Bucket supply buffer device
By introducing a buffer tank and a negative pressure device into the direct supply system of the barrel, a vacuum generator is used to form a negative pressure environment, the liquid supply pause problem during the barrel switching is solved, and the continuous supply of chemicals is achieved, which reduces the system complexity and cost.
Patent Information
- Application Number
- CN202422031994.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-21
- Publication Date
- 2025-09-02
- Estimated Expiration
- 2034-08-21
AI Technical Summary
The existing direct barrel supply system cannot supply liquid for a short time when the barrel is switched, which cannot meet the needs of some customers for continuous supply, especially in the fields of semiconductor manufacturing.
The buffer tank and negative pressure device are used to combine the pneumatic pump and the PLC controller to form a negative pressure environment through the vacuum generator, and the buffer tank is used to store chemical liquid to ensure continuous supply during the empty barrel switching and reduce pauses.
Continuous supply during bucket empty switching is achieved, meeting customer demand for not allowing any delays and interruptions, while reducing system complexity and footprint and reducing costs.
Smart Images
Figure CN223294636U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of chemical supply, and in particular to a barrel supply buffer device. Background Art
[0002] A direct-to-drum system is a specific method of chemical supply and delivery that involves delivering chemicals directly from storage drums to the point of use or processing equipment, without intermediate storage or mixing steps. This system is commonly used in industries such as chemical plants, pharmaceutical factories, laboratories, and semiconductor manufacturing where efficient, direct, and safe chemical handling is required.
[0003] The barrel direct supply system of the prior art is as follows Figure 2 As shown, it includes two storage barrels (barrel A and barrel B), a nitrogen source, a pneumatic pump, an exhaust system, etc. In the barrel direct supply system of the prior art, there will be a short pause (about 20 seconds) when the barrel is switched to empty. Taking two 50L barrels as an example, when a barrel is judged to be empty, the barrel in supply itself has 30L~50L of liquid as a buffer, and the pneumatic pump does not have so much liquid buffer. Once the pneumatic pump empties one of the barrels and switches to the other barrel, it takes time to exhaust the gas in the pipeline, and it has no liquid supply buffer function, which leads to a short pause when the barrel is switched to empty. This cannot meet the needs of some R&D customers who require small quantities but do not allow any delays and interruptions. For example: the equipment in the semiconductor CMP area does not allow any interruption to the supply equipment. Summary of the Invention
[0004] The purpose of the present application is to overcome the problem in the prior art that the barrel direct supply system may be unable to supply liquid for a short period of time when switching to an empty barrel, and to provide a barrel supply buffer device.
[0005] Specifically, the barrel supply buffer device includes: a buffer tank, which is provided with a liquid inlet, an air vent and a liquid outlet, the liquid inlet is connected to a first liquid inlet pipe and a second liquid inlet pipe, the first liquid inlet pipe and the second liquid inlet pipe are respectively equipped with a first valve and a second valve, the air vent is connected to a negative pressure device, and the buffer tank is equipped with a liquid level sensor; a nitrogen source, the nitrogen source is connected to a first air pipe, a second air pipe and a third air pipe, the first air pipe is used to connect to a first storage tank, the second air pipe is used to connect to a second storage tank, the third air pipe is connected to the air vent, and the first air pipe, the second air pipe and the third air pipe are respectively equipped with a third valve, a fourth valve and a fifth valve.
[0006] In some possible implementations, the first liquid inlet pipe and the second liquid inlet pipe are connected to the first storage tank and the second storage tank at one end away from the buffer tank, respectively, for introducing the chemical liquid in the first storage tank and the second storage tank into the buffer tank.
[0007] In some possible implementations, the negative pressure device includes a vacuum generator, the input end of the vacuum generator is connected to the nitrogen source through a fourth air pipe, the negative pressure end of the vacuum generator is connected to the vent through a fifth air pipe, and the fourth air pipe and the fifth air pipe are respectively equipped with a sixth valve and a seventh valve. The vacuum generator can be used to suck out the gas in the buffer tank to form a negative pressure environment.
[0008] In some possible implementations, the output end of the vacuum generator is connected to an exhaust system, so that the gas exhausted by the vacuum generator can be sent to the exhaust system.
[0009] In some possible implementations, the liquid outlet is connected to at least one pneumatic pump, the output end of the pneumatic pump is connected to a liquid outlet pipe, and the liquid outlet pipe is installed with an eighth valve. The pneumatic pump can be used to suck out the chemical liquid in the buffer tank and supply it out.
