Sucking disc device

Abstract

The utility model belongs to the technical field of direct writing photoetching, and discloses a suction cup device. The suction cup device comprises a supporting plate, a suction cup mechanism and an air channel pipeline, a plurality of cushion blocks are arranged on the supporting plate in a protruding mode, the suction cup mechanism is jointly supported by the cushion blocks, a containing space is formed between the suction cup mechanism and the supporting plate, the air channel pipeline is arranged in the containing space, the air channel pipeline is communicated with the suction cup mechanism, and the air channel pipeline can provide negative pressure adsorption force. The multiple cushion blocks are arranged on the supporting plate to jointly support the suction cup mechanism, stable supporting of the suction cup mechanism is achieved, and then the bearing capacity of the suction cup mechanism is enhanced; the air channel pipeline arranged in the containing space can be supported by the supporting plate, and the air channel pipeline cannot be wound when the suction cup device reciprocates. The air channel pipeline is directly communicated with the suction cup mechanism so as to provide continuous and stable negative pressure adsorption force, so that a workpiece placed on the suction cup mechanism can be stably adsorbed, and surface damage possibly caused by a traditional mechanical clamping mode is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of direct writing photolithography, in particular to a suction cup device. Background Art

[0002] Direct-write lithography, the mainstream technology for making masks for semiconductors, is currently used in the manufacturing of semiconductor devices, various integrated circuits, liquid crystal displays, circuit boards, and other products. Direct-write lithography for flat-panel display manufacturing significantly improves production efficiency, reduces costs through direct exposure without a mask, and ensures high precision and high-quality product quality, providing strong technical support for the rapid iteration and customized production of flat-panel displays.

[0003] In the prior art, the suction cup of a direct write exposure machine is usually supported by a single or double beam. However, due to the large size of the flat panel display, the existing supporting method cannot meet the supporting requirements of the flat panel manufacturer.

[0004] Therefore, it is necessary to provide a suction cup device to solve the above problems. Utility Model Content

[0005] The utility model aims to provide a suction cup device with strong bearing capacity, reasonable arrangement of gas pipelines and no tendency to get entangled.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] A suction cup device, comprising:

[0008] A support plate, wherein a plurality of pads are convexly provided on the support plate;

[0009] A suction cup mechanism, wherein the suction cup mechanism is supported by a plurality of the pads, and an accommodating space is provided between the suction cup mechanism and the support plate;

[0010] An air pipeline is arranged in the accommodating space, the air pipeline is connected to the suction cup mechanism, and the air pipeline can provide negative pressure adsorption force.

[0011] Preferably, the area of ​​the support plate is not less than the area of ​​the suction cup mechanism.

[0012] Preferably, a plurality of suction cup assemblies are spliced ​​together to form the suction cup mechanism.

[0013] Preferably, the surface area of ​​the pad is N*A, where A is the area of ​​one suction cup assembly supported by the pad, and N is the number of suction cup assemblies supported by the pad.

[0014] Preferably, the suction cup assembly includes a first layer of plates, a second layer of plates and a third layer of plates stacked in sequence, a vacuum cavity is formed between the first layer of plates and the second layer of plates, the air path is connected to the vacuum cavity, an adsorption cavity is formed between the second layer of plates and the third layer of plates, the adsorption cavity is connected to the vacuum cavity, and a number of adsorption holes are opened on the third layer of plates to connect the adsorption cavity with the outside world.

[0015] Preferably, the suction cup assembly further comprises a locking piece, which is sequentially passed through the first layer plate, the second layer plate and the third layer plate to fixedly connect the three.

[0016] Preferably, there are multiple locking members, and the multiple locking members jointly fix and connect the first layer board, the second layer board and the third layer board.

[0017] Preferably, the suction cup mechanism further comprises a sealing cover plate, and the sealing cover of the sealing cover plate is arranged at the joint of two adjacent suction cup assemblies.

[0018] Preferably, the top surfaces of two adjacent suction cup assemblies are each provided with a groove, the two grooves forming a receiving groove, the sealing cover plate is located in the receiving groove, and the sealing cover plate does not protrude from the top surface of the suction cup assembly.

[0019] Preferably, the support plate is made of marble.

