Evaporation equipment

Abstract

The utility model discloses evaporation equipment. The evaporation equipment comprises a crucible; the opening of the crucible is covered with the main cover plate, the main cover plate comprises a plurality of sub cover plates which are arranged at intervals, and the sub cover plates are movably arranged on the main cover plate in the first direction; the nozzles are arranged on the sub-cover plates and used for spraying out evaporation materials, and the nozzles can synchronously move relative to the crucible along with the sub-cover plates; the driving mechanism is arranged on the crucible and connected with the sub cover plate, and the driving mechanism is used for driving the sub cover plate to move in a reciprocating mode relative to the main cover plate and the crucible in the first direction. Therefore, the driving mechanism can realize the bidirectional adjustment of the nozzle in the first direction relative to the crucible, that is, the evaporation equipment can realize the position change of the nozzle through the driving mechanism, so that the position of the nozzle can be quickly adjusted according to the evaporation operation requirement of the evaporation equipment, and the production takt of the evaporation equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation equipment, in particular to evaporation equipment. Background Art

[0002] At present, when evaporation equipment is used for process production, the evaporation equipment used is an evaporation source system, which mainly includes a crucible for loading materials and a nozzle fixed on the crucible. The heated and vaporized evaporation material is sprayed out through the nozzle to realize the coating operation.

[0003] In the related art, in a linear crucible structure, the molecules of the evaporation material sprayed out from the nozzles at various locations will be non-uniform. When the nozzle position in the evaporation equipment is fixed, the position of the nozzle cannot be adjusted by hardware to achieve uniformity of the evaporation operation. Since the coating uniformity cannot be adjusted by process parameters during the production process, when the uniformity of the film is abnormal, it is necessary to cool down and open the cavity for treatment, manually adjust the position of the nozzle, and then restore to the required process conditions. This requires a long processing time, which affects the production rhythm and reduces production capacity. Utility Model Content

[0004] The present invention aims to solve at least one of the technical problems in the prior art. To this end, one object of the present invention is to provide an evaporation device having good coating thickness uniformity.

[0005] According to an embodiment of the present invention, the evaporation equipment includes: a crucible; a main cover plate, the main cover plate covers the opening of the crucible, the main cover plate includes a plurality of sub-cover plates arranged at intervals, and the sub-cover plates are movably arranged on the crucible along the first direction; a nozzle, the nozzle is provided on the sub-cover plate and is used to spray out the evaporation material, and the nozzle can move synchronously with the sub-cover plate relative to the main cover plate and the crucible; a driving mechanism, the driving mechanism is provided on the crucible and connected to the sub-cover plate, and the driving mechanism is used to drive the sub-cover plate to move back and forth relative to the crucible along the first direction.

[0006] According to some embodiments of the present invention, the winding drive mechanism includes: a first driving unit, which is arranged on the first side of the sub-cover in the first direction, and is used to drive the sub-cover to move toward the first side of the first direction; a second driving unit, which is arranged on the second side of the sub-cover in the first direction, and is used to drive the sub-cover to move toward the second side of the first direction.

[0007] According to some embodiments of the present invention, the first driving part is constructed as a first winding mechanism, the first winding mechanism has a first winding belt arranged to be wound, and the first winding belt is connected to the sub-cover; the second driving part is constructed as a second winding mechanism, the second winding mechanism has a second winding belt arranged to be wound, and the second winding belt is connected to the sub-cover; wherein, when one of the first winding mechanism and the second winding mechanism unwinds, the other one of the first winding mechanism and the second winding mechanism rewinds.

[0008] According to some embodiments of the present invention, the driving mechanism also includes a rotating mechanism, which includes: a first rotating part, which is connected to the first reel of the first winding mechanism and can drive the first reel to rotate to reel up the first tape; and / or, a second rotating part, which is connected to the second reel of the first winding mechanism and can drive the second reel to rotate to reel up the second tape.

[0009] According to some embodiments of the present invention, the driving mechanism includes a first rotating part and a second rotating part, and at least one of the first rotating part and the second rotating part is configured as a driving motor.

[0010] According to some embodiments of the present invention, the first roll tape is a metal flexible roll tape; and / or the second roll tape is a metal flexible roll tape.

