Sheet basket shaking support and wet process equipment

Abstract

The utility model provides a wafer basket shaking support and wet process equipment, and relates to the technical field of semiconductor cleaning. The bearing structure is arranged on the main frame body, and at least four piece basket accommodating positions are arranged on the top surface of the bearing structure; each of the main frame body and the bearing structure at least comprises an inner layer and an outer layer wrapping the outer side of the inner layer, the inner layer comprises a metal material, and the outer layer comprises polytetrafluoroethylene. The wafer basket shaking support can be compatible with at least two wafer baskets with different sizes, so that the utilization rate of the wafer basket shaking support is improved, the problems of aging, open welding and the like can be effectively solved, the problems of aging, deformation and the like of the wafer basket shaking support can be thoroughly solved, metal ions are effectively isolated, and the reliability of products is improved. The wet process equipment comprises a wet process equipment main body and the wafer basket shaking support, the wafer basket shaking support is installed on the equipment main body and can be compatible with at least two kinds of wafer baskets with different sizes, and the cleaning efficiency is high.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor cleaning, in particular to a sheet basket shaking bracket and wet process equipment. Background Art

[0002] During the wafer processing process, the wafer needs to go through multiple cleaning, corrosion and other processes. During the cleaning process of the wet process equipment, the shaking bracket works in an acidic and alkaline environment for a long time.

[0003] The applicant has discovered that the prior art has at least the following technical problems:

[0004] 1. The current sway bracket is made of PVC with metal inside. When it works in acid and alkaline liquid environments for a long time, there are problems such as aging and deformation of the PVC material, leakage of the inner metal material and reaction with the liquid, which leads to a decrease in the equipment integrity rate and affects the overall product yield.

[0005] 2. The current rocking bracket is only compatible with one size of film basket, resulting in low equipment utilization. Utility Model Content

[0006] The purpose of this utility model is to provide a tablet basket swing stand and wet process equipment to address the existing technical problems of the current swing stand, which is made of PVC with metal wrapped inside. When operating in acidic and alkaline liquid environments for a long time, there are problems such as aging and deformation of the PVC material, leakage of the inner metal material and reaction with the liquid, which leads to a decrease in equipment integrity and affects the overall product yield. Furthermore, the current swing stand is only compatible with one size of tablet basket, resulting in low equipment utilization. The various technical effects that can be produced by the preferred technical solution among the many technical solutions provided by this utility model are detailed below.

[0007] To achieve the above objectives, the present invention provides the following technical solutions:

[0008] The utility model provides a sheet basket shaking bracket, comprising:

[0009] Main frame;

[0010] A supporting structure is provided on the main frame, and a top surface of the supporting structure is provided with at least four tablet basket accommodating positions;

[0011] The main frame and the supporting structure are both configured to include at least an inner layer and an outer layer covering the outer side of the inner layer, the inner layer includes a metal material, and the outer layer includes polytetrafluoroethylene.

[0012] Preferably, the main frame includes:

[0013] The first "Z" frame;

[0014] A second "Z"-shaped frame is symmetrically arranged with respect to the first "Z"-shaped frame;

[0015] A connecting piece connects the first "Z"-shaped frame and the second "Z"-shaped frame.

[0016] Preferably, the first "Z"-shaped frame and the second "Z"-shaped frame each include a support frame, a connecting frame and a mounting frame, the support frame and the mounting frame are respectively arranged at both ends of the connecting frame and are respectively located on both sides of the connecting frame, and the supporting structure is installed on the support frame.

[0017] Preferably, the supporting structure includes a first supporting plate and a second supporting plate, and the first supporting plate and the second supporting plate are respectively arranged at two ends of the support frame.

[0018] Preferably, at least four sheet basket accommodating slots are provided on both the first supporting plate and the second supporting plate.

[0019] Preferably, the main frame further includes a reinforcement member, which is fixedly connected to the connecting member and arranged in a cross shape with the connecting member, and the first supporting plate and the second supporting plate are respectively provided at both ends of the reinforcement member.

[0020] Preferably, a first mounting groove is provided on the top of the reinforcement member, and a second mounting groove for inserting into the first mounting groove is provided on the bottom of the first supporting plate and the second supporting plate.

[0021] Preferably, the inner layer comprises 316 stainless steel.

[0022] A wet process equipment comprises a wet process equipment body and the above-mentioned film basket shaking bracket, wherein the film basket shaking bracket is installed on the equipment body.

