Processing device for electronic-grade hydrogen peroxide

Abstract

The utility model discloses an electronic grade hydrogen peroxide processing device which comprises a raw material storage tank, a multi-stage filtering device, an ion exchanger, an ultrapure water mixer and a finished product storage tank, the multi-stage filtering device comprises a coarse filter and a precision filter, a replaceable filter screen is arranged in the coarse filter, and the ultrapure water mixer is arranged in the fine filter. The filter screen and the coarse filter are detachably connected, the filter screen comprises a screen body, a plurality of uniformly distributed insertion blocks are arranged on the periphery of the screen body, insertion grooves matched with the insertion blocks in shape are formed in a shell of the coarse filter, the filter screen is inserted into the insertion grooves from top to bottom through the insertion blocks, pin holes are formed in the upper surfaces of the insertion blocks, and positioning pins penetrate through the insertion grooves. The bottom end of the positioning pin is connected with the pin hole, and the top end of the positioning pin is connected with the coarse filter shell upper cover and is fixed through a nut, so that the positioning pin presses the insertion block of the filter screen; the precise filter comprises a plurality of layers of filtering membranes with filtering pore diameters decreased step by step and a high-pressure backwashing device, and the fluid flow direction of the high-pressure backwashing device is opposite to the filtering flow direction of the precise filter.

Description

Technical Field

[0001] The utility model relates to a processing device for electronic-grade hydrogen peroxide. Background Art

[0002] Electronic-grade hydrogen peroxide is widely used in high-tech fields such as semiconductors, integrated circuits, and liquid crystal displays, requiring extremely high purity. While existing hydrogen peroxide processing equipment can generally meet these purity requirements, there is still room for improvement in terms of further removing impurities, increasing product purity, and improving production efficiency. Therefore, there is a need for a more efficient and easy-to-operate electronic-grade hydrogen peroxide processing device. Utility Model Content

[0003] The purpose of the utility model is to solve the above deficiencies in the prior art and to provide a processing device for electronic-grade hydrogen peroxide with convenient connection.

[0004] The processing device of electronic-grade hydrogen peroxide includes a raw material storage tank, a multi-stage filtration device, an ion exchanger, an ultrapure water mixer and a finished product storage tank. The multi-stage filtration device includes a coarse filter and a precision filter. The coarse filter is provided with a replaceable filter screen, and the filter screen and the coarse filter are connected in a detachable manner. The filter screen includes a mesh body, and a plurality of evenly distributed plug-ins are provided around the mesh body. The housing of the coarse filter is provided with slots matching the shape of the plug-ins. The filter screen is inserted into the slots from top to bottom through the plug-ins. The upper surface of the plug-in block is provided with a pin hole. The positioning pin passes through the slot. The bottom end of the positioning pin is connected to the pin hole. The top end of the positioning pin is connected to the upper cover of the coarse filter housing and is fixed by a nut so that the positioning pin presses the plug-in block of the filter screen; the precision filter includes several layers of filter membranes with gradually decreasing filtration apertures and a high-pressure backwashing device. The high-pressure backwashing device includes a high-pressure pump, a backwashing pipe, a sewage outlet and a control valve. The fluid flow direction of the high-pressure backwashing device is opposite to the filtration flow direction of the precision filter.

[0005] As a further improvement, the filter screen is made of a high-temperature-resistant and corrosion-resistant polymer material.

[0006] As a further improvement, the high temperature resistant and corrosion resistant polymer material is stainless steel.

[0007] As a further improvement, the filter mesh has a filtration pore size of 1 to 10 microns.

[0008] As a further improvement, the filtration pore size of the filtration membrane is 0.1 to 0.5 microns.

[0009] As a further improvement, the filter membrane is made of a nano-scale material that is resistant to high temperatures and corrosion.

[0010] As a further improvement, the high temperature resistant and corrosion resistant nano-scale material is polytetrafluoroethylene, polyethersulfone or nylon.

[0011] Beneficial effects:

[0012] The device combines multi-stage filtration and ion exchange to effectively remove particulate matter and metal ions in hydrogen peroxide, significantly improving product purity and meeting the requirements of electronic-grade hydrogen peroxide.

[0013] The device has a reasonable structural design, simple operation, and a high degree of automation, which can reduce manual intervention and improve production efficiency.