[0011] According to some embodiments of the present invention, the evaporation equipment includes multiple groups of the nozzles and the sub-cover plates, and the multiple groups of the nozzles and the sub-cover plates are arranged on the crucible along the first direction.

[0012] According to some embodiments of the present invention, a set of the nozzle and the sub-cover plate includes one sub-cover plate and at least one nozzle, and the position of the nozzle relative to the sub-cover plate is fixed.

[0013] According to some embodiments of the present invention, the crucible is formed with a mounting cavity, the inner wall of the mounting cavity is provided with a slide groove extending along the first direction, and the sub-cover is slidably disposed in the slide groove.

[0014] According to some embodiments of the present invention, the main cover includes a fixed portion and a plurality of sub-covers that are movable relative to the fixed portion along a first direction, and the driving mechanism is disposed on the fixed portion.

[0015] The evaporation device according to the embodiment of the present invention has at least the following advantages:

[0016] (1) In the evaporation equipment, the position of the nozzle relative to the crucible in the first direction can be adjusted, and there is no need to cool down the evaporation device and open the cavity under abnormal conditions. This can save the adjustment time of the evaporation equipment while optimizing the uniformity of the thin film, and help to improve the production cycle.

[0017] (2) The evaporation equipment adjusts the nozzle position by driving the sub-cover plate through a driving mechanism to move the nozzle, with high adjustment accuracy and good stability.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0020] Figure 1 It is a structural schematic diagram of the evaporation equipment in the prior art;

[0021] Figure 2 This is a top view of the main cover plate of the evaporation equipment according to an embodiment of the present utility model;

[0022] Figure 3 It is a partial enlarged schematic diagram of the interior of the evaporation device according to an embodiment of the present utility model;

[0023] Figure 4 yes Figure 3 Sectional view at midline AA;

[0024] Figure 5 It is a cross-sectional view of the second winding mechanism according to an embodiment of the present utility model.

[0025] Reference numerals:

[0026] Evaporation equipment 100;

[0027] Crucible 1; mounting cavity 11; chute 12; sub-cover plate 2; fixing portion 22; nozzle 3;

[0028] Driving mechanism 4; first winding mechanism 41; first belt 411; second winding mechanism 42; second belt 421; rotating mechanism 43; rotating shaft 431. DETAILED DESCRIPTION

[0029] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0030] Reference below Figure 1-Figure 5 The evaporation device 100 according to an embodiment of the present invention is described. The evaporation device 100 is used to evaporate or sublimate the evaporation material so that the evaporation material can be precipitated in space or on the surface of the substrate and form a coating film.

[0031] The evaporation device 100 according to the embodiment of the present invention includes: a crucible 1 , a main cover plate, a sub-cover plate 2 and a nozzle 3 .

[0032] The crucible 1 can be used to accommodate the evaporation material. The evaporation material can be placed in the storage space formed by the crucible 1 and is suitable for evaporation or sublimation in the crucible 1. At the same time, the main cover plate covers the opening of the crucible 1 and includes a plurality of sub-cover plates 2 arranged at intervals. The sub-cover plates 2 are movably arranged on the main cover plate along a first direction. The nozzle 3 is provided on the sub-cover plates 2 and is used to spray the vaporized evaporation material.

[0033] Furthermore, the position of the nozzle 3 relative to the sub-cover plate 2 is fixed, the main cover plate is a mounting carrier for the sub-cover plate 2, and the main cover plate is fixed to the crucible 1, so that the nozzle 3 can move synchronously with the sub-cover plate 2 relative to the main cover plate and the crucible 1, and the driving mechanism 4 is provided on the main cover plate, and the driving mechanism 4 is connected to the sub-cover plate 2, and the driving mechanism 4 is used to drive the sub-cover plate 2 to move back and forth relative to the crucible 1 along the first direction to adjust the position of the sub-cover plate 2 relative to the crucible 1 in the first direction. It can be understood that during the process of adjusting the position of the sub-cover plate 2 relative to the crucible 1 in the first direction, the nozzle 3 can move synchronously with the sub-cover plate 2, thereby realizing the position adjustment of the nozzle 3 relative to the crucible 1 in the first direction in the evaporation equipment 100, thereby improving the evaporation operation effect of the evaporation equipment 100.

