Chemical vapor deposition furnace

Abstract

The utility model relates to the field of sintering furnaces, in particular to a chemical vapor deposition furnace, which comprises a support frame, a furnace body fixed on the support frame, an openable cover body arranged at the bottom of the furnace body, a lifting mechanism arranged on the cover body, a sagger fixed on the upper surface of the cover body, two cylinders arranged in the cover body, and support rods fixed on piston rods of the cylinders, in the whole chemical vapor deposition process, the supporting rods of the two air cylinders alternately support solid materials, finally, the solid materials can be completely coated without dead corners, the coating effect is greatly improved, and meanwhile the production efficiency is greatly improved.

Description

Technical Field

[0001] The utility model relates to the field of sintering furnaces, in particular to a chemical vapor deposition furnace. Background Art

[0002] Chemical vapor deposition is a process technology in which reactants react chemically under gaseous conditions to generate solid substances that are deposited on the surface of a heated solid substrate, thereby producing solid materials. A chemical vapor deposition furnace is a device used for the above-mentioned reaction, and is mainly used for the production of composite materials such as silicon carbide coatings, carbon-carbon composite coatings, etc. on graphite or carbon-carbon surfaces. The patent with application number CN202322321928.7 discloses a descending furnace system for a chemical vapor deposition furnace. When the chemical vapor deposition furnace coats a solid material, the solid material is placed on the furnace bottom plate. During the process of coating the solid material on the furnace bottom plate, the side of the solid material in contact with the furnace bottom plate often has a poor coating effect or cannot be coated, which results in poor coating effect, or the need for repeated coating processes, which leads to waste of manpower and material resources and reduced production efficiency. Therefore, there is an urgent need for a chemical vapor deposition furnace that can fully coat solid materials. Utility Model Content

[0003] (1) Technical problems solved

[0004] In view of the shortcomings of the existing technology, the purpose of the present invention is to provide a chemical vapor deposition furnace that solves the problems of the existing technology and can fully coat solid materials during the chemical vapor deposition process, greatly improving the coating effect and also greatly improving production efficiency.

[0005] (2) Technical solution

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solution: a chemical vapor deposition furnace, comprising a support frame, a furnace body is fixed on the support frame, an openable and closable cover is provided at the bottom of the furnace body, a lifting mechanism is provided on the cover body, a sagger is fixed on the upper surface of the cover body, two cylinders are provided in the cover body, a support rod is fixed on the piston rod of the cylinder, and the upper end of the support rod extends into the interior of the sagger.

[0007] Preferably, the support rod is made of corundum.

[0008] Preferably, a connecting rod perpendicular to the supporting rod is fixed to the top end of the supporting rod, and the top end of the supporting rod is fixed at the center position of the connecting rod, and two groups of inverted eight-shaped material support frames are fixed on the connecting rod.

[0009] Preferably, the upper surface of the material support frame is configured to be in a continuous mountain shape.

[0010] Preferably, the support frame includes a first support plate, a plurality of first support columns are fixed on the bottom surface of the first support plate, the bottom of the first support column is fixed on the top surface of the second support plate, a plurality of second support columns are fixed on the bottom surface of the second support plate, and through holes are opened at the center positions of the first support plate and the second support plate, and the furnace body is fixed in the through holes.

[0011] Preferably, the lifting mechanism includes a lifting plate fixed on the bottom surface of the cover body, and screw nut seats are fixed at the four corners of the lifting plate. The screw nut seats are provided with matching screws, and the four screws are provided with a driving mechanism.

[0012] Preferably, the screw nut seat is a screw half nut seat, a motor is fixed on the lifting plate, a driving gear is fixed on the rotating shaft of the motor, a transmission chain is connected to the driving gear, the transmission chain is connected to the driven gear, a transmission rod is fixed through the center position of the driven gear, driving walking wheels are fixed at both ends of the transmission rod, two driven walking wheels are fixed on the bottom surface of the lifting plate, and a walking track is provided on the ground opposite to the driving walking wheel and the driven walking wheel.

