Observation window structure of sealing cover for MPCVD equipment

Abstract

The utility model discloses an observation window structure of a sealing cover for MPCVD (Micro-Pressure Chemical Vapor Deposition) equipment, which comprises a sealing cover body, and at least one observation window base is embedded in the side wall of the sealing cover body; the top end of the observation window base is located outside the sealing cover body, glass is detachably installed at the top end of the observation window base, the bottom end of the observation window base is located inside the sealing cover body, a groove is formed in the top end of the observation window base, and an observation channel is formed in the bottom end of the inner wall of the groove. The observation channel penetrates through the bottom end of the observation window base, a baffle is installed on the inner side wall of the observation channel, the baffle is used for covering the observation channel, and an observation hole is formed in the baffle. According to the utility model, the groove, the observation channel, the baffle plate, the observation hole, the extension part and the gap are matched for use, so that the amount of microwaves entering the glass can be reduced, the temperature of the glass is reduced, and the service life of the observation window is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of accessories for MPCVD equipment, in particular to an observation window structure of a sealing cover for MPCVD equipment. Background Art

[0002] Microwave plasma chemical vapor deposition (MPCVD) is a method used to grow artificial diamonds. This method places a seed crystal in a vacuum chamber and introduces a carbon-containing mixed gas containing nitrogen, methane and hydrogen. Methane is the source of carbon atoms for synthetic diamonds, while nitrogen acts as a catalyst to increase the growth rate of diamonds. Hydrogen can inhibit the formation of graphite. Under the action of microwave plasma, the carbon-containing gas is dissociated and carbon atoms are deposited into a diamond film on the diamond substrate.

[0003] For example, the patent with patent number CN221275888U includes a sealing cover body and a piping system; the interior of the sealing cover body is provided with a first cooling water chamber, a second cooling water chamber and a third cooling water chamber, and the second cooling water chamber and the third cooling water chamber are connected by a water inlet channel; the outer end surface of the sealing cover body is provided with a first water inlet, a first water outlet, a second water inlet and a second water outlet, the first water inlet and the first water outlet are connected to the first cooling water chamber, the second water inlet is connected to the second cooling water chamber, and the second water outlet is connected to the third cooling water chamber; the piping system includes a water inlet pipe, a circulation pipe and a water outlet pipe.

[0004] Although the above device cools and dissipates heat from the sealing cover to reduce its temperature, an observation window is provided on the sealing cover to facilitate the user to observe the growth of the diamond. However, when the device is in operation, microwaves are transmitted to the observation window, causing the temperature of the observation window to be high, which may easily cause harm to the user and shorten the service life of the observation window. Utility Model Content

[0005] In view of the above defects, the purpose of the present invention is to propose an observation window structure for a sealing cover for MPCVD equipment to solve the problem that the temperature of the observation window of the existing sealing cover is high, which can easily cause harm to the user and affect the service life of the observation window.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] An observation window structure of a sealing cover for MPCVD equipment comprises a sealing cover body, wherein at least one observation window base is embedded in a side wall of the sealing cover body;

[0008] The top of the observation window base is located outside the sealing cover body, and glass is detachably installed on the top of the observation window base. The bottom end of the observation window base is located inside the sealing cover body. A groove is provided at the top of the observation window base, and an observation channel is provided at the bottom end of the inner wall of the groove. The observation channel passes through the bottom end of the observation window base, and a baffle is installed on the inner side wall of the observation channel. The baffle is used to cover the observation channel, and the baffle is provided with an observation hole. The edge of the observation hole extends downward to form an extension portion, and a gap is left between the extension portion and the observation channel.

[0009] Preferably, a sealing gasket is installed in the groove, and the sealing gasket is tightly connected to the glass and the groove respectively.

[0010] Preferably, the sealing gasket is made of copper, the observation window base is made of stainless steel, the inner bottom wall of the groove is provided with an annular protrusion, and the sealing gasket is tightly fitted and connected to the annular protrusion.

[0011] Preferably, an annular groove is provided on the inner side wall of the observation channel, and the baffle is installed in the annular groove.

[0012] Preferably, the annular groove is communicated with the groove.

[0013] Preferably, the extension portion is cylindrical.

[0014] Preferably, the glass is detachably mounted on the top of the observation window base by bolts.