[0023] The utility model provides a film basket shaking bracket, which includes a main frame and a supporting structure. The supporting structure is arranged on the main frame, and at least four film basket accommodating positions are arranged on the top surface, which can be compatible with at least two film baskets of different sizes to improve the utilization rate of the film basket shaking bracket. In addition, the main frame and the supporting structure are both configured to include at least an inner layer and an outer layer wrapped around the outer side of the inner layer, the inner layer includes a metal material, and the outer layer includes polytetrafluoroethylene, which can effectively solve problems such as aging and open welding, and can completely solve problems such as aging and deformation of the film basket shaking bracket, thereby improving the integrity rate of the equipment; for product technology, due to the good chemical properties of polytetrafluoroethylene, it can achieve the purpose of effectively isolating metal ions and improve the reliability of the product.

[0024] The wet process equipment provided by the utility model includes a wet process equipment main body and the above-mentioned film basket shaking bracket. The film basket shaking bracket is installed on the equipment main body and can be compatible with at least two film baskets of different sizes. The film basket shaking bracket has high utilization rate and high cleaning efficiency, and can isolate metal ions during the process, thereby improving product reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 This is a structural diagram of an embodiment of the sheet basket shaking bracket of the utility model;

[0027] Figure 2 It is a structural schematic diagram of the main frame and the inner part of the supporting structure in the sheet basket shaking bracket of the utility model.

[0028] In the figure: 1, main frame; 11, first "Z"-shaped frame; 12, second "Z"-shaped frame; 13, connecting member; 14, reinforcement member; 101, inner layer; 102, outer layer; 111, support frame; 112, connecting frame; 113, mounting frame;

[0029] 2. Support structure; 21. First supporting plate; 22. Second supporting plate; 2101. First slot; 2102. Second slot; 2103. Third slot; 2104. Fourth slot. DETAILED DESCRIPTION

[0030] To make the purpose, technical solution, and advantages of the present invention more clear, the technical solution of the present invention will be described in detail below. Obviously, the embodiments described are only some of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other implementation methods obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0031] Figure 1 It is a structural diagram of this embodiment, as shown in FIG. Figure 1 As shown, this embodiment provides a film basket shaking bracket, including a main frame 1 and a supporting structure 2.

[0032] The main frame 1 is the main structure of the film basket swing bracket and plays the main supporting role. The supporting structure 2 is set on the main frame 1. The top surface of the supporting structure 2 is provided with at least four film basket accommodating positions. When the film basket is installed on the supporting structure 2, it needs to cooperate with two of the film basket accommodating positions.

[0033] Compared with the existing equipment where the film basket shaking bracket can only accommodate a single film basket, the film basket shaking bracket in this embodiment is provided with four film basket accommodating positions. By installing film baskets of different sizes into adjacent or spaced film basket accommodating positions, it is compatible with at least two film baskets of different sizes, thereby improving the utilization rate of the film basket shaking bracket.

[0034] Figure 2 This is a schematic diagram of the structure of the main frame and the supporting structure in this embodiment. Figure 2 As shown, the main frame 1 and the supporting structure 2 in this embodiment are configured to include at least an inner layer 101 and an outer layer 102 wrapped around the outer side of the inner layer 101. The inner layer 101 includes a metal material, and the outer layer 102 includes polytetrafluoroethylene.

[0035] Inner layer 101 comprises 316 stainless steel, which offers excellent corrosion resistance, high-temperature strength, and weldability, effectively resolving issues such as aging and cracking. Outer layer 102 comprises polytetrafluoroethylene (PTFE), a chemically stable material that effectively addresses issues such as basket wobbling and bracket aging and deformation, thereby improving equipment availability. Furthermore, PTFE's excellent chemical properties effectively isolate metal ions, enhancing product reliability.

[0036] As an optional embodiment, the main frame 1 includes a first “Z”-shaped frame 11 , a second “Z”-shaped frame 12 and a connecting member 13 .

[0037] Among them, the first "Z"-shaped frame 11 and the second "Z"-shaped frame 12 are symmetrically arranged, and the connecting member 13 is used to connect the first "Z"-shaped frame 11 and the second "Z"-shaped frame 12, so that the whole constitutes a complete and stable support frame structure, which is used to stably support the supporting structure 2 thereon and the sheet basket placed on the supporting structure 2.

[0038] Specifically, the first "Z"-shaped frame 11 and the second "Z"-shaped frame 12 each include a support frame 111, a connecting frame 112, and a mounting frame 113. The support frame 111 and the mounting frame 113 are respectively disposed at both ends of the connecting frame 112 and are located on both sides of the connecting frame 112, and the supporting structure 2 is mounted on the support frame 111.

[0039] By providing a "Z"-shaped frame structure, with the mounting frame 113 located at the top and on opposite sides of the support frame 111, and by fixing the mounting frame 113 to the main body of the wet process equipment, the overall structure is more stable during use. This arrangement also makes it easier to install and remove the main frame 1 from the main body of the wet process equipment.

