at least two slides, a connecting rod is connected between two adjacent slides on the same linear guide rail, two adjacent slides on two adjacent linear guide rails are connected by two connecting rods and a rotating block is connected between the two connecting rods, the rotating block is rotatably installed on the base plate, the test plate reinforcement rib is arranged in the through-hole, a connecting component is provided between the test plate reinforcement rib and each slide, and at least one of the four rotating blocks is connected to a handle.

[0005] Further preferably, the connecting assembly includes a fixed block, which is fixed to the lower edge of the test board reinforcement rib, and the side of the fixed block close to the skateboard is connected to a cam bearing. The fixed block is used for the installation of the cam bearing, and the cam bearing can be connected to the skateboard. The skateboard is pressed against the cam bearing to achieve the fixation of the roller bearing, and then the test board reinforcement rib is fixed to the base plate, thereby indirectly realizing the connection between the test machine and the probe station test head.

[0006] Further preferably, an avoidance groove is provided below the fixing block to facilitate the installation of the cam bearing; and a plurality of connection holes are provided above the fixing block for connecting the fixing block to the reinforcing ribs of the test plate.

[0007] Further preferably, the base plate is provided with a plurality of positioning grooves for matching the cam bearing along the four side walls of the through hole, which are used for positioning the cam bearing and ensuring that the reinforcing ribs of the test plate are accurately placed relative to the base plate.

[0008] Further preferably, the bottom surface of the slide plate is an inclined surface that matches the cam bearing, so that the slide plate can be pressed against the top of the cam bearing during movement, and as the slide plate gradually moves, the cam bearing can be further pressed down and fixed.

[0009] Further preferably, the slide plate is provided with a rotation groove and a transfer block connected to the connecting rod, which facilitates the connection between the connecting rod and the slide plate and ensures that the connecting rod can rotate a certain angle relative to the slide plate.

[0010] Further preferably, the rotating block is in a T-shaped structure, and the lateral side of the T is a connecting platform rotatably connected to the connecting rod, so as to facilitate the connection between the rotating block and the two connecting rods.

[0011] Further preferably, two glue-pressed handles are provided on the bottom plate, and the two glue-pressed handles are respectively arranged on two opposite sides of the bottom plate, so as to facilitate manual picking up of the bottom plate.

[0012] Beneficial effect: The connecting fixture of the utility model is used for the test machine and the probe station test head. The base plate and the test board reinforcement rib are connected by the slide plate and the connecting assembly, so that the test machine and the probe station test head are connected, that is, the test head is installed on the test machine; specifically, the cam bearing of the connecting assembly is fixed to the lower side of the test board reinforcement rib by the fixing block. When the handle is turned, the rotating block can be driven to rotate, thereby driving the connecting rod to move, and the slide plate is pushed to move synchronously by the connecting rod. When the slide plate is pressed against the top of the cam bearing and moves with the slide plate, the cam bearing is fixed, thereby fixing the test board reinforcement rib, and indirectly connecting the test machine and the probe station test head; the connecting fixture has a simple structure and a clever design, can realize the fast and accurate connection between the test machine and the test head, and the connection method is simple and easy, which can be achieved by manually turning the handle, and is easy to maintain and replace. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic diagram of the isometric structure of a connection fixture for a test machine and a probe station test head disclosed in an embodiment of the present utility model;

[0014] Figure 2 This is a schematic top view of the structure of a connection fixture for a test machine and a probe station test head disclosed in an embodiment of the present utility model;

[0015] Figure 3 This is a schematic diagram of the exploded structure of the slide plate and the connecting assembly disclosed in an embodiment of the present utility model;

[0016] Figure 4 This is a structural diagram of the connection assembly disclosed in an embodiment of the present utility model.