[0015] Preferably, the number of the observation window bases is four, and the four observation window bases are arranged in a circular array on the side wall of the sealing cover body.

[0016] The technical solution provided by the utility model may have the following beneficial effects:

[0017] The device can reduce the amount of microwaves entering the glass through the coordinated use of grooves, observation channels, baffles, observation holes, extensions and gaps, thereby lowering the temperature of the glass and increasing the service life of the observation window. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 It is a schematic diagram of the internal structure of the observation window base of the utility model.

[0020] Among them: 1. Sealing cover body; 2. Observation window base; 21. Groove; 211. Annular protrusion; 22. Observation channel; 221. Annular groove; 23. Glass; 3. Baffle; 31. Observation hole; 32. Extension. DETAILED DESCRIPTION

[0021] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0022] In the description of the present invention, it should be understood that the terms "longitudinal", "transverse", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore should not be understood as limiting the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more such features, and are used to distinguish between the described features, without distinction of order or importance.

[0023] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0024] Below is the attached figure Figures 1 to 2 The technical solution of the utility model is further illustrated through specific implementation methods.

[0025] like Figure 1-2 As shown, an observation window structure of a sealing cover for MPCVD equipment includes a sealing cover body 1, and at least one observation window base 2 is embedded in the side wall of the sealing cover body 1;

[0026] The top of the observation window base 2 is located outside the sealing cover body 1, and the top of the observation window base 2 is detachably installed with glass 23. The bottom end of the observation window base 2 is located inside the sealing cover body 1. The top of the observation window base 2 is provided with a groove 21, and the bottom end of the inner wall of the groove 21 is provided with an observation channel 22. The observation channel 22 is arranged through the bottom end of the observation window base 2, and a baffle 3 is installed on the inner side wall of the observation channel 22. The baffle 3 is used to cover the observation channel 22, and the baffle 3 is provided with an observation hole 31. The edge of the observation hole 31 extends downward to form an extension portion 32, and a gap is left between the extension portion 32 and the observation channel 22.

[0027] During diamond manufacturing, the microwaves in the sealing cover body 1 enter the observation channel 22, part of the microwaves enter the gap between the extension part 32 and the observation channel 22, and part of the microwaves enter the extension part 32. When the microwaves in the gap encounter the baffle 3, they will be blocked by the baffle 3 and reflected back. The reflected microwaves enter the observation channel 22 after passing through the gap. The phase of the reflected microwaves is opposite to the phase of the microwaves entering the observation channel 22 from the sealing cover body 1. Therefore, the reflected microwaves will offset part of the microwaves entering the observation channel 22 from the sealing cover body 1, thereby reducing the amount of microwaves entering the extension part 32 through the observation channel 22. The amount of microwaves entering the extension part 32 will gradually attenuate in the extension part 32 when passing through the extension part 32, so that the amount of microwaves entering the glass 23 is very small, thereby reducing the temperature of the glass 23 and improving the service life of the observation window.

[0028] like Figure 2 As shown, a sealing gasket is installed in the groove 21, and the sealing gasket is tightly connected to the glass 23 and the groove 21 respectively.

[0029] Specifically, the connection between the glass 23 and the observation window base 2 can be sealed by the provided sealing gasket, thereby preventing outside air from entering the observation window through the gap at the connection between the glass 23 and the observation window base 2.

[0030] like Figure 2 As shown, the sealing gasket is made of copper, the observation window base 2 is made of stainless steel, the inner bottom wall of the groove 21 is provided with an annular protrusion 211 , and the sealing gasket is tightly fitted and connected to the annular protrusion 211 .

[0031] Specifically, when installing the sealing gasket, it is installed in the groove 21 by squeezing the sealing gasket. At the same time, since the hardness of copper is less than that of stainless steel, the contact position of the sealing gasket with the annular protrusion 211 will be deformed and shrink inward, so that the sealing gasket and the annular protrusion 211 fit tightly together, improving the sealing between the sealing gasket and the groove 21, and preventing outside air from entering the observation window through the gap between the sealing gasket and the groove 21.

[0032] like Figure 2 As shown, an annular groove 221 is formed on the inner side wall of the observation channel 22 , and the baffle 3 is installed in the annular groove 221 .

[0033] Specifically, the annular groove 221 can facilitate installation and removal of the baffle 3 .

[0034] like Figure 2 As shown, the annular groove 221 is communicated with the groove 21 .

