Protective device for sputter coating vacuum chamber

Abstract

The utility model relates to the technical field of coating equipment, in particular to a protective device for a sputter coating vacuum chamber, which comprises a vacuum chamber cavity, a protective cover is fixedly arranged on one side of the vacuum chamber cavity, light-transmitting glass is arranged between the protective cover and the vacuum chamber cavity, the light-transmitting glass is embedded in the protective cover, and the protective cover is fixedly arranged on the other side of the vacuum chamber cavity. A through hole is formed in the side, away from the vacuum chamber cavity, of the protective cover, the aperture of the through hole is equal to that of the vacuum chamber cavity, a shielding cylinder is fixedly arranged on the side, away from the protective cover, of the vacuum chamber cavity, and the shielding cylinder communicates with the vacuum chamber cavity. A mounting frame is fixedly arranged on the side, away from the shielding cylinder, of the vacuum chamber cavity, a laser sensor is fixedly arranged on the mounting frame, and the transmitting end of the laser sensor and the through hole are coaxially arranged. And the cable also has the characteristics of high strength, insulation, maintenance-free property and the like.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a protective device for a sputtering coating vacuum chamber. Background Art

[0002] This shielding barrel is widely used in the DSL801 horizontal continuous coating system, a magnetron sputtering system specifically designed for double-sided ITO coating of silicon-based heterojunction cells under vacuum conditions. It can coat both sides of crystalline silicon wafers. Within the sputtering vacuum chamber, the electrical signals for the position detection system are transmitted through the tempered glass of the cavity. To ensure safe and reliable transmission of electrical signals, the cleanliness of the glass surface within the vacuum chamber must be maintained.

[0003] According to the sputtering technology used in the current process, there are adverse factors such as high temperature, dust, and irregular arcs in the vacuum chamber. Therefore, it is necessary to protect the key technical components in the vacuum chamber to prevent excessive deposition of ITO film and dust on the surface, or even damage from arcs. Utility Model Content

[0004] In view of this, the purpose of the present invention is to provide a protective device for a sputtering coating vacuum chamber to solve the problems raised in the above background technology.

[0005] Based on the above-mentioned purpose, the utility model provides a protective device for a sputtering coating vacuum chamber, comprising a vacuum chamber cavity, a protective cover fixedly provided on one side of the vacuum chamber cavity, a light-transmitting glass provided between the protective cover and the vacuum chamber cavity, the light-transmitting glass embedded in the interior of the protective cover, a through hole provided on the side of the protective cover away from the vacuum chamber cavity, the aperture of the through hole is equal to the aperture of the vacuum chamber cavity, a shielding tube fixedly provided on the side of the vacuum chamber cavity away from the protective cover, the shielding tube is connected to the vacuum chamber cavity, a mounting bracket fixedly provided on the side of the vacuum chamber cavity away from the shielding tube, a laser sensor fixedly provided on the mounting bracket, and the emitting end of the laser sensor is coaxially arranged with the through hole.

[0006] Preferably, an annular rubber pad is provided between the protective cover and the light-transmitting glass.

[0007] Preferably, a sealing ring is provided between the light-transmitting glass and the vacuum chamber cavity.

[0008] Preferably, the shielding tube is made of aluminum alloy, and its surface is formed by black anodizing.

[0009] Preferably, the shielding cylinder includes a cylinder body and a base, the cylinder body and the base are integrally formed, at least two positioning holes are provided on the base, and the positioning holes are used to fix the base on the vacuum chamber cavity through bolts.

[0010] Beneficial effects of the present invention: The shielding tube designed in this scheme can not only eliminate the influence on electrical signal detection in complex environments, but also has the characteristics of high strength, insulation, and maintenance-free. At the same time, it is not limited to the protection of the electrical signal detection glass surface in vacuum sputtering coating equipment, but can also be used for point protection with high cleanliness requirements in other complex environments. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0012] Figure 1 It is a schematic diagram of the overall structure of the embodiment of the utility model;

[0013] Figure 2 This is a schematic diagram of the three-dimensional structure of the protective cover according to an embodiment of the present utility model;

[0014] Figure 3 This is a schematic diagram of the three-dimensional structure of the light-transmitting glass according to an embodiment of the present utility model;

[0015] Figure 4 It is a schematic diagram of the three-dimensional structure of the shielding tube according to an embodiment of the utility model.

[0016] The following are marked in the figure:

[0017] 1. Vacuum chamber cavity; 2. Protective cover; 3. Translucent glass; 4. Through hole; 5. Shielding tube; 6. Mounting bracket; 7. Laser sensor; 8. Ring rubber pad; 9. Sealing ring; 10. Cylinder body; 11. Base; 12. Positioning hole. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.