[0017] Figure markings: 1-base plate, 11-through hole, 12-positioning groove, 2-linear guide rail, 3-slide plate, 31-rotation groove, 32-adaptation block, 4-connecting rod, 5-rotation block, 6-handle, 7-test plate reinforcement rib, 8-connecting assembly, 81-fixed block, 811-avoidance groove, 812-connecting hole, 82-cam bearing, 9-rubberized handle. DETAILED DESCRIPTION

[0018] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

[0019] like Figure 1-4 As shown, a connection fixture for a test machine and a probe station test head includes a rectangular bottom plate 1 and a test board reinforcement rib 7, wherein the bottom plate 1 is connected to the test machine, and the test board reinforcement rib 7 is connected to the probe station test head. The connection between the bottom plate 1 and the test board reinforcement rib 7 realizes the connection between the probe station test head and the test machine, that is, the installation of the test head on the test machine is realized. The bottom plate 1 is provided with a rectangular via 11 to facilitate the connection of the test head connected to the test board reinforcement rib 7 and the test machine. A linear guide rail 2 is provided on the base plate 1 along the four sides of the through hole 11, and each linear guide rail 2 is connected to at least two slides 3. A connecting rod 4 is connected between two adjacent slides 3 on the same linear guide rail 2. The two close slides 3 on the two adjacent linear guide rails 2 are connected by two connecting rods 4 and a rotating block 5 is connected between the two connecting rods. The rotating block 5 is rotatably installed on the base plate 1, and the test plate reinforcement rib 7 is arranged in the through hole 11. A connecting component 8 is provided between the test plate reinforcement rib 7 and each slide 3, and at least one of the four rotating blocks 5 is connected to a handle 6. The linear guide rail 2 is used to guide the movement of the skateboard 3, ensuring that the skateboard 3 can move along the guide rail, ensuring that the movement direction of the skateboard 3 is accurate and the movement is smooth; the connecting component 8 is fixed under the test board reinforcement 7, and is used to connect with the skateboard 3; that is, the handle 6 can drive the rotating block 5 to rotate, thereby driving the two connecting rods 4 connected to it for rotation to displace, and then driving the skateboard 3 and the connecting rod 4 connected in sequence to displace synchronously, so that the skateboard 3 can press the connecting component 8 on the test board reinforcement 7, and then fix the test board reinforcement 7, thereby indirectly fixing the probe station test head on the test machine.

[0020] In the present application, the connecting assembly 8 includes a fixing block 81, which is fixed to the lower edge of the test plate reinforcement 7. The side of the fixing block 81 close to the slide 3 is connected to a cam bearing 82. The fixing block 81 is used to install the cam bearing 82. The cam bearing 82 is used to abut against the slide 3. The slide 3 is pressed against the cam bearing 82 to fix the cam bearing 82, thereby fixing the test plate reinforcement 7. A avoidance groove 811 is provided below the fixing block 81. The setting of the avoidance groove 811 facilitates the installation of the cam bearing 82, such as by installing it on the fixing block 81 through a pin, and the cam bearing 82 is connected to the pin. A plurality of connecting holes 812 are provided above the fixing block 81. The fixing block 81 can be fixed to the test plate reinforcement 7 by screwing through the connecting holes 812.

[0021] In this application, a plurality of positioning grooves 12 are provided on the four side walls of the through hole 11 on the base plate 1 to match the cam bearing 82, which are used to position and limit the cam bearing 82, thereby ensuring the accurate position of the cam bearing 82, and then ensuring the accurate docking between the test plate reinforcement rib 7 and the base plate 1, thereby ensuring the accurate docking between the test head and the test machine.

[0022] In this application, the bottom surface of the skateboard 3 is an inclined surface that matches the cam bearing 82. As the skateboard 3 moves, the cam bearing 82 moves up and down along the inclined surface of the bottom surface of the skateboard 3. First, it can ensure that the skateboard 3 can automatically press against the cam bearing 82 during the movement, that is, the relatively higher end of the bottom surface of the skateboard 3 first contacts the cam bearing 82. As the skateboard 3 moves, the relatively lower end of the bottom surface of the skateboard 3 slowly contacts the cam bearing 82, pressing the cam bearing 82 down and fixing it, and then fixing the test plate reinforcement rib 7 to the base plate 1, thereby realizing the connection and fixation of the test head and the test machine.