[0010] In some possible implementations, the first valve, the second valve, the third valve, the fourth valve, the fifth valve, the sixth valve, the seventh valve, and the eighth valve are all pneumatic valves. By setting up pneumatic valves, it is possible to facilitate the automatic control of the first valve, the second valve, the third valve, the fourth valve, the fifth valve, the sixth valve, the seventh valve, and the eighth valve.
[0011] In some possible implementations, a PLC controller is further included, and the liquid level sensor and the solenoid valve of the pneumatic valve are electrically connected to the PLC controller, so that the on and off of the pneumatic valve can be controlled by the PLC controller.
[0012] In some possible implementations, the vent is arranged at the upper end of the buffer tank, and the liquid outlet is arranged at the lower end of the buffer tank, so that the vacuum generator will not entrain liquid when extracting the gas in the buffer tank through the vent, and the liquid can be discharged more thoroughly when it is discharged from the liquid outlet.
[0013] The present application has the following beneficial effects: by providing a buffer tank, the present application only needs to ensure that there is always liquid in the buffer tank, and there will be no situation where liquid is not available when the barrel is switched to empty, thereby meeting the needs of some R&D customers who require a small quantity but do not allow any delays and interruptions to occur. Secondly, the use of the buffer device of the present application can eliminate some components of the barrel direct supply system in the prior art, such as: liquid-gas separator, barrel return pipeline, etc., thereby reducing costs and the required site space. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] The drawings that constitute a part of this application are used to provide a further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute an improper limitation on this application.
[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.
[0016] Figure 1 This is a schematic structural diagram of a barrel supply buffer device according to an embodiment of the present application;
[0017] Figure 2 It is a structural diagram of a barrel direct supply system in the prior art;
[0018] Figure 3 This is a circuit connection block diagram of the PLC controller in the barrel supply buffer device of an embodiment of the present application.
[0019] Reference numerals:
[0020] 1. Buffer tank; 101. Liquid inlet; 102. Vent; 103. Liquid outlet; 2. First liquid inlet pipe; 3. Second liquid inlet pipe; 4. First valve; 5. Second valve; 6. Liquid level sensor; 7. Nitrogen source; 8. First air pipe; 9. Second air pipe; 10. Third air pipe; 11. First storage tank; 12. Second storage tank; 13. Third valve; 14. Fourth valve; 15. Fifth valve; 16. Vacuum generator; 17. Fourth air pipe; 18. Fifth air pipe; 19. Sixth valve; 20. Seventh valve; 21. Exhaust system; 22. Pneumatic pump; 23. Liquid outlet pipe; 24. Eighth valve; 25. PLC controller; 26. Liquid-using equipment. DETAILED DESCRIPTION
[0021] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application; it is obvious that the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.
[0022] See also Figure 1, a preferred embodiment of the present application, a barrel supply buffer device, including a buffer tank 1, the buffer tank 1 is provided with a liquid inlet 101, an air vent 102 and a liquid outlet 103, and the air vent 102 is provided at the upper end of the buffer tank 1, and the liquid outlet 103 is provided at the lower end of the buffer tank 1, wherein the liquid inlet 101 is used to send the chemical liquid in the first storage tank 11 and the second storage tank 12 into the buffer tank 1 for standby use, and the air vent 102 is used to use a negative pressure device to extract the gas in the buffer tank 1 to form a negative pressure in the buffer tank 1, so as to facilitate the high pressure in the first storage tank 11 and the second storage tank 12 to press the chemical liquid from the first storage tank 11 and the second storage tank 12 into the buffer tank 1, and the air vent 102 is also used to introduce nitrogen into the buffer tank 1 to form a negative pressure in the buffer tank 1 A high-pressure environment is formed so that the chemical liquid in the buffer tank 1 is discharged from the liquid outlet 103. The chemical liquid in the buffer tank 1 is discharged from the buffer tank 1 from the liquid outlet 103 during liquid supply. The liquid inlet 101 is connected to a first liquid inlet pipe 2 and a second liquid inlet pipe 3. The first liquid inlet pipe 2 and the second liquid inlet pipe 3 are respectively installed with a first valve 4 and a second valve 5. The first liquid inlet pipe 2 and the second liquid inlet pipe 3 are connected to the first storage tank 11 and the second storage tank 12 at one end away from the buffer tank 1, respectively, for introducing the chemical liquid in the first storage tank 11 and the second storage tank 12 into the buffer tank 1. The vent 102 is connected to a negative pressure device for extracting gas from the buffer tank 1. The buffer tank 1 is installed with a liquid level sensor 6 for detecting the liquid level information in the buffer tank 1 in real time:
[0023] like Figure 1 As shown, the negative pressure device includes a vacuum generator 16, the input end of the vacuum generator 16 is connected to the nitrogen source 7 through a fourth air pipe 17, the negative pressure end of the vacuum generator 16 is connected to the vent 102 through a fifth air pipe 18, the fourth air pipe 17 and the fifth air pipe 18 are respectively installed with a sixth valve 19 and a seventh valve 20, the output end of the vacuum generator 16 is connected to the exhaust system 21, and the gas discharged from the vacuum generator 16 can be sent to the exhaust system 21, and the nitrogen is input from the input end of the vacuum generator 16 and output from its output end, so that the gas in the buffer tank 1 can be extracted by using the siphon effect.