[0013] Preferably, the furnace body comprises a furnace shell, a heat-insulating layer and a heating body from the outside to the inside, wherein a water jacket is provided in the furnace shell.

[0014] Preferably, an annular block is fixed to the bottom of the furnace body, an annular graphite felt is fixed to the bottom surface of the annular block, and an annular groove matching the graphite felt is provided on the top surface of the cover body.

[0015] Preferably, a first guardrail and a first staircase are provided on the first support plate, and a second guardrail and a second staircase are provided on the second support plate.

[0016] (3) Beneficial effects

[0017] 1. The utility model supports the solid material alternately through the support rods of the two cylinders during the entire chemical vapor deposition process, and finally the solid material can be fully coated without dead corners, which greatly increases the coating effect and also greatly improves the production efficiency;

[0018] 2. The present invention provides better support and lifting of solid materials by arranging connecting rods and two sets of inverted figure-eight material support frames on the support rods, making the support and lifting process more stable. The upper surface of the material support frame is arranged in a continuous mountain shape, which not only provides good support for the material but also minimizes the contact area between the material support frame and the solid material.

[0019] 3. The utility model has an annular block fixed at the bottom of the furnace body, an annular graphite felt fixed on the bottom surface of the annular block, and an annular groove matching the graphite felt is opened on the top surface of the cover body. This arrangement greatly increases the sealing and heat preservation properties of the cover and the furnace body after they are combined. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is an overall schematic diagram of the utility model.

[0021] Figure 2 This is a cross-sectional view of the furnace body, annular block, cover body, sagger and lifting plate of the utility model after being separated.

[0022] Figure 3 This is a schematic diagram of the garbage cylinder, support rod, connecting rod and material support frame of the utility model.

[0023] Figure 4 It is an overall schematic diagram of the utility model.

[0024] In the figure: 1-support frame, 2-furnace body, 3-cover body, 4-lifting mechanism, 5-sagger, 6-cylinder, 7-support rod, 8-connecting rod, 9-material support frame, 10-first support plate, 11-first support column, 12-second support plate, 13-second support column, 14-lifting plate, 15-screw nut seat, 16-screw, 17-driving mechanism, 18-motor, 19-driving gear, 20-transmission chain, 21-driven gear, 22-transmission rod, 23-driving walking wheel, 24-driven walking wheel, 25-walking track, 26-furnace shell, 27-insulation layer, 28-heating body, 29-water jacket, 30-annular block, 31-graphite soft felt, 32-annular groove, 33-first guardrail, 34-first staircase, 35-second guardrail, 36-second staircase. DETAILED DESCRIPTION