[0040] As an optional embodiment, the supporting structure 2 includes a first supporting plate 21 and a second supporting plate 22 , and the first supporting plate 21 and the second supporting plate 22 are respectively disposed at two ends of the support frame 111 .

[0041] By arranging the first supporting plate 21 and the second supporting plate 22 at both ends of the support frame 111 respectively, the support frame 111 of the main frame 1 as a whole serves as a support, increasing the support area, making the bottom of the main frame 1 more evenly stressed, and improving stability during use.

[0042] Specifically, in this embodiment, at least four sheet basket accommodating slots are provided on each of the first supporting plate 21 and the second supporting plate 22 .

[0043] Among them, at least four film basket accommodating slots can be arranged at equal distances, and can also be customized according to different film basket installation conditions.

[0044] The tablet basket slots on the first and second support plates 21, 22 are parallel to each other, and the four tablet basket slots on the first and second support plates 21, 22 are defined as the first slot 2101, the second slot 2102, the third slot 2103, and the fourth slot 2104, respectively. The spacing between the first slot 2101 and the fourth slot 2104 is suitable for the first tablet basket, and the spacing between the second slot 2102 and the third slot 2103 is suitable for the second tablet basket. Of course, depending on actual usage, the tablet basket can be installed in the first slot 2101 and the third slot 2103, or in the second slot 2102 and the second slot, to ensure that the tablet basket swing bracket is compatible with tablet baskets of different sizes.

[0045] As an optional embodiment, the main frame 1 is provided with a reinforcement 14, which is fixedly connected to the connecting member 13 and arranged in a "cross" shape with the connecting member 13. A first supporting plate 21 and a second supporting plate 22 are respectively provided at both ends of the reinforcement 14 to improve the strength of the main frame 1 during use.

[0046] As an optional embodiment, a first mounting groove is set at the top of the reinforcement 14, and a second mounting groove for inserting into the first mounting groove is set at the bottom of the first support plate 21 and the second support plate 22. By setting the mounting grooves to connect the first support plate 21, the second support plate 22 and the reinforcement 14 in the form of plug-in connection, the connection stability is better.

[0047] This embodiment also provides a wet process equipment, including a wet process equipment main body and the above-mentioned film basket shaking bracket. The film basket shaking bracket is installed on the equipment main body and can be compatible with at least two film baskets of different sizes. The film basket shaking bracket has high utilization rate and high cleaning efficiency, and can isolate metal ions during the process, thereby improving product reliability.

[0048] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A sheet basket shaking bracket, characterized in that: include: Main frame; A supporting structure is provided on the main frame, and a top surface of the supporting structure is provided with at least four tablet basket accommodating positions; The main frame and the supporting structure are both configured to include at least an inner layer and an outer layer covering the outer side of the inner layer, the inner layer includes a metal material, and the outer layer includes polytetrafluoroethylene.

2. The sheet basket shaking bracket according to claim 1, characterized in that: The main frame includes: The first "Z" frame; A second "Z"-shaped frame, arranged symmetrically with the first "Z"-shaped frame; A connecting piece connects the first "Z"-shaped frame and the second "Z"-shaped frame.

3. The film basket shaking bracket according to claim 2, characterized in that: The first "Z"-shaped frame and the second "Z"-shaped frame both include a support frame, a connecting frame and a mounting frame. The support frame and the mounting frame are respectively arranged at both ends of the connecting frame and are respectively located on both sides of the connecting frame. The supporting structure is installed on the support frame.

4. The film basket shaking bracket according to claim 3, characterized in that: The supporting structure includes a first supporting plate and a second supporting plate, and the first supporting plate and the second supporting plate are respectively arranged at two ends of the support frame.

5. The film basket shaking bracket according to claim 4, characterized in that: At least four sheet basket accommodating slots are provided on each of the first supporting plate and the second supporting plate.

6. The film basket shaking bracket according to claim 4 or 5, characterized in that: The main frame also includes a reinforcement member, which is fixedly connected to the connecting member and arranged in a "cross" shape with the connecting member. The first supporting plate and the second supporting plate are respectively provided at both ends of the reinforcement member.

7. The film basket shaking bracket according to claim 6, characterized in that: A first mounting groove is provided on the top of the reinforcement member, and a second mounting groove for inserting into the first mounting groove is provided on the bottom of the first supporting plate and the second supporting plate.

8. The film basket shaking bracket according to any one of claims 1 to 5, characterized in that: The inner layer comprises 316 stainless steel.

9. A wet process equipment, characterized in that: It comprises a wet process equipment main body and a film basket shaking bracket as described in any one of claims 1 to 8, wherein the film basket shaking bracket is installed on the equipment main body.

Images