[0014] The multi-stage filtration device effectively removes various types of particulate impurities in hydrogen peroxide through a combination of coarse filtration and fine filtration, providing a high-purity raw material basis for subsequent ion exchange and other fine processing steps. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the overall structure of the processing equipment for electronic grade hydrogen peroxide;

[0016] Figure 2 It is a structural diagram of a multi-stage filtration device;

[0017] Figure 3 It is a schematic diagram of the connection between the filter and the coarse filter;

[0018] Figure 4 It is a schematic diagram of the connection between the plug, the positioning pin and the housing;

[0019] 1. Raw material storage tank 2. Multi-stage filtration device 21. Coarse filter 211. Filter screen 2111. Mesh 2112. Insert 212. Slot 213. Locating pin 22. Precision filter 221. Filter membrane 222. High-pressure backwash device 2221. High-pressure pump 2222. Backwash pipe 2223. Sewage outlet 2224. Control valve 3. Ion exchange device 4. Ultrapure water mixer 5. Finished product storage tank DETAILED DESCRIPTION

[0020] In order to deepen the understanding of the present invention, the present invention will be further described in detail below with reference to embodiments and drawings. The embodiments are only used to explain the present invention and do not constitute a limitation on the scope of protection of the present invention.

[0021] like Figures 1 to 4 As shown, the processing device of electronic grade hydrogen peroxide includes a raw material storage tank 1, a multi-stage filtration device 2, a coarse filter 21, a filter screen 211, a mesh body 2111, an insert 2112, a slot 212, a positioning pin 213, a precision filter 22, a filter membrane 221, a high-pressure backwashing device 222, a high-pressure pump 2221, a backwashing pipe 2222, a sewage outlet 2223, a control valve 2224, an ion exchange device 3, an ultrapure water mixer 4 and a finished product storage tank 5.

[0022] The processing device of electronic grade hydrogen peroxide includes a raw material storage tank 1, a multi-stage filtration device 2, an ion exchanger, an ultrapure water mixer 4 and a finished product storage tank 5. The multi-stage filtration device 2 includes a coarse filter 21 and a precision filter 22. The coarse filter 21 is provided with a replaceable filter screen 211. The filter screen 211 is connected to the coarse filter 21 in a detachable manner. The filter screen 211 includes a mesh body 2111. A plurality of evenly distributed plug blocks 2112 are provided around the mesh body 2111. The housing of the coarse filter 21 is provided with a slot 212 that matches the shape of the plug block 2112. The filter screen 211 is inserted into the slot 212 from top to bottom through the plug block 2112. A pin hole is provided on the upper surface of the plug 2112, and the positioning pin 213 passes through the slot 212. The bottom end of the positioning pin 213 is connected to the pin hole, and the top end of the positioning pin 213 is connected to the upper cover of the coarse filter 21 shell and is fixed by a nut, so that the positioning pin 213 presses the plug 2112 of the filter screen 211; the precision filter 22 includes several layers of filter membranes 221 with gradually decreasing filter apertures and a high-pressure backwashing device 222. The high-pressure backwashing device 222 includes a high-pressure pump 2221, a backwashing pipe 2222, a sewage outlet 2223 and a control valve 2224. The fluid flow direction of the high-pressure backwashing device 222 is opposite to the filtration flow direction of the precision filter 22.

[0023] The multi-stage filtration device 2 is a key component in the entire electronic-grade hydrogen peroxide processing process. It is responsible for removing large and small particle impurities in the hydrogen peroxide to ensure the smooth progress of subsequent processes and ensure the purity of the final product.

[0024] The device mainly consists of a coarse filter 21 and a fine filter 22, and removes particulate matter and suspended matter from the raw material through a reasonable multi-stage filtration structure;

[0025] The coarse filter 21 is the first filtration step in the multi-stage filtration device 2, primarily used to remove large impurities from the hydrogen peroxide feedstock. It operates by performing preliminary filtration through a relatively large pore size filter screen 211 or membrane 221, typically ranging from 1 to 10 microns. This effectively removes larger particles, such as solid impurities and suspended solids.

[0026] The filter screen 211 of the coarse filter 21 is usually made of stainless steel or high-molecular corrosion-resistant material, which has the characteristics of high temperature resistance and chemical corrosion resistance, ensuring that it is not affected by the corrosion of hydrogen peroxide during long-term operation.

[0027] The coarse filter 21 is designed as a modular structure, and the filter components can be easily disassembled and replaced to maintain the filtering effect and the long-term stable operation of the equipment.