[0034] It should be noted that "the drive mechanism 4 is provided on the crucible 1" means that the drive mechanism 4 is fixed relative to the crucible 1. The drive mechanism 4 can be indirectly fixed to the crucible 1 through the main cover plate, or the drive mechanism 4 can be directly fixed to the crucible 1 and arranged in a position suitable for connecting with the sub-cover plate 2 and avoiding the main cover plate.

[0035] Combine Figure 2 and Figure 3 As shown, the driving mechanism 4 is disposed on the crucible 1 , and the driving mechanism 4 can drive the sub-cover plate 2 to drive the nozzle 3 to move synchronously relative to the crucible 1 , thereby adjusting the position of the sub-cover plate 2 in the first direction.

[0036] Here, "reciprocating movement" means that the driving mechanism 4 can drive the sub-cover plate 2 to move relative to the crucible 1 toward the first side of the first direction, and the driving mechanism 4 can also drive the sub-cover plate 2 to move relative to the crucible 1 toward the second side of the first direction, and the directions of the first side and the second side are opposite, so that the position of the nozzle 3 relative to the crucible 1 in the first direction can be adjusted according to production and processing requirements.

[0037] It should be noted that, at present, when the evaporation equipment is used for process production, the evaporation equipment used is an evaporation source system, which mainly includes a crucible for loading materials and a nozzle fixed on the crucible. The heated and vaporized evaporation material is ejected through the nozzle to realize the coating operation. In the related art, in the linear crucible structure, the molecules of the evaporation material ejected from the nozzles at various locations will be uneven. When the nozzle position in the evaporation equipment is fixed, the position of the nozzle cannot be adjusted by hardware to achieve the uniformity of the evaporation operation, because the coating uniformity cannot be adjusted by process parameters during the production process. Therefore, when the uniformity of the thin film is abnormal, it is necessary to cool down and open the cavity for processing, manually adjust the position of the nozzle, and then restore to the required process conditions. It takes a long processing time, which affects the production rhythm and reduces production capacity.

[0038] In the utility model, the driving mechanism 4 can realize bidirectional adjustment of the nozzle 3 relative to the crucible 1 in the first direction. That is to say, the evaporation equipment 100 can realize the position change of the nozzle 3 through the driving mechanism 4, so that the position of the nozzle 3 can be quickly adjusted according to the evaporation operation requirements of the evaporation equipment 100. There is no need to manually adjust after cooling and opening the cavity as in the existing technical solution, which can save the adjustment time of the evaporation equipment 100 and improve the production rhythm of the evaporation equipment 100.

[0039] like Figure 3 As shown, in some embodiments of the present invention, the winding drive mechanism includes: a first drive part and a second drive part.

[0040] The first drive unit is disposed on the first side of the sub-cover plate 2 in the first direction, and is used to drive the sub-cover plate 2 to move toward the first side in the first direction; the second drive unit is disposed on the second side of the sub-cover plate 2 in the first direction, and is used to drive the sub-cover plate 2 to move toward the second side in the first direction. Thus, the evaporation apparatus 100 can use the two drive units (i.e., the first drive unit and the second drive unit) to respectively drive the sub-cover plate 2 to move relative to the main cover plate and the crucible 1 toward the first side or the second side in the first direction, thereby adjusting the position of the sub-cover plate 2 and the nozzle 3 on the crucible 1.

[0041] It can be understood that in the present invention, the driving mechanism 4 has a first driving part and a second driving part, and the first driving part and the second driving part are respectively connected to the sub-cover plate 2, and the first driving part and the second driving part can respectively drive the sub-cover plate 2, so as to realize the position adjustment of the sub-cover plate 2 relative to the crucible 1 in the first direction through the cooperation of the first driving part and the second driving part.

[0042] like Figure 3 As shown, in a further embodiment of the present invention, the first driving part is constructed as a first winding mechanism 41, the first winding mechanism 41 has a first winding belt 411 that is wound, and the first winding belt 411 is connected to the sub-cover 2; the second driving part is constructed as a second winding mechanism 42, the second winding mechanism 42 has a second winding belt 421 that is wound, and the second winding belt 421 is connected to the sub-cover 2.