[0020] Beneficial effects of the utility model:

[0021] The suction cup device includes a support plate, a suction cup mechanism, and an air pipeline. The support plate is provided with a plurality of pads, the suction cup mechanism is supported by the plurality of pads, a storage space is provided between the suction cup mechanism and the support plate, the air pipeline is arranged in the storage space, the air pipeline is connected to the suction cup mechanism, and the air pipeline can provide a negative pressure adsorption force. By providing a plurality of pads on the support plate to jointly support the suction cup mechanism, a stable support for the suction cup mechanism is achieved, thereby enhancing the bearing capacity of the suction cup mechanism; by providing the pads, a storage space is provided between the suction cup mechanism and the support plate, so that the air pipeline can be arranged in the storage space, providing convenience for the arrangement of the air pipeline. Compared with an air pipeline arranged in the air, the air pipeline arranged in the storage space can be supported by the support plate, and the air pipeline will not be entangled when the suction cup device reciprocates; the air pipeline is directly connected to the suction cup mechanism to provide a continuous and stable negative pressure adsorption force, so that the workpiece placed on the suction cup mechanism can be stably adsorbed, avoiding the surface damage that may be caused by traditional mechanical clamping methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of the suction cup device provided by the utility model;

[0023] Figure 2 It is a structural diagram of the support plate and the pad provided by the utility model;

[0024] Figure 3 It is a structural diagram of the suction cup mechanism provided by the utility model;

[0025] Figure 4 It is a structural schematic diagram of the suction cup assembly provided by the utility model.

[0026] In the picture:

[0027] 1. Support plate;

[0028] 2. Pads;

[0029] 3. Suction cup mechanism; 31. Suction cup assembly; 311. First layer; 312. Second layer; 313. Third layer; 3131. Groove; 32. Sealing cover;

[0030] 4. Accommodation space. DETAILED DESCRIPTION

[0031] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0032] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0033] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0034] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0035] Direct-write lithography is the mainstream technology for making pan-semiconductor masks on the market. It can be used to manufacture semiconductor devices, various integrated circuits, liquid crystal displays, circuit boards and other products. Among them, the use of direct-write lithography for flat-panel display manufacturing has significantly improved production efficiency, reduced costs through direct exposure without the need for masks, and ensured high precision and high-quality product quality, providing strong technical support for the rapid iteration and customized production of flat-panel displays. In the existing technology, the suction cup of the direct-write exposure machine is usually supported by a single or double beam. However, due to the large size of the flat-panel display, the existing support method cannot meet the support needs of the flat-panel manufacturer.

[0036] To solve the above problems, Figures 1-4 As shown, this embodiment provides a suction cup device. The suction cup device includes a support plate 1, a suction cup mechanism 3, and an air pipeline. A plurality of pads 2 are protruding from the support plate 1, and the suction cup mechanism 3 is supported by the pads 2. An accommodating space 4 is defined between the suction cup mechanism 3 and the support plate 1. The air pipeline is disposed within the accommodating space 4 and communicates with the suction cup mechanism 3. The air pipeline is capable of providing negative pressure suction.

[0037] By arranging multiple pads 2 on the support plate 1 to jointly support the suction cup mechanism 3, stable support for the suction cup mechanism 3 is achieved, thereby enhancing the carrying capacity of the suction cup mechanism 3; by arranging the pads 2, a accommodating space 4 is provided between the suction cup mechanism 3 and the support plate 1, so that the air pipeline can be arranged in the accommodating space 4, which provides convenience for the arrangement of the air pipeline. Compared with the air pipeline arranged in the air, the air pipeline arranged in the accommodating space 4 can be supported by the support plate 1, and the air pipeline will not be entangled when the suction cup device moves back and forth; the air pipeline is directly connected to the suction cup mechanism 3 to provide continuous and stable negative pressure adsorption force, so that the workpiece placed on the suction cup mechanism 3 can be stably adsorbed, avoiding the surface damage that may be caused by traditional mechanical clamping methods.