[0035] Specifically, the annular groove 221 is connected to the groove 21. When installing the baffle 3, the baffle 3 can be placed into the annular groove 221 from the top of the observation window base 2, making the installation and removal of the baffle 3 more convenient.

[0036] like Figure 2 As shown, the extension portion 32 is cylindrical.

[0037] Preferably, the baffle 3 is made of stainless steel, which can strongly shield and reflect microwaves, thereby causing the microwaves to be reflected in the cylindrical extension portion 32 and increasing attenuation.

[0038] Furthermore, the cylindrical extension 32 forms a circular waveguide for the microwaves entering the extension 32. Since a circular waveguide requires a certain diameter and length to attenuate the microwaves to a safe range, the present structure attenuates the microwaves by cooperating with the baffle 3 and the gap between the extension 32 and the observation channel 22, thereby reducing the amount of microwaves entering the extension 32. Therefore, the overall length of the observation window does not need to be set too long, but the diameter of the observation window needs to be larger. An observation window with a larger diameter can provide a wider field of view of the observation window, making it easier for users to observe the growth of diamonds.

[0039] like Figure 2 As shown, the glass 23 is detachably mounted on the top of the observation window base 2 by bolts.

[0040] Specifically, the glass 23 and the observation window base 2 can be easily assembled and disassembled by bolts.

[0041] like Figure 1-2As shown, there are four observation window bases 2 , and the four observation window bases 2 are arranged in a circular array on the side wall of the sealing cover body 1 .

[0042] Specifically, four observation window bases 2 are provided, which can facilitate the user to select different directions to observe the growth of diamonds.

[0043] The technical principles of the present invention have been described above with reference to specific embodiments. These descriptions are intended solely to illustrate the principles of the present invention and should not be construed in any way as limiting the scope of protection of the present invention. Based on the explanations herein, those skilled in the art will be able to devise other specific implementations of the present invention without inventive effort, and such implementations will fall within the scope of protection of the present invention.

Claims

1. An observation window structure for a sealing cover of an MPCVD device, characterized in that: It comprises a sealing cover body (1), wherein at least one observation window base (2) is embedded in a side wall of the sealing cover body (1); The top of the observation window base (2) is located outside the sealing cover body (1), and the top of the observation window base (2) is detachably mounted with glass (23). The bottom of the observation window base (2) is located inside the sealing cover body (1). The top of the observation window base (2) is provided with a groove (21), and the bottom of the inner wall of the groove (21) is provided with an observation channel (22). The observation channel (22) passes through the bottom of the observation window base (2). A baffle (3) is installed on the inner side wall of the observation channel (22), and the baffle (3) is used to cover the observation channel (22). The baffle (3) is provided with an observation hole (31), and the edge of the observation hole (31) extends downward to form an extension portion (32), and a gap is left between the extension portion (32) and the observation channel (22).

2. The observation window structure of the sealing cover for MPCVD equipment according to claim 1, characterized in that: A sealing gasket is installed in the groove (21), and the sealing gasket is tightly fitted and connected to the glass (23) and the groove (21) respectively.

3. The observation window structure of the sealing cover for MPCVD equipment according to claim 2, characterized in that: The sealing gasket is made of copper, the observation window base (2) is made of stainless steel, an annular protrusion (211) is convexly provided on the inner bottom wall of the groove (21), and the sealing gasket is tightly fitted and connected to the annular protrusion (211).

4. The observation window structure of the sealing cover for MPCVD equipment according to claim 1, characterized in that: An annular groove (221) is provided on the inner side wall of the observation channel (22), and the baffle (3) is installed in the annular groove (221).

5. The observation window structure of the sealing cover for MPCVD equipment according to claim 4, characterized in that: The annular groove (221) is communicated with the groove (21).

6. The observation window structure of the sealing cover for MPCVD equipment according to claim 1, characterized in that: The extension portion (32) is cylindrical.

7. The observation window structure of the sealing cover for MPCVD equipment according to claim 1, characterized in that: The glass (23) is detachably mounted on the top end of the observation window base (2) via bolts.

8. The observation window structure of the sealing cover for MPCVD equipment according to claim 1, characterized in that: The number of the observation window bases (2) is four, and the four observation window bases (2) are arranged in a circular array on the side wall of the sealing cover body (1).

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