[0023] In this application, the skateboard 3 is provided with a rotating groove 31 and an adapter block 32 connected to the connecting rod 4. When the two connected skateboards 3 are located on the same linear guide rail 2, the skateboard 3 is connected to the connecting rod 4 through the rotating groove 31 to ensure that the connecting rod 4 can move synchronously with the skateboard 3 and in the same direction when the skateboard 3 is moved; when the two connected skateboards 3 are respectively located on the two linear guide rails 2, due to the rotation of the rotating block 5, the connecting rod 4 will rotate at a certain angle along the rotating block 5, and at the same time will be displaced to a certain extent along the direction of the linear guide rail 2, pushing the skateboard 3 to move along the linear guide rail 2, realizing the pushing of the skateboard 3 to move, so that the skateboard 3 is in rolling contact with the cam bearing 82, and then the skateboard 3 presses the cam bearing 82 or moves away from the cam bearing 82, so that the connecting rod 4 will rotate to a certain extent relative to the skateboard 3. For installation requirements, it is necessary to install an adapter block 32 on the side of the skateboard 3 to ensure the connection between the skateboard 3 and the connecting rod 4.

[0024] In this application, the turning block 5 has a T-shaped structure, and the horizontal part of the T is a connecting platform that is rotatably connected to the connecting rod 4, which is convenient for rotating connection with the two connecting rods 4 respectively. The T-shape of the turning block 5 is rotatably connected to the base plate 1 relative to the longitudinal direction to ensure that while the turning block 5 rotates, the two horizontal connecting platforms of the T-shape can drive the connecting rod 4 to move synchronously.

[0025] In the present application, two glued handles 9 are provided on the base plate 1, and the two glued handles 9 are respectively arranged on two opposite sides of the base plate 1 for manually taking the base plate 1, facilitating manual grasping of the base plate 1 during processing and assembly.

[0026] Finally, it should be noted that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A connection fixture for a test machine and a probe station test head, comprising a rectangular bottom plate (1) and a test plate reinforcement rib (7), characterized in that: The base plate (1) is provided with a through hole (11) of a rectangular structure, and a linear guide rail (2) is provided along the four sides of the through hole (11) on the base plate (1), and each linear guide rail (2) is connected to at least two slides (3), and a connecting rod (4) is connected between two adjacent slides (3) on the same linear guide rail (2), and two adjacent slides (3) on two adjacent linear guide rails (2) are connected by two connecting rods (4), and a rotating block (5) is connected between the two connecting rods, and the rotating block (5) is rotatably installed on the base plate (1), and the test plate reinforcement rib (7) is arranged in the through hole (11), and a connecting component (8) is provided between the test plate reinforcement rib (7) and each slide (3), and at least one of the four rotating blocks (5) is connected to a handle (6).

2. The connection fixture for a test machine and a probe station test head according to claim 1, characterized in that: The connecting assembly (8) includes a fixing block (81), which is fixed to the lower edge of the test plate reinforcement rib (7), and a cam bearing (82) is connected to the side of the fixing block (81) close to the slide plate (3).

3. The connection fixture for a test machine and a probe station test head according to claim 2, characterized in that: An avoidance groove (811) is provided below the fixing block (81), and a plurality of connection holes (812) are provided above the fixing block (81).

4. The connection fixture for a test machine and a probe station test head according to claim 2, characterized in that: The base plate (1) is provided with a plurality of positioning grooves (12) along the four side walls of the through hole (11) for matching the cam bearing (82).

5. The connection fixture for a test machine and a probe station test head according to claim 4, characterized in that: The bottom surface of the slide plate (3) is an inclined surface that matches the cam bearing (82).

6. The connection fixture for a test machine and a probe station test head according to claim 1, characterized in that: The slide plate (3) is provided with a rotation groove (31) and a transfer block (32) connected to the connecting rod (4).

7. The connection fixture for a test machine and a probe station test head according to claim 1, characterized in that: The rotating block (5) is in a T-shaped structure, and the transverse side of the T-shape is a connecting platform that is rotatably connected to the connecting rod (4).

8. The connection fixture for a test machine and a probe station test head according to claim 1, characterized in that: Two glue-pressed handles (9) are provided on the bottom plate (1), and the two glue-pressed handles (9) are respectively arranged on two opposite sides of the bottom plate (1).

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