[0038] Specifically, the area of ​​the support plate 1 is not less than the area of ​​the suction cup mechanism 3. When the area of ​​the support plate 1 is not less than the area of ​​the suction cup mechanism 3, the multiple pads 2 provided on the support plate 1 can better support the suction cup mechanism 3, preventing the suction cup mechanism 3 from shaking. In this embodiment, the area of ​​the support plate 1 is the same as that of the suction cup mechanism 3 and has the same shape. This ensures that the suction cup device is more compact while providing stable support for the suction cup mechanism 3.

[0039] In this embodiment, the support plate 1 is made of marble. Marble has stable physical properties and is not easily deformed, which ensures the stability of the suction cup assembly. Marble also has good wear resistance and corrosion resistance, making it less susceptible to wear and corrosion during long-term use. This helps extend the service life of the suction cup assembly and reduce maintenance costs.

[0040] Specifically, if Figure 1 、 Figure 3 As shown, multiple suction cup assemblies 31 are spliced ​​together to form the suction cup mechanism 3. That is, the suction cup mechanism 3 adopts a split design, which reduces the difficulty of processing and molding while ensuring the overall suction area. In addition, when a suction cup assembly 31 fails or its performance deteriorates, it can be independently disassembled and replaced, reducing maintenance costs.

[0041] Furthermore, the surface area of ​​the pad 2 is N*A, where A is the area of ​​a suction cup assembly 31 supported by the pad 2, and N is the number of suction cup assemblies 31 supported by the pad 2. That is, when the pad 2 supports the suction cup assembly 31, the surface area of ​​the pad 2 corresponding to the single suction cup assembly 31 is A, and the pad 2 located at the joint of the two suction cup assemblies 31 corresponds to supporting two suction cup assemblies 31, so its surface area is 2A, and so on. This makes the suction cup mechanism 3 of this split design have the same force area at each position, and the force is more uniform, avoiding the suction cup mechanism 3 from tilting; at the same time, according to the overall flatness of the support plate 1, the height of the pad 2 is adjusted by polishing and other means, so that the suction cup mechanism 3 is level, ensuring the flatness of the suction cup mechanism 3.

[0042] In this embodiment, if Figure 1-Figure 3 As shown, four rectangular suction cup assemblies 31 are spliced ​​together to form a rectangular suction cup mechanism 3. At this time, the pad 2 located in the center supports four suction cup assemblies 31, and its surface area is 4A; the pad 2 located at the splicing position supports two suction cup assemblies 31, and its surface area is 2A; the pads 2 at the remaining positions support one suction cup assembly 31, and its surface area is A.

[0043] Specifically, if Figure 4As shown, the suction cup assembly 31 includes a first layer of plate 311, a second layer of plate 312 and a third layer of plate 313 stacked in sequence, a vacuum cavity is formed between the first layer of plate 311 and the second layer of plate 312, the air path is connected to the vacuum cavity, an adsorption cavity is formed between the second layer of plate 312 and the third layer of plate 313, the adsorption cavity is connected to the vacuum cavity, and a plurality of adsorption holes are opened on the third layer of plate 313 to connect the adsorption cavity with the outside world.

[0044] The air in the vacuum chamber is evacuated through the air pipe, creating a negative pressure environment. Since the adsorption chamber is connected to the vacuum chamber, the air in the adsorption chamber is also evacuated, generating a suction force on the workpiece placed on the suction cup mechanism 3 through the adsorption holes in the third layer 313, thereby firmly adsorbing the workpiece. The design of this suction cup assembly 31 increases its overall thickness and rigidity, making it less prone to deformation and improving the stability of adsorption. The dual-layer structure of the vacuum chamber and the adsorption chamber achieves adsorption, making the adsorption force more evenly distributed over a larger area, avoiding adsorption failure caused by excessive local force.

[0045] Specifically, the suction cup assembly 31 further includes a locking member (not shown) that is sequentially disposed through the first, second, and third layers 311, 312, and 313 to securely connect them. The locking member securely connects the first, second, and third layers 311, 312, and 313, forming a more stable overall structure that prevents relative movement or deformation, thereby improving overall stability and durability.