[0019] It should be noted that, unless otherwise defined, the technical or scientific terms used in this utility model should have the usual meanings understood by people with ordinary skills in the field to which this utility model belongs. The "first", "second" and similar words used in this utility model do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative position relationships. When the absolute position of the object being described changes, the relative position relationship may also change accordingly.

[0020] like Figures 1 to 4 As shown, a protective device for a sputtering coating vacuum chamber includes a vacuum chamber cavity 1, a protective cover 2 is fixedly provided on one side of the vacuum chamber cavity 1, a light-transmitting glass 3 is provided between the protective cover 2 and the vacuum chamber cavity 1, and the light-transmitting glass 3 is embedded in the inside of the protective cover 2, and a through hole 4 is provided on the side of the protective cover 2 away from the vacuum chamber cavity 1, the aperture of the through hole 4 is equal to the aperture of the vacuum chamber cavity 1, a shielding tube 5 is fixedly provided on the side of the vacuum chamber cavity 1 away from the protective cover 2, and the shielding tube 5 is connected to the vacuum chamber cavity 1, and a mounting bracket 6 is fixedly provided on the side of the vacuum chamber cavity 1 away from the shielding tube 5, a laser sensor 7 is fixed on the mounting bracket 6, and the emitting end of the laser sensor 7 is coaxially arranged with the through hole 4.

[0021] As an optional embodiment, an annular rubber pad 8 is provided between the protective cover 2 and the light-transmitting glass 3 .

[0022] As an optional embodiment, a sealing ring 9 is provided between the light-transmitting glass 3 and the vacuum chamber body 1 .

[0023] As an optional embodiment, the shielding tube 5 is made of aluminum alloy, and its surface is formed by black anodizing.

[0024] As an optional embodiment, the shielding tube 5 includes a tube body 10 and a base 11, and the tube body 10 and the base 11 are integrally formed. At least two positioning holes 12 are provided on the base 11, and the positioning holes 12 are used to fix the base 11 on the vacuum chamber cavity 1 through bolts.

[0025] The utility model provides a shielding tube 5 on the vacuum chamber cavity 1, which has high temperature resistance, high vacuum resistance, good insulation, safe and reliable use in the vacuum sputtering coating room, easy installation, and maintenance-free. It effectively eliminates the pollution of key components and sensor glass surfaces caused by factors such as dust in the vacuum chamber, sputtering coating precipitation, and arc damage, thereby ensuring the reliability and authenticity of electrical signal detection, enhancing the anti-interference ability of the equipment during operation, and improving the equipment utilization rate.

[0026] Those skilled in the art will understand that the discussion of any of the above embodiments is merely illustrative and is not intended to limit the scope of the present invention to these examples. Within the spirit and principles of the present invention, the technical features of the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and many other variations exist in the various aspects of the present invention described above, which are not provided in detail for the sake of clarity. Any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A protective device for a sputtering coating vacuum chamber, comprising a vacuum chamber cavity (1), characterized in that: A protective cover (2) is fixedly provided on one side of the vacuum chamber cavity (1), and a light-transmitting glass (3) is provided between the protective cover (2) and the vacuum chamber cavity (1), and the light-transmitting glass (3) is embedded in the interior of the protective cover (2). A through hole (4) is provided on the side of the protective cover (2) away from the vacuum chamber cavity (1), and the aperture of the through hole (4) is equal to the aperture of the vacuum chamber cavity (1). A shielding tube (5) is fixedly provided on the side of the vacuum chamber cavity (1) away from the protective cover (2), and the shielding tube (5) is connected to the vacuum chamber cavity (1). A mounting frame (6) is fixedly provided on the side of the vacuum chamber cavity (1) away from the shielding tube (5), and a laser sensor (7) is fixedly provided on the mounting frame (6), and the emitting end of the laser sensor (7) is coaxially arranged with the through hole (4).

2. A protective device for a sputtering coating vacuum chamber according to claim 1, characterized in that: An annular rubber pad (8) is provided between the protective cover (2) and the light-transmitting glass (3).

3. The protective device for a sputtering coating vacuum chamber according to claim 1, characterized in that: A sealing ring (9) is provided between the light-transmitting glass (3) and the vacuum chamber cavity (1).

4. The protective device for a sputtering coating vacuum chamber according to claim 1, characterized in that: The shielding cylinder (5) is made of aluminum alloy, and its surface is formed by black anodizing.

5. The protective device for a sputtering coating vacuum chamber according to claim 1, characterized in that: The shielding cylinder (5) comprises a cylinder body (10) and a base (11), wherein the cylinder body (10) and the base (11) are integrally formed, and at least two positioning holes (12) are provided on the base (11), and the positioning holes (12) are used to fix the base (11) on the vacuum chamber body (1) via bolts.

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