[0043] When one of the first winding mechanism 41 and the second winding mechanism 42 is unwinding, the other of the first winding mechanism 41 and the second winding mechanism 42 is rewinding. That is, when the first winding mechanism 41 is rewinding the first tape 411, the sub-cover 2 is driven by the first tape 411 to move toward the first winding mechanism 41 (i.e., toward the first side of the first direction), and at the same time, the second winding mechanism 42 is unwinding the second tape 421 to ensure that the sub-cover 2 can move toward the first side; when the second winding mechanism 42 is rewinding the second tape 421, the sub-cover 2 is driven by the second tape 421 to move toward the second winding mechanism 42 (i.e., toward the second side of the first direction), and at the same time, the first winding mechanism 41 is unwinding the first tape 411 to ensure that the sub-cover 2 can move toward the second side.

[0044] It should be noted that the winding mechanisms (i.e., the first winding mechanism 41 and the second winding mechanism 42) both wind a certain length of tape, and the winding mechanisms can unwind or rewind according to the position adjustment requirements of the sub-cover 2. Specifically, the rewinding action of the winding mechanism drives the sub-cover 2 to move, thereby achieving position adjustment of the sub-cover 2 in a first direction, and the winding mechanism located on the side opposite to the movement direction of the sub-cover 2 unwinds to meet the position adjustment requirements of the sub-cover 2.

[0045] Reference Figure 3 , take the driving mechanism 4 driving the sub-cover 2 to move toward the first side as an example: the first winding mechanism 41 performs a winding action to drive the sub-cover 2 to move toward the first side through the first roll 411, and at the same time the second winding mechanism 42 performs an unwinding action to convey the second roll 421 to the side of the sub-cover 2 to increase the conveying length of the second roll 421 to meet the position change requirements of the sub-cover 2.

[0046] It is understood that the width of the first tape 411 and the second tape 421 is equal to the width of the crucible opening. By covering the opening of the crucible with the first tape 411 and the second tape 421, the vapor deposition material gas escaping from the gap can be effectively blocked. Alternatively, the two ends of the sub-cover plate 2 in the first direction are connected to the fixed portion 22 of the main cover plate through a telescopic body, so that the entire main cover plate forms a closed plate structure, eliminating the gas escape space between the fixed portion 22 and the sub-cover plate 2. The telescopic body can be a wavy folded metal foil, such as aluminum foil; or glass wool, glass fiber wool, etc.

[0047] Reference Figure 3 It can be seen that the first winding mechanism 41 and the second winding mechanism 42 are respectively arranged on both sides of the sub-cover plate 2 in the first direction, and the sub-cover plate 2 can be adjusted in position along the first direction between the first winding mechanism 41 and the second winding mechanism 42. That is to say, the position adjustment stroke of the sub-cover plate 2 relative to the crucible 1 is determined by the positions of the first winding mechanism 41 and the second winding mechanism 42.

[0048] In some embodiments of the present invention, the driving mechanism 4 further includes a rotating mechanism 43 , and the rotating mechanism 43 includes a first rotating portion and a second rotating portion.

[0049] Furthermore, the first rotating part is connected to the first reel of the first winding mechanism 41, and the first rotating part can drive the first reel to rotate to reel in the first tape 411; the second rotating part is connected to the second reel of the first winding mechanism 41, and the second rotating part can drive the second reel to rotate to reel in the second tape 421.

[0050] Among them, the first tape 411 is wound on the first reel, and the first tape 411 can be wound by rotating the first reel to realize the winding action of the first tape 411; the second tape 421 is wound on the second reel, and the second tape 421 can be wound by rotating the second reel to realize the winding action of the second tape 421.

[0051] It can be understood that the rotating mechanism 43 is used to be connected to the rotating shaft 431 of the winding mechanism (such as the first winding mechanism 41 and the second winding mechanism 42), and the rotating mechanism 43 can drive the rotating shaft 431 to rotate to realize the action of the winding mechanism to reel in the tape.

[0052] It should be noted that the winding action of the first winding mechanism 41 and the second winding mechanism 42 can be driven by the rotary mechanism 43 (i.e., the first rotary part and the second rotary part) respectively. When the first rotary part drives the first reel to realize the winding action of the first winding mechanism 41, the sub-cover plate 2 can drive the second tape 421 to move toward the first side, and the second winding mechanism 42 can realize the unwinding action under the drive of the sub-cover plate 2; when the second rotary part drives the second reel to realize the winding action of the second winding mechanism 42, the sub-cover plate 2 can drive the first tape 411 to move toward the second side, and the first winding mechanism 41 can realize the unwinding action under the drive of the sub-cover plate 2. In other words, the unwinding action of one of the first winding mechanism 41 and the second winding mechanism 42 can be realized by the rotary mechanism 43 that cooperates with the other of the first winding mechanism 41 and the second winding mechanism 42.