[0028] Precision filter 22 is the core component of multi-stage filtration device 2, used to further remove tiny particles of impurities remaining after coarse filtration, particularly suspended solids and impurities with a diameter of less than 1 micron. Precision filter 22 utilizes a nano-scale filter membrane with a pore size typically between 0.1 and 0.5 microns, ensuring filtration accuracy that meets the high purity requirements of electronic-grade hydrogen peroxide.

[0029] The filter membrane 221 of the precision filter 22 is a polymer nanofiltration membrane, typically made of corrosion-resistant and high-temperature-resistant materials such as polytetrafluoroethylene (PTFE), polyethersulfone (PES), or nylon. This type of membrane not only provides extremely high filtration accuracy but also resists the oxidizing properties of hydrogen peroxide, ensuring a safe and stable filtration process.

[0030] The precision filter 22 adopts a multi-layer filter membrane structure, and the pore size of each layer of filter membrane decreases step by step to ensure that all kinds of particulate impurities in the hydrogen peroxide are removed to the greatest extent possible. Through this layer-by-layer filtration, the burden of the filter membrane can be reduced and its service life can be extended.

[0031] The precision filter 22 has an extremely high filtration efficiency, which can ensure that the particle content in the filtered hydrogen peroxide is controlled to less than 10 particles per liter, meeting the strict requirements of semiconductor and integrated circuit manufacturing for high-purity hydrogen peroxide.

[0032] The core idea of ​​high-pressure backwashing technology is to use high-pressure water flow to pass through the filter or filter membrane in the opposite direction (opposite to the normal filtration flow direction) to flush out the impurities captured during the filtration process from the filter medium, thereby restoring the permeability and filtration efficiency of the filter.

[0033] During the normal filtration process, particles in the fluid are trapped by the filter membrane or screen. Over time, these particles gradually clog the filter medium, increasing filtration resistance and reducing the speed or volume of fluid passing through. Reverse high-pressure water cleaning powerfully washes away these particles adhering to the filter surface, preventing premature filter clogging and extending the service life of the equipment.

[0034] Multi-stage filtration unit 2 effectively removes all types of particulate impurities from hydrogen peroxide through a combination of coarse and fine filtration, providing a high-purity raw material foundation for subsequent ion exchange and other fine processing steps. This unit features advanced design, a high degree of automation, and the ability to operate stably over a long period of time, making it suitable for large-scale production and processing of electronic-grade hydrogen peroxide.

[0035] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A processing device for electronic grade hydrogen peroxide, comprising a raw material storage tank, a multi-stage filtration device, an ion exchanger, an ultrapure water mixer and a finished product storage tank, characterized in that: The multi-stage filtering device includes a coarse filter and a precision filter. The coarse filter is provided with a replaceable filter screen, and the filter screen and the coarse filter are connected in a detachable manner. The filter screen includes a mesh body, and a number of evenly distributed plug-ins are provided around the mesh body. The coarse filter shell is provided with a slot matching the shape of the plug-in block. The filter screen is inserted into the slot from top to bottom through the plug-in block. The upper surface of the plug-in block is provided with a pin hole. The positioning pin passes through the slot. The bottom end of the positioning pin is connected to the pin hole. The top end of the positioning pin is connected to the upper cover of the coarse filter shell and is fixed by a nut so that the positioning pin presses the plug-in block of the filter screen; the precision filter includes several layers of filter membranes with gradually decreasing filtration apertures and a high-pressure backwashing device. The high-pressure backwashing device includes a high-pressure pump, a backwashing pipe, a sewage outlet and a control valve. The fluid flow direction of the high-pressure backwashing device is opposite to the filtration flow direction of the precision filter.

2. The processing device of electronic grade hydrogen peroxide according to claim 1, wherein The filter screen is made of a high-temperature-resistant and corrosion-resistant polymer material.

3. The processing device of electronic grade hydrogen peroxide according to claim 2, characterized in that, The high temperature resistant and corrosion resistant polymer material is stainless steel.

4. The processing device of electronic grade hydrogen peroxide according to claim 1, characterized in that, The filter mesh has a filtration pore size of 1 to 10 microns.

5. The processing device of electronic grade hydrogen peroxide according to claim 1, characterized in that, The filtration pore size of the filter membrane is 0.1 to 0.5 microns.

6. The processing device for electronic grade hydrogen peroxide according to claim 1, characterized in that, The filter membrane is made of nanometer-grade material that is resistant to high temperatures and corrosion.

7. The processing device for electronic grade hydrogen peroxide according to claim 6, characterized in that, The high temperature resistant and corrosion resistant nanometer-level material is polytetrafluoroethylene, polyethersulfone or nylon.

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