[0046] Furthermore, multiple locking members are provided, and these members collectively securely connect the first, second, and third layers 311, 312, and 313. Multiple locking members distribute the securing force more evenly, reducing the risk of structural deformation or damage due to excessive force at a single point. Furthermore, the joint strength of the first, second, and third layers 311, 312, and 313 can be enhanced by the joint securing of the members. Furthermore, by adjusting the tightness of the locking members, the gaps between the first, second, and third layers 311, 312, and 313 can be adjusted, thereby adjusting the flatness of the suction cup mechanism.

[0047] In this embodiment, the locking member is a bolt. It should be noted that any structure in the prior art that can securely connect the first layer 311, the second layer 312, and the third layer 313 can be used as the locking member in this embodiment, and this embodiment does not limit this.

[0048] Specifically, if Figure 3As shown, the suction cup mechanism 3 further includes a sealing cover plate 32, which is provided at the joint between two adjacent suction cup assemblies 31. The sealing cover plate 32 can cover and seal the joint gap between the two adjacent suction cup assemblies 31, preventing external gas or liquid from entering the interior of the suction cup mechanism 3 through the gap, thereby maintaining a vacuum state inside the suction cup mechanism 3.

[0049] Specifically, if Figure 3 、 Figure 4 As shown, the top surfaces of two adjacent suction cup assemblies 31 are each provided with a recessed groove 3131. The two recessed grooves 3131 form a receiving groove, and the sealing cover plate 32 is located within the receiving groove. The sealing cover plate 32 does not protrude from the top surface of the suction cup assembly 31. This ensures that the surface of the entire suction cup mechanism 3 remains smooth, thereby allowing the surface of the workpiece to fit tightly against the top surface of the suction cup assembly 31, and preventing the protrusion from affecting the suction and placement of the workpiece.

[0050] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A suction cup device, characterized in that: include: A support plate (1), wherein a plurality of pads (2) are protrudingly provided on the support plate (1); A suction cup mechanism (3), wherein the suction cup mechanism (3) is supported by a plurality of the pads (2), and an accommodating space (4) is provided between the suction cup mechanism (3) and the support plate (1); An air pipeline is arranged in the accommodating space (4), the air pipeline is connected to the suction cup mechanism (3), and the air pipeline can provide negative pressure adsorption force.

2. The suction cup device according to claim 1, characterized in that The area of ​​the support plate (1) is not less than the area of ​​the suction cup mechanism (3).

3. The suction cup device according to claim 1, wherein: A plurality of suction cup assemblies (31) are spliced ​​together to form the suction cup mechanism (3).

4. The suction cup device according to claim 3, characterized in that The surface area of ​​the pad (2) is N*A, where A is the area of ​​one of the suction cup assemblies (31) supported by the pad (2), and N is the number of the suction cup assemblies (31) supported by the pad (2).

5. The suction cup device according to claim 3, characterized in that The suction cup assembly (31) comprises a first layer plate (311), a second layer plate (312) and a third layer plate (313) stacked in sequence, a vacuum cavity is formed between the first layer plate (311) and the second layer plate (312), the air path pipeline is connected to the vacuum cavity, an adsorption cavity is formed between the second layer plate (312) and the third layer plate (313), the adsorption cavity is connected to the vacuum cavity, and a plurality of adsorption holes are provided on the third layer plate (313) to enable the adsorption cavity to communicate with the outside world.

6. The suction cup device according to claim 5, characterized in that The suction cup assembly (31) further comprises a locking piece, which is sequentially passed through the first layer plate (311), the second layer plate (312) and the third layer plate (313) to fixedly connect the three.

7. The suction cup device according to claim 6, characterized in that There are multiple locking members, and the multiple locking members jointly and fixedly connect the first layer board (311), the second layer board (312) and the third layer board (313).

8. The suction cup device according to claim 3, characterized in that The suction cup mechanism (3) further comprises a sealing cover plate (32), wherein the sealing cover plate (32) is provided at the joint of two adjacent suction cup assemblies (31).

9. The suction cup device according to claim 8, characterized in that The top surfaces of the two adjacent suction cup assemblies (31) are both provided with grooves (3131), and the two grooves (3131) constitute a receiving groove, the sealing cover plate (32) is located in the receiving groove, and the sealing cover plate (32) does not protrude from the top surface of the suction cup assembly (31).

10. The suction cup device according to any one of claims 1 to 9, characterized in that: The support plate (1) is made of marble.

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