[0053] In some embodiments of the present invention, at least one of the first rotating part and the second rotating part is configured as a driving motor, so that the driving motor drives the rotating shaft 431 to rotate, thereby realizing the winding action of the winding mechanism.

[0054] Among them, the first rotating part and the second rotating part can both be constructed as drive motors, so that when the first winding mechanism 41 is required to perform a winding action, the first driving motor connected to the first reel is driven to realize the winding action of the first winding mechanism 41; when the second winding mechanism 42 is required to perform a winding action, the second driving motor connected to the second reel is driven to realize the winding action of the second winding mechanism 42.

[0055] It should be noted that the driving motor can be constructed as a servo motor to improve the adjustment accuracy of the position of the nozzle 3.

[0056] In some embodiments of the present invention, when one of the first rotating portion and the second rotating portion is configured as an active rotating mechanism 43, the other of the first rotating portion and the second rotating portion may also be configured as a rotating spring. The rotating spring may be configured as a torsion spring adapted to store energy when the corresponding winding mechanism performs an unwinding action.

[0057] That is, when the first rotating portion is configured as a drive motor, the second rotating portion can be configured as a rotary spring. Thus, when the drive motor drives the first winding mechanism 41 to perform a rewinding action, the second winding mechanism 42 can perform an unwinding action, and the rotary spring accumulates energy, causing the second winding mechanism 42 to have a tendency to perform a rewinding action. Furthermore, when the drive motor is unlocked, the rotary spring can cause the second winding mechanism 42 to perform a rewinding action, and the first reel 411 can be driven by the sub-cover 2 to achieve an unwinding action for the first winding mechanism 41.

[0058] It can be understood that when a set of rotating mechanisms 43 includes a driving motor and a rotating spring, the number of motors set in the device can be reduced, thereby reducing the manufacturing cost of the evaporation device 100.

[0059] In some embodiments of the present invention, the first tape 411 is a metal flexible tape.

[0060] In other embodiments of the present invention, the second tape 421 is a metal flexible tape.

[0061] The aforementioned "metal flexible tape" can be constructed as a titanium tape, which has excellent heat resistance, strength, plasticity, and toughness, and can meet the requirements of driving the sub-cover 2 and winding and storing. It should be noted that the specific material of the metal flexible tape is not limited to this, and can also be other materials that can meet the requirements of winding and driving the sub-cover 2.

[0062] It should be noted that the first roll 411 and the second roll 421 can be constructed of the same material to improve the connection reliability between the driving mechanism 4 and the sub-cover 2 .

[0063] like Figure 2 As shown, in some embodiments of the present invention, the evaporation device 100 includes multiple sets of nozzles 3 and sub-cover plates 2, and the multiple sets of nozzles 3 and sub-cover plates 2 are arranged along a first direction on the crucible 1. As a result, the positions of the multiple nozzles 3 in the evaporation device 100 are adjustable, thereby enriching the evaporation operation methods of the evaporation device 100 and improving the evaporation operation effect of the evaporation device 100.

[0064] It is understood that each set of nozzles 3 and sub-cover plate 2 can correspond to a set of drive mechanisms 4. When multiple sets of drive mechanisms 4 are also provided in the evaporation apparatus 100, the positions of the multiple nozzles 3 relative to the crucible 1 in the first direction can be adjusted respectively, thereby enabling the evaporation apparatus 100 to meet various evaporation operation requirements.

[0065] In a further embodiment of the present invention, a group of nozzles 3 and sub-cover plate 2 includes a sub-cover plate 2 and at least one nozzle 3, and the position of the nozzle 3 relative to the sub-cover plate 2 is fixed, so that the nozzle 3 can be driven to move synchronously by driving the sub-cover plate 2 to achieve position adjustment of the nozzle 3 in the evaporation equipment 100, and the reliability of the nozzle 3 position adjustment process can be improved.