[0025] The following is a combination of the appended examples of the present invention Figure 1-4 The technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0026] The utility model provides a technical solution: a chemical vapor deposition furnace, comprising a support frame 1, a furnace body 2 is fixed on the support frame 1, an openable and closable cover 3 is provided at the bottom of the furnace body 2, a lifting mechanism 4 is provided on the cover body 3, a sagger 5 is fixed on the upper surface of the cover body 3, two cylinders 6 are provided in the cover body 3, a support rod 7 is fixed on the piston rod of the cylinder 6, and the upper end of the support rod 7 extends into the interior of the sagger 5. When working, the cover body 3 and the sagger 5 fixed on the cover body 3 are first lowered to the bottom of the support frame 1 by the lifting mechanism 4, and then the solid material to be coated is placed in the sagger 5. The solid material placed in the sagger 5 is lifted by the two support rods 7 is supported, and the bottom surface of the solid material is not in contact with the bottom surface of the sagger 5. Then the lifting mechanism 4 lifts the cover 3 together with the sagger 5 until the cover 5 and the furnace body 2 are tightly closed. Then the furnace body 2 is started to heat, and the reaction gas is started to pass into the furnace body 2 (wherein the furnace body 2 is provided with an air inlet, and the air inlet is connected to an external air supply system, and the air supply system provides the required reaction gas), and the tail gas after the reaction is discharged through the tail gas exhaust port (wherein the tail gas exhaust port is provided on the furnace body 2, and the tail gas exhaust port can also be connected to a tail gas treatment device, and the tail gas is discharged after treatment, which is more environmentally friendly). During the whole reaction process , the two cylinders 6 support the solid material alternately. For example, after a period of time, the first cylinder 6 is started to extend the support rod 7 to push the solid material upward, that is, to make the support rod 7 on the second cylinder 6 not contact the bottom surface of the solid material. In this way, the bottom surface of the solid material that was originally in contact with the support rod 7 of the second cylinder 6 can be fully coated. After a certain period of time, the first cylinder 6 is started to shrink the support rod 7 to lower the solid material until it reaches the point where the support rod 7 of the first cylinder 6 is no longer in contact with the bottom surface of the solid material. At this time, the solid material passes through the second cylinder 6. The support rod 7 supports it, so that the bottom surface of the solid material that was originally in contact with the support rod 7 of the first cylinder 6 can be fully coated. This is carried out alternately, and the solid material can eventually be fully coated without dead corners, which greatly increases the coating effect and greatly improves the production efficiency. After the coating of the solid material is completed and cooled to the required temperature, the lifting mechanism 4 is started to lower the cover body 3 and the sagger 5 fixed on the cover body 3 to the bottom of the support frame 1, and then the solid material in the sagger 5 can be taken out. The lifting and lowering of the cover plate 3 and the sagger 5 by the lifting mechanism 4 greatly facilitates the loading and unloading of the solid material.

[0027] The support rod 7 is made of corundum, which has a good heat preservation and insulation effect during the lifting and lowering process of the support rod 7.

[0028] A connecting rod 8 perpendicular to the supporting rod 7 is fixed to the top of the supporting rod 7, and the top of the supporting rod 7 is fixed at the center of the connecting rod 8. Two groups of inverted eight-shaped material support frames 9 are fixed on the connecting rod 8. This arrangement can better support and lift the solid material, making the supporting and lifting process more stable.

[0029] The upper surface of the material support frame 9 is configured to be in the shape of a continuous mountain peak, which not only provides good support for the material but also minimizes the contact area between the material support frame 9 and the solid material.

[0030] The support frame 1 includes a first support plate 10, on the bottom surface of which a plurality of first support columns 11 are fixed, the bottom of the first support column 11 is fixed to the top surface of the second support plate 12, and a plurality of second support columns 13 are fixed to the bottom surface of the second support plate 12. Through holes are provided at the center positions of the first support plate 10 and the second support plate 12, in which the furnace body 2 is fixed. The support frame 1 with this structure can fix the furnace body 2 well, making the furnace body 2 more stable.

[0031] The lifting mechanism 4 includes a lifting plate 14 fixed to the bottom surface of the cover body 3, and screw nut seats 15 are fixed at the four corners of the lifting plate 14. The screw nut seat 15 is provided with a screw 16 that matches it, and the four screws 16 are provided with a driving mechanism 17, wherein the driving mechanism 17 is a prior art, which mainly realizes the synchronous rotation of the four screws 16 through a driving motor, a plurality of transmission rods and a plurality of sets of bevel gear sets, etc., which will not be repeated here. The four screws 16 are driven to rotate synchronously by the driving mechanism 17, thereby driving the four screw nut seats 15 to rise or fall synchronously, thereby driving the lifting plate 14 to rise or fall.