[0024] It also includes a nitrogen source 7, which is connected to a first air pipe 8, a second air pipe 9 and a third air pipe 10. The first air pipe 8 is used to connect to a first storage tank 11, the second air pipe 9 is used to connect to a second storage tank 12, and the third air pipe 10 is connected to a vent 102. The first air pipe 8, the second air pipe 9 and the third air pipe 10 are respectively installed with a third valve 13, a fourth valve 14 and a fifth valve 15. The nitrogen source 7 can feed nitrogen into the first storage tank 11, the second storage tank 12 and the buffer tank 1 to increase their internal pressure, and the corresponding pipeline channels can be realized through the corresponding valves, so that nitrogen can be transported according to demand.
[0025] To provide power for the supply of the chemical liquid in the buffer tank 1, at least one pneumatic pump 22 is connected to the liquid outlet 103. The output end of the pneumatic pump 22 is connected to a liquid outlet pipe 23, and an eighth valve 24 is installed on the liquid outlet pipe 23. The pneumatic pump 22 can suck out the chemical liquid in the buffer tank 1 and supply it to the liquid-using device 26.
[0026] To facilitate the automatic control of the valves, the first valve 4, the second valve 5, the third valve 13, the fourth valve 14, the fifth valve 15, the sixth valve 19, the seventh valve 20, and the eighth valve 24 are all set as pneumatic valves. In this embodiment, as Figure 3 shown, it further includes a PLC controller 25. The liquid level sensor 6 and the solenoid valves of the pneumatic valves are electrically connected to the PLC controller 25. The liquid level sensor 6 can detect the liquid level information of the buffer tank 1 in real time and transmit the liquid level information to the PLC controller 25, so that the PLC controller 25 can automatically control the channels of the corresponding pneumatic valves according to the preset program to achieve the automatic liquid addition of the buffer tank 1.
[0027] In this embodiment, five photoelectric sensors (of course, it can also be capacitive sensors) are arranged on the side wall of the buffer tank 1 to detect the liquid level information, and four liquid level height thresholds of HH, H, M, L, and LL are set corresponding to the photoelectric sensors. Among them, HH < H < M < L < LL. When the liquid level is lower than M, liquid is added to the buffer tank 1; when the liquid level is higher than H, the liquid addition stops; when there is no chemical liquid in both the first storage tank 11 and the second storage tank 12, if the buffer tank 1 is supplying at this time, the fifth valve 15 will open, and nitrogen will be filled into the buffer tank 1 to prevent the chemical liquid in the buffer tank 1 from being sucked away by the pneumatic pump 22 and generating a vacuum, and the emptied first storage tank 11 and second storage tank 12 can be replaced during this period. Of course, the emptied storage tank can also be replaced after one of the storage tanks is emptied. If the liquid level is lower than L, the liquid supply stops. Among them, LL and HH are safeguard measures, that is, when the sensors at the liquid levels L and H fail, LL and HH are used to replace the original L and H, so as to continue to ensure that the liquid level in the buffer tank 1 is not too high or too low.
[0028] The working principle of this embodiment is as follows:
[0029] I. Working principle of the receiving side of the buffer tank 1:
[0030] 01. Standby state of the buffer tank 1: Initial state, or reaching this state after receiving. In the standby state, all valves are closed. If the liquid level of this tank is lower than M, it automatically enters the next receiving state;
[0031] 02. Buffer tank 1 [Receiving] state: When the liquid level in buffer tank 1 is lower than M, the state will be changed from [Standby] to [Receiving] state. In this [Receiving] state, the seventh valve 20, the sixth valve 19, the third valve 13, and the first valve 4 will be opened (at this time, the first storage tank 11 is in the transfer state. If the first storage tank 11 is empty, the second storage tank 12 will be switched to the transfer state. When the second storage tank 12 is in the transfer state, the fourth valve 14 and the second valve 5 will be opened). The purpose is to suck the chemical liquid in the first storage tank 11 and the second storage tank 12 into the buffer tank 1. When the liquid level in buffer tank 1 is higher than the liquid level H, the state will automatically return to the previous step [Standby] state and close the seventh valve 20, the sixth valve 19, the third valve 13, and the first valve 4 (or the seventh valve 20, the sixth valve 19, the third valve 13, the fourth valve 14, and the second valve 5).