[0066] It should be noted that when a sub-cover plate 2 is provided with multiple nozzles 3 (such as two, three, etc.), the sub-cover plate 2 can drive the multiple nozzles 3 to move synchronously to achieve synchronous adjustment of the positions of the multiple nozzles 3 in the crucible 1, reducing the difficulty of adjustment.

[0067] like Figure 4As shown, in some embodiments of the present invention, the crucible 1 is formed with a mounting cavity 11, and the inner wall of the mounting cavity 11 is provided with a slide groove 12 extending along a first direction, and the sub-cover plate 2 is slidably disposed in the slide groove 12. The slide groove 12 is slidably engaged with the sub-cover plate 2, and the slide groove 12 can guide the sliding of the sub-cover plate 2, thereby improving the stability and reliability of the sub-cover plate 2 during position adjustment.

[0068] In some embodiments of the present application, the main cover includes a fixed portion 22 and a plurality of sub-covers 2 that are movable relative to the fixed portion 22 along a first direction, and the driving mechanism 4 is disposed on the fixed portion 22 .

[0069] The fixing portion 22 is a mounting structure within the main cover plate for mounting the sub-cover plate 2 and the drive mechanism 4. This allows the sub-cover plate 2 and the winding drive mechanism 4 to be mounted on the fixing portion first, and then assembled to the crucible 1 along with the main cover plate, thereby reducing the difficulty of assembling the evaporation apparatus 100. The fixing portion 22 can be constructed as a plate-like structure, a base structure, or the like, without specific limitation herein, as long as it satisfies the mounting requirements of the sub-cover plate 2 and the drive mechanism 4.

[0070] The evaporation device 100 according to the embodiment of the present invention has at least the following advantages compared to the above-mentioned prior art solutions:

[0071] (1) In the evaporation device 100, the position of the nozzle 3 relative to the crucible 1 in the first direction can be adjusted, and there is no need to cool down the evaporation device and open the cavity under abnormal conditions. This can save the adjustment time of the evaporation device 100 while optimizing the uniformity of the thin film, and help improve the production cycle.

[0072] (2) The evaporation device 100 realizes the position adjustment of the nozzle 3 by driving the sub-cover plate 2 to move the nozzle 3 through the driving mechanism 4, with high adjustment accuracy and good stability.

[0073] The evaporation device 100 according to the embodiment of the present application can also be applied to the evaporation system, and the evaporation system can be provided with a film thickness measurement system, a data feedback analysis system, an adjustment control system, etc. The evaporation device 100 can be electrically connected to the adjustment control system, and the adjustment control system can control the evaporation device 100 based on the signal of the data feedback analysis system to adjust the position of the nozzle 3 in the evaporation device 100. Among them, the film thickness measurement system can measure the film thickness of the thin film formed by the evaporation operation of the evaporation device 100, and feed the film thickness signal back to the data feedback analysis system. The data feedback analysis system can analyze and judge the consistency of the film based on the film thickness signal to determine whether the consistency of the film meets the preset requirements. If the preset requirements are not met (i.e., the film thickness distribution is asymmetric, the center of symmetry is not formed at the center position of the substrate, etc.), the control signal is fed back to the adjustment control system, and the evaporation device 100 is adjusted by the adjustment control system.

[0074] Specifically, when the film thickness distribution of the film is asymmetric, that is, the center of symmetry is not at the center of the substrate, the evaporation system determines that the hardware position of the nozzle 3 needs to be adjusted. The nozzle 3 at the corresponding position in the evaporation equipment 100 is adjusted and moved through calculation, and further film testing is carried out to obtain the adjusted film thickness, so that the overall film is symmetrically distributed and meets the uniformity requirements. The evaporation system adjustment is completed and the film can continue to be taped.

[0075] Furthermore, if the film thickness is roughly symmetrically distributed along the center of the substrate, but there is an overall numerical deviation in the left and right film thicknesses, the evaporation system determines that the left and right temperature difference of the crucible 1 needs to be adjusted. The evaporation system can calculate the left and right temperatures that need to be adjusted based on the film thickness deviation value. After the temperature adjustment is completed, the film is tested to obtain the adjusted film thickness. The film is symmetrically distributed along the center of the substrate as a whole, meeting the uniformity requirements, and completing the adjustment of the evaporation equipment 100.