[0032] The screw nut seat 15 is a screw half nut seat, a motor 18 is fixed on the lifting plate 14, a driving gear 19 is fixed on the rotating shaft of the motor 18, a transmission chain 20 is connected to the driving gear 19, and the transmission chain 20 is connected to the driven gear 21. A transmission rod 22 is fixed through the center position of the driven gear 21, and a driving walking wheel 23 is fixed at both ends of the transmission rod 22. Two driven walking wheels 24 are fixed on the bottom surface of the lifting plate 14, and a walking track 25 is provided on the ground opposite to the driving walking wheel 23 and the driven walking wheel 24. The screw nut seat 15 is a screw half nut seat, which can be used as a screw half nut seat. The lifting motion of the lifting plate 14 is converted into linear motion. When the coated material needs to be transported, the lifting plate 14 is first lowered by the driving mechanism 17 until the active walking wheel 23 and the driven walking wheel 24 are in contact with the walking track 25. Then the motor 18 is started, driving the active gear 19 to rotate, and then driving the driven gear 21 to rotate, and then driving the active walking wheel 23 to move along the walking track 25, and then driving the driven walking wheel 24 to move along the walking track 25, and then transporting the coated solid material to the required location. This arrangement greatly facilitates the transportation of materials.

[0033] The furnace body 2 includes a furnace shell 26, an insulation layer 27, and a heating body 28 from the outside to the inside. A water jacket 29 is provided in the furnace shell 26, and cooling water circulates through the water jacket 29 to cool the furnace shell 26 well. The insulation layer 27 has a good insulation effect, and the heating body 28 realizes heating of the solid material.

[0034] An annular block 30 is fixed to the bottom of the furnace body 2, and an annular graphite felt 31 is fixed to the bottom surface of the annular block 30. An annular groove 32 matching the graphite felt 31 is provided on the top surface of the cover body 3. This arrangement greatly increases the sealing and heat preservation properties of the cover body 3 and the furnace body 2 after they are combined.

[0035] A first guardrail 33 and a first staircase 34 are provided on the first support plate 10, and a second guardrail 35 and a second staircase 36 are provided on the second support plate 12. The arrangement of the first guardrail 33 and the second guardrail 35 increases safety, and the arrangement of the first staircase 34 and the second staircase 36 facilitates operators to enter the first support plate 10 and the second support plate 12.

[0036] Working principle: When working, first, the cover 3 and the sagger 5 fixed on the cover 3 are lowered to the bottom of the support frame 1 through the lifting mechanism 4, and then the solid material to be coated is placed in the sagger 5. The solid material placed in the sagger 5 is supported by two support rods 7, and the bottom surface of the solid material is not in contact with the bottom surface of the sagger 5. Then the lifting mechanism 4 raises the cover 3 together with the sagger 5 until the cover 5 and the furnace body 2 are tightly closed. Then the furnace body 2 is started to heat and the reaction gas is started to be passed into the furnace body 2 ( The furnace body 2 is provided with an air inlet, which is connected to an external air supply system, and the air supply system provides the required reaction gas), and the tail gas after the reaction is discharged through the tail gas discharge port (the tail gas discharge port is provided on the furnace body 2, and the tail gas discharge port can also be connected to a tail gas treatment device to treat the tail gas before discharging, which is more environmentally friendly). During the entire reaction process, the two cylinders 6 alternately support the solid material. For example, after a period of time, the first cylinder 6 is started, so that the support rod 7 is extended, and the solid material is pushed up. That is, the support rod 7 on the second cylinder 6 is not in contact with the bottom surface of the solid material, so that the bottom surface of the solid material that was originally in contact with the support rod 7 of the second cylinder 6 can be fully coated. After a certain period of time, the first cylinder 6 is started, causing the support rod 7 to retract and the solid material to be lowered until the support rod 7 of the first cylinder 6 is no longer in contact with the bottom surface of the solid material. At this time, the solid material is supported by the support rod 7 of the second cylinder 6, so that the bottom surface of the solid material that was originally in contact with the support rod 7 of the first cylinder 6 can be fully coated. This alternation is carried out, and the solid material can eventually be fully coated without dead corners, which greatly increases the coating effect and greatly improves the production efficiency. After the coating of the solid material is completed and cooled to the required temperature, the lifting mechanism 4 is started, and the cover 3 and the sagger 5 fixed on the cover 3 are lowered to the bottom of the support frame 1. Then the solid material in the sagger 5 can be taken out. The lifting and lowering of the cover 3 and the sagger 5 by the lifting mechanism 4 greatly facilitates the loading and unloading of the solid material.