[0032] 2. Working principle of buffer tank 1 supply side
[0033] 01. Buffer tank 1 [Standby] state: initial state, or when supply is completed and reaches this state, if the liquid level is higher than the L level and there is a liquid request signal, it will automatically enter the next step [Supply];
[0034] 02. Buffer Tank 1 [Supply] State: Entered from [Standby] State. In this state, the third valve 13, the first valve 4 (the first storage tank 11 is in the transfer state. If the second storage tank 12 is in the transfer state, the fourth valve 14 and the second valve 5 will be opened), and the eighth valve 24 will be opened. The pneumatic pump 22P01 or the pneumatic pump 22P02 will be turned on. If it is determined that both barrels cannot be transferred, the fifth valve 15 will be opened to replenish air. During this period, the first storage tank 11 and the second storage tank 12 can be replaced. If it is determined that the liquid level is lower than the L level, the state will jump to [Standby] State and stop supplying liquid. If it is determined that the liquid level is higher than the L level and there is no liquid demand signal, the state will automatically enter the previous step [Standby] State.
[0035] In this embodiment, the chemical liquid in the first storage tank 11 and the second storage tank 12 is sucked into the buffer tank 1 by the vacuum generator 16, and the liquid pumping is stopped when the liquid level in the buffer tank 1 reaches the H liquid level. When the liquid level drops below the M liquid level, the vacuum generator 16 is started again to pump the liquid level to the H liquid level. When the chemical liquid in the first storage tank 11 is supplied and replaced to the second storage tank 12 for supply, since the buffer tank 1 contains chemical liquid above the M liquid level, the supply of chemical liquid will not be interrupted during the empty cut, that is, there will be no situation where liquid is not available when the barrel is switched to empty, thereby meeting the needs of some R&D customers who require a small amount but do not allow any delays and interruptions. Secondly, the use of the buffer device of the present application can remove some components of the barrel direct supply system in the prior art, such as: liquid-gas separator, barrel return pipeline, etc., thereby reducing costs and the required site space.
[0036] The above are only preferred specific implementations of this application; however, the scope of protection of this application is not limited thereto. Any person skilled in the art who, within the technical scope disclosed in this application, makes equivalent substitutions or modifications based on the technical solutions and improved concepts of this application shall be covered by the scope of protection of this application.
Claims
1. A barrel supply buffer device, characterized in that: include: a buffer tank, the buffer tank being provided with a liquid inlet, a vent and a liquid outlet, the liquid inlet being connected to a first liquid inlet pipe and a second liquid inlet pipe, the first liquid inlet pipe and the second liquid inlet pipe being respectively equipped with a first valve and a second valve, the vent being connected to a negative pressure device, and the buffer tank being equipped with a liquid level sensor; A nitrogen source is connected to a first air pipe, a second air pipe, and a third air pipe, the first air pipe is used to connect to a first storage tank, the second air pipe is used to connect to a second storage tank, the third air pipe is connected to a vent, and the first air pipe, the second air pipe, and the third air pipe are respectively equipped with a third valve, a fourth valve, and a fifth valve.
2. The barrel supply buffer device according to claim 1, characterized in that: One end of the first liquid inlet pipe and the second liquid inlet pipe away from the buffer tank is connected to the first storage tank and the second storage tank respectively.
3. The barrel supply buffer device according to claim 1, characterized in that: The negative pressure device includes a vacuum generator, the input end of the vacuum generator is connected to the nitrogen source through a fourth air pipe, the negative pressure end of the vacuum generator is connected to the vent through a fifth air pipe, and the fourth air pipe and the fifth air pipe are respectively installed with a sixth valve and a seventh valve.
4. The barrel supply buffer device according to claim 3, characterized in that: The output end of the vacuum generator is connected to the exhaust system.
5. The barrel supply buffer device according to claim 3 or 4, characterized in that: The liquid outlet is connected to at least one pneumatic pump, the output end of the pneumatic pump is connected to a liquid outlet pipe, and the liquid outlet pipe is installed with an eighth valve.
6. The barrel supply buffer device according to claim 5, characterized in that: The first valve, the second valve, the third valve, the fourth valve, the fifth valve, the sixth valve, the seventh valve and the eighth valve are all pneumatic valves.
7. The barrel supply buffer device according to claim 6, characterized in that: It also includes a PLC controller, and the liquid level sensor and the solenoid valve of the pneumatic valve are both electrically connected to the PLC controller.
8. The barrel supply buffer device according to claim 1, characterized in that: The vent is arranged at the upper end of the buffer tank, and the liquid outlet is arranged at the lower end of the buffer tank.