[0076] It should be noted that when the evaporation device 100 in this application is applied to the evaporation system, the position of the nozzle 3 in the evaporation device 100 can be automatically adjusted based on the test results, saving personnel's manual operation and judgment time, and the adjustment process of the evaporation device 100 is automatically controllable.

[0077] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0078] In the description of the present invention, "first feature" and "second feature" may include one or more such features.

[0079] In the description of the present invention, “plurality” means two or more.

[0080] In the description of the present invention, a first feature being “above” or “below” a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact via another feature therebetween.

[0081] In the description of the present invention, a first feature “above”, “above” and “above” a second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature.

[0082] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the illustrative use of the above terms does not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0083] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and purpose of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A vapor deposition device, characterized in that: include: Crucible (1); A main cover plate, the main cover plate covers the opening of the crucible (1), the main cover plate comprises a plurality of sub-cover plates (2) arranged at intervals, the sub-cover plates (2) being movably arranged on the main cover plate along a first direction; a nozzle (3), the nozzle (3) being provided on the sub-cover plate (2) and being used for spraying out the evaporation material, and the nozzle (3) being capable of synchronously moving with the sub-cover plate (2) relative to the main cover plate and the crucible (1); A driving mechanism (4) is provided on the crucible (1) and connected to the sub-cover plate (2), and the driving mechanism (4) is used to drive the sub-cover plate (2) to move back and forth relative to the crucible (1) along the first direction.

2. The evaporation device according to claim 1, characterized in that The driving mechanism comprises: a first driving portion, the first driving portion being arranged on a first side of the sub-cover plate (2) in the first direction and being used for driving the sub-cover plate (2) to move toward the first side in the first direction; A second driving portion, the second driving portion is arranged on a second side of the sub-cover plate (2) in the first direction, and is used to drive the sub-cover plate (2) to move toward the second side in the first direction.

3. The evaporation device according to claim 2, characterized in that The first driving portion is constructed as a first winding mechanism (41), the first winding mechanism (41) having a first winding belt (411) that is wound, and the first winding belt (411) is connected to the sub-cover plate (2); The second driving portion is constructed as a second winding mechanism (42), the second winding mechanism (42) having a wound second belt (421), and the second belt (421) is connected to the sub-cover plate (2); Wherein, when one of the first winding mechanism (41) and the second winding mechanism (42) unwinds, the other of the first winding mechanism (41) and the second winding mechanism (42) rewinds.

4. The evaporation equipment according to claim 3, characterized in that The driving mechanism (4) further comprises a rotating mechanism (43), wherein the rotating mechanism (43) comprises: a first rotating portion, the first rotating portion being connected to the first reel of the first winding mechanism (41) and capable of driving the first reel to rotate so as to reel up the first tape (411); and / or, a second rotating portion, wherein the second rotating portion is connected to the second reel of the first winding mechanism (41) and can drive the second reel to rotate to reel in the second tape (421).

5. The evaporation equipment according to claim 4, characterized in that The driving mechanism (4) comprises a first rotating part and a second rotating part, and at least one of the first rotating part and the second rotating part is configured as a driving motor.

6. The evaporation equipment according to claim 3, characterized in that The first coil (411) is a metal flexible coil; And / or, the second roll (421) is a metal flexible roll.

7. The evaporation equipment according to claim 1, characterized in that The evaporation device comprises a plurality of groups of the nozzles (3) and the sub-cover plates (2), and the plurality of groups of the nozzles (3) and the sub-cover plates (2) are arranged on the crucible (1) along the first direction.

8. The evaporation equipment according to claim 7, characterized in that A set of the nozzle (3) and the sub-cover plate (2) comprises one sub-cover plate (2) and at least one nozzle (3), and the position of the nozzle (3) relative to the sub-cover plate (2) is fixed.

9. The evaporation equipment according to claim 1, characterized in that The crucible (1) is formed with a mounting cavity (11), the inner wall of the mounting cavity (11) is provided with a slide groove (12) extending along the first direction, and the sub-cover plate (2) is slidably arranged in the slide groove (12).

10. The evaporation equipment according to claim 1, characterized in that The main cover plate comprises a fixing portion (22) and a plurality of sub-cover plates (2) that are movable relative to the fixing portion (22) along a first direction, and the driving mechanism (4) is arranged on the fixing portion (22).

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