[0037] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A chemical vapor deposition furnace, characterized in that: The invention comprises a support frame (1), a furnace body (2) is fixed on the support frame (1), an openable and closable cover body (3) is provided at the bottom of the furnace body (2), a lifting mechanism (4) is provided on the cover body (3), a sagger (5) is fixed on the upper surface of the cover body (3), two cylinders (6) are provided in the cover body (3), a support rod (7) is fixed on the piston rod of the cylinder (6), and the upper end of the support rod (7) extends into the interior of the sagger (5).

2. The chemical vapor deposition furnace according to claim 1, characterized in that: The support rod (7) is made of corundum.

3. The chemical vapor deposition furnace according to claim 1, characterized in that: A connecting rod (8) perpendicular to the supporting rod (7) is fixed to the top end of the supporting rod (7), and the top end of the supporting rod (7) is fixed at the center of the connecting rod (8). Two groups of inverted eight-shaped material support frames (9) are fixed to the connecting rod (8).

4. The chemical vapor deposition furnace according to claim 3, characterized in that: The upper surface of the material support frame (9) is configured to be in a continuous mountain-like shape.

5. The chemical vapor deposition furnace according to claim 1, characterized in that: The support frame (1) comprises a first support plate (10), a plurality of first support columns (11) are fixed on the bottom surface of the first support plate (10), the bottom of the first support column (11) is fixed on the top surface of the second support plate (12), a plurality of second support columns (13) are fixed on the bottom surface of the second support plate (12), and a through hole is provided at the center position of the first support plate (10) and the second support plate (12), and the furnace body (2) is fixed in the through hole.

6. The chemical vapor deposition furnace according to claim 5, characterized in that: The lifting mechanism (4) includes a lifting plate (14) fixed on the bottom surface of the cover body (3), and screw nut seats (15) are fixed at the four corners of the lifting plate (14). The screw nut seats (15) are provided with matching screws (16), and the four screws (16) are provided with driving mechanisms (17).

7. The chemical vapor deposition furnace according to claim 6, characterized in that: The screw nut seat (15) is a screw half nut seat, a motor (18) is fixed on the lifting plate (14), a driving gear (19) is fixed on the rotating shaft of the motor (18), a transmission chain (20) is connected to the driving gear (19), the transmission chain (20) is connected to the driven gear (21), a transmission rod (22) is fixed through the center position of the driven gear (21), and driving wheels (23) are fixed at both ends of the transmission rod (22). Two driven wheels (24) are fixed on the bottom surface of the lifting plate (14), and a walking track (25) is provided on the ground opposite to the driving wheel (23) and the driven wheel (24).

8. The chemical vapor deposition furnace according to claim 1, characterized in that: The furnace body (2) comprises, from outside to inside, a furnace shell (26), a heat-insulating layer (27), and a heating body (28), wherein a water jacket (29) is provided in the furnace shell (26).

9. The chemical vapor deposition furnace according to claim 1, characterized in that: An annular block (30) is fixed to the bottom of the furnace body (2), an annular graphite felt (31) is fixed to the bottom surface of the annular block (30), and an annular groove (32) matching the graphite felt (31) is provided on the top surface of the cover body (3).

10. The chemical vapor deposition furnace according to claim 5, characterized in that: The first support plate (10) is provided with a first guardrail (33) and a first staircase (34), and the second support plate (12) is provided with a second guardrail (35) and a second